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ELECTRICITY
H01
Electric elements
H01J
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
H01J37/00
Discharge tubes with provision for introducing objects or material to be exposed to the discharge
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H01J37/3455
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Patents Grants
last 30 patents
Information
Patent Grant
Sputtering apparatus
Patent number
11,978,615
Issue date
May 7, 2024
Samsung Display Co., Ltd.
Hyun-Woo Kim
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Tilted PVD source with rotating pedestal
Patent number
11,948,784
Issue date
Apr 2, 2024
Applied Materials, Inc.
Harish Penmethsa
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method for particle removal from wafers through plasma modification...
Patent number
11,932,934
Issue date
Mar 19, 2024
Applied Materials, Inc.
Halbert Chong
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Apparatus and a method of controlling thickness variation in a mate...
Patent number
11,913,109
Issue date
Feb 27, 2024
SPTS Technologies Limited
Tony Wilby
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Magnetron sputtering apparatus and magnetron sputtering method
Patent number
11,901,166
Issue date
Feb 13, 2024
Tokyo Electron Limited
Tetsuya Miyashita
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Methods and apparatus for extended chamber for through silicon via...
Patent number
11,846,013
Issue date
Dec 19, 2023
Applied Materials, Inc.
David Gunther
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Magnetically enhanced high density plasma-chemical vapor deposition...
Patent number
11,821,068
Issue date
Nov 21, 2023
IonQuest Corp.
Bassam Hanna Abraham
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Sputtering a layer on a substrate using a high-energy density plasm...
Patent number
11,823,859
Issue date
Nov 21, 2023
IonQuest Corp.
Bassam Hanna Abraham
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Methods and apparatus for controlling ion fraction in physical vapo...
Patent number
11,810,770
Issue date
Nov 7, 2023
Applied Materials, Inc.
Xiaodong Wang
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Tilted magnetron in a PVD sputtering deposition chamber
Patent number
11,784,032
Issue date
Oct 10, 2023
Applied Materials, Inc.
Lizhong Sun
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Methods and apparatus for processing a substrate
Patent number
11,784,033
Issue date
Oct 10, 2023
Applied Materials, Inc.
Mengxue Wu
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Methods and apparatus for processing a substrate
Patent number
11,761,078
Issue date
Sep 19, 2023
Applied Materials, Inc.
Mengxue Wu
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Deposition system and method
Patent number
11,728,226
Issue date
Aug 15, 2023
Taiwan Semiconductor Manufacturing Co., Ltd
Wen-Hao Cheng
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Physical vapor deposition apparatus and method thereof
Patent number
11,688,591
Issue date
Jun 27, 2023
Taiwan Semiconductor Manufacturing Co., Ltd
Chia-Hsi Wang
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Methods and apparatus for depositing aluminum by physical vapor dep...
Patent number
11,670,485
Issue date
Jun 6, 2023
Applied Materials, Inc.
Siew Kit Hoi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Depositing apparatus
Patent number
11,646,180
Issue date
May 9, 2023
Samsung Display Co., Ltd.
Kwanyong Lee
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of coating a substrate and coating apparatus for coating a s...
Patent number
11,624,110
Issue date
Apr 11, 2023
Applied Materials, Inc.
Hyun Chan Park
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Cathode unit and film forming apparatus
Patent number
11,581,171
Issue date
Feb 14, 2023
Tokyo Electron Limited
Masato Shinada
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Film forming system and method for forming film on substrate
Patent number
11,542,592
Issue date
Jan 3, 2023
Tokyo Electron Limited
Masato Shinada
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Modifiable magnet configuration for arc vaporization sources
Patent number
11,535,928
Issue date
Dec 27, 2022
OERLIKON SURFACE SOLUTIONS AG, PFÄFFIKON
Siegfried Krassnitzer
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Device for sputtering
Patent number
11,530,476
Issue date
Dec 20, 2022
APPLIED NANO TECHNOLOGY SCIENCE, INC.
Tien-Chun Cheng
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method for particle removal from wafers through plasma modification...
Patent number
11,473,189
Issue date
Oct 18, 2022
Applied Materials, Inc.
Halbert Chong
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Apparatus and methods for depositing durable optical coatings
Patent number
11,466,362
Issue date
Oct 11, 2022
UNIVERSITY OF THE WEST OF SCOTLAND
Desmond Gibson
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Physical vapor deposition apparatus and method thereof
Patent number
11,462,394
Issue date
Oct 4, 2022
Taiwan Semiconductor Manufacturing Co., Ltd
Chia-Hsi Wang
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Methods and apparatus for zone control of RF bias for stress unifor...
Patent number
11,450,511
Issue date
Sep 20, 2022
Applied Materials, Inc.
Lizhong Sun
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Film forming apparatus and film forming method using the same
Patent number
11,414,746
Issue date
Aug 16, 2022
Canon Kabushiki Kaisha
Kazuya Demura
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Machine for the deposition of material by the cathodic sputtering t...
Patent number
11,387,086
Issue date
Jul 12, 2022
KENOSISTEC S.R.L.
Stefano Perugini
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Magnetically enhanced low temperature-high density plasma-chemical...
Patent number
11,306,391
Issue date
Apr 19, 2022
IonQuest Corp.
Bassam Hanna Abraham
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Multi-radius magnetron for physical vapor deposition (PVD) and meth...
Patent number
11,295,938
Issue date
Apr 5, 2022
Applied Materials, Inc.
Jiao Song
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Magnetically enhanced high density plasma-chemical vapor deposition...
Patent number
11,286,555
Issue date
Mar 29, 2022
IonQuest Corp.
Bassam Hanna Abraham
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
SPUTTERING APPARATUS FOR COATING OF 3D-OBJECTS
Publication number
20240136156
Publication date
Apr 25, 2024
Evatec AG
Stephan VOSER
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
VACUUM DEPOSITION INTO TRENCHES AND VIAS
Publication number
20240021421
Publication date
Jan 18, 2024
Ascentool, Inc.
George Xinsheng Guo
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
FILM FORMING APPARATUS AND METHOD OF CONTROLLING FILM FORMING APPAR...
Publication number
20240021423
Publication date
Jan 18, 2024
TOKYO ELECTRON LIMITED
Yasuhiko KOJIMA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHODS AND APPARATUS FOR CONTROLLING ION FRACTION IN PHYSICAL VAPO...
Publication number
20230402271
Publication date
Dec 14, 2023
Applied Materials, Inc.
Xiaodong WANG
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
DEPOSITION SYSTEM AND METHOD
Publication number
20230352350
Publication date
Nov 2, 2023
Taiwan Semiconductor Manufacturing Co., Ltd.
Wen-Hao CHENG
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
PHYSICAL VAPOR DEPOSITION APPARATUS AND METHOD THEREOF
Publication number
20230307218
Publication date
Sep 28, 2023
Taiwan Semiconductor Manufacturing Co., Ltd.
Chia-Hsi WANG
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Cathode Unit for Magnetron Sputtering Apparatus and Magnetron Sputt...
Publication number
20230207295
Publication date
Jun 29, 2023
Ulvac, Inc.
Toshiya Aoyagi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SEMICONDUCTOR PROCESSING APPARATUS AND MAGNETRON MECHANISM
Publication number
20230170196
Publication date
Jun 1, 2023
Beijing NAURA Microelectronics Equipment Co., Ltd.
Yujie YANG
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
MAGNET SYSTEM, SPUTTERING DEVICE AND HOUSING COVER
Publication number
20230154734
Publication date
May 18, 2023
VON ARDENNE Asset GmbH & Co. KG
Thorsten SANDER
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
APPARATUS AND PROCESS WITH A DC-PULSED CATHODE ARRAY
Publication number
20230097276
Publication date
Mar 30, 2023
Evatec AG
Mohamed ELGHAZZALI
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
PHYSICAL VAPOR DEPOSITION PROCESS APPARATUS AND METHOD OF OPTIMIZIN...
Publication number
20230067466
Publication date
Mar 2, 2023
Taiwan Semiconductor Manufacturing Company, Ltd.
Chen-Hung LIN
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SEMICONDUCTOR APPARATUS AND MAGNETIC STRUCTURE OF SEMICONDUCTOR APP...
Publication number
20230055004
Publication date
Feb 23, 2023
Beijing NAURA Microelectronics Equipment Co., Ltd.
Zhenduo YU
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MOVABLE MAGNET ARRAY FOR MAGNETRON SPUTTERING
Publication number
20230052340
Publication date
Feb 16, 2023
INTELLIVATION LLC
Michael G. Simmons
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SPUTTERING APPARATUS
Publication number
20230035198
Publication date
Feb 2, 2023
SAMSUNG DISPLAY CO., LTD.
HYUN-WOO KIM
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD FOR PARTICLE REMOVAL FROM WAFERS THROUGH PLASMA MODIFICATION...
Publication number
20230002885
Publication date
Jan 5, 2023
Applied Materials, Inc.
Halbert Chong
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
FILM FORMING APPARATUS, PROCESSING CONDITION DETERMINATION METHOD,...
Publication number
20220415634
Publication date
Dec 29, 2022
TOKYO ELECTRON LIMITED
Kenichi Imakita
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHODS AND APPARATUS FOR PROCESSING A SUBSTRATE
Publication number
20220380883
Publication date
Dec 1, 2022
Mengxue WU
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHODS AND APPARATUS FOR PROCESSING A SUBSTRATE
Publication number
20220384165
Publication date
Dec 1, 2022
Mengxue WU
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PHYSICAL VAPOR DEPOSITION APPARATUS AND METHOD THEREOF
Publication number
20220367161
Publication date
Nov 17, 2022
Taiwan Semiconductor Manufacturing Co., Ltd.
Chia-Hsi WANG
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
FILM DEPOSITION APPARATUS, SPUTTERING TARGET, AND MANUFACTURING MET...
Publication number
20220301837
Publication date
Sep 22, 2022
KIOXIA Corporation
Akitsugu HATAZAKI
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
APPARATUS FOR PERFORMING SPUTTERING PROCESS AND METHOD THEREOF
Publication number
20220270866
Publication date
Aug 25, 2022
TOKYO ELECTRON LIMITED
Tetsuya MIYASHITA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Magnetically Enhanced High Density Plasma-Chemical Vapor Deposition...
Publication number
20220195585
Publication date
Jun 23, 2022
IonQuest Corp.
Bassam Hanna ABRAHAM
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
FILM FORMING APPARATUS AND FILM FORMING METHOD
Publication number
20220178014
Publication date
Jun 9, 2022
TOKYO ELECTRON LIMITED
Koji MAEDA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHODS AND APPARATUS FOR ZONE CONTROL OF RF BIAS FOR STRESS UNIFOR...
Publication number
20220157563
Publication date
May 19, 2022
Lizhong SUN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHODS AND APPARATUSES FOR DEPOSITION OF ADHERENT CARBON COATINGS...
Publication number
20220127726
Publication date
Apr 28, 2022
Hana Baránková
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
DEVICE FOR SPUTTERING
Publication number
20220106680
Publication date
Apr 7, 2022
Applied Nano Technology Science, Inc.
TIEN-CHUN CHENG
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
MAGNETRON SPUTTERING APPARATUS AND MAGNETRON SPUTTERING METHOD
Publication number
20220108880
Publication date
Apr 7, 2022
TOKYO ELECTRON LIMITED
Tetsuya MIYASHITA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
DEPOSITION SYSTEM AND METHOD
Publication number
20220051952
Publication date
Feb 17, 2022
Taiwan Semiconductor Manufacturing Co., Ltd.
Wen-Hao CHENG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Magnetically Enhanced High Density Plasma-Chemical Vapor Deposition...
Publication number
20220042168
Publication date
Feb 10, 2022
IonQuest Corp.
Bassam Hanna Abraham
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
ROTARY MAGNETRON SPUTTERING WITH INDIVIDUALLY ADJUSTABLE MAGNETIC F...
Publication number
20220028672
Publication date
Jan 27, 2022
lNTERPANE ENTWICKLUNGS - UND BERATUNGSGESELLSCHAFT MBH
Alexander POLLE
H01 - BASIC ELECTRIC ELEMENTS