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  • CPC
  • C23C16/45589
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CCHEMISTRY METALLURGY C23Surface treatment C23CCOATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating

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C23C16/45589Movable means
Industries

Patents Grantslast 30 patents

Patents Applicationslast 30 patents

  • Information Patent Application

    GAS DISTRIBUTION APPARATUSES FOR IMPROVING MIXING UNIFORMITY
    • Publication number 20240068095
    • Publication date Feb 29, 2024
    • Applied Materials, Inc.
    • Youngki Chang
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    PRECURSOR SUPPLY SYSTEM
    • Publication number 20240035159
    • Publication date Feb 1, 2024
    • Samsung Electronics Co., Ltd.
    • Kyungrim KIM
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    ALD APPARATUS, METHOD AND VALVE
    • Publication number 20230383404
    • Publication date Nov 30, 2023
    • Picosun Oy
    • Marko PUDAS
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    APPARATUS FOR CONDUCTING PLASMA SURFACE TREATMENT, BOARD TREATMENT...
    • Publication number 20230343560
    • Publication date Oct 26, 2023
    • New Power Plasma Co., Ltd.
    • Junyoung Oh
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    DEPOSITION METHOD AND DEPOSITION APPARATUS
    • Publication number 20230272523
    • Publication date Aug 31, 2023
    • TOKYO ELECTRON LIMITED
    • Yuichi FURUYA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SEMICONDUCTOR DEPOSITION METHOD AND SEMICONDUCTOR DEPOSITION SYSTEM
    • Publication number 20230054190
    • Publication date Feb 23, 2023
    • CHANGXIN MEMORY TECHNOLOGIES, INC.
    • Lifeng QIU
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    THIN-FILM-DEPOSITION EQUIPMENT
    • Publication number 20220415623
    • Publication date Dec 29, 2022
    • SKY TECH INC.
    • JING-CHENG LIN
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Vacuum Systems in Semiconductor Fabrication Facilities
    • Publication number 20220356567
    • Publication date Nov 10, 2022
    • Taiwan Semiconductor Manufacturing Co., Ltd.
    • Ming-Fa Wu
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Apparatus and Methods for Improving Chemical Utilization Rate in De...
    • Publication number 20220316061
    • Publication date Oct 6, 2022
    • Applied Materials, Inc.
    • Kevin Griffin
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    METHOD OF USING HIGH DENSITY PLASMA CHEMICAL VAPOR DEPOSITION CHAMBER
    • Publication number 20220270855
    • Publication date Aug 25, 2022
    • Taiwan Semiconductor Manufacturing Company, Ltd.
    • Wei-Ching WU
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SUBSTRATE PROCESSING APPARATUS
    • Publication number 20220243322
    • Publication date Aug 4, 2022
    • ASM IP HOLDING B.V.
    • TaeWoong Kim
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...
    • Publication number 20220208530
    • Publication date Jun 30, 2022
    • Kokusai Electric Corporation
    • Yuji TAKEBAYASHI
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Apparatus and Methods for Improving Chemical Utilization Rate in De...
    • Publication number 20220195600
    • Publication date Jun 23, 2022
    • Applied Materials, Inc.
    • Kevin Griffin
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    METHOD AND SYSTEM FOR MANUFACTURING SEMICONDUCTOR
    • Publication number 20220139728
    • Publication date May 5, 2022
    • Taiwan Semiconductor Manufacturing company Ltd.
    • YU-HSIANG CHENG
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    MODULAR ZONE CONTROL FOR A PROCESSING CHAMBER
    • Publication number 20220108891
    • Publication date Apr 7, 2022
    • Applied Materials, Inc.
    • Zubin Huang
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    APPARATUS AND METHODS FOR CONTROLLING CONCENTRATION OF PRECURSORS T...
    • Publication number 20210381104
    • Publication date Dec 9, 2021
    • Applied Materials, Inc.
    • Kenric Choi
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    PLASMA PROCESSING APPARATUS
    • Publication number 20210375597
    • Publication date Dec 2, 2021
    • TOKYO ELECTRON LIMITED
    • Yuki HOSAKA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    HIGH DENSITY PLASMA CHEMICAL VAPOR DEPOSITION CHAMBER AND METHOD OF...
    • Publication number 20210125811
    • Publication date Apr 29, 2021
    • Taiwan Semiconductor Manufacturing Company, Ltd.
    • Wei-Ching WU
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Vacuum Systems in Semiconductor Fabrication Facilities
    • Publication number 20210079522
    • Publication date Mar 18, 2021
    • Taiwan Semiconductor Manufacturing Company, Ltd.
    • Ming-Fa Wu
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    DEPOSITION OF ALUMINUM OXIDE ETCH STOP LAYERS
    • Publication number 20200251384
    • Publication date Aug 6, 2020
    • LAM RESEARCH CORPORATION
    • Meliha Gozde Rainville
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    ALD APPARATUS, METHOD AND VALVE
    • Publication number 20200190666
    • Publication date Jun 18, 2020
    • Picosun Oy
    • Marko PUDAS
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    ACTUATOR TO ADJUST DYNAMICALLY SHOWERHEAD TILT IN A SEMICONDUCTOR-...
    • Publication number 20200181776
    • Publication date Jun 11, 2020
    • LAM RESEARCH CORPORATION
    • John WILTSE
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    EVAPORATOR APPARATUS
    • Publication number 20200176721
    • Publication date Jun 4, 2020
    • WUHAN CHINA STAR OPTOELECTRONICS SEMICONDUCTOR DISPLAY TECHNOLOGY CO., LTD.
    • Zhao LI
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    AXISYMMETRIC MATERIAL DEPOSITION FROM PLASMA ASSISTED BY ANGLED GAS...
    • Publication number 20200123653
    • Publication date Apr 23, 2020
    • Diamond Foundry Inc.
    • Jeremy Scholz
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    MULTIZONE ROTATABLE DIFFUSER APPARATUS
    • Publication number 20190309418
    • Publication date Oct 10, 2019
    • Applied Materials, Inc.
    • Akshay GUNAJI
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    RESIN CONTAINER COATING DEVICE
    • Publication number 20190249304
    • Publication date Aug 15, 2019
    • NISSEI ASB MACHINE CO., LTD.
    • Kiyonori Shimada
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SHADOW RING FOR MODIFYING WAFER EDGE AND BEVEL DEPOSITION
    • Publication number 20190153592
    • Publication date May 23, 2019
    • Applied Materials, Inc.
    • Dale Du BOIS
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    COATING APPRATUS FOR CONTAINERS
    • Publication number 20190127269
    • Publication date May 2, 2019
    • ARKEMA B.V.
    • Bram VAN DIS
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    METHOD FOR APPLYING A PECVD LUBRICITY LAYER WITH A MOVING GAS INLET
    • Publication number 20190093226
    • Publication date Mar 28, 2019
    • SiO2 Medical Products, Inc.
    • James Newton
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SYSTEM AND METHOD FOR ATOMIC LAYER DEPOSITION
    • Publication number 20180274096
    • Publication date Sep 27, 2018
    • ISAC RESEARCH INC.
    • Hyung Sang PARK
    • H01 - BASIC ELECTRIC ELEMENTS