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PLASMA PROCESSING APPARATUS
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Publication number 20240047184
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Publication date Feb 8, 2024
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TOKYO ELECTRON LIMITED
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H01 - BASIC ELECTRIC ELEMENTS
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HYBRID CHAMBER
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Publication number 20230326723
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Publication date Oct 12, 2023
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TES CO., LTD.
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Jae-Woo KIM
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H01 - BASIC ELECTRIC ELEMENTS
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SEMICONDUCTOR WAFER
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Publication number 20230282439
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Publication date Sep 7, 2023
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mi2-factory GmbH
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Florian KRIPPENDORF
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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DEPOSITION METHOD AND DEPOSITION APPARATUS
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Publication number 20230230817
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Publication date Jul 20, 2023
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TOKYO ELECTRON LIMITED
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Hitoshi KATO
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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PLASMA PROCESSING APPARATUS
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Publication number 20230207282
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Publication date Jun 29, 2023
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TOKYO ELECTRON LIMITED
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Shusei KATO
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H01 - BASIC ELECTRIC ELEMENTS
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SUBSTRATE PROCESSING APPARATUS
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Publication number 20230135026
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Publication date May 4, 2023
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SEMES CO., LTD.
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Young Hwan YANG
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H01 - BASIC ELECTRIC ELEMENTS
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Ion Milling Device
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Publication number 20230048299
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Publication date Feb 16, 2023
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Hitachi High-Tech Corporation
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Shota AIDA
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H01 - BASIC ELECTRIC ELEMENTS
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PLASMA PROCESSING APPARATUS
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Publication number 20210020416
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Publication date Jan 21, 2021
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TOKYO ELECTRON LIMITED
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Rumiko MORIYA
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H01 - BASIC ELECTRIC ELEMENTS