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H01J37/3177
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H
ELECTRICITY
H01
Electric elements
H01J
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
H01J37/00
Discharge tubes with provision for introducing objects or material to be exposed to the discharge
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H01J37/3177
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Patents Grants
last 30 patents
Information
Patent Grant
Charged particle assessment tool, inspection method
Patent number
11,984,295
Issue date
May 14, 2024
ASML Netherlands B.V.
Marco Jan-Jaco Wieland
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Beam grid layout
Patent number
RE49952
Issue date
Apr 30, 2024
ASML Netherlands B.V.
Vincent Sylvester Kuiper
Information
Patent Grant
Multiple electron-beam image acquisition apparatus and multiple ele...
Patent number
11,961,703
Issue date
Apr 16, 2024
NuFlare Technology, Inc.
Chosaku Noda
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Replaceable module for a charged particle apparatus
Patent number
11,961,698
Issue date
Apr 16, 2024
ASML Netherlands B.V.
Christiaan Otten
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Vacuum chamber arrangement for charged particle beam generator
Patent number
11,961,627
Issue date
Apr 16, 2024
ASML Netherlands B.V.
Alexander Hendrik Vincent Van Veen
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Grant
Charged particle beam device for inspection of a specimen with a pl...
Patent number
11,961,709
Issue date
Apr 16, 2024
FEI Company
Ali Mohammadi-Gheidari
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Data generation method, charged particle beam irradiation device, a...
Patent number
11,942,305
Issue date
Mar 26, 2024
NuFlare Technology, Inc.
Kenichi Yasui
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Multi charged particle beam writing apparatus
Patent number
11,908,659
Issue date
Feb 20, 2024
NuFlare Technology, Inc.
Toshiki Kimura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Massive overlay metrology sampling with multiple measurement columns
Patent number
11,899,375
Issue date
Feb 13, 2024
KLA Corporation
Jonathan Madsen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Multi-charged-particle-beam writing apparatus and multi-charged-par...
Patent number
11,901,156
Issue date
Feb 13, 2024
NuFlare Technology, Inc.
Ryosuke Ueba
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Multi-beam writing method and multi-beam writing apparatus
Patent number
11,869,746
Issue date
Jan 9, 2024
NuFlare Technology, Inc.
Hiroshi Matsumoto
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Multiple charged-particle beam apparatus and methods
Patent number
11,854,765
Issue date
Dec 26, 2023
ASML Netherlands B.V.
Weiming Ren
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Blanking aperture array unit
Patent number
11,837,429
Issue date
Dec 5, 2023
NuFlare Technology, Inc.
Shuji Yoshino
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Embedded high-Z marker material and process for alignment of multil...
Patent number
11,823,864
Issue date
Nov 21, 2023
HRL Laboratories, LLC
Christopher Bohn
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Multi charged particle beam adjustment method, multi charged partic...
Patent number
11,804,360
Issue date
Oct 31, 2023
NuFlare Technology, Inc.
Tsubasa Nanao
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Charged particle assessment tool, inspection method
Patent number
11,798,783
Issue date
Oct 24, 2023
ASML Netherlands B.V.
Marco Jan-Jaco Wieland
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Aperture array with integrated current measurement
Patent number
11,791,132
Issue date
Oct 17, 2023
ASML Netherlands B.V.
Albertus Victor Gerardus Mangnus
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Writing data generating method, multi charged particle beam writing...
Patent number
11,774,860
Issue date
Oct 3, 2023
NuFlare Technology, Inc.
Kenichi Yasui
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and system for determining a charged particle beam exposure...
Patent number
11,756,765
Issue date
Sep 12, 2023
D2S, Inc.
Akira Fujimura
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Charged particle beam writing apparatus and charged particle beam w...
Patent number
11,756,766
Issue date
Sep 12, 2023
NuFlare Technology, Inc.
Takahito Nakayama
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and system for the removal and/or avoidance of contamination...
Patent number
11,738,376
Issue date
Aug 29, 2023
ASML Netherlands, B.V.
Marc Smits
B08 - CLEANING
Information
Patent Grant
Multi charged particle beam writing apparatus and method of adjusti...
Patent number
11,740,546
Issue date
Aug 29, 2023
NuFlare Technology, Inc.
Tsubasa Nanao
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle blocking element, exposure apparatus comprising su...
Patent number
11,728,123
Issue date
Aug 15, 2023
ASML Netherlands B.V.
Alexander Hendrik Vincent Van Veen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Multi-beam inspection apparatus with improved detection performance...
Patent number
11,721,521
Issue date
Aug 8, 2023
ASML Netherlands B.V.
Weiming Ren
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Lithography system, sensor and measuring method
Patent number
RE49602
Issue date
Aug 8, 2023
ASML Netherlands B.V.
Pieter Kruit
Information
Patent Grant
Semiconductor device, multi-charged-particle beam writing apparatus...
Patent number
11,721,520
Issue date
Aug 8, 2023
NuFlare Technology, Inc.
Kei Obara
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Vacuum chamber arrangement for charged particle beam generator
Patent number
11,705,252
Issue date
Jul 18, 2023
ASML Netherlands B.V.
Alexander Hendrik Vincent Van Veen
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Grant
Multiple electron beam writing apparatus and multiple electron beam...
Patent number
11,621,140
Issue date
Apr 4, 2023
NuFlare Technology, Inc.
Kota Iwasaki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for determining a beamlet position and method for determinin...
Patent number
RE49483
Issue date
Apr 4, 2023
ASML Netherlands B.V.
Paul IJmert Scheffers
Information
Patent Grant
Sensor module for scanning electron microscopy applications
Patent number
11,610,757
Issue date
Mar 21, 2023
KLA Corporation
Marcel Trimpl
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
MULTIPLE CHARGED-PARTICLE BEAM APPARATUS AND METHODS
Publication number
20240145214
Publication date
May 2, 2024
ASML NETHERLANDS B.V.
Weiming REN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MULTI-BEAM CHARGED PARTICLE BEAM SYSTEM WITH ANISOTROPIC FILTERING...
Publication number
20240128051
Publication date
Apr 18, 2024
Carl Zeiss MultiSEM GmbH
Dirk Zeidler
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CHARGED PARTICLE ASSESSMENT SYSTEM AND METHOD OF ALIGNING A SAMPLE...
Publication number
20240128045
Publication date
Apr 18, 2024
ASML NETHERLANDS B.V.
Erwin SLOT
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
DISTORTION REDUCTION IN A MULTI-BEAM IMAGING SYSTEM
Publication number
20240112884
Publication date
Apr 4, 2024
KLA Corporation
Michael I. Cook
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MULTI-BEAM CHARGED PARTICLE SYSTEM AND METHOD OF CONTROLLING THE WO...
Publication number
20240079207
Publication date
Mar 7, 2024
Carl Zeiss MultiSEM GmbH
Michael Behnke
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ELECTRON-OPTICAL DEVICE
Publication number
20240038485
Publication date
Feb 1, 2024
ASML NETHERLANDS B.V.
Stijn Wilem Herman Karel STEENBRINK
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
BLANKING APERTURE ARRAY SYSTEM AND MULTI CHARGED PARTICLE BEAM WRIT...
Publication number
20240029999
Publication date
Jan 25, 2024
NuFlare Technology, Inc.
Hiroshi Yamashita
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Adjustable Permanent Magnetic Lens Having Thermal Control Device
Publication number
20240021403
Publication date
Jan 18, 2024
IMS Nanofabrication GmbH
Dietmar Puchberger
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD AND SYSTEM FOR THE REMOVAL AND/OR AVOIDANCE OF CONTAMINATION...
Publication number
20240017301
Publication date
Jan 18, 2024
ASML NETHERLANDS B.V.
Marc SMITS
B08 - CLEANING
Information
Patent Application
CHARGED PARTICLE BEAM DEVICE FOR INSPECTION OF A SPECIMEN WITH A PL...
Publication number
20240006149
Publication date
Jan 4, 2024
FEI Company
Ali Mohammadi-Gheidari
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MULTIPLE CHARGED PARTICLE BEAM WRITING METHOD AND MULTIPLE CHARGED...
Publication number
20230420217
Publication date
Dec 28, 2023
NuFlare Technology, Inc.
Hiroshi MATSUMOTO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MULTI CHARGED PARTICLE BEAM EVALUATION METHOD, MULTI CHARGED PARTIC...
Publication number
20230402253
Publication date
Dec 14, 2023
NuFlare Technology, Inc.
Hirofumi MORITA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD AND SYSTEM FOR DETERMINING A CHARGED PARTICLE BEAM EXPOSURE...
Publication number
20230386784
Publication date
Nov 30, 2023
D2S, INC.
Akira Fujimura
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
VACUUM CHAMBER ARRANGEMENT FOR CHARGED PARTICLE BEAM GENERATOR
Publication number
20230386696
Publication date
Nov 30, 2023
ASML NETHERLANDS B.V.
Alexander Hendrik Vincent VAN VEEN
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Application
COVERAGE CALCULATING METHOD, CHARGED PARTICLE BEAM WRITING METHOD,...
Publication number
20230369015
Publication date
Nov 16, 2023
NuFlare Technology, Inc.
Kenichi YASUI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Multi-Beam Pattern Definition Device
Publication number
20230360880
Publication date
Nov 9, 2023
IMS Nanofabrication GmbH
Stefan Eder-Kapl
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Adjustable Permanent Magnetic Lens Having Shunting Device
Publication number
20230360878
Publication date
Nov 9, 2023
IMS Nanofabrication GmbH
Dietmar Puchberger
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MASSIVE OVERLAY METROLOGY SAMPLING WITH MULTIPLE MEASUREMENT COLUMNS
Publication number
20230359129
Publication date
Nov 9, 2023
Jonathan Madsen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CHARGED PARTICLE BLOCKING ELEMENT, EXPOSURE APPARATUS COMPRISING SU...
Publication number
20230335366
Publication date
Oct 19, 2023
ASML NETHERLANDS B.V.
Alexander Hendrik Vincent VAN VEEN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CHARGED PARTICLE SYSTEM, METHOD OF PROCESSING A SAMPLE USING A MULT...
Publication number
20230326715
Publication date
Oct 12, 2023
ASML NETHERLANDS B.V.
Marco Jan-Jaco WIELAND
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
OBJECTIVE LENS ARRAY ASSEMBLY, ELECTRON-OPTICAL SYSTEM, ELECTRON-OP...
Publication number
20230290609
Publication date
Sep 14, 2023
ASML NETHERLANDS B.V.
Marco Jan-Jaco WIELAND
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MULTI-ELECTRON BEAM WRITING APPARATUS AND MULTI-ELECTRON BEAM WRITI...
Publication number
20230260748
Publication date
Aug 17, 2023
NuFlare Technology, Inc.
Kota IWASAKI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
OPTICAL SYSTEM ADJUSTMENT METHOD FOR MULTI CHARGED PARTICLE BEAM AP...
Publication number
20230260749
Publication date
Aug 17, 2023
NuFlare Technology, Inc.
Hirofumi MORITA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
A DETECTOR SUBSTRATE FOR USE IN A CHARGED PARTICLE MULTI-BEAM ASSES...
Publication number
20230238211
Publication date
Jul 27, 2023
ASML NETHERLANDS B.V.
Marco Jan-Jaco WIELAND
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CHARGED-PARTICLE MULTI-BEAM COLUMN, CHARGED-PARTICLE MULTI-BEAM COL...
Publication number
20230238215
Publication date
Jul 27, 2023
ASML NETHERLANDS B.V.
Marco Jan-Jaco WIELAND
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SENSOR MODULE FOR SCANNING ELECTRON MICROSCOPY APPLICATIONS
Publication number
20230230800
Publication date
Jul 20, 2023
KLA Corporation
Marcel Trimpl
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CHARGED PARTICLE SYSTEM, APERTURE ARRAY, CHARGED PARTICLE TOOL AND...
Publication number
20230223233
Publication date
Jul 13, 2023
ASML NETHERLANDS B.V.
Diego MARTINEZ NEGRETE GASQUE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MULTI-CHARGED PARTICLE BEAM WRITING APPARATUS, AND MULTI-CHARGED PA...
Publication number
20230187172
Publication date
Jun 15, 2023
NuFlare Technology, Inc.
Yasuo KATO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
DIFFERENTIAL PUMPING APPARATUS AND FOCUSED ENERGY BEAM SYSTEM
Publication number
20230178335
Publication date
Jun 8, 2023
V Technology Co., LTD.
Michinobu MIZUMURA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MULTI-ELECTRON BEAM INSPECTION DEVICE AND MULTI-ELECTRON BEAM INSPE...
Publication number
20230170183
Publication date
Jun 1, 2023
NuFlare Technology, Inc.
Riki OGAWA
H01 - BASIC ELECTRIC ELEMENTS