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H01J2237/0453
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H
ELECTRICITY
H01
Electric elements
H01J
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
H01J2237/00
Discharge tubes exposing object to beam
Current Industry
H01J2237/0453
multiple apertures
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Patents Grants
last 30 patents
Information
Patent Grant
Beam grid layout
Patent number
RE49952
Issue date
Apr 30, 2024
ASML Netherlands B.V.
Vincent Sylvester Kuiper
Information
Patent Grant
Apparatus using charged particle beams
Patent number
11,961,697
Issue date
Apr 16, 2024
ASML Netherlands B.V.
Xuerang Hu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle beam device for inspection of a specimen with a pl...
Patent number
11,961,709
Issue date
Apr 16, 2024
FEI Company
Ali Mohammadi-Gheidari
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Systems and methods for charged particle flooding to enhance voltag...
Patent number
11,929,232
Issue date
Mar 12, 2024
ASML Netherlands B.V.
Frank Nan Zhang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus of plural charged-particle beams
Patent number
11,887,807
Issue date
Jan 30, 2024
ASML Netherlands B.V.
Weiming Ren
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
High throughput multi-electron beam system
Patent number
11,869,743
Issue date
Jan 9, 2024
KLA Corporation
Xinrong Jiang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Multiple charged-particle beam apparatus and methods
Patent number
11,854,765
Issue date
Dec 26, 2023
ASML Netherlands B.V.
Weiming Ren
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Electron optical module for providing an off-axial electron beam wi...
Patent number
11,804,357
Issue date
Oct 31, 2023
FEI Company
Ali Mohammadi-Gheidari
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus for multiple charged-particle beams
Patent number
11,804,355
Issue date
Oct 31, 2023
ASML Netherlands B.V.
Yan Ren
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle beam apparatus, and systems and methods for operat...
Patent number
11,798,777
Issue date
Oct 24, 2023
ASML Netherlands B.V.
Martinus Gerardus Maria Johannes Maassen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle beam apparatus
Patent number
11,798,776
Issue date
Oct 24, 2023
HITACHI HIGH-TECH CORPORATION
Shunichi Motomura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle assessment tool, inspection method
Patent number
11,798,783
Issue date
Oct 24, 2023
ASML Netherlands B.V.
Marco Jan-Jaco Wieland
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Aberration corrector
Patent number
11,791,125
Issue date
Oct 17, 2023
NuFlare Technology, Inc.
Yuichi Maekawa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma source with ceramic electrode plate
Patent number
11,776,793
Issue date
Oct 3, 2023
Applied Materials, Inc.
Robert B. Moore
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and system for the removal and/or avoidance of contamination...
Patent number
11,738,376
Issue date
Aug 29, 2023
ASML Netherlands, B.V.
Marc Smits
B08 - CLEANING
Information
Patent Grant
Apparatus of plural charged-particle beams
Patent number
11,705,304
Issue date
Jul 18, 2023
ASML Netherlands B.V.
Shuai Li
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle beam manipulation device and method for manipulati...
Patent number
11,705,301
Issue date
Jul 18, 2023
ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
Benjamin John Cook
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus using charged particle beams
Patent number
11,670,477
Issue date
Jun 6, 2023
ASML Netherlands B.V.
Xuerang Hu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Particle beam system and method for the particle-optical examinatio...
Patent number
11,657,999
Issue date
May 23, 2023
Carl Zeiss MultiSEM GmbH
Dirk Zeidler
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Systems and methods of creating multiple electron beams
Patent number
11,651,934
Issue date
May 16, 2023
KLA Corporation
Xinrong Jiang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
High-resolution multiple beam source
Patent number
11,615,938
Issue date
Mar 28, 2023
NUFLARE TECHNOLOGY, INC.
John Hartley
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Aberration corrector and multiple electron beam irradiation apparatus
Patent number
11,605,523
Issue date
Mar 14, 2023
NuFlare Technology, Inc.
Kazuhiko Inoue
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Multi-beam inspection apparatus with single-beam mode
Patent number
11,594,396
Issue date
Feb 28, 2023
ASML Netherlands B.V.
Weiming Ren
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus of plural charged-particle beams
Patent number
11,587,758
Issue date
Feb 21, 2023
ASML Netherlands B.V.
Weiming Ren
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Aberration corrector and multiple electron beam irradiation apparatus
Patent number
11,574,793
Issue date
Feb 7, 2023
NuFlare Technology, Inc.
Kazuhiko Inoue
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Pattern inspection apparatus and pattern outline position acquisiti...
Patent number
11,569,057
Issue date
Jan 31, 2023
NuFlare Technology, Inc.
Shinji Sugihara
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Particle beam system for adjusting the current of individual partic...
Patent number
11,562,880
Issue date
Jan 24, 2023
Carl Zeiss MultiSEM GmbH
Dirk Zeidler
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle beam apparatus, multi-beamlet assembly, and method...
Patent number
11,495,433
Issue date
Nov 8, 2022
ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
Benjamin John Cook
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Multiple charged-particle beam apparatus with low crosstalk
Patent number
11,469,074
Issue date
Oct 11, 2022
ASML Netherlands B.V.
Weiming Ren
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Transparent halo assembly for reduced particle generation
Patent number
11,424,112
Issue date
Aug 23, 2022
Varian Semiconductor Equipment Associates, Inc.
Ernest E. Allen
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
Information
Patent Application
MULTIPLE CHARGED-PARTICLE BEAM APPARATUS AND METHODS
Publication number
20240145214
Publication date
May 2, 2024
ASML NETHERLANDS B.V.
Weiming REN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
APPARATUS OF PLURAL CHARGED-PARTICLE BEAMS
Publication number
20240128044
Publication date
Apr 18, 2024
ASML NETHERLANDS B.V.
Weiming REN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MULTI-BEAM CHARGED PARTICLE SYSTEM AND METHOD OF CONTROLLING THE WO...
Publication number
20240079207
Publication date
Mar 7, 2024
Carl Zeiss MultiSEM GmbH
Michael Behnke
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ELECTRON-OPTICAL DEVICE
Publication number
20240038485
Publication date
Feb 1, 2024
ASML NETHERLANDS B.V.
Stijn Wilem Herman Karel STEENBRINK
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ELECTRON-OPTICAL SYSTEM AND METHOD OF OPERATING AN ELECTRON-OPTICAL...
Publication number
20240029995
Publication date
Jan 25, 2024
ASML NETHERLANDS B.V.
Stijn Wilem Herman Karel STEENBRINK
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD AND SYSTEM FOR THE REMOVAL AND/OR AVOIDANCE OF CONTAMINATION...
Publication number
20240017301
Publication date
Jan 18, 2024
ASML NETHERLANDS B.V.
Marc SMITS
B08 - CLEANING
Information
Patent Application
CHARGED PARTICLE BEAM DEVICE FOR INSPECTION OF A SPECIMEN WITH A PL...
Publication number
20240006149
Publication date
Jan 4, 2024
FEI Company
Ali Mohammadi-Gheidari
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
APPARATUS USING CHARGED PARTICLE BEAMS
Publication number
20230411110
Publication date
Dec 21, 2023
ASML NETHERLANDS B.V.
Xuerang HU
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MULTI CHARGED PARTICLE BEAM EVALUATION METHOD, MULTI CHARGED PARTIC...
Publication number
20230402253
Publication date
Dec 14, 2023
NuFlare Technology, Inc.
Hirofumi MORITA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CHARGED PARTICLE TOOL, CALIBRATION METHOD, INSPECTION METHOD
Publication number
20230324318
Publication date
Oct 12, 2023
ASML NETHERLANDS B.V.
Yan REN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CHARGED PARTICLE BEAM PATTERN FORMING DEVICE AND CHARGED PARTICLE B...
Publication number
20230298848
Publication date
Sep 21, 2023
Kabushiki Kaisha Toshiba
Hiroko NAKAMURA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
OBJECTIVE LENS ARRAY ASSEMBLY, ELECTRON-OPTICAL SYSTEM, ELECTRON-OP...
Publication number
20230290609
Publication date
Sep 14, 2023
ASML NETHERLANDS B.V.
Marco Jan-Jaco WIELAND
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
APPARATUS OF PLURAL CHARGED-PARTICLE BEAMS
Publication number
20230282441
Publication date
Sep 7, 2023
ASML NETHERLANDS B.V.
Weiming REN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
OBJECTIVE LENS ARRAY ASSEMBLY, ELECTRON-OPTICAL SYSTEM, ELECTRON-OP...
Publication number
20230245849
Publication date
Aug 3, 2023
ASML NETHERLANDS B.V.
Marco Jan-Jaco WIELAND
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
A DETECTOR SUBSTRATE FOR USE IN A CHARGED PARTICLE MULTI-BEAM ASSES...
Publication number
20230238211
Publication date
Jul 27, 2023
ASML NETHERLANDS B.V.
Marco Jan-Jaco WIELAND
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CHARGED-PARTICLE MULTI-BEAM COLUMN, CHARGED-PARTICLE MULTI-BEAM COL...
Publication number
20230238215
Publication date
Jul 27, 2023
ASML NETHERLANDS B.V.
Marco Jan-Jaco WIELAND
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA SOURCE FOR SEMICONDUCTOR PROCESSING
Publication number
20230238221
Publication date
Jul 27, 2023
Applied Materials, Inc.
Vladimir Nagorny
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CHARGED PARTICLE ASSESSMENT TOOL, INSPECTION METHOD
Publication number
20230125800
Publication date
Apr 27, 2023
ASML NETHERLANDS B.V.
Marco Jan-Jaco WIELAND
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
BEAM MANIPULATOR IN CHARGED PARTICLE-BEAM EXPOSURE APPARATUS
Publication number
20230124558
Publication date
Apr 20, 2023
ASML NETHERLANDS B.V.
Johannes Cornelis Jacobus DE LANGEN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Systems and Methods of Creating Multiple Electron Beams
Publication number
20230109032
Publication date
Apr 6, 2023
KLA Corporation
Xinrong Jiang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MANIPULATOR, MANIPULATOR ARRAY, CHARGED PARTICLE TOOL, MULTI-BEAM C...
Publication number
20230109236
Publication date
Apr 6, 2023
ASML NETHERLANDS B.V.
Laura DINU GURTLER
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ELECTRON OPTICAL MODULE FOR PROVIDING AN OFF-AXIAL ELECTRON BEAM WI...
Publication number
20230101108
Publication date
Mar 30, 2023
FEI Company
Ali MOHAMMADI-GHEIDARI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PARTICLE BEAM SYSTEM WITH MULTI-SOURCE SYSTEM AND MULTI-BEAM PARTIC...
Publication number
20230065475
Publication date
Mar 2, 2023
Carl Zeiss MultiSEM GmbH
Dirk Zeidler
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PARTICLE BEAM COLUMN
Publication number
20230065039
Publication date
Mar 2, 2023
CARL ZEISS MICROSCOPY GMBH
Erik Essers
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
HIGH RESOLUTION, MULTI-ELECTRON BEAM APPARATUS
Publication number
20230066086
Publication date
Mar 2, 2023
KLA Corporation
Xinrong Jiang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Beam Pattern Device Having Beam Absorber Structure
Publication number
20230052445
Publication date
Feb 16, 2023
IMS Nanofabrication GmbH
Elmar Platzgummer
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
APERTURE ASSEMBLY, BEAM MANIPULATOR UNIT, METHOD OF MANIPULATING CH...
Publication number
20230037583
Publication date
Feb 9, 2023
ASML NETHERLANDS B.V.
Marco Jan-Jaco WIELAND
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MULTIPLE CHARGED-PARTICLE BEAM APPARATUS WITH LOW CROSSTALK
Publication number
20230020194
Publication date
Jan 19, 2023
ASML NETHERLANDS B.V.
Weiming REN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MULTI-MODAL OPERATIONS FOR MULTI-BEAM INSPECTION SYSTEM
Publication number
20230019113
Publication date
Jan 19, 2023
ASML NETHERLANDS B.V.
Martinus Gerardus Johannes Maria MAASSEN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MULTI-SOURCE CHARGED PARTICLE ILLUMINATION APPARATUS
Publication number
20220415611
Publication date
Dec 29, 2022
ASML NETHERLANDS B.V.
Stijn Wilem Herman Karel STEENBRINK
H01 - BASIC ELECTRIC ELEMENTS