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PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES
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Photomechanical
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Patents Grants
last 30 patents
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Patent Grant
Lithography apparatus, patterning system, and method of patterning...
Patent number
11,994,804
Issue date
May 28, 2024
Applied Materials, Inc.
Christopher Dennis Bencher
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Imprint method, imprint apparatus, and film formation apparatus
Patent number
11,852,985
Issue date
Dec 26, 2023
Kioxia Corporation
Takeshi Higuchi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Illumination optical system, exposure apparatus, and article manufa...
Patent number
11,448,969
Issue date
Sep 20, 2022
Canon Kabushiki Kaisha
Michio Kono
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Exposure equipment and exposure method
Patent number
11,119,412
Issue date
Sep 14, 2021
SHANGHAI MICRO ELECTRONICS EQUIPMENT (GROUP) CO., LTD.
Jun Qian
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Beam splitting apparatus
Patent number
11,112,618
Issue date
Sep 7, 2021
ASML Netherlands B.V.
Gosse Charles De Vries
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Scattering lithography
Patent number
11,067,899
Issue date
Jul 20, 2021
Vathys, Inc.
Tapabrata Ghosh
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Apparatus and related method to control radiation transmission thro...
Patent number
10,976,666
Issue date
Apr 13, 2021
GLOBALFOUNDRIES U.S. INC.
Ezra D. B. Hall
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Projection lighting system for semiconductor lithography with an im...
Patent number
10,969,699
Issue date
Apr 6, 2021
Carl Zeiss SMT GmbH
Ulrich Weber
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Exposure system, exposure device and exposure method
Patent number
10,942,458
Issue date
Mar 9, 2021
SHANGHAI MICRO ELECTRONICS EQUIPMENT (GROUP) CO., LTD.
Ke Lan
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Illumination optical device, illumination method, and exposure meth...
Patent number
10,591,824
Issue date
Mar 17, 2020
Nikon Corporation
Toru Fujii
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Exposure apparatus, exposure apparatus adjustment method and storag...
Patent number
10,558,125
Issue date
Feb 11, 2020
Tokyo Electron Limited
Teruhiko Moriya
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Illumination system of a microlithographic projection device and me...
Patent number
10,539,883
Issue date
Jan 21, 2020
Carl Zeiss SMT GmbH
Markus Deguenther
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Pattern manufacturing apparatus, pattern manufacturing method, and...
Patent number
10,539,885
Issue date
Jan 21, 2020
Kantatsu Co., Ltd.
Eiji Oshima
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Projection exposure apparatus and method for measuring an imaging a...
Patent number
10,324,380
Issue date
Jun 18, 2019
Carl Zeiss SMT GmbH
Stig Bieling
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Optical component for use in a radiation source module of a project...
Patent number
10,288,894
Issue date
May 14, 2019
Carl Zeiss SMT GmbH
Michael Patra
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Illumination system of a microlithographic projection exposure appa...
Patent number
10,281,823
Issue date
May 7, 2019
Carl Zeiss SMT GmbH
Markus Deguenther
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Beam distributing optical device and associated unit, system and ap...
Patent number
10,061,203
Issue date
Aug 28, 2018
Carl Zeiss SMT GmbH
Markus Deguenther
G02 - OPTICS
Information
Patent Grant
Method and apparatuses for optical pupil symmetrization
Patent number
9,904,173
Issue date
Feb 27, 2018
ASML Holding N.V.
Yevgeniy Konstantinovich Shmarev
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Maskless lithographic apparatus measuring accumulated amount of light
Patent number
9,891,537
Issue date
Feb 13, 2018
Samsung Electronics, Co., Ltd.
Ji Young Chu
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Systems and methods for high-throughput and small-footprint scannin...
Patent number
9,810,994
Issue date
Nov 7, 2017
Taiwan Semiconductor Manufacturing Company, Ltd
Burn Jeng Lin
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Systems and methods for high-throughput and small-footprint scannin...
Patent number
9,519,225
Issue date
Dec 13, 2016
Taiwan Semiconductor Manufacturing Company, Ltd.
Burn Jeng Lin
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Microlithographic projection exposure apparatus illumination optics
Patent number
9,470,981
Issue date
Oct 18, 2016
Carl Zeiss SMT GmbH
Alexander Kohl
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method of forming patterned layer, method of forming patterned phot...
Patent number
9,341,950
Issue date
May 17, 2016
Au Optronics Corporation
Hsiang-Chih Hsiao
G02 - OPTICS
Information
Patent Grant
Digital exposure device using digital micro-mirror device and a met...
Patent number
9,310,697
Issue date
Apr 12, 2016
Samsung Display Co., Ltd.
Sanghyun Yun
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Illumination optical device, illumination method, and exposure meth...
Patent number
9,310,604
Issue date
Apr 12, 2016
Nikon Corporation
Toru Fujii
G02 - OPTICS
Information
Patent Grant
Illumination optical system, exposure apparatus, and method of manu...
Patent number
9,280,054
Issue date
Mar 8, 2016
Canon Kabushiki Kaisha
Noboru Osaka
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Exposure device
Patent number
9,280,062
Issue date
Mar 8, 2016
ORC Manufacturing Co., Ltd.
Duk Lee
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Systems and methods for high-throughput and small-footprint scannin...
Patent number
9,229,332
Issue date
Jan 5, 2016
Taiwan Semiconductor Manufacturing Company, Ltd.
Burn Jeng Lin
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Microlithographic projection exposure apparatus illumination optics
Patent number
9,223,226
Issue date
Dec 29, 2015
Carl Zeiss SMT GmbH
Alexander Kohl
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Interference exposure device and method
Patent number
9,195,146
Issue date
Nov 24, 2015
Shanghai Micro Electronics Equipment Co., Ltd.
Qixin Xu
G01 - MEASURING TESTING
Patents Applications
last 30 patents
Information
Patent Application
MULTI-CHANNEL LIGHT SOURCE FOR PROJECTION OPTICS HEATING
Publication number
20240077803
Publication date
Mar 7, 2024
ASML NETHERLANDS B.V.
Laurentius Johannes Adrianus VAN BOKHOVEN
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD OF PRODUCING AN OPTICAL ELEMENT FOR A LITHOGRAPHY APPARATUS
Publication number
20240025003
Publication date
Jan 25, 2024
Carl Zeiss SMT GMBH
Conrad Wolke
B24 - GRINDING POLISHING
Information
Patent Application
DEVICE AND METHOD FOR REGULATING AND CONTROLLING INCIDENT ANGLE OF...
Publication number
20230280658
Publication date
Sep 7, 2023
TSINGHUA UNIVERSITY
Leijie WANG
G01 - MEASURING TESTING
Information
Patent Application
ILLUMINATION OPTICAL SYSTEM, EXPOSURE APPARATUS, AND ARTICLE MANUFA...
Publication number
20220390853
Publication date
Dec 8, 2022
Canon Kabushiki Kaisha
Michio Kono
G02 - OPTICS
Information
Patent Application
LITHOGRAPHY APPARATUS, PATTERNING SYSTEM, AND METHOD OF PATTERNING...
Publication number
20220373897
Publication date
Nov 24, 2022
Applied Materials, Inc.
Christopher Dennis BENCHER
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
IMPRINT METHOD, IMPRINT APPARATUS, AND FILM FORMATION APPARATUS
Publication number
20220082954
Publication date
Mar 17, 2022
KIOXIA Corporation
Takeshi HIGUCHI
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
SCATTERING LITHOGRAPHY
Publication number
20210240086
Publication date
Aug 5, 2021
Tapabrata Ghosh
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
APPARATUS AND RELATED METHOD TO CONTROL RADIATION TRANSMISSION THRO...
Publication number
20210124272
Publication date
Apr 29, 2021
GLOBALFOUNDRIES U.S. Inc.
Ezra D.B. Hall
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
PROJECTION LIGHTING SYSTEM FOR SEMICONDUCTOR LITHOGRAPHY WITH AN IM...
Publication number
20190384187
Publication date
Dec 19, 2019
Carl Zeiss SMT GMBH
Ulrich Weber
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
ILLUMINATION SYSTEM OF A MICROLITHOGRAPHIC PROJECTION DEVICE AND ME...
Publication number
20180284622
Publication date
Oct 4, 2018
Carl Zeiss SMT GMBH
Markus Deguenther
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Beam splitting apparatus
Publication number
20180252930
Publication date
Sep 6, 2018
ASML NETHERLANDS B.V.
Gosse Charles DE VRIES
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PROJECTION EXPOSURE APPARATUS AND METHOD FOR MEASURING AN IMAGING A...
Publication number
20180196350
Publication date
Jul 12, 2018
Carl Zeiss SMT GMBH
Stig BIELING
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
EXPOSURE APPARATUS, EXPOSURE APPARATUS ADJUSTMENT METHOD AND STORAG...
Publication number
20180136567
Publication date
May 17, 2018
TOKYO ELECTRON LIMITED
Teruhiko MORIYA
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
PATTERN MANUFACTURING APPARATUS, PATTERN MANUFACTURING METHOD, AND...
Publication number
20180088471
Publication date
Mar 29, 2018
KANTATSU CO., LTD
Eiji OSHIMA
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
BEAM DISTRIBUTING OPTICAL DEVICE AND ASSOCIATED UNIT, SYSTEM AND AP...
Publication number
20160357114
Publication date
Dec 8, 2016
Carl Zeiss SMT GMBH
Markus Deguenther
G02 - OPTICS
Information
Patent Application
APPARATUS AND METHOD FOR PERFORMING MULTI-BEAM BASED LITHOGRAPHY
Publication number
20140233001
Publication date
Aug 21, 2014
Samsung Electronics Co., Ltd.
JIN CHOI
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
INTERFERENCE EXPOSURE DEVICE AND METHOD
Publication number
20140176925
Publication date
Jun 26, 2014
SHANGHAI MICRO ELECTRONICS EQUIPMENT Co., LTD.
Qixin Xu
G01 - MEASURING TESTING
Information
Patent Application
Exposure Device for the Structured Exposure of a Surface
Publication number
20140118711
Publication date
May 1, 2014
Jan Werschnik
G02 - OPTICS
Information
Patent Application
EXPOSURE DEVICE
Publication number
20130308111
Publication date
Nov 21, 2013
ORC MANUFACTURING CO., LTD.
Duk Lee
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Scanned-Spot-Array EUV Lithography System
Publication number
20130258305
Publication date
Oct 3, 2013
Kenneth C. Johnson
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
EXPOSURE APPARATUS, METHOD OF FORMING PATTERNED LAYER, METHOD OF FO...
Publication number
20130235316
Publication date
Sep 12, 2013
AU OPTRONICS CORPORATION
Hsiang-Chih Hsiao
G02 - OPTICS
Information
Patent Application
REFLECTIVE PHOTOLITHOGRAPHY APPARATUS HAVING CONTROL MIRROR MODULE
Publication number
20130208253
Publication date
Aug 15, 2013
Samsung Electronics Co., Ltd.
WOO-SEOK SHIM
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Photo-Alingment Apparatus, and Method for Fabricating Liquid Crysta...
Publication number
20130083307
Publication date
Apr 4, 2013
CHIMEI INNOLUX CORPORATION
Hung-I TSENG
G02 - OPTICS
Information
Patent Application
ILLUMINATION OPTICAL DEVICE, ILLUMINATION METHOD, AND EXPOSURE METH...
Publication number
20120249989
Publication date
Oct 4, 2012
Nikon Corporation
Toru FUJII
G02 - OPTICS
Information
Patent Application
ILLUMINATION OPTICAL SYSTEM, EXPOSURE APPARATUS, AND METHOD OF MANU...
Publication number
20120212724
Publication date
Aug 23, 2012
Canon Kabushiki Kaisha
Noboru Osaka
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS ILLUMINATION OPTICS
Publication number
20120081685
Publication date
Apr 5, 2012
Carl Zeiss SMT GMBH
Alexander Kohl
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
DIFFRACTIVE PHOTO MASKS AND METHODS OF USING AND FABRICATING THE SAME
Publication number
20120082943
Publication date
Apr 5, 2012
Georgia Tech Research Corporation
Guy Matthew Burrow
G02 - OPTICS
Information
Patent Application
MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS ILLUMINATION OPTICS
Publication number
20120081686
Publication date
Apr 5, 2012
Carl Zeiss SMT GMBH
Alexander Kohl
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
INTERFERENCE PROJECTION EXPOSURE SYSTEM AND METHOD OF USING SAME
Publication number
20120081687
Publication date
Apr 5, 2012
Georgia Tech Research Corporation
Guy Matthew Burrow
G02 - OPTICS
Information
Patent Application
OPTICAL DEVICE AND EXPOSURE APPARATUS INCLUDING THE SAME
Publication number
20120013880
Publication date
Jan 19, 2012
Jin CHOI
G02 - OPTICS