Multiple-pass interferometer

Industry

CPC
G01B9/02018

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Parent Industries

GPHYSICS G01Measuring instruments G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS MEASURING ANGLES MEASURING AREAS MEASURING IRREGULARITIES OF SURFACES OR CONTOURS G01B9/00Instruments as specified in the subgroups and characterised by the use of optical measuring means

Current Industry

G01B9/02018Multiple-pass interferometer

Industries

Patents Grantslast 30 patents

Information Patent Grant
Measuring assembly for the frequency-based determination of the pos...
- Patent number 11,274,914
- Issue date Mar 15, 2022
- Carl Zeiss SMT GmbH
- Matthias Manger
- G01 - MEASURING TESTING
Information Patent Grant
Methods and apparatus for high resolution imaging with reflectors a...
- Patent number 11,016,309
- Issue date May 25, 2021
- Massachusetts Institute of Technology
- Barmak Heshmat Dehkordi
- G01 - MEASURING TESTING
Information Patent Grant
Method for defect inspection of transparent substrate by integratin...
- Patent number 10,976,152
- Issue date Apr 13, 2021
- National Taiwan Normal University
- Chau-Jern Cheng
- G01 - MEASURING TESTING
Information Patent Grant
Inspecting a multilayer sample
- Patent number 10,890,434
- Issue date Jan 12, 2021
- APPLEJACK 199 L.P.
- Wojciech Jan Walecki
- G01 - MEASURING TESTING
Information Patent Grant
Three-dimensional measurement device
- Patent number 10,704,888
- Issue date Jul 7, 2020
- CKD Corporation
- Hiroyuki Ishigaki
- G01 - MEASURING TESTING
Information Patent Grant
Mirror plate for a fabry-perot interferometer and a fabry-perot int...
- Patent number 10,495,514
- Issue date Dec 3, 2019
- Teknologian tutkimuskeskus VTT Oy
- Aapo Varpula
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Displacement detecting device with controlled heat generation
- Patent number 10,451,401
- Issue date Oct 22, 2019
- DMG MORI CO., LTD.
- Hideaki Tamiya
- G01 - MEASURING TESTING
Information Patent Grant
Balanced detection systems
- Patent number 10,436,573
- Issue date Oct 8, 2019
- Carl Zeiss Meditec, Inc.
- Tilman Schmoll
- G01 - MEASURING TESTING
Information Patent Grant
Methods and apparatus for high resolution imaging with reflectors a...
- Patent number 10,386,650
- Issue date Aug 20, 2019
- Massachusetts Institute of Technology
- Barmak Heshmat Dehkordi
- G01 - MEASURING TESTING
Information Patent Grant
Position measurement system and lithographic apparatus
- Patent number 10,331,045
- Issue date Jun 25, 2019
- ASML Netherlands B.V.
- Engelbertus Antonius Fransiscus Van Der Pasch
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Measurement apparatus, lithography apparatus, and method of manufac...
- Patent number 10,095,125
- Issue date Oct 9, 2018
- Canon Kabushiki Kaisha
- Hiroshi Okuda
- G02 - OPTICS
Information Patent Grant
Optical imaging device with image defect determination
- Patent number 9,996,014
- Issue date Jun 12, 2018
- Carl Zeiss SMT GmbH
- Rolf Freimann
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Integrated reciprocal space mapping for simultaneous lattice parame...
- Patent number 9,864,075
- Issue date Jan 9, 2018
- Jonathan Giencke
- G01 - MEASURING TESTING
Information Patent Grant
Interferometer having two transparent plates in parallel for making...
- Patent number 9,797,704
- Issue date Oct 24, 2017
- Dr. Johannes Heidenhain GmbH
- Markus Meissner
- G01 - MEASURING TESTING
Information Patent Grant
Device for interferential distance measurement
- Patent number 9,739,598
- Issue date Aug 22, 2017
- Dr. Johannes Heidenhain GmbH
- Ralph Joerger
- G01 - MEASURING TESTING
Information Patent Grant
Multiple beam path laser optical system using multiple beam reflector
- Patent number 9,739,592
- Issue date Aug 22, 2017
- FOUNDATION FOR RESEARCH & BUSINESS, SEOUL NATIONAL UNIVERSITY OF SCIENCE & TE...
- Ik-Keun Park
- G01 - MEASURING TESTING
Information Patent Grant
Device for distance measurement
- Patent number 9,400,168
- Issue date Jul 26, 2016
- Dr. Johannes Heidenhain GmbH
- Walter Huber
- G01 - MEASURING TESTING
Information Patent Grant
Interferometer
- Patent number 9,372,066
- Issue date Jun 21, 2016
- Canon Kabushiki Kaisha
- Shigeki Kato
- G01 - MEASURING TESTING
Information Patent Grant
Measuring device for high-precision optical determination of distan...
- Patent number 9,310,183
- Issue date Apr 12, 2016
- Dr. Johannes Heidenhain GmbH
- Wolfgang Holzapfel
- G01 - MEASURING TESTING
Information Patent Grant
Method for the absolute measurement of the flatness of the surfaces...
- Patent number 9,267,789
- Issue date Feb 23, 2016
- Commissariat a l'Energie Atomique et Aux Energies Alternatives
- Stephane Bouillet
- G01 - MEASURING TESTING
Information Patent Grant
Optical imaging device with image defect determination
- Patent number 9,235,131
- Issue date Jan 12, 2016
- Carl Zeiss SMT GmbH
- Rolf Freimann
- G01 - MEASURING TESTING
Information Patent Grant
Interferometer devices for determining initial position of a stage...
- Patent number 9,194,694
- Issue date Nov 24, 2015
- Nikon Corporation
- Eric Peter Goodwin
- G01 - MEASURING TESTING
Information Patent Grant
Interferometer
- Patent number 9,188,424
- Issue date Nov 17, 2015
- Dr. Johannes Heidenhain GmbH
- Wolfgang Holzapfel
- G01 - MEASURING TESTING
Information Patent Grant
Interferometer
- Patent number 9,127,924
- Issue date Sep 8, 2015
- Dr. Johannes Heidenhain GmbH
- Markus Meissner
- G01 - MEASURING TESTING
Information Patent Grant
Displacement detecting device
- Patent number 9,074,861
- Issue date Jul 7, 2015
- DMG MORI SEIKI CO., LTD.
- Hideaki Tamiya
- G01 - MEASURING TESTING
Information Patent Grant
Device for determining distance interferometrically
- Patent number 9,068,811
- Issue date Jun 30, 2015
- Dr. Johannes Heidenhain GmbH
- Wolfgang Holzapfel
- G01 - MEASURING TESTING
Information Patent Grant
Polarizing different phases of interfered light used in a method an...
- Patent number 8,860,946
- Issue date Oct 14, 2014
- Hitachi, Ltd.
- Toshihiko Nakata
- G01 - MEASURING TESTING
Information Patent Grant
Double pass interferometer with tilted mirrors
- Patent number 8,582,112
- Issue date Nov 12, 2013
- Canon Kabushiki Kaisha
- Shigeki Kato
- G01 - MEASURING TESTING
Information Patent Grant
Optical imaging device with image defect determination
- Patent number 8,537,333
- Issue date Sep 17, 2013
- Carl Zeiss SMT GmbH
- Rolf Freimann
- G01 - MEASURING TESTING
Information Patent Grant
Laser gauge interferometer
- Patent number 8,456,642
- Issue date Jun 4, 2013
- Canon Kabushiki Kaisha
- Keita Sugiura
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
COMPACT DUAL PASS INTERFEROMETER FOR A PLANE MIRROR INTERFEROMETER
- Publication number 20240011762
- Publication date Jan 11, 2024
- ASML NETHERLANDS B.V.
- Maarten Jozef JANSEN
- G01 - MEASURING TESTING
Information Patent Application
OPTICAL INTERFERENCE RANGE SENSOR
- Publication number 20230288185
- Publication date Sep 14, 2023
- Omron Corporation
- Yusuke NAGASAKI
- G01 - MEASURING TESTING
Information Patent Application
MEASURING ASSEMBLY FOR THE FREQUENCY-BASED DETERMINATION OF THE POS...
- Publication number 20210080244
- Publication date Mar 18, 2021
- Carl Zeiss SMT GMBH
- Matthias MANGER
- G01 - MEASURING TESTING
Information Patent Application
Methods and apparatus for high resolution imaging with reflectors a...
- Publication number 20190331932
- Publication date Oct 31, 2019
- Massachusetts Institute of Technology
- Barmak Heshmat Dehkordi
- G01 - MEASURING TESTING
Information Patent Application
PHOTODETECTOR
- Publication number 20190162519
- Publication date May 30, 2019
- Rain Tree Photonics Pte. Ltd.
- Ying Huang
- G02 - OPTICS
Information Patent Application
POSITION MEASUREMENT SYSTEM AND LITHOGRAPHIC APPARATUS
- Publication number 20180364594
- Publication date Dec 20, 2018
- ASML Netherlands B.V.
- Engelbertus Antonius Fransiscus VAN DER PASCH
- G01 - MEASURING TESTING
Information Patent Application
BALANCED DETECTION SYSTEMS
- Publication number 20180364025
- Publication date Dec 20, 2018
- Tilman SCHMOLL
- G01 - MEASURING TESTING
Information Patent Application
Method and Apparatus for Defect Inspection of Transparent Substrate
- Publication number 20180188016
- Publication date Jul 5, 2018
- National Taiwan Normal University
- Chau-Jern Cheng
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
THREE-DIMENSIONAL MEASUREMENT DEVICE
- Publication number 20180106590
- Publication date Apr 19, 2018
- CKD CORPORATION
- Hiroyuki Ishigaki
- G01 - MEASURING TESTING
Information Patent Application
Interferometer
- Publication number 20140376002
- Publication date Dec 25, 2014
- Markus Meissner
- G01 - MEASURING TESTING
Information Patent Application
Interferometer
- Publication number 20140176962
- Publication date Jun 26, 2014
- Dr. Johannes Heidenhain Gmbh
- Wolfgang Holzapfel
- G01 - MEASURING TESTING
Information Patent Application
METHOD FOR THE ABSOLUTE MEASUREMENT OF THE FLATNESS OF THE SURFACES...
- Publication number 20140160491
- Publication date Jun 12, 2014
- COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENE. ALT.
- Stephane Bouillet
- G01 - MEASURING TESTING
Information Patent Application
OPTICAL IMAGING DEVICE WITH IMAGE DEFECT DETERMINATION
- Publication number 20140016108
- Publication date Jan 16, 2014
- Carl Zeiss SMT GMBH
- Rolf FREIMANN
- G01 - MEASURING TESTING
Information Patent Application
DEVICE FOR DISTANCE MEASUREMENT
- Publication number 20130335746
- Publication date Dec 19, 2013
- Walter Huber
- G01 - MEASURING TESTING
Information Patent Application
Displacement Detecting Device
- Publication number 20130250307
- Publication date Sep 26, 2013
- MORI SEIKI CO., LTD.
- Hideaki TAMIYA
- G01 - MEASURING TESTING
Information Patent Application
INTERFEROMETER DEVICES FOR DETERMINING INITIAL POSITION OF A STAGE...
- Publication number 20130194583
- Publication date Aug 1, 2013
- Nikon Corporation
- Eric Peter Goodwin
- G01 - MEASURING TESTING
Information Patent Application
Device for Determining Distance Interferometrically
- Publication number 20130057872
- Publication date Mar 7, 2013
- Wolfgang Holzapfel
- G01 - MEASURING TESTING
Information Patent Application
DOUBLE PASS INTERFEROMETER WITH TILTED MIRRORS
- Publication number 20120327424
- Publication date Dec 27, 2012
- Canon Kabushiki Kaisha
- Shigeki Kato
- G01 - MEASURING TESTING
Information Patent Application
OPTICAL IMAGING DEVICE WITH IMAGE DEFECT DETERMINATION
- Publication number 20110164232
- Publication date Jul 7, 2011
- Carl Zeiss SMT GMBH
- Rolf FREIMANN
- G01 - MEASURING TESTING
Information Patent Application
Multi-beam interferometer displacement measuring system utilized in...
- Publication number 20110157598
- Publication date Jun 30, 2011
- NATIONAL YUNLIN UNIVERSITY OF SCIENCE AND TECHNOLOGY
- Yung-Cheng WANG
- G01 - MEASURING TESTING
Information Patent Application
Rotary Interferometer
- Publication number 20110157595
- Publication date Jun 30, 2011
- William S. Yerazunis
- G01 - MEASURING TESTING
Information Patent Application
INTERFEROMETER
- Publication number 20110141479
- Publication date Jun 16, 2011
- Canon Kabushiki Kaisha
- Shigeki Kato
- G01 - MEASURING TESTING
Information Patent Application
LASER GAUGE INTERFEROMETER
- Publication number 20110043819
- Publication date Feb 24, 2011
- Canon Kabushiki Kaisha
- Keita Sugiura
- G01 - MEASURING TESTING
Information Patent Application
Interferometer
- Publication number 20100238456
- Publication date Sep 23, 2010
- Clive Christopher Speake
- G01 - MEASURING TESTING
Information Patent Application
LASER INTERFEROMETER SYSTEM FOR MEASURING ROLL ANGLE
- Publication number 20100141957
- Publication date Jun 10, 2010
- University of Shanghai for Science and Technology
- Wenmei HOU
- G01 - MEASURING TESTING
Information Patent Application
Optical member, interferometer system, stage apparatus, exposure ap...
- Publication number 20090310105
- Publication date Dec 17, 2009
- Nikon Corporation
- Yosuke Kuriyama
- G02 - OPTICS
Information Patent Application
PHASE-CONJUGATE OPTICAL COHERENCE TOMOGRAPHY METHODS AND APPARATUS
- Publication number 20090290162
- Publication date Nov 26, 2009
- Massachusetts Institute of Technology
- Baris I. Erkmen
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Application
INTERFEROMETER
- Publication number 20090284750
- Publication date Nov 19, 2009
- Canon Kabushiki Kaisha
- Shigeki Kato
- G01 - MEASURING TESTING
Information Patent Application
Spectral Domain Phase Microscopy (SDPM) Dual Mode Imaging Systems a...
- Publication number 20090237673
- Publication date Sep 24, 2009
- Eric L. Buckland
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Application
Interferometer with Double Polarizing Beam Splitter
- Publication number 20090109442
- Publication date Apr 30, 2009
- Greg C. Felix
- G02 - OPTICS

Multiple-pass interferometer

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Measuring assembly for the frequency-based determination of the pos...

Methods and apparatus for high resolution imaging with reflectors a...

Method for defect inspection of transparent substrate by integratin...

Inspecting a multilayer sample

Three-dimensional measurement device

Mirror plate for a fabry-perot interferometer and a fabry-perot int...

Displacement detecting device with controlled heat generation

Balanced detection systems

Methods and apparatus for high resolution imaging with reflectors a...

Position measurement system and lithographic apparatus

Measurement apparatus, lithography apparatus, and method of manufac...

Optical imaging device with image defect determination

Integrated reciprocal space mapping for simultaneous lattice parame...

Interferometer having two transparent plates in parallel for making...

Device for interferential distance measurement

Multiple beam path laser optical system using multiple beam reflector

Device for distance measurement

Interferometer

Measuring device for high-precision optical determination of distan...

Method for the absolute measurement of the flatness of the surfaces...

Optical imaging device with image defect determination

Interferometer devices for determining initial position of a stage...

Interferometer

Interferometer

Displacement detecting device

Device for determining distance interferometrically

Polarizing different phases of interfered light used in a method an...

Double pass interferometer with tilted mirrors

Optical imaging device with image defect determination

Laser gauge interferometer

Patents Applicationslast 30 patents

COMPACT DUAL PASS INTERFEROMETER FOR A PLANE MIRROR INTERFEROMETER

OPTICAL INTERFERENCE RANGE SENSOR

MEASURING ASSEMBLY FOR THE FREQUENCY-BASED DETERMINATION OF THE POS...

Methods and apparatus for high resolution imaging with reflectors a...

PHOTODETECTOR

POSITION MEASUREMENT SYSTEM AND LITHOGRAPHIC APPARATUS

BALANCED DETECTION SYSTEMS

Method and Apparatus for Defect Inspection of Transparent Substrate

THREE-DIMENSIONAL MEASUREMENT DEVICE

Interferometer

Interferometer

METHOD FOR THE ABSOLUTE MEASUREMENT OF THE FLATNESS OF THE SURFACES...

OPTICAL IMAGING DEVICE WITH IMAGE DEFECT DETERMINATION

DEVICE FOR DISTANCE MEASUREMENT

Displacement Detecting Device

INTERFEROMETER DEVICES FOR DETERMINING INITIAL POSITION OF A STAGE...

Device for Determining Distance Interferometrically

DOUBLE PASS INTERFEROMETER WITH TILTED MIRRORS

OPTICAL IMAGING DEVICE WITH IMAGE DEFECT DETERMINATION

Multi-beam interferometer displacement measuring system utilized in...

Rotary Interferometer

INTERFEROMETER

LASER GAUGE INTERFEROMETER

Interferometer

LASER INTERFEROMETER SYSTEM FOR MEASURING ROLL ANGLE

Optical member, interferometer system, stage apparatus, exposure ap...

PHASE-CONJUGATE OPTICAL COHERENCE TOMOGRAPHY METHODS AND APPARATUS

INTERFEROMETER

Spectral Domain Phase Microscopy (SDPM) Dual Mode Imaging Systems a...

Interferometer with Double Polarizing Beam Splitter