Multiple projection paths, array of projection systems, microlens projection systems, tandem projection systems

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CPC
G03F7/70275

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Parent Industries

GPHYSICS G03Photography G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES G03F7/00Photomechanical

Current Industry

G03F7/70275Multiple projection paths, array of projection systems, microlens projection systems, tandem projection systems

Industries

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Patents Grantslast 30 patents

Information Patent Grant
System and method for parallel two-photon lithography using a metal...
- Patent number 12,130,407
- Issue date Oct 29, 2024
- Lawrence Livermore National Security, LLC
- Xiaoxing Xia
- G02 - OPTICS
Information Patent Grant
Lithography apparatus, patterning system, and method of patterning...
- Patent number 11,994,804
- Issue date May 28, 2024
- Applied Materials, Inc.
- Christopher Dennis Bencher
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and system for nanoscale data recording
- Patent number 11,886,123
- Issue date Jan 30, 2024
- Franklin Mark Schellenberg
- G11 - INFORMATION STORAGE
Information Patent Grant
Photolithography system including selective light array
- Patent number 11,880,139
- Issue date Jan 23, 2024
- Honeywell Federal Manufacturing & Technologies, LLC
- Barbara Diane Young
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Metrology device and detection apparatus therefor
- Patent number 11,782,351
- Issue date Oct 10, 2023
- ASML Netherlands B.V.
- Nitesh Pandey
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
UV lithography system
- Patent number 11,561,476
- Issue date Jan 24, 2023
- Kenneth Carlisle Johnson
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Catadioptric projection lens and method for producing same
- Patent number 11,360,293
- Issue date Jun 14, 2022
- Carl Zeiss SMT GmbH
- Martin Rocktaeschel
- G02 - OPTICS
Information Patent Grant
Method and system for nanoscale data recording
- Patent number 11,269,258
- Issue date Mar 8, 2022
- Franklin Mark Schellenberg
- B82 - NANO-TECHNOLOGY
Information Patent Grant
System for making accurate grating patterns using multiple writing...
- Patent number 11,243,480
- Issue date Feb 8, 2022
- Applied Materials, Inc.
- David Markle
- G02 - OPTICS
Information Patent Grant
Optical system for transferring original structure portions of a li...
- Patent number 11,137,688
- Issue date Oct 5, 2021
- Carl Zeiss SMT GmbH
- Michael Patra
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure equipment and exposure method
- Patent number 11,119,412
- Issue date Sep 14, 2021
- SHANGHAI MICRO ELECTRONICS EQUIPMENT (GROUP) CO., LTD.
- Jun Qian
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Large area high resolution feature reduction lithography technique
- Patent number 11,042,098
- Issue date Jun 22, 2021
- Applied Materials, Inc.
- Arvinder Chadha
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Vertical control method for use in lithography machine
- Patent number 11,042,101
- Issue date Jun 22, 2021
- SHANGHAI MICRO ELECTRONICS EQUIPMENT (GROUP) CO., LTD.
- Dan Chen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Apparatus for making direct writing screen plate and using method t...
- Patent number 10,969,689
- Issue date Apr 6, 2021
- JIANGSU GIS LASER TECHNOLOGIES INC.
- Lloyd Ma
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Micro LED array illumination source
- Patent number 10,908,507
- Issue date Feb 2, 2021
- Applied Materials, Inc.
- Jang Fung Chen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and system for nanoscale data recording
- Patent number 10,884,340
- Issue date Jan 5, 2021
- Franklin Mark Schellenberg
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Mask and fabrication method thereof, display panel and touch panel
- Patent number 10,859,920
- Issue date Dec 8, 2020
- BOE Technology Group Co., Ltd.
- Liqing Liao
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Lithography apparatus and method using the same
- Patent number 10,775,706
- Issue date Sep 15, 2020
- Taiwan Semiconductor Manufacturing Co., Ltd
- Chi-Hung Liao
- G02 - OPTICS
Information Patent Grant
Method to enhance the resolution of maskless lithography while main...
- Patent number 10,761,430
- Issue date Sep 1, 2020
- Applied Materials, Inc.
- Christopher Dennis Bencher
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and system for nanoscale data recording
- Patent number 10,747,118
- Issue date Aug 18, 2020
- Franklin Mark Schellenberg
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Quarter wave light splitting
- Patent number 10,705,431
- Issue date Jul 7, 2020
- Applied Materials, Inc.
- Christopher Dennis Bencher
- G02 - OPTICS
Information Patent Grant
Optical mask for use in a photolithography process, a method for fa...
- Patent number 10,663,856
- Issue date May 26, 2020
- City University of Hong Kong
- Johnny Chung Yin Ho
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Projection exposure apparatus and method
- Patent number 10,585,361
- Issue date Mar 10, 2020
- SHANGHAI MICRO ELECTRONICS EQUIPMENT (GROUP) CO., LTD.
- Yuefei Chen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and system for nanoscale data recording
- Patent number 10,539,880
- Issue date Jan 21, 2020
- Franklin Mark Schellenberg
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Multi-configuration digital lithography system
- Patent number 10,459,341
- Issue date Oct 29, 2019
- Applied Materials, Inc.
- Chien-Hua Lai
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Stitchless direct imaging for high resolution electronic patterning
- Patent number 10,429,742
- Issue date Oct 1, 2019
- Orbotech Ltd.
- Steffen Ruecker
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Digital photolithography using compact eye module layout
- Patent number 10,409,172
- Issue date Sep 10, 2019
- Applied Materials, Inc.
- David Markle
- G02 - OPTICS
Information Patent Grant
Optical system
- Patent number 10,386,733
- Issue date Aug 20, 2019
- Carl Zeiss SMT GmbH
- Rolf Freimann
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Apparatus and methods for on-the-fly digital exposure image data mo...
- Patent number 10,379,450
- Issue date Aug 13, 2019
- Applied Materials, Inc.
- Benjamin M. Johnston
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Real time software and array control
- Patent number 10,331,038
- Issue date Jun 25, 2019
- Applied Materials, Inc.
- Uwe Hollerbach
- G05 - CONTROLLING REGULATING

Patents Applicationslast 30 patents

Information Patent Application
ILLUMINATION SYSTEM, PROJECTION ILLUMINATION FACILITY AND PROJECTIO...
- Publication number 20250068081
- Publication date Feb 27, 2025
- Carl Zeiss SMT GMBH
- Stig Bieling
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SYSTEMS AND METHODS FOR LITHOGRAPHIC TOOLS WITH INCREASED TOLERANCES
- Publication number 20250021012
- Publication date Jan 16, 2025
- ASML NETHERLANDS B.V.
- Jasper WINTERS
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
DIGITAL LITHOGRAPHY EXPOSURE UNIT BOUNDARY SMOOTHING
- Publication number 20240280911
- Publication date Aug 22, 2024
- Applied Materials, Inc.
- CHI-MING TSAI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
INSPECTION SYSTEM FOR RETICLE PARTICLE DETECTION USING A STRUCTURAL...
- Publication number 20240272058
- Publication date Aug 15, 2024
- ASML NETHERLANDS B.V.
- Michal Emanuel PAWLOWSKI
- G01 - MEASURING TESTING
Information Patent Application
METHOD AND SYSTEM FOR NANOSCALE DATA RECORDING
- Publication number 20240248407
- Publication date Jul 25, 2024
- Franklin Mark Schellenberg
- B82 - NANO-TECHNOLOGY
Information Patent Application
EXPOSURE DEVICE AND METHOD
- Publication number 20240126177
- Publication date Apr 18, 2024
- Chun-Jung Chiu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PNEUMATIC CONTROLLED FLEXURE SYSTEM FOR STABILIZING A PROJECTION DE...
- Publication number 20240069452
- Publication date Feb 29, 2024
- Applied Materials, Inc.
- Assaf KIDRON
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
DIGITAL MICROMIRROR DEVICE FOR AN ILLUMINATION OPTICAL COMPONENT OF...
- Publication number 20230221649
- Publication date Jul 13, 2023
- Carl Zeiss SMT GMBH
- Michael Patra
- G02 - OPTICS
Information Patent Application
LITHOGRAPHIC APPARATUS, METROLOGY SYSTEMS, ILLUMINATION SWITCHES AN...
- Publication number 20230213868
- Publication date Jul 6, 2023
- ASML Holding N.V.
- Mohamed SWILLAM
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PHOTOLITHOGRAPHY SYSTEM INCLUDING SELECTIVE LIGHT ARRAY
- Publication number 20230092166
- Publication date Mar 23, 2023
- HONEYWELL FEDERAL MANUFACTURING & TECHNOLOGIES, LLC
- Barbara Diane Young
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
UV Lithography System
- Publication number 20230011685
- Publication date Jan 12, 2023
- Kenneth Carlisle Johnson
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHY APPARATUS, PATTERNING SYSTEM, AND METHOD OF PATTERNING...
- Publication number 20220373897
- Publication date Nov 24, 2022
- Applied Materials, Inc.
- Christopher Dennis BENCHER
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD AND APPARATUS FOR GREYSCALE LITHOGRAPHY
- Publication number 20220357668
- Publication date Nov 10, 2022
- Applied Materials, Inc.
- Ludovic GODET
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METROLOGY DEVICE AND DETECTION APPARATUS THEREFOR
- Publication number 20220334497
- Publication date Oct 20, 2022
- ASML NETHERLANDS B.V.
- Nitesh PANDEY
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SYSTEM AND METHOD FOR PARALLEL TWO-PHOTON LITHOGRAPHY USING A METAL...
- Publication number 20220252761
- Publication date Aug 11, 2022
- LAWRENCE LIVERMORE NATIONAL SECURITY, LLC
- Xiaoxing XIA
- G02 - OPTICS
Information Patent Application
OPTICAL SYSTEM
- Publication number 20220236652
- Publication date Jul 28, 2022
- Carl Zeiss SMT GMBH
- Rolf Freimann
- G02 - OPTICS
Information Patent Application
METHOD AND SYSTEM FOR NANOSCALE DATA RECORDING
- Publication number 20220197150
- Publication date Jun 23, 2022
- Franklin Mark Schellenberg
- B82 - NANO-TECHNOLOGY
Information Patent Application
A SYSTEM FOR MAKING ACCURATE GRATING PATTERNS USING MULTIPLE WRITIN...
- Publication number 20210191285
- Publication date Jun 24, 2021
- Applied Materials, Inc.
- David MARKLE
- G02 - OPTICS
Information Patent Application
METHOD AND SYSTEM FOR NANOSCALE DATA RECORDING
- Publication number 20210124273
- Publication date Apr 29, 2021
- Franklin Mark Schellenberg
- B82 - NANO-TECHNOLOGY
Information Patent Application
MASK-LESS LASER DIRECT IMAGING SYSTEM
- Publication number 20210063884
- Publication date Mar 4, 2021
- SHUZ TUNG MACHINERY INDUSTRIAL CO.,LTD.
- KUO-SHU HUNG
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
OPTICAL SYSTEM FOR TRANSFERRING ORIGINAL STRUCTURE PORTIONS OF A LI...
- Publication number 20210055661
- Publication date Feb 25, 2021
- Carl Zeiss SMT GMBH
- Michael PATRA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD AND SYSTEM FOR NANOSCALE DATA RECORDING
- Publication number 20200379356
- Publication date Dec 3, 2020
- Franklin Mark Schellenberg
- B82 - NANO-TECHNOLOGY
Information Patent Application
PROJECTION OBJECTIVE
- Publication number 20200310256
- Publication date Oct 1, 2020
- SHANGHAI MICRO ELECTRONICS EQUIPMENT (GROUP) CO., LTD.
- Fuping AN
- G02 - OPTICS
Information Patent Application
LARGE AREA HIGH RESOLUTION FEATURE REDUCTION LITHOGRAPHY TECHNIQUE
- Publication number 20200264518
- Publication date Aug 20, 2020
- Applied Materials, Inc.
- Arvinder CHADHA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD AND SYSTEM FOR NANOSCALE DATA RECORDING
- Publication number 20200166850
- Publication date May 28, 2020
- Franklin Mark Schellenberg
- B82 - NANO-TECHNOLOGY
Information Patent Application
LITHOGRAPHY APPARATUS AND METHOD USING THE SAME
- Publication number 20200103765
- Publication date Apr 2, 2020
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chi-Hung LIAO
- G02 - OPTICS
Information Patent Application
METHOD TO ENHANCE THE RESOLUTION OF MASKLESS LITHOGRAPHY WHILE MAIN...
- Publication number 20200089128
- Publication date Mar 19, 2020
- Applied Materials, Inc.
- Christopher Dennis BENCHER
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
OPTICAL SYSTEM
- Publication number 20190354025
- Publication date Nov 21, 2019
- Carl Zeiss SMT GMBH
- Rolf Freimann
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
CATADIOPTRIC PROJECTION LENS AND METHOD FOR PRODUCING SAME
- Publication number 20190302434
- Publication date Oct 3, 2019
- Carl Zeiss SMT GMBH
- Martin Rocktaeschel
- G02 - OPTICS
Information Patent Application
REAL TIME SOFTWARE AND ARRAY CONTROL
- Publication number 20190271916
- Publication date Sep 5, 2019
- Applied Materials, Inc.
- Uwe HOLLERBACH
- G05 - CONTROLLING REGULATING

Multiple projection paths, array of projection systems, microlens projection systems, tandem projection systems

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

System and method for parallel two-photon lithography using a metal...

Lithography apparatus, patterning system, and method of patterning...

Method and system for nanoscale data recording

Photolithography system including selective light array

Metrology device and detection apparatus therefor

UV lithography system

Catadioptric projection lens and method for producing same

Method and system for nanoscale data recording

System for making accurate grating patterns using multiple writing...

Optical system for transferring original structure portions of a li...

Exposure equipment and exposure method

Large area high resolution feature reduction lithography technique

Vertical control method for use in lithography machine

Apparatus for making direct writing screen plate and using method t...

Micro LED array illumination source

Method and system for nanoscale data recording

Mask and fabrication method thereof, display panel and touch panel

Lithography apparatus and method using the same

Method to enhance the resolution of maskless lithography while main...

Method and system for nanoscale data recording

Quarter wave light splitting

Optical mask for use in a photolithography process, a method for fa...

Projection exposure apparatus and method

Method and system for nanoscale data recording

Multi-configuration digital lithography system

Stitchless direct imaging for high resolution electronic patterning

Digital photolithography using compact eye module layout

Optical system

Apparatus and methods for on-the-fly digital exposure image data mo...

Real time software and array control

Patents Applicationslast 30 patents

ILLUMINATION SYSTEM, PROJECTION ILLUMINATION FACILITY AND PROJECTIO...

SYSTEMS AND METHODS FOR LITHOGRAPHIC TOOLS WITH INCREASED TOLERANCES

DIGITAL LITHOGRAPHY EXPOSURE UNIT BOUNDARY SMOOTHING

INSPECTION SYSTEM FOR RETICLE PARTICLE DETECTION USING A STRUCTURAL...

METHOD AND SYSTEM FOR NANOSCALE DATA RECORDING

EXPOSURE DEVICE AND METHOD

PNEUMATIC CONTROLLED FLEXURE SYSTEM FOR STABILIZING A PROJECTION DE...

DIGITAL MICROMIRROR DEVICE FOR AN ILLUMINATION OPTICAL COMPONENT OF...

LITHOGRAPHIC APPARATUS, METROLOGY SYSTEMS, ILLUMINATION SWITCHES AN...

PHOTOLITHOGRAPHY SYSTEM INCLUDING SELECTIVE LIGHT ARRAY

UV Lithography System

LITHOGRAPHY APPARATUS, PATTERNING SYSTEM, AND METHOD OF PATTERNING...

METHOD AND APPARATUS FOR GREYSCALE LITHOGRAPHY

METROLOGY DEVICE AND DETECTION APPARATUS THEREFOR

SYSTEM AND METHOD FOR PARALLEL TWO-PHOTON LITHOGRAPHY USING A METAL...

OPTICAL SYSTEM

METHOD AND SYSTEM FOR NANOSCALE DATA RECORDING

A SYSTEM FOR MAKING ACCURATE GRATING PATTERNS USING MULTIPLE WRITIN...

METHOD AND SYSTEM FOR NANOSCALE DATA RECORDING

MASK-LESS LASER DIRECT IMAGING SYSTEM

OPTICAL SYSTEM FOR TRANSFERRING ORIGINAL STRUCTURE PORTIONS OF A LI...

METHOD AND SYSTEM FOR NANOSCALE DATA RECORDING

PROJECTION OBJECTIVE

LARGE AREA HIGH RESOLUTION FEATURE REDUCTION LITHOGRAPHY TECHNIQUE

METHOD AND SYSTEM FOR NANOSCALE DATA RECORDING

LITHOGRAPHY APPARATUS AND METHOD USING THE SAME

METHOD TO ENHANCE THE RESOLUTION OF MASKLESS LITHOGRAPHY WHILE MAIN...

OPTICAL SYSTEM

CATADIOPTRIC PROJECTION LENS AND METHOD FOR PRODUCING SAME

REAL TIME SOFTWARE AND ARRAY CONTROL