Multiple source

Industry

CPC
H01J2237/0635

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Parent Industries

HELECTRICITY H01Electric elements H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS H01J2237/00Discharge tubes exposing object to beam

Current Industry

H01J2237/0635Multiple source

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Electrode for plasma processing apparatus and plasma processing app...
- Patent number 12,165,850
- Issue date Dec 10, 2024
- Tokyo Electron Limited
- Takaki Kobune
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Beam bender
- Patent number 11,011,342
- Issue date May 18, 2021
- Ebara Corporation
- Takeshi Murakami
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Device for generating a source current of charge carriers
- Patent number 10,957,510
- Issue date Mar 23, 2021
- Ketek GmbH
- Felix Düsberg
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Patterned atomic layer etching and deposition using miniature-colum...
- Patent number 10,607,845
- Issue date Mar 31, 2020
- Kevin M. Monahan
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Electron source
- Patent number 10,558,123
- Issue date Feb 11, 2020
- KLA-Tencor Corporation
- Yung-Ho Alex Chuang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Electron source architecture for a scanning electron microscopy system
- Patent number 10,388,489
- Issue date Aug 20, 2019
- KLA-Tencor Corporation
- Mohammed Tahmassebpur
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron source
- Patent number 10,133,181
- Issue date Nov 20, 2018
- KLA-Tencor Corporation
- Yung-Ho Alex Chuang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Micro-electron column having an electron emitter improving the dens...
- Patent number 9,673,016
- Issue date Jun 6, 2017
- Industry-University Cooperation Foundation Sunmoon University
- Ho Seob Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Precision substrate material removal using miniature-column charged...
- Patent number 9,466,464
- Issue date Oct 11, 2016
- Multibeam Corporation
- David K. Lam
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method and system for electron microscope with multiple cathodes
- Patent number 9,464,998
- Issue date Oct 11, 2016
- California Institute of Technology
- Ahmed H. Zewail
- G01 - MEASURING TESTING
Information Patent Grant
Multi-beam scanning electron beam device and methods of using the same
- Patent number 9,153,413
- Issue date Oct 6, 2015
- Applied Materials Israel, Ltd.
- Gilad Almogy
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Cold electron number amplifier
- Patent number 8,750,458
- Issue date Jun 10, 2014
- Moxtek, Inc.
- Dongbing Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle source with multiple selectable particle emitters
- Patent number 8,710,453
- Issue date Apr 29, 2014
- FEI Company
- N. William Parker
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Carbon nanotube electron gun
- Patent number 8,536,546
- Issue date Sep 17, 2013
- Eloret Corporation
- Cattien V. Nguyen
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Multi-column electron beam exposure apparatus and magnetic field ge...
- Patent number 8,390,201
- Issue date Mar 5, 2013
- Advantest Corp.
- Hiroshi Yasuda
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Surface emission type electron source and drawing device
- Patent number 8,232,711
- Issue date Jul 31, 2012
- Crestec Corporation
- Akira Kojima
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Hole inspection apparatus and hole inspection method using the same
- Patent number 7,968,844
- Issue date Jun 28, 2011
- Cebt Co. Ltd.
- Ho Seob Kim
- G01 - MEASURING TESTING
Information Patent Grant
Electron beam apparatus and method of manufacturing semiconductor d...
- Patent number 7,888,642
- Issue date Feb 15, 2011
- Ebara Corporation
- Mamoru Nakasuji
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Carbon nanotube electron gun
- Patent number 7,847,273
- Issue date Dec 7, 2010
- Eloret Corporation
- Cattien V. Nguyen
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Hybrid multibeam electronic emission device with controlled divergence
- Patent number 7,838,839
- Issue date Nov 23, 2010
- Commissariat a l'Energie Atomique
- Yohan Desieres
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Electron beam irradiation device
- Patent number 7,829,863
- Issue date Nov 9, 2010
- Kyoto University
- Kenjiro Kimura
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Charge control apparatus and measurement apparatus equipped with th...
- Patent number 7,683,319
- Issue date Mar 23, 2010
- Hitachi High-Technologies Corporation
- Hiroshi Makino
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Imaging system with multi source array
- Patent number 7,638,777
- Issue date Dec 29, 2009
- ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
- Hans-Peter Feuerbaum
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Parallel electron beam lithography stamp (PEBLS)
- Patent number 7,550,747
- Issue date Jun 23, 2009
- Blaise Laurent Mouttet
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Digital parallel electron beam lithography stamp
- Patent number 7,425,715
- Issue date Sep 16, 2008
- Blaise Laurent Mouttet
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron beam apparatus, a device manufacturing method using the sa...
- Patent number 7,425,703
- Issue date Sep 16, 2008
- Ebara Corporation
- Mamoru Nakasuji
- G01 - MEASURING TESTING
Information Patent Grant
Electron beam apparatus and method of manufacturing semiconductor d...
- Patent number 7,423,267
- Issue date Sep 9, 2008
- Ebara Corporation
- Mamoru Nakasuji
- G01 - MEASURING TESTING
Information Patent Grant
Article comprising gated field emission structures with centralized...
- Patent number 7,332,736
- Issue date Feb 19, 2008
- Samsung Electronic Co., Ltd.
- Sungho Jin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi-pixel electron microbeam irradiator systems and methods for s...
- Patent number 7,220,971
- Issue date May 22, 2007
- The University of North Carolina at Chapel Hill
- Sha X. Chang
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Electron beam apparatus and method of manufacturing semiconductor d...
- Patent number 7,129,485
- Issue date Oct 31, 2006
- Ebara Corporation
- Mamoru Nakasuji
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
MULTIPLE ELECTRON BEAM OPTICS
- Publication number 20240387140
- Publication date Nov 21, 2024
- APPLIED MATERIALS ISRAEL LTD.
- Alon Litman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PARTICLE BEAM SYSTEM WITH MULTI-SOURCE SYSTEM AND MULTI-BEAM PARTIC...
- Publication number 20230065475
- Publication date Mar 2, 2023
- Carl Zeiss MultiSEM GmbH
- Dirk Zeidler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTRODE FOR PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING APP...
- Publication number 20220344127
- Publication date Oct 27, 2022
- TOKYO ELECTRON LIMITED
- Takaki KOBUNE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Device For Generating a Source Current of Charge Carriers
- Publication number 20200144015
- Publication date May 7, 2020
- KETEK GmbH
- Felix Düsberg
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
BEAM BENDER
- Publication number 20190378677
- Publication date Dec 12, 2019
- EBARA CORPORATION
- Takeshi Murakami
- G01 - MEASURING TESTING
Information Patent Application
Electron Source
- Publication number 20190049851
- Publication date Feb 14, 2019
- KLA-Tencor Corporation
- Yung-Ho Alex Chuang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
GUN CONFIGURED TO GENERATE CHARGED PARTICLES
- Publication number 20140346368
- Publication date Nov 27, 2014
- National University of Singapore
- Anjam Khursheed
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Charged Particle Source with Multiple Selectable Particle Emitters
- Publication number 20120168638
- Publication date Jul 5, 2012
- FEI Company
- N. William Parker
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HIGH THROUGHPUT SEM TOOL
- Publication number 20110163229
- Publication date Jul 7, 2011
- APPLIED MATERIALS ISRAEL, LTD.
- Juergen Frosien
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Multi-column electron beam exposure apparatus and magnetic field ge...
- Publication number 20110148297
- Publication date Jun 23, 2011
- Hiroshi Yasuda
- B82 - NANO-TECHNOLOGY
Information Patent Application
CARBON NANOTUBE ELECTRON GUN
- Publication number 20110104976
- Publication date May 5, 2011
- Eloret Corporation
- Cattien V. Nguyen
- B82 - NANO-TECHNOLOGY
Information Patent Application
HIGH THROUGHPUT SEM TOOL
- Publication number 20100320382
- Publication date Dec 23, 2010
- APPLIED MATERIALS ISRAEL, LTD.
- Gilad Almogy
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SURFACE EMISSION TYPE ELECTRON SOURCE AND DRAWING DEVICE
- Publication number 20100072875
- Publication date Mar 25, 2010
- Akira Kojima
- B82 - NANO-TECHNOLOGY
Information Patent Application
Charge control apparatus and measurement apparatus equipped with th...
- Publication number 20090166557
- Publication date Jul 2, 2009
- Hiroshi Makino
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Hole Inspection Apparatus and Hole Inspection Method using the Same
- Publication number 20090152461
- Publication date Jun 18, 2009
- Ho Seob Kim
- G01 - MEASURING TESTING
Information Patent Application
Electron Beam Irradiation Device
- Publication number 20090127473
- Publication date May 21, 2009
- Kenjiro Kimura
- B82 - NANO-TECHNOLOGY
Information Patent Application
Method of fabrication of cold cathodes on thin diamondlike carbon f...
- Publication number 20090124159
- Publication date May 14, 2009
- Jean Pierre Briand
- B82 - NANO-TECHNOLOGY
Information Patent Application
ELECTRON BEAM APPARATUS AND METHOD OF MANUFACTURING SEMICONDUCTOR D...
- Publication number 20090039262
- Publication date Feb 12, 2009
- EBARA CORPORATION
- Mamoru NAKASUJI
- G01 - MEASURING TESTING
Information Patent Application
Electron beam apparatus, a device manufacturing method using the sa...
- Publication number 20080315095
- Publication date Dec 25, 2008
- EBARA CORPORATION
- Mamoru Nakasuji
- G01 - MEASURING TESTING
Information Patent Application
Carbon nanotube electron gun
- Publication number 20080237483
- Publication date Oct 2, 2008
- Cattien V. Nguyen
- B82 - NANO-TECHNOLOGY
Information Patent Application
Electron Beam Etching Apparatus and Method for the same
- Publication number 20080067421
- Publication date Mar 20, 2008
- Kuei-Wen Cheng
- B82 - NANO-TECHNOLOGY
Information Patent Application
Digital parallel electron beam lithography stamp
- Publication number 20070257212
- Publication date Nov 8, 2007
- Blaise Laurent Mouttet
- B82 - NANO-TECHNOLOGY
Information Patent Application
Parallel Electron Beam Lithography stamp (PEBLS)
- Publication number 20070228296
- Publication date Oct 4, 2007
- Blaise Laurent Mouttet
- B82 - NANO-TECHNOLOGY
Information Patent Application
MULTI-PIXEL ELECTRON MICROBEAM IRRADIATOR SYSTEMS AND METHODS FOR S...
- Publication number 20070114434
- Publication date May 24, 2007
- The University of North Carolina at Chapel Hill
- Sha X. Chang
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Application
Divergence-controlled hybrid multiple electron beam-emitting device
- Publication number 20070080647
- Publication date Apr 12, 2007
- COMMESSARIAT A L'ENERGIE ATOMIQUE
- Yohan Desieres
- B82 - NANO-TECHNOLOGY
Information Patent Application
Electron beam apparatus and method of manufacturing semiconductor d...
- Publication number 20070018101
- Publication date Jan 25, 2007
- EBARA CORPORATION
- Mamoru Nakasuji
- G01 - MEASURING TESTING
Information Patent Application
Imaging system with multi source array
- Publication number 20060237659
- Publication date Oct 26, 2006
- ICT Integrated Circuit Testing Gesellschaft Fur Ha
- Hans Peter Feuerbaum
- B82 - NANO-TECHNOLOGY
Information Patent Application
Article comprising gated field emission structures with centralized...
- Publication number 20060054879
- Publication date Mar 16, 2006
- Sungho Jin
- B82 - NANO-TECHNOLOGY
Information Patent Application
Field emission electron gun and electron beam apparatus using the same
- Publication number 20060001350
- Publication date Jan 5, 2006
- Hitachi High-Technologies Corporation
- Tadashi Fujieda
- B82 - NANO-TECHNOLOGY
Information Patent Application
Electron beam apparatus, a device manufacturing method using the sa...
- Publication number 20050214958
- Publication date Sep 29, 2005
- EBARA CORPORATION
- Mamoru Nakasuji
- G01 - MEASURING TESTING

Multiple source

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Electrode for plasma processing apparatus and plasma processing app...

Beam bender

Device for generating a source current of charge carriers

Patterned atomic layer etching and deposition using miniature-colum...

Electron source

Electron source architecture for a scanning electron microscopy system

Electron source

Micro-electron column having an electron emitter improving the dens...

Precision substrate material removal using miniature-column charged...

Method and system for electron microscope with multiple cathodes

Multi-beam scanning electron beam device and methods of using the same

Cold electron number amplifier

Charged particle source with multiple selectable particle emitters

Carbon nanotube electron gun

Multi-column electron beam exposure apparatus and magnetic field ge...

Surface emission type electron source and drawing device

Hole inspection apparatus and hole inspection method using the same

Electron beam apparatus and method of manufacturing semiconductor d...

Carbon nanotube electron gun

Hybrid multibeam electronic emission device with controlled divergence

Electron beam irradiation device

Charge control apparatus and measurement apparatus equipped with th...

Imaging system with multi source array

Parallel electron beam lithography stamp (PEBLS)

Digital parallel electron beam lithography stamp

Electron beam apparatus, a device manufacturing method using the sa...

Electron beam apparatus and method of manufacturing semiconductor d...

Article comprising gated field emission structures with centralized...

Multi-pixel electron microbeam irradiator systems and methods for s...

Electron beam apparatus and method of manufacturing semiconductor d...

Patents Applicationslast 30 patents

MULTIPLE ELECTRON BEAM OPTICS

PARTICLE BEAM SYSTEM WITH MULTI-SOURCE SYSTEM AND MULTI-BEAM PARTIC...

ELECTRODE FOR PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING APP...

Device For Generating a Source Current of Charge Carriers

BEAM BENDER

Electron Source

GUN CONFIGURED TO GENERATE CHARGED PARTICLES

Charged Particle Source with Multiple Selectable Particle Emitters

HIGH THROUGHPUT SEM TOOL

Multi-column electron beam exposure apparatus and magnetic field ge...

CARBON NANOTUBE ELECTRON GUN

HIGH THROUGHPUT SEM TOOL

SURFACE EMISSION TYPE ELECTRON SOURCE AND DRAWING DEVICE

Charge control apparatus and measurement apparatus equipped with th...

Hole Inspection Apparatus and Hole Inspection Method using the Same

Electron Beam Irradiation Device

Method of fabrication of cold cathodes on thin diamondlike carbon f...

ELECTRON BEAM APPARATUS AND METHOD OF MANUFACTURING SEMICONDUCTOR D...

Electron beam apparatus, a device manufacturing method using the sa...

Carbon nanotube electron gun

Electron Beam Etching Apparatus and Method for the same

Digital parallel electron beam lithography stamp

Parallel Electron Beam Lithography stamp (PEBLS)

MULTI-PIXEL ELECTRON MICROBEAM IRRADIATOR SYSTEMS AND METHODS FOR S...

Divergence-controlled hybrid multiple electron beam-emitting device

Electron beam apparatus and method of manufacturing semiconductor d...

Imaging system with multi source array

Article comprising gated field emission structures with centralized...

Field emission electron gun and electron beam apparatus using the same

Electron beam apparatus, a device manufacturing method using the sa...