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Ion beam apparatus
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Patent number 10,651,006
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Issue date May 12, 2020
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Hitachi High-Tech Science Corporation
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Shinichi Matsubara
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H01 - BASIC ELECTRIC ELEMENTS
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Boron implanting using a co-gas
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Patent number 10,446,371
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Issue date Oct 15, 2019
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Varian Semiconductor Equipment Associates, Inc.
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Bon-Woong Koo
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H01 - BASIC ELECTRIC ELEMENTS
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Boron implanting using a co-gas
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Patent number 10,290,466
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Issue date May 14, 2019
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Varian Semiconductor Equipment Associates, Inc.
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Bon-Woong Koo
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Boron implanting using a co-gas
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Patent number 9,887,067
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Issue date Feb 6, 2018
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Varian Semiconductor Equipment Associates, Inc.
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Bon-Woong Koo
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Boron implanting using a co-gas
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Patent number 9,865,430
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Issue date Jan 9, 2018
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Varian Semiconductor Equipment Associates, Inc.
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Bon-Woong Koo
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H01 - BASIC ELECTRIC ELEMENTS
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Ion implanting system
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Patent number 8,575,574
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Issue date Nov 5, 2013
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Samsung Display Co., Ltd.
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Jin-Hee Kang
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Focused ion beam field source
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Patent number 8,030,621
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Issue date Oct 4, 2011
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Massachusetts Institute of Technology
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Paulo Lozano
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H01 - BASIC ELECTRIC ELEMENTS
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Ion implanting apparatus
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Patent number 6,555,831
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Issue date Apr 29, 2003
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Nissin Electric Co., Ltd.
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Masashi Konishi
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H01 - BASIC ELECTRIC ELEMENTS
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Plasma processing system and method
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Patent number 6,368,678
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Issue date Apr 9, 2002
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Terry Bluck
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Plasma processing system and method
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Patent number 6,101,972
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Issue date Aug 15, 2000
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Intevac, Inc.
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Terry Bluck
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Ion implantation apparatus
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Patent number 5,404,017
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Issue date Apr 4, 1995
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Kabushiki Kaisha Kobe Seiko Sho
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Noriyuki Inuishi
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H01 - BASIC ELECTRIC ELEMENTS
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DC or HF ion source
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Patent number 5,369,337
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Issue date Nov 29, 1994
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Mitsubishi Jukogyo Kabushiki Kaisha
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Kenichi Yanagi
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H01 - BASIC ELECTRIC ELEMENTS
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