Neutralising arrangements

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CPC
H01J2237/0041

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HELECTRICITY H01Electric elements H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS H01J2237/00Discharge tubes exposing object to beam

Current Industry

H01J2237/0041Neutralising arrangements

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Scanned angled etching apparatus and techniques providing separate...
- Patent number 12,106,936
- Issue date Oct 1, 2024
- Applied Materials, Inc.
- Peter F. Kurunczi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Scanned angled etching apparatus and techniques providing separate...
- Patent number 11,715,621
- Issue date Aug 1, 2023
- Applied Materials, Inc.
- Peter F. Kurunczi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for modifying the wettability and/or other biocompatibility...
- Patent number 11,698,582
- Issue date Jul 11, 2023
- Exogenesis Corporation
- Joseph B. Khoury
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and system for inspecting an EUV mask
- Patent number 11,662,323
- Issue date May 30, 2023
- ASML Netherlands B.V.
- Guochong Weng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ceramic material and electrostatic chuck device
- Patent number 11,387,132
- Issue date Jul 12, 2022
- Sumitomo Osaka Cement Co., Ltd.
- Yoshiki Yoshioka
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Semiconductor manufacturing device with embedded fluid conduits
- Patent number 11,213,891
- Issue date Jan 4, 2022
- Varian Semiconductor Equipment Associates, Inc.
- Joshua M. Abeshaus
- B22 - CASTING POWDER METALLURGY
Information Patent Grant
Method and apparatus for neutral beam processing based on gas clust...
- Patent number 11,199,769
- Issue date Dec 14, 2021
- Sean R. Kirkpatrick
- B24 - GRINDING POLISHING
Information Patent Grant
Methods and devices for examining an electrically charged specimen...
- Patent number 11,170,970
- Issue date Nov 9, 2021
- Carl Zeiss SMT GmbH
- Michael Budach
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for neutral beam processing based on gas clust...
- Patent number 11,048,162
- Issue date Jun 29, 2021
- Exogenesis Corporation
- Sean R. Kirkpatrick
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Treatment method for inhibiting platelet attachment and articles tr...
- Patent number 10,971,324
- Issue date Apr 6, 2021
- Exogenesis Corporation
- Joseph Khoury
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam device
- Patent number 10,872,742
- Issue date Dec 22, 2020
- HITACHI HIGH-TECH CORPORATION
- Takafumi Miwa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for neutral beam processing based on gas cluster ion beam te...
- Patent number 10,858,732
- Issue date Dec 8, 2020
- Exogenesis Corporation
- Sean R. Kirkpatrick
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for neutral beam processing based on gas cluster ion beam te...
- Patent number 10,825,685
- Issue date Nov 3, 2020
- Exogenesis Corporation
- Sean R. Kirkpatrick
- C03 - GLASS MINERAL OR SLAG WOOL
Information Patent Grant
System and method for reduced workpiece adhesion due to electrostat...
- Patent number 10,825,645
- Issue date Nov 3, 2020
- Varian Semiconductor Equipment Associates, Inc.
- Eric D. Wilson
- G01 - MEASURING TESTING
Information Patent Grant
Method and system for inspecting an EUV mask
- Patent number 10,775,325
- Issue date Sep 15, 2020
- ASML Netherlands B.V.
- Guochong Weng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing method
- Patent number 10,770,257
- Issue date Sep 8, 2020
- ASM IP Holding B.V.
- Yuko Kengoyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Surface treatment apparatus using plasma
- Patent number 10,692,686
- Issue date Jun 23, 2020
- JEHARA CORPORATION
- Hongseub Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Enhanced high aspect ratio etch performance using accelerated neutr...
- Patent number 10,670,960
- Issue date Jun 2, 2020
- Exogenesis Corporation
- Sean R. Kirkpatrick
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Methods and apparatus for employing an accelerated neutral beam for...
- Patent number 10,627,352
- Issue date Apr 21, 2020
- Exogenesis Corporation
- Sean R. Kirkpatrick
- G01 - MEASURING TESTING
Information Patent Grant
Semiconductor manufacturing device with embedded fluid conduits
- Patent number 10,486,232
- Issue date Nov 26, 2019
- Varian Semiconductor Equipment Associates, Inc.
- Joshua M. Abeshaus
- B22 - CASTING POWDER METALLURGY
Information Patent Grant
Semiconductor manufacturing device with embedded fluid conduits
- Patent number 10,427,217
- Issue date Oct 1, 2019
- Varian Semiconductor Equipment Associates, Inc.
- Joshua M. Abeshaus
- B22 - CASTING POWDER METALLURGY
Information Patent Grant
Method and apparatus for neutral beam processing based on gas clust...
- Patent number 10,409,155
- Issue date Sep 10, 2019
- Exogensis Corporation
- Sean R. Kirkpatrick
- B24 - GRINDING POLISHING
Information Patent Grant
Vacuum apparatus for vacuum treating substrate
- Patent number 10,312,061
- Issue date Jun 4, 2019
- BOE Technology Group Co., Ltd.
- Haitao Yang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Hollow cathode ion source
- Patent number 10,242,846
- Issue date Mar 26, 2019
- AGC FLAT GLASS NORTH AMERICA, INC.
- John Chambers
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Treatment method for defect reduction in a substrate and substrates...
- Patent number 10,209,617
- Issue date Feb 19, 2019
- Exogenesis Corporation
- Sean R. Kirkpatrick
- B24 - GRINDING POLISHING
Information Patent Grant
Method for neutral beam processing based on gas cluster ion beam te...
- Patent number 10,202,684
- Issue date Feb 12, 2019
- Exogenesis Corporation
- Sean R. Kirkpatrick
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for neutral beam processing based on gas clust...
- Patent number 10,181,402
- Issue date Jan 15, 2019
- Exogenesis Corporation
- Sean R. Kirkpatrick
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Method and system for inspecting an EUV mask
- Patent number 10,088,438
- Issue date Oct 2, 2018
- Hermes-Microvision, Inc.
- Guochong Weng
- G01 - MEASURING TESTING
Information Patent Grant
Structure electron beam inspection system for inspecting extreme ul...
- Patent number 10,054,556
- Issue date Aug 21, 2018
- Hermes Microvision Inc.
- You-Jin Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of preventing charge accumulation in manufacture of semicond...
- Patent number 9,881,785
- Issue date Jan 30, 2018
- Samsung Electronics Co., Ltd.
- Young-geun Roh
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SEMICONDUCTOR WAFER PROCESSING METHOD
- Publication number 20250038033
- Publication date Jan 30, 2025
- Hitachi High-Tech Corporation
- Nozomu YOSHIOKA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DISCHARGING AN ELECTROSTATIC CHUCK LOCATED WITHIN A VACUUM CHAMBER
- Publication number 20240234078
- Publication date Jul 11, 2024
- APPLIED MATERIALS ISRAEL LTD.
- Adam Faust
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Fiber Fabry-Perot Cavity Laser Phase Plate For Charged Particle Mic...
- Publication number 20240222066
- Publication date Jul 4, 2024
- FEI Company
- Afric Meijer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SCANNED ANGLED ETCHING APPARATUS AND TECHNIQUES PROVIDING SEPARATE...
- Publication number 20230335375
- Publication date Oct 19, 2023
- Applied Materials, Inc.
- Peter F. Kurunczi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INHIBITING BACTERIA COLONIZATION WITHOUT ANTIBIOTICS
- Publication number 20210405523
- Publication date Dec 30, 2021
- Exogenesis Corporation
- Joseph Khoury
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND SYSTEM FOR INSPECTING AN EUV MASK
- Publication number 20210172891
- Publication date Jun 10, 2021
- ASML NETHERLANDS B.V.
- Guochong Weng
- G01 - MEASURING TESTING
Information Patent Application
PROCESSING METHOD, PLACING PEDESTAL, PLASMA PROCESSING APPARATUS, A...
- Publication number 20210013016
- Publication date Jan 14, 2021
- TOKYO ELECTRON LIMITED
- Takashi TSUTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR NEUTRAL BEAM PROCESSING BASED ON GAS CLUST...
- Publication number 20200249565
- Publication date Aug 6, 2020
- Exogenesis Corporation
- Sean R. Kirkpatrick
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SCANNED ANGLED ETCHING APPARATUS AND TECHNIQUES PROVIDING SEPARATE...
- Publication number 20200194226
- Publication date Jun 18, 2020
- Applied Materials, Inc.
- Peter F. Kurunczi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM DEVICE
- Publication number 20200006032
- Publication date Jan 2, 2020
- Hitachi High-Technologies Corporation
- Takafumi MIWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DRUG DELIVERY SYSTEM AND METHOD OF MANUFACTURING THEREOF
- Publication number 20190171098
- Publication date Jun 6, 2019
- Exogenesis Corporation
- Sean R. Kirkpatrick
- B24 - GRINDING POLISHING
Information Patent Application
METHOD AND SYSTEM FOR INSPECTING AN EUV MASK
- Publication number 20190170671
- Publication date Jun 6, 2019
- HERMES MICROVISION, INC.
- Guochong Weng
- G01 - MEASURING TESTING
Information Patent Application
Method for modifying the wettability and/or other biocompatibility...
- Publication number 20190137868
- Publication date May 9, 2019
- Joseph B. Khoury
- B24 - GRINDING POLISHING
Information Patent Application
System And Method For Reduced Workpiece Adhesion Due To Electrostat...
- Publication number 20190057835
- Publication date Feb 21, 2019
- Varian Semiconductor Equipment Associates, Inc.
- Eric D. Wilson
- G01 - MEASURING TESTING
Information Patent Application
CERAMIC MATERIAL AND ELECTROSTATIC CHUCK DEVICE
- Publication number 20190043746
- Publication date Feb 7, 2019
- Sumitomo Osaka Cement Co., Ltd.
- Yoshiki YOSHIOKA
- C04 - CEMENTS CONCRETE ARTIFICIAL STONE CERAMICS REFRACTORIES
Information Patent Application
ION IMPLANT PLASMA FLOOD GUN PERFORMANCE BY USING TRACE IN SITU CLE...
- Publication number 20180337020
- Publication date Nov 22, 2018
- Entegris, Inc.
- Steven E. Bishop
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MEDICAL DEVICE FOR BONE IMPLANT AND METHOD FOR PRODUCING SUCH A DEVICE
- Publication number 20180321583
- Publication date Nov 8, 2018
- Laurence B. Tarrant
- B24 - GRINDING POLISHING
Information Patent Application
ENHANCED HIGH ASPECT RATIO ETCH PERFORMANCE USING ACCELERATED NEUTR...
- Publication number 20180292745
- Publication date Oct 11, 2018
- Exogenesis Corporation
- Sean R. Kirkpatrick
- B24 - GRINDING POLISHING
Information Patent Application
DRUG DELIVERY SYSTEM AND METHOD OF MANUFACTURING THEREOF
- Publication number 20180211813
- Publication date Jul 26, 2018
- Exogenesis Corporation
- Sean R. Kirkpatrick
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TREATMENT METHOD FOR INHIBITING PLATELET ATTACHMENT AND ARTICLES TR...
- Publication number 20180190468
- Publication date Jul 5, 2018
- Exogenesis Corporation
- Joseph Khoury
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DRUG DELIVERY SYSTEM AND METHOD OF MANUFACTURING THEREOF
- Publication number 20180090295
- Publication date Mar 29, 2018
- Sean R. Kirkpatrick
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SELF-CLEANING LINEAR IONIZING BAR AND METHODS THEREFOR
- Publication number 20170169986
- Publication date Jun 15, 2017
- Illinois Tool Works Inc.
- Peter GEFTER
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR NEUTRAL BEAM PROCESSING BASED ON GAS CLUSTER ION BEAM TE...
- Publication number 20140363678
- Publication date Dec 11, 2014
- Sean R. Kirkpatrick
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS AND TECHNIQUES FOR ENERGETIC NEUTRAL BEAM PROCESSING
- Publication number 20140272179
- Publication date Sep 18, 2014
- Varian Semiconductor Equipment Associates, Inc.
- Svetlana B. Radovanov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION IMPLANTATION APPARATUS
- Publication number 20140053778
- Publication date Feb 27, 2014
- NISSIN ION EQUIPMENT CO., LTD.
- Masao Naito
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF PREVENTING CHARGE ACCUMULATION IN MANUFACTURE OF SEMICOND...
- Publication number 20140057451
- Publication date Feb 27, 2014
- Samsung Electronics Co., Ltd.
- Young-geun ROH
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
STRUCTURE FOR DISCHARGING EXTREME ULTRAVIOLET MASK
- Publication number 20140027634
- Publication date Jan 30, 2014
- HERMES MICROVISION, INC.
- You-Jin WANG
- G01 - MEASURING TESTING
Information Patent Application
METHOD AND APPARATUS FOR NEUTRAL BEAM PROCESSING BASED ON GAS CLUST...
- Publication number 20140021343
- Publication date Jan 23, 2014
- Exogenesis Corporation
- Sean R. Kirkpatrick
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS AND APPARATUS FOR EMPLOYING AN ACCELERATED NEUTRAL BEAM FOR...
- Publication number 20130213933
- Publication date Aug 22, 2013
- Exogenesis Corporation
- Sean R. Kirkpatrick
- G01 - MEASURING TESTING
Information Patent Application
ION IMPLANTATION WITH CHARGE AND DIRECTION CONTROL
- Publication number 20130140987
- Publication date Jun 6, 2013
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chih-Hong Hwang
- H01 - BASIC ELECTRIC ELEMENTS

Neutralising arrangements

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Scanned angled etching apparatus and techniques providing separate...

Scanned angled etching apparatus and techniques providing separate...

Method for modifying the wettability and/or other biocompatibility...

Method and system for inspecting an EUV mask

Ceramic material and electrostatic chuck device

Semiconductor manufacturing device with embedded fluid conduits

Method and apparatus for neutral beam processing based on gas clust...

Methods and devices for examining an electrically charged specimen...

Method and apparatus for neutral beam processing based on gas clust...

Treatment method for inhibiting platelet attachment and articles tr...

Charged particle beam device

Method for neutral beam processing based on gas cluster ion beam te...

Method for neutral beam processing based on gas cluster ion beam te...

System and method for reduced workpiece adhesion due to electrostat...

Method and system for inspecting an EUV mask

Substrate processing method

Surface treatment apparatus using plasma

Enhanced high aspect ratio etch performance using accelerated neutr...

Methods and apparatus for employing an accelerated neutral beam for...

Semiconductor manufacturing device with embedded fluid conduits

Semiconductor manufacturing device with embedded fluid conduits

Method and apparatus for neutral beam processing based on gas clust...

Vacuum apparatus for vacuum treating substrate

Hollow cathode ion source

Treatment method for defect reduction in a substrate and substrates...

Method for neutral beam processing based on gas cluster ion beam te...

Method and apparatus for neutral beam processing based on gas clust...

Method and system for inspecting an EUV mask

Structure electron beam inspection system for inspecting extreme ul...

Method of preventing charge accumulation in manufacture of semicond...

Patents Applicationslast 30 patents

SEMICONDUCTOR WAFER PROCESSING METHOD

DISCHARGING AN ELECTROSTATIC CHUCK LOCATED WITHIN A VACUUM CHAMBER

Fiber Fabry-Perot Cavity Laser Phase Plate For Charged Particle Mic...

SCANNED ANGLED ETCHING APPARATUS AND TECHNIQUES PROVIDING SEPARATE...

INHIBITING BACTERIA COLONIZATION WITHOUT ANTIBIOTICS

METHOD AND SYSTEM FOR INSPECTING AN EUV MASK

PROCESSING METHOD, PLACING PEDESTAL, PLASMA PROCESSING APPARATUS, A...

METHOD AND APPARATUS FOR NEUTRAL BEAM PROCESSING BASED ON GAS CLUST...

SCANNED ANGLED ETCHING APPARATUS AND TECHNIQUES PROVIDING SEPARATE...

CHARGED PARTICLE BEAM DEVICE

DRUG DELIVERY SYSTEM AND METHOD OF MANUFACTURING THEREOF

METHOD AND SYSTEM FOR INSPECTING AN EUV MASK

Method for modifying the wettability and/or other biocompatibility...

System And Method For Reduced Workpiece Adhesion Due To Electrostat...

CERAMIC MATERIAL AND ELECTROSTATIC CHUCK DEVICE

ION IMPLANT PLASMA FLOOD GUN PERFORMANCE BY USING TRACE IN SITU CLE...

MEDICAL DEVICE FOR BONE IMPLANT AND METHOD FOR PRODUCING SUCH A DEVICE

ENHANCED HIGH ASPECT RATIO ETCH PERFORMANCE USING ACCELERATED NEUTR...

DRUG DELIVERY SYSTEM AND METHOD OF MANUFACTURING THEREOF

TREATMENT METHOD FOR INHIBITING PLATELET ATTACHMENT AND ARTICLES TR...

DRUG DELIVERY SYSTEM AND METHOD OF MANUFACTURING THEREOF

SELF-CLEANING LINEAR IONIZING BAR AND METHODS THEREFOR

METHOD FOR NEUTRAL BEAM PROCESSING BASED ON GAS CLUSTER ION BEAM TE...

APPARATUS AND TECHNIQUES FOR ENERGETIC NEUTRAL BEAM PROCESSING

ION IMPLANTATION APPARATUS

METHOD OF PREVENTING CHARGE ACCUMULATION IN MANUFACTURE OF SEMICOND...

STRUCTURE FOR DISCHARGING EXTREME ULTRAVIOLET MASK

METHOD AND APPARATUS FOR NEUTRAL BEAM PROCESSING BASED ON GAS CLUST...

METHODS AND APPARATUS FOR EMPLOYING AN ACCELERATED NEUTRAL BEAM FOR...

ION IMPLANTATION WITH CHARGE AND DIRECTION CONTROL