Nitrides

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CPC
C23C16/303

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CCHEMISTRY METALLURGY C23Surface treatment C23CCOATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating

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C23C16/303Nitrides

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Patents Grantslast 30 patents

Information Patent Grant
Hydrogen recycle system and hydrogen recycle method
- Patent number 12,246,963
- Issue date Mar 11, 2025
- National University Corporation Tokai National Higher Education and Research...
- Shinji Kambara
- C01 - INORGANIC CHEMISTRY
Information Patent Grant
Apparatus and method for manufacturing hexagonal crystals
- Patent number 12,247,315
- Issue date Mar 11, 2025
- LNBS CO. LTD.
- Hyung Soo Ahn
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor wafer and method for manufacturing same
- Patent number 12,243,739
- Issue date Mar 4, 2025
- Mitsubishi Electric Corporation
- Yuki Taketomi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Engineered substrate structures for power and RF applications
- Patent number 12,217,957
- Issue date Feb 4, 2025
- QROMIS, Inc.
- Vladimir Odnoblyudov
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for depositing a conformal metal or metalloid silicon nitri...
- Patent number 12,163,224
- Issue date Dec 10, 2024
- VERSUM MATERIALS US, LLC
- Xinjian Lei
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Coated tool and cutting tool
- Patent number 12,121,976
- Issue date Oct 22, 2024
- Kyocera Corporation
- Kou Ri
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Method of processing substrate, recording medium, substrate process...
- Patent number 12,084,760
- Issue date Sep 10, 2024
- Kokusai Electric Corporation
- Takuya Joda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Air data probe corrosion protection
- Patent number 12,071,684
- Issue date Aug 27, 2024
- Rosemount Aerospace Inc.
- Steven Poteet
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Nitride crystal, optical device, semiconductor device, and method f...
- Patent number 12,074,203
- Issue date Aug 27, 2024
- Kabushiki Kaisha Toshiba
- Toshiki Hikosaka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for forming barrier layer in semiconductor structure
- Patent number 12,062,573
- Issue date Aug 13, 2024
- Yangtze Memory Technologies Co., Ltd.
- Peng Zhou
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing a piezoelectric thin film
- Patent number 12,063,023
- Issue date Aug 13, 2024
- WAVELORD CO., LTD.
- Sang Jeong An
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and method for manufacturing hexagonal silicon crystal
- Patent number 12,054,849
- Issue date Aug 6, 2024
- Hyung Soo Ahn
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing semiconductor device
- Patent number 12,051,586
- Issue date Jul 30, 2024
- Samsung Electronics Co., Ltd.
- Seung-Min Ryu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Thermally conductive and protective coating for electronic device
- Patent number 12,033,426
- Issue date Jul 9, 2024
- Next Biometrics Group ASA
- Matias N. Troccoli
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Hydrogen recycle system and hydrogen recycle method
- Patent number 12,024,427
- Issue date Jul 2, 2024
- National University Corporation Tokai National Higher Education and Research...
- Shinji Kambara
- C01 - INORGANIC CHEMISTRY
Information Patent Grant
Gap-fill with aluminum-containing films
- Patent number 12,018,363
- Issue date Jun 25, 2024
- Applied Materials, Inc.
- Mark Saly
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Engineered substrate structures for power and RF applications
- Patent number 12,009,205
- Issue date Jun 11, 2024
- QROMIS, Inc.
- Vladimir Odnoblyudov
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing semiconductor device, non-transitory comput...
- Patent number 12,000,045
- Issue date Jun 4, 2024
- Kokusai Electric Corporation
- Takuya Joda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for manufacturing a semiconductor layer and su...
- Patent number 11,996,287
- Issue date May 28, 2024
- Albert-Ludwigs-Universitat Freiburg
- Stefano Leone
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
High aspect ratio taper improvement using directional deposition
- Patent number 11,987,879
- Issue date May 21, 2024
- Applied Materials, Inc.
- Armin Saeedi Vahdat
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Coated tool and cutting tool
- Patent number 11,964,328
- Issue date Apr 23, 2024
- Kyocera Corporation
- Tadashi Katsuma
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Method for producing GaN layered substrate
- Patent number 11,967,530
- Issue date Apr 23, 2024
- Shin-Etsu Chemical Co., Ltd.
- Sumio Sekiyama
- B32 - LAYERED PRODUCTS
Information Patent Grant
Methods to reduce material surface roughness
- Patent number 11,939,674
- Issue date Mar 26, 2024
- Applied Materials, Inc.
- Yi Yang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for manufacturing nitride semiconductor device
- Patent number 11,935,744
- Issue date Mar 19, 2024
- Sumitomo Electric Industries, Ltd.
- Isao Makabe
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Aluminum compounds and methods of forming aluminum- containing film...
- Patent number 11,912,728
- Issue date Feb 27, 2024
- UP Chemical Co., Ltd.
- Won Seok Han
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Nucleation layer deposition method
- Patent number 11,887,848
- Issue date Jan 30, 2024
- Aixtron SE
- Christof Martin Mauder
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of forming a film on a substrate by chemical vapor deposition
- Patent number 11,885,022
- Issue date Jan 30, 2024
- Shin-Etsu Chemical Co., Ltd.
- Chikara Mori
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
High pressure spatial chemical vapor deposition system and related...
- Patent number 11,885,018
- Issue date Jan 30, 2024
- Lehigh University
- Siddha Pimputkar
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Manufacturing apparatus for a group-III nitride crystal comprising...
- Patent number 11,879,184
- Issue date Jan 23, 2024
- Panasonic Holdings Corporation
- Yusuke Mori
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for manufacturing nitride semiconductor substrate and nitrid...
- Patent number 11,873,578
- Issue date Jan 16, 2024
- Sumitomo Chemical Company, Limited
- Takehiro Yoshida
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
METHODS OF DEPOSITING MATERIALS ONTO 2-DIMENSIONAL LAYERED MATERIALS
- Publication number 20250051923
- Publication date Feb 13, 2025
- Oxford Instruments Nanotechnology Tools Limited
- Sarah RIAZIMEHR
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF DEPOSITION IN HIGH ASPECT RATIO (HAR) FEATURES
- Publication number 20240420965
- Publication date Dec 19, 2024
- TOKYO ELECTRON LIMITED
- Shihsheng Chang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR PRODUCING A COATING ON AN OBJECT AND CORRESPONDINGLY PRO...
- Publication number 20240410051
- Publication date Dec 12, 2024
- BOEHLERIT GmbH & Co. KG
- Margarethe TRAXLER
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
THIN FILM FORMATION METHOD
- Publication number 20240376601
- Publication date Nov 14, 2024
- Jusung Engineering Co., Ltd.
- Jeong HEO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ALUMINUM OXYNITRIDE COATINGS WITH ENHANCED CRYSTALLINITY
- Publication number 20240367237
- Publication date Nov 7, 2024
- Kennametal Inc.
- Zhenyu LIU
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...
- Publication number 20240344194
- Publication date Oct 17, 2024
- Kokusai Electric Corporation
- Atsuhiko ASHITANI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, NON-TRANSITORY COMPUT...
- Publication number 20240279807
- Publication date Aug 22, 2024
- Kokusai Electric Corporation
- Takuya JODA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND APPARATUS FOR MANUFACTURING A SEMICONDUCTOR LAYER AND SU...
- Publication number 20240274435
- Publication date Aug 15, 2024
- Albert-Ludwigs-Universitat Freiburg
- Stefano LEONE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HYDROGEN RECYCLE SYSTEM AND HYDROGEN RECYCLE METHOD
- Publication number 20240217811
- Publication date Jul 4, 2024
- NATIONAL UNIVERSITY CORPORATION TOKAI NATIONAL HIGHER EDUCATION AND RESEARCH...
- Shinji Kambara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HIGH PRESSURE SPATIAL CHEMICAL VAPOR DEPOSITION SYSTEM AND RELATED...
- Publication number 20240209502
- Publication date Jun 27, 2024
- LEHIGH UNIVERSITY
- Siddha PIMPUTKAR
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ALN-BASED HARD MATERIAL LAYER ON BODIES OF METAL, HARD METAL, CERME...
- Publication number 20240158909
- Publication date May 16, 2024
- Fraunhofer-Gesellschaft zur Forderung der angewandten Forschung e.V.
- Mandy HÖHN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND APPARATUS FOR PRODUCING GROUP III NITRIDE SEMICONDUCTOR
- Publication number 20240153765
- Publication date May 9, 2024
- SCREEN Holdings Co., Ltd.
- Masaki INABA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Nanoporous GaN on p-type GaN: A Mg out-diffusion compensation layer...
- Publication number 20240133027
- Publication date Apr 25, 2024
- Srabanti Chowdhury
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR WAFER PROCESSING TOOL WITH IMPROVED LEAK CHECK
- Publication number 20240084445
- Publication date Mar 14, 2024
- TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY
- Chih-Wei Chou
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COATING SYSTEM FOR PLASTIC PROCESSING APPLICATIONS
- Publication number 20240052482
- Publication date Feb 15, 2024
- OERLIKON SURFACE SOLUTIONS AG, PFÄFFIKON
- Anders OIof ERIKSSON
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR MANUFACTURING SEMICONDUCTOR STRUCTURE WITH MATERIAL IN M...
- Publication number 20240038528
- Publication date Feb 1, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Kai-Fang CHENG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COMBINED EPITAXIAL GROWTH SYSTEM HAVING MULTIPLE REACTION CHAMBERS,...
- Publication number 20230387349
- Publication date Nov 30, 2023
- Foshan University
- Bingfeng Fan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
EPITAXIAL STRUCTURE AND METHOD OF MANUFACTURING THE SAME
- Publication number 20230360909
- Publication date Nov 9, 2023
- GLOBALWAFERS CO., LTD.
- PO-JUNG LIN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
NIOBIUM, VANADIUM, TANTALUM FILM FORMING COMPOSITIONS AND DEPOSITIO...
- Publication number 20230323530
- Publication date Oct 12, 2023
- L'Air Liquide, Société Anonyme pour l'Etude et l'Exploitatation des Procédés...
- Daehyeon KIM
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS AND SYSTEMS FOR FILLING GAP FEATURES ON SUBSTRATE SURFACES
- Publication number 20230295795
- Publication date Sep 21, 2023
- ASM IP HOLDING B.V.
- Yasiel Cabrera
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND SYSTEM FOR DEPOSITING MOLYBDENUM LAYERS
- Publication number 20230279539
- Publication date Sep 7, 2023
- ASM IP HOLDING B.V.
- Paul Ma
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS AND METHOD FOR MANUFACTURING HEXAGONAL CRYSTALS
- Publication number 20230272549
- Publication date Aug 31, 2023
- LNBS Co, Ltd.
- Hyung Soo AHN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
NITRIDE CRYSTAL, OPTICAL DEVICE, SEMICONDUCTOR DEVICE, AND METHOD F...
- Publication number 20230261058
- Publication date Aug 17, 2023
- Kabushiki Kaisha Toshiba
- Toshiki HIKOSAKA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HIGH ASPECT RATIO TAPER IMPROVEMENT USING DIRECTIONAL DEPOSITION
- Publication number 20230257872
- Publication date Aug 17, 2023
- Applied Materials, Inc.
- Armin Saeedi Vahdat
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF PROCESSING SUBSTRATE, RECORDING MEDIUM, SUBSTRATE PROCESS...
- Publication number 20230257873
- Publication date Aug 17, 2023
- Kokusai Electric Corporation
- Takuya JODA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
AIR DATA PROBE CORROSION PROTECTION
- Publication number 20230227978
- Publication date Jul 20, 2023
- Rosemount Aerospace Inc.
- Steven Poteet
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS TO REDUCE MATERIAL SURFACE ROUGHNESS
- Publication number 20230203652
- Publication date Jun 29, 2023
- Applied Materials, Inc.
- Yi Yang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HYBRID CHEMICAL AND PHYSICAL VAPOR DEPOSITION OF TRANSITION-METAL-A...
- Publication number 20230200245
- Publication date Jun 22, 2023
- UNIVERSITY OF HOUSTON SYSTEM
- Jae-Hyun Ryou
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEVICE FOR SUPPLYING A MIXED GAS, DEVICE FOR PRODUCING METAL NITRID...
- Publication number 20230193458
- Publication date Jun 22, 2023
- Taiyo Nippon Sanso Corporation
- Hayato MURATA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR DEVICE MANUFACTURING METHOD, SEMICONDUCTOR MEMORY DEV...
- Publication number 20230187203
- Publication date Jun 15, 2023
- KIOXIA Corporation
- Tsunehiro Ino
- H01 - BASIC ELECTRIC ELEMENTS

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Hydrogen recycle system and hydrogen recycle method

Apparatus and method for manufacturing hexagonal crystals

Semiconductor wafer and method for manufacturing same

Engineered substrate structures for power and RF applications

Methods for depositing a conformal metal or metalloid silicon nitri...

Coated tool and cutting tool

Method of processing substrate, recording medium, substrate process...

Air data probe corrosion protection

Nitride crystal, optical device, semiconductor device, and method f...

Method for forming barrier layer in semiconductor structure

Method of manufacturing a piezoelectric thin film

Apparatus and method for manufacturing hexagonal silicon crystal

Method of manufacturing semiconductor device

Thermally conductive and protective coating for electronic device

Hydrogen recycle system and hydrogen recycle method

Gap-fill with aluminum-containing films

Engineered substrate structures for power and RF applications

Method of manufacturing semiconductor device, non-transitory comput...

Method and apparatus for manufacturing a semiconductor layer and su...

High aspect ratio taper improvement using directional deposition

Coated tool and cutting tool

Method for producing GaN layered substrate

Methods to reduce material surface roughness

Method for manufacturing nitride semiconductor device

Aluminum compounds and methods of forming aluminum- containing film...

Nucleation layer deposition method

Method of forming a film on a substrate by chemical vapor deposition

High pressure spatial chemical vapor deposition system and related...

Manufacturing apparatus for a group-III nitride crystal comprising...

Method for manufacturing nitride semiconductor substrate and nitrid...

Patents Applicationslast 30 patents

METHODS OF DEPOSITING MATERIALS ONTO 2-DIMENSIONAL LAYERED MATERIALS

METHOD OF DEPOSITION IN HIGH ASPECT RATIO (HAR) FEATURES

METHOD FOR PRODUCING A COATING ON AN OBJECT AND CORRESPONDINGLY PRO...

THIN FILM FORMATION METHOD

ALUMINUM OXYNITRIDE COATINGS WITH ENHANCED CRYSTALLINITY

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, NON-TRANSITORY COMPUT...

METHOD AND APPARATUS FOR MANUFACTURING A SEMICONDUCTOR LAYER AND SU...

HYDROGEN RECYCLE SYSTEM AND HYDROGEN RECYCLE METHOD

HIGH PRESSURE SPATIAL CHEMICAL VAPOR DEPOSITION SYSTEM AND RELATED...

ALN-BASED HARD MATERIAL LAYER ON BODIES OF METAL, HARD METAL, CERME...

METHOD AND APPARATUS FOR PRODUCING GROUP III NITRIDE SEMICONDUCTOR

Nanoporous GaN on p-type GaN: A Mg out-diffusion compensation layer...

SEMICONDUCTOR WAFER PROCESSING TOOL WITH IMPROVED LEAK CHECK

COATING SYSTEM FOR PLASTIC PROCESSING APPLICATIONS

METHOD FOR MANUFACTURING SEMICONDUCTOR STRUCTURE WITH MATERIAL IN M...

COMBINED EPITAXIAL GROWTH SYSTEM HAVING MULTIPLE REACTION CHAMBERS,...

EPITAXIAL STRUCTURE AND METHOD OF MANUFACTURING THE SAME

NIOBIUM, VANADIUM, TANTALUM FILM FORMING COMPOSITIONS AND DEPOSITIO...

METHODS AND SYSTEMS FOR FILLING GAP FEATURES ON SUBSTRATE SURFACES

METHOD AND SYSTEM FOR DEPOSITING MOLYBDENUM LAYERS

APPARATUS AND METHOD FOR MANUFACTURING HEXAGONAL CRYSTALS

NITRIDE CRYSTAL, OPTICAL DEVICE, SEMICONDUCTOR DEVICE, AND METHOD F...

HIGH ASPECT RATIO TAPER IMPROVEMENT USING DIRECTIONAL DEPOSITION

METHOD OF PROCESSING SUBSTRATE, RECORDING MEDIUM, SUBSTRATE PROCESS...

AIR DATA PROBE CORROSION PROTECTION

METHODS TO REDUCE MATERIAL SURFACE ROUGHNESS

HYBRID CHEMICAL AND PHYSICAL VAPOR DEPOSITION OF TRANSITION-METAL-A...

DEVICE FOR SUPPLYING A MIXED GAS, DEVICE FOR PRODUCING METAL NITRID...

SEMICONDUCTOR DEVICE MANUFACTURING METHOD, SEMICONDUCTOR MEMORY DEV...