Nitriding

Industry

CPC
H01J2237/3387

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Parent Industries

HELECTRICITY H01Electric elements H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS H01J2237/00Discharge tubes exposing object to beam

Current Industry

H01J2237/3387Nitriding

Industries

Patents Grantslast 30 patents

Information Patent Grant
Nitriding apparatus and nitriding method
- Patent number 12,033,836
- Issue date Jul 9, 2024
- Kobe Steel, Ltd.
- Maiko Abe
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate treatment apparatus, method of manufacturing semiconducto...
- Patent number 10,804,221
- Issue date Oct 13, 2020
- TOSHIBA MEMORY CORPORATION
- Fuyuma Ito
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma nitriding apparatus
- Patent number 10,443,117
- Issue date Oct 15, 2019
- IHI Corporation
- Norimitsu Kameya
- F05 - INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF...
Information Patent Grant
Plasma processing apparatus and method of manufacturing semiconduct...
- Patent number 10,403,478
- Issue date Sep 3, 2019
- Kokusai Electric Corporation
- Hidehiro Yanai
- B08 - CLEANING
Information Patent Grant
Plasma processing method and method for manufacturing an electronic...
- Patent number 7,928,018
- Issue date Apr 19, 2011
- Foundation for Advancement of International Science
- Tadahiro Ohmi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for nitriding substrate and method for forming insulating film
- Patent number 7,820,557
- Issue date Oct 26, 2010
- Tokyo Electron Limited
- Minoru Honda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for switching decoupled plasma nitridation processes of diff...
- Patent number 7,601,404
- Issue date Oct 13, 2009
- United Microelectronics Corp.
- Ying-Wei Yen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and system for forming a nitrided germanium-containing layer...
- Patent number 7,517,812
- Issue date Apr 14, 2009
- Tokyo Electron Limited
- Takuya Sugawara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for forming a nitride layer on a biomedical de...
- Patent number 7,261,914
- Issue date Aug 28, 2007
- Southwest Research Institute
- Ronghua Wei
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of forming buried interconnecting wire
- Patent number 6,664,178
- Issue date Dec 16, 2003
- Matsushita Electric Industrial Co., Ltd.
- Tokuhiko Tamaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for exposing a substrate to plasma radicals
- Patent number 6,450,116
- Issue date Sep 17, 2002
- Applied Materials, Inc.
- David B. Noble
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for forming an insulating film on semiconductor substrate su...
- Patent number 6,265,327
- Issue date Jul 24, 2001
- Japan Science and Technology Corp.
- Hikaru Kobayashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of forming wire interconnection wire
- Patent number 6,260,266
- Issue date Jul 17, 2001
- Matsushita Electric Industrial Co., Ltd.
- Tokuhiko Tamaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and device for treatment of products in gas-discharge plasma
- Patent number 5,503,725
- Issue date Apr 2, 1996
- Novatech
- Leonid P. Sablev
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma enhanced thermal treatment apparatus
- Patent number 4,870,245
- Issue date Sep 26, 1989
- Motorola, Inc.
- J. B. Price
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Hearth support arrangement
- Patent number 4,760,584
- Issue date Jul 26, 1988
- William R. Jones
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for controlling the glow discharge process
- Patent number 4,700,315
- Issue date Oct 13, 1987
- Wellman Thermal Systems Corporation
- Dennis R. Blackburn
- G05 - CONTROLLING REGULATING
Information Patent Grant
3761370
- Patent number 3,761,370
- Issue date Sep 25, 1973
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
3536602
- Patent number 3,536,602
- Issue date Oct 27, 1970
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
FILM FORMING APPARATUS
- Publication number 20240321563
- Publication date Sep 26, 2024
- SHIBAURA MECHATRONICS CORPORATION
- Shigeki MATSUNAKA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA PROCESSING METHOD AND MANUFACTURING METHOD OF SEMICONDUCTOR...
- Publication number 20240194487
- Publication date Jun 13, 2024
- Hitachi High-Tech Corporation
- Yu Zhao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF PROCESSING SUBSTRATE, MET...
- Publication number 20240047180
- Publication date Feb 8, 2024
- Kokusai Electric Corporation
- Daisuke HARA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF FABRICATING AN ELECTRODE STRUCTURE AND APPARATUS FOR FABR...
- Publication number 20230360932
- Publication date Nov 9, 2023
- Samsung Electronics Co., Ltd.
- Dohyung KIM
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
UNIFORMITY CONTROL FOR PLASMA PROCESSING USING WALL RECOMBINATION
- Publication number 20230215702
- Publication date Jul 6, 2023
- Applied Materials, Inc.
- Vladimir Nagorny
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
PLASMA PROCESSING WITH TUNABLE NITRIDATION
- Publication number 20230127138
- Publication date Apr 27, 2023
- Applied Materials, Inc.
- Wei LIU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
IGNITION CONTROLLING METHOD, FILM FORMING METHOD, AND FILM FORMING...
- Publication number 20230129976
- Publication date Apr 27, 2023
- TOKYO ELECTRON LIMITED
- Takeshi KOBAYASHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING METHOD, SUBSTRATE PROCESSING APPARATUS, AND ME...
- Publication number 20220406572
- Publication date Dec 22, 2022
- Tokyo Electron Limited
- Kenichi OYAMA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
NITRIDING APPARATUS AND NITRIDING METHOD
- Publication number 20210351015
- Publication date Nov 11, 2021
- Kabushiki Kaisha Kobe Seiko Sho (Kobe Steel, Ltd.)
- Maiko ABE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TREATMENT APPARATUS, METHOD OF MANUFACTURING SEMICONDUCTO...
- Publication number 20200091092
- Publication date Mar 19, 2020
- Toshiba Memory Corporation
- Fuyuma Ito
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA NITRIDING APPARATUS
- Publication number 20160281207
- Publication date Sep 29, 2016
- IHI Corporation
- Norimitsu KAMEYA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20160155616
- Publication date Jun 2, 2016
- Samsung Electronics Co., Ltd.
- Suho LEE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20150371832
- Publication date Dec 24, 2015
- Hitachi Kokusai Electric Inc.
- Hidehiro YANAI
- B08 - CLEANING
Information Patent Application
PLASMA NITRIDING METHOD
- Publication number 20130022760
- Publication date Jan 24, 2013
- TOKYO ELECTRON LIMITED
- Toshinori Debari
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA NITRIDING METHOD AND PLASMA NITRIDING APPARATUS
- Publication number 20130017690
- Publication date Jan 17, 2013
- TOKYO ELECTRON LIMITED
- Koichi Takatsuki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA-NITRIDING METHOD
- Publication number 20120251737
- Publication date Oct 4, 2012
- TOKYO ELECTRON LIMITED
- Yoshinori OSAKI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SELECTIVE PLASMA NITRIDING METHOD AND PLASMA NITRIDING APPARATUS
- Publication number 20120184111
- Publication date Jul 19, 2012
- TOKYO ELECTRON LIMITED
- Taichi Monden
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Electron Beam Enhanced Nitriding System (EBENS)
- Publication number 20110308461
- Publication date Dec 22, 2011
- Scott G. Walton
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR NITRIDING SUBSTRATE AND METHOD FOR FORMING INSULATING FILM
- Publication number 20090269940
- Publication date Oct 29, 2009
- TOKYO ELECTRON LIMITED
- Minoru Honda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTRON BEAM ENHANCED NITRIDING SYSTEM
- Publication number 20090032143
- Publication date Feb 5, 2009
- Scott G Walton
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Plasma Processing Method and Method for Manufacturing an Electronic...
- Publication number 20080268657
- Publication date Oct 30, 2008
- Foundation for Advancement of International Science
- Tadahiro Ohmi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and system for forming a nitrided germanium-containing layer...
- Publication number 20070099435
- Publication date May 3, 2007
- TOKYO ELECTRON LIMITED
- Takuya Sugawara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method and apparatus for improving nitrogen profile during plasma n...
- Publication number 20070049048
- Publication date Mar 1, 2007
- Shahid Rauf
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method for Switching Decoupled Plasma Nitridation Processes of Diff...
- Publication number 20060280876
- Publication date Dec 14, 2006
- Ying-Wei Yen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Electron beam enhanced nitriding system (EBENS)
- Publication number 20050281958
- Publication date Dec 22, 2005
- Scott G. Walton
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method and apparatus for forming a nitride layer on a biomedical de...
- Publication number 20040213891
- Publication date Oct 28, 2004
- Ronghua Wei
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS AND METHOD FOR EXPOSING A SUBSTRATE TO PLASMA RADICALS
- Publication number 20020073925
- Publication date Jun 20, 2002
- DAVID B. NOBLE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method of forming interconnection wire
- Publication number 20010029667
- Publication date Oct 18, 2001
- Matsushita Electric Industrial Co., Ltd.
- Tokuhiko Tamaki
- H01 - BASIC ELECTRIC ELEMENTS

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Nitriding apparatus and nitriding method

Substrate treatment apparatus, method of manufacturing semiconducto...

Plasma nitriding apparatus

Plasma processing apparatus and method of manufacturing semiconduct...

Plasma processing method and method for manufacturing an electronic...

Method for nitriding substrate and method for forming insulating film

Method for switching decoupled plasma nitridation processes of diff...

Method and system for forming a nitrided germanium-containing layer...

Method and apparatus for forming a nitride layer on a biomedical de...

Method of forming buried interconnecting wire

Apparatus for exposing a substrate to plasma radicals

Method for forming an insulating film on semiconductor substrate su...

Method of forming wire interconnection wire

Method and device for treatment of products in gas-discharge plasma

Plasma enhanced thermal treatment apparatus

Hearth support arrangement

Method and apparatus for controlling the glow discharge process

3761370

3536602

Patents Applicationslast 30 patents

FILM FORMING APPARATUS

PLASMA PROCESSING METHOD AND MANUFACTURING METHOD OF SEMICONDUCTOR...

SUBSTRATE PROCESSING APPARATUS, METHOD OF PROCESSING SUBSTRATE, MET...

METHOD OF FABRICATING AN ELECTRODE STRUCTURE AND APPARATUS FOR FABR...

UNIFORMITY CONTROL FOR PLASMA PROCESSING USING WALL RECOMBINATION

PLASMA PROCESSING WITH TUNABLE NITRIDATION

IGNITION CONTROLLING METHOD, FILM FORMING METHOD, AND FILM FORMING...

SUBSTRATE PROCESSING METHOD, SUBSTRATE PROCESSING APPARATUS, AND ME...

NITRIDING APPARATUS AND NITRIDING METHOD

SUBSTRATE TREATMENT APPARATUS, METHOD OF MANUFACTURING SEMICONDUCTO...

PLASMA NITRIDING APPARATUS

SUBSTRATE PROCESSING APPARATUS

PLASMA PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICONDUCT...

PLASMA NITRIDING METHOD

PLASMA NITRIDING METHOD AND PLASMA NITRIDING APPARATUS

PLASMA-NITRIDING METHOD

SELECTIVE PLASMA NITRIDING METHOD AND PLASMA NITRIDING APPARATUS

Electron Beam Enhanced Nitriding System (EBENS)

METHOD FOR NITRIDING SUBSTRATE AND METHOD FOR FORMING INSULATING FILM

ELECTRON BEAM ENHANCED NITRIDING SYSTEM

Plasma Processing Method and Method for Manufacturing an Electronic...

Method and system for forming a nitrided germanium-containing layer...

Method and apparatus for improving nitrogen profile during plasma n...

Method for Switching Decoupled Plasma Nitridation Processes of Diff...

Electron beam enhanced nitriding system (EBENS)

Method and apparatus for forming a nitride layer on a biomedical de...

APPARATUS AND METHOD FOR EXPOSING A SUBSTRATE TO PLASMA RADICALS

Method of forming interconnection wire