Oblique incidence of vaporised material on substrate

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CPC
C23C14/225

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CCHEMISTRY METALLURGY C23Surface treatment C23CCOATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material

Current Industry

C23C14/225Oblique incidence of vaporised material on substrate

Industries

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Patents Grantslast 30 patents

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- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR

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Oblique incidence of vaporised material on substrate

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Microchannel plate and method of making the microchannel plate with...

Ribbon beam plasma enhanced chemical vapor deposition system for an...

Method for vacuum deposition of a coating on the front face of a su...

Techniques and device structure based upon directional seeding and...

Microchannel plate and method of making the microchannel plate with...

Substrate processing method

PVD directional deposition for encapsulation

Semiconductor device, method and machine of manufacture

Coatings of non-planar substrates and methods for the production th...

Sputtering apparatus

Techniques and apparatus for selective shaping of mask features usi...

Film forming system and method for forming film on substrate

Semiconductor memory device and semiconductor memory manufacturing...

Film-forming device

Semiconductor device, method and machine of manufacture

Apparatus, device and process for coating of articles

Vapor phase deposition system

Scintillator plate, radiation imaging apparatus, and method of manu...

Oblique deposition for quantum device fabrication

Method of forming wiring on side portion of substrate

Techniques for selective deposition using angled ions

Techniques and apparatus for selective shaping of mask features usi...

Methods of forming metal silicide layers and metal silicide layers...

Block copolymer pattern formation method and diffraction limited op...

Coatings of non-planar substrates

Semiconductor memory device and semiconductor memory manufacturing...

Processing apparatus and collimator

Method for producing a coating and optoelectronic semiconductor com...

Methods and apparatus for dynamically treating atomic layer deposit...

Control of lift ejection angle

Patents Applicationslast 30 patents

MICROCHANNEL PLATE AND METHOD OF MAKING THE MICROCHANNEL PLATE WITH...

Semiconductor Device, Method and Machine of Manufacture

PVD DIRECTIONAL DEPOSITION FOR ENCAPSULATION

SYSTEM FOR DEPOSITING PIEZOELECTRIC MATERIALS, METHODS FOR USING TH...

COATINGS OF NON-PLANAR SUBSTRATES AND METHODS FOR THE PRODUCTION TH...

TECHNIQUES AND APPARATUS FOR SELECTIVE SHAPING OF MASK FEATURES USI...

SYSTEM FOR FASTENING OPTICAL COMPONENTS

Semiconductor Device, Method and Machine of Manufacture

SUBSTRATE PROCESSING METHOD

Method For Vacuum Deposition Of A Coating On The Front Face Of A Su...

TECHNIQUES AND APPARATUS FOR SELECTIVE SHAPING OF MASK FEATURES USI...

OBLIQUE DEPOSITION FOR QUANTUM DEVICE FABRICATION

COATINGS OF NON-PLANAR SUBSTRATES AND METHODS FOR THE PRODUCTION TH...

SEMICONDUCTOR MEMORY DEVICE AND SEMICONDUCTOR MEMORY MANUFACTURING...

Method For Manufacturing A Humidity Sensor And Humidity Sensor

SCINTILLATOR PLATE, RADIATION IMAGING APPARATUS, AND METHOD OF MANU...

VAPOR PHASE DEPOSITION SYSTEM

PROCESSING APPARATUS AND COLLIMATOR

Nanostructure Lithium Ion Battery

Control of Lift Ejection Angle

DIRECTED SURFACE FUNCTIONALIZATION ON SELECTED SURFACE AREAS OF TOP...

METHOD FOR PRODUCING A COATING AND OPTOELECTRONIC SEMICONDUCTOR COM...

METAL MASK SUBSTRATE, METAL MASK SUBSTRATE CONTROL METHOD, METAL MA...

APPARATUS AND METHOD OF MANUFACTURING RADIATION DETECTION PANEL

APPARATUS AND METHOD OF MANUFACTURING RADIATION DETECTION PANEL

METHOD FOR PRODUCING A COATING AND OPTOELECTRONIC SEMICONDUCTOR COM...

DONOR SHEET AND METHOD FOR LIGHT INDUCED FORWARD TRANSFER MANUFACTU...

MULTIFUNCTIONAL ELECTRODE

ReRAM Cells Including TaXSiYN Embedded Resistors

APPARATUS AND METHOD OF MANUFACTURING RADIATION DETECTION PANEL