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Observing the objects or the point of impact on the object
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H01J37/3005
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H
ELECTRICITY
H01
Electric elements
H01J
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
H01J37/00
Discharge tubes with provision for introducing objects or material to be exposed to the discharge
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H01J37/3005
Observing the objects or the point of impact on the object
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Patents Grants
last 30 patents
Information
Patent Grant
Systems, devices, and methods for aligning a particle beam and perf...
Patent number
12,020,897
Issue date
Jun 25, 2024
PDF Solutions, Inc.
Indranil De
G01 - MEASURING TESTING
Information
Patent Grant
Method and system for cross-sectioning a sample with a preset thick...
Patent number
RE50001
Issue date
Jun 4, 2024
FIBICS INCORPORATED
Michael William Phaneuf
Information
Patent Grant
Methods and structures for semiconductor device testing
Patent number
11,982,709
Issue date
May 14, 2024
Yangtze Memory Technologies Co., Ltd.
Lin Qi
G01 - MEASURING TESTING
Information
Patent Grant
Microscopy imaging method for 3D tomography with predictive drift t...
Patent number
11,923,168
Issue date
Mar 5, 2024
FIBICS INCORPORATED
Michael William Phaneuf
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Processing an object using a material processing device
Patent number
11,862,428
Issue date
Jan 2, 2024
Carl Zeiss Microscopy GmbH
Fabian Perez-Willard
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Writing data generating method, multi charged particle beam writing...
Patent number
11,774,860
Issue date
Oct 3, 2023
NuFlare Technology, Inc.
Kenichi Yasui
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
FIB delayering endpoint detection by monitoring sputtered materials...
Patent number
11,694,934
Issue date
Jul 4, 2023
Applied Materials Israel Ltd.
Yehuda Zur
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Uniform milling of adjacent materials using parallel scanning fib
Patent number
11,636,997
Issue date
Apr 25, 2023
Applied Materials Israel Ltd.
Yehuda Zur
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Systems, devices, and methods for aligning a particle beam and perf...
Patent number
11,605,526
Issue date
Mar 14, 2023
PDF Solutions, Inc.
Indranil De
G01 - MEASURING TESTING
Information
Patent Grant
Method and system for iteratively cross-sectioning a sample to corr...
Patent number
11,462,383
Issue date
Oct 4, 2022
Fibics Incorporated
Michael William Phaneuf
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Charged particle beam inspection of ungrounded samples
Patent number
11,448,607
Issue date
Sep 20, 2022
ASML Netherlands B.V.
Chiyan Kuan
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and system for generating reciprocal space map
Patent number
11,430,632
Issue date
Aug 30, 2022
FEI Company
Andrew Barnum
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Charged particle beam apparatus
Patent number
11,430,630
Issue date
Aug 30, 2022
Hitachi High-Technologies Corporation
Ryo Hirano
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Inspection apparatus and inspection method
Patent number
11,385,192
Issue date
Jul 12, 2022
NuFlare Technology, Inc.
Masataka Shiratsuchi
G01 - MEASURING TESTING
Information
Patent Grant
System and method for spatially resolved optical metrology of an io...
Patent number
11,380,517
Issue date
Jul 5, 2022
Applied Materials, Inc.
Gang Shu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Line-based endpoint detection
Patent number
11,355,313
Issue date
Jun 7, 2022
FEI Company
Brian Routh
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Particle beam irradiation apparatus
Patent number
11,335,534
Issue date
May 17, 2022
Hitachi High-Tech Science Corporation
Takuma Aso
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Methods for aligning a particle beam and performing a non-contact e...
Patent number
11,328,899
Issue date
May 10, 2022
PDF Solutions, Inc.
Indranil De
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Holes tilt angle measurement using FIB diagonal cut
Patent number
11,280,749
Issue date
Mar 22, 2022
Applied Materials Israel Ltd.
Yehuda Zur
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Inspection device
Patent number
11,276,551
Issue date
Mar 15, 2022
Hitachi, Ltd.
Atsuko Shintani
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Fixture for vapor deposition system
Patent number
11,276,556
Issue date
Mar 15, 2022
Raytheon Technologies Corporation
James W. Neal
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Detecting method and detecting equipment therefor
Patent number
11,237,414
Issue date
Feb 1, 2022
HKC CORPORATION LIMITED
Chung-Kuang Chien
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Charged particle beam apparatus
Patent number
11,239,046
Issue date
Feb 1, 2022
Hitachi High-Tech Science Corporation
Ayana Muraki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Writing data generating method, multi charged particle beam writing...
Patent number
11,199,781
Issue date
Dec 14, 2021
NuFlare Technology, Inc.
Kenichi Yasui
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
End-point detection for similar adjacent materials
Patent number
11,199,401
Issue date
Dec 14, 2021
Applied Materials Israel Ltd.
Yehuda Zur
G01 - MEASURING TESTING
Information
Patent Grant
Dual beam microscope system for imaging during sample processing
Patent number
11,183,364
Issue date
Nov 23, 2021
FEI Company
Yuchen Deng
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Ion milling device
Patent number
11,133,153
Issue date
Sep 28, 2021
HITACHI HIGH-TECH CORPORATION
Toru Iwaya
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of preparing thin film sample piece and charged particle bea...
Patent number
11,094,503
Issue date
Aug 17, 2021
Hitachi High-Tech Science Corporation
Masato Suzuki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Depth-controllable ion milling
Patent number
11,049,690
Issue date
Jun 29, 2021
SELA—SOLUTIONS ENABLING NANO ANALYSIS LTD.
Vladimir Zheleznyak
G01 - MEASURING TESTING
Information
Patent Grant
Sample holder system and sample observation apparatus
Patent number
10,930,467
Issue date
Feb 23, 2021
Jeol Ltd.
Tsutomu Negishi
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
Integrated Circuit with FIB-Ready Structures
Publication number
20240321548
Publication date
Sep 26, 2024
Nuvoton Technology Corporation
Yuval Kirschner
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SYSTEMS, DEVICES, AND METHODS FOR ALIGNING A PARTICLE BEAM AND PERF...
Publication number
20240304414
Publication date
Sep 12, 2024
PDF Solutions, Inc.
Indranil DE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF PREPARING A SAMPLE FOR TRANSMISSION ELECTRON MICROSCOPY (...
Publication number
20240297015
Publication date
Sep 5, 2024
FEI Company
Ludek Cervinka
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ELECTRONIC TWEEZERS
Publication number
20240234084
Publication date
Jul 11, 2024
Zhejiang University
He TIAN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Processor System, Correction Method, and Correction Program
Publication number
20240222064
Publication date
Jul 4, 2024
HITACHI HIGH-TECH CORPORATION
Mayuka OSAKI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MICROSCOPY IMAGING METHOD AND SYSTEM
Publication number
20240177966
Publication date
May 30, 2024
Fibics Incorporated
Michael William Phaneuf
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
ELECTRONIC TWEEZERS
Publication number
20240136149
Publication date
Apr 25, 2024
Zhejiang University
He TIAN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ENHANCED DEPOSITION RATE BY APPLYING A NEGATIVE VOLTAGE TO A GAS IN...
Publication number
20240105421
Publication date
Mar 28, 2024
APPLIED MATERIALS ISRAEL LTD.
Yehuda Zur
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD AND APPARATUS FOR PREPARING SAMPLES FOR IMAGING
Publication number
20240038486
Publication date
Feb 1, 2024
Taiwan Semiconductor Manufacturing Company, Ltd.
Yu-Ching Chiu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHODS AND STRUCTURES FOR SEMICONDUCTOR DEVICE TESTING
Publication number
20230375616
Publication date
Nov 23, 2023
Yangtze Memory Technologies Co., Ltd.
Lin QI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SYSTEMS, DEVICES, AND METHODS FOR ALIGNING A PARTICLE BEAM AND PERF...
Publication number
20230282444
Publication date
Sep 7, 2023
PDF Solutions, Inc.
Indranil DE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Tweezers, Conveyance Device, and Method for Conveying Sample Piece
Publication number
20230268156
Publication date
Aug 24, 2023
Hitachi High-Tech Corporation
Naoki SAMURA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MICROSCOPY FEEDBACK FOR IMPROVED MILLING ACCURACY
Publication number
20230197403
Publication date
Jun 22, 2023
FEI Company
Thomas Gary Miller
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method Of Imaging And Milling A Sample
Publication number
20230162945
Publication date
May 25, 2023
FEI Company
Jaroslav Velcovský
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
FIB DELAYERING ENDPOINT DETECTION BY MONITORING SPUTTERED MATERIALS...
Publication number
20230104390
Publication date
Apr 6, 2023
APPLIED MATERIALS ISRAEL LTD.
Yehuda Zur
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF PROCESSING AN OBJECT USING A MATERIAL PROCESSING DEVICE,...
Publication number
20230097540
Publication date
Mar 30, 2023
CARL ZEISS MICROSCOPY GMBH
Fabian Perez Willard
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MICROSCOPY IMAGING METHOD AND SYSTEM
Publication number
20230044598
Publication date
Feb 9, 2023
Fibics Incorporated
Michael William Phaneuf
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
METHOD AND APPARATUS FOR DETECTING DISCHARGE SITE
Publication number
20230028337
Publication date
Jan 26, 2023
NuFlare Technology, Inc.
Toru ARIIZUMI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SYSTEMS, DEVICES, AND METHODS FOR ALIGNING A PARTICLE BEAM AND PERF...
Publication number
20220336187
Publication date
Oct 20, 2022
PDF Solutions, Inc.
Indranil DE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD AND SYSTEM FOR GENERATING RECIPROCAL SPACE MAP
Publication number
20220181117
Publication date
Jun 9, 2022
FEI Company
Andrew Barnum
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
X-RAY REFERENCE OBJECT, X-RAY DETECTOR, ADDITIVE MANUFACTURING APPA...
Publication number
20220143709
Publication date
May 12, 2022
Arcam AB
Christian Ekberg
B22 - CASTING POWDER METALLURGY
Information
Patent Application
WRITING DATA GENERATING METHOD, MULTI CHARGED PARTICLE BEAM WRITING...
Publication number
20220100099
Publication date
Mar 31, 2022
NuFlare Technology, Inc.
Kenichi YASUI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
UNIFORM MILLING OF ADJACENT MATERIALS USING PARALLEL SCANNING FIB
Publication number
20220005670
Publication date
Jan 6, 2022
APPLIED MATERIALS ISRAEL LTD.
Yehuda Zur
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
LINE-BASED ENDPOINT DETECTION
Publication number
20210407765
Publication date
Dec 30, 2021
FEI Company
Brian Routh
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
DUAL BEAM MICROSCOPE SYSTEM FOR IMAGING DURING SAMPLE PROCESSING
Publication number
20210391145
Publication date
Dec 16, 2021
FEI Company
Yuchen Deng
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MICROSCOPY IMAGING METHOD AND SYSTEM
Publication number
20210159046
Publication date
May 27, 2021
Fibics Incorporated
Michael William Phaneuf
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
SYSTEMS, DEVICES, AND METHODS FOR ALIGNING A PARTICLE BEAM AND PERF...
Publication number
20210098229
Publication date
Apr 1, 2021
Indranil DE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PARTICLE BEAM IRRADIATION APPARATUS
Publication number
20210090853
Publication date
Mar 25, 2021
HITACHI HIGH-TECH SCIENCE CORPORATION
Takuma ASO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
INSPECTION APPARATUS AND INSPECTION METHOD
Publication number
20210010959
Publication date
Jan 14, 2021
NuFlare Technology, Inc.
Masataka SHIRATSUCHI
G01 - MEASURING TESTING
Information
Patent Application
INSPECTION DEVICE
Publication number
20200365364
Publication date
Nov 19, 2020
Hitachi, Ltd
Atsuko SHINTANI
H01 - BASIC ELECTRIC ELEMENTS