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HELECTRICITY H01Electric elements H01LSEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

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H01L21/26566of a cluster

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Semiconductor epitaxial wafer and method of producing semiconductor...
- Patent number 11,935,745
- Issue date Mar 19, 2024
- Sumco Corporation
- Ryosuke Okuyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Epitaxial wafer manufacturing method and epitaxial wafer
- Patent number RE49657
- Issue date Sep 12, 2023
- Sumco Corporation
- Takuro Iwanaga
Information Patent Grant
Method and apparatus for forming substrate surfaces with exposed cr...
- Patent number 11,735,432
- Issue date Aug 22, 2023
- Exogenesis Corporation
- Sean R. Kirkpatrick
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for modifying the wettability and/or other biocompatibility...
- Patent number 11,698,582
- Issue date Jul 11, 2023
- Exogenesis Corporation
- Joseph B. Khoury
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor epitaxial wafer and method of producing semiconductor...
- Patent number 11,640,907
- Issue date May 2, 2023
- Sumco Corporation
- Ryosuke Okuyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device and formation method thereof
- Patent number 11,211,475
- Issue date Dec 28, 2021
- Semiconductor Manufacturing International (Shanghai) Corporation
- Haiyang Zhang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of producing semiconductor epitaxial wafer, semiconductor ep...
- Patent number 11,211,423
- Issue date Dec 28, 2021
- Sumco Corporation
- Ryosuke Okuyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for neutral beam processing based on gas clust...
- Patent number 11,199,769
- Issue date Dec 14, 2021
- Sean R. Kirkpatrick
- B24 - GRINDING POLISHING
Information Patent Grant
Method of producing semiconductor epitaxial wafer and method of pro...
- Patent number 11,195,716
- Issue date Dec 7, 2021
- Sumco Corporation
- Ryosuke Okuyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor epitaxial wafer and method of producing semiconductor...
- Patent number 11,107,687
- Issue date Aug 31, 2021
- Sumco Corporation
- Ryosuke Okuyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for neutral beam processing based on gas clust...
- Patent number 11,048,162
- Issue date Jun 29, 2021
- Exogenesis Corporation
- Sean R. Kirkpatrick
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method for ultra-shallow etching using neutral beam processing base...
- Patent number 11,004,692
- Issue date May 11, 2021
- Exogenesis Corporation
- Sean R. Kirkpatrick
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of evaluating impurity gettering capability of epitaxial sil...
- Patent number 10,861,709
- Issue date Dec 8, 2020
- Sumco Corporation
- Satoshi Shigematsu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for neutral beam processing based on gas cluster ion beam te...
- Patent number 10,825,685
- Issue date Nov 3, 2020
- Exogenesis Corporation
- Sean R. Kirkpatrick
- C03 - GLASS MINERAL OR SLAG WOOL
Information Patent Grant
Liner planarization-free process flow for fabricating metallic inte...
- Patent number 10,741,397
- Issue date Aug 11, 2020
- International Business Machines Corporation
- Chih-Chao Yang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Enhanced high aspect ratio etch performance using accelerated neutr...
- Patent number 10,670,960
- Issue date Jun 2, 2020
- Exogenesis Corporation
- Sean R. Kirkpatrick
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Method of producing semiconductor epitaxial wafer, semiconductor ep...
- Patent number 10,629,648
- Issue date Apr 21, 2020
- Sumco Corporation
- Ryosuke Okuyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods for doping a sub-fin region of a semiconductor structure by...
- Patent number 10,497,781
- Issue date Dec 3, 2019
- Intel Corporation
- Aaron D. Lilak
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Epitaxial wafer manufacturing method and epitaxial wafer
- Patent number 10,453,682
- Issue date Oct 22, 2019
- Sumco Corporation
- Takuro Iwanaga
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Liner planarization-free process flow for fabricating metallic inte...
- Patent number 10,431,464
- Issue date Oct 1, 2019
- International Business Machines Corporation
- Chih-Chao Yang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for neutral beam processing based on gas clust...
- Patent number 10,409,155
- Issue date Sep 10, 2019
- Exogensis Corporation
- Sean R. Kirkpatrick
- B24 - GRINDING POLISHING
Information Patent Grant
Method for producing semiconductor epitaxial wafer and method of pr...
- Patent number 10,396,120
- Issue date Aug 27, 2019
- Sumco Corporation
- Takeshi Kadono
- C30 - CRYSTAL GROWTH
Information Patent Grant
Stacked nanowire device width adjustment by gas cluster ion beam (G...
- Patent number 10,388,731
- Issue date Aug 20, 2019
- International Business Machines Corporation
- Kangguo Cheng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Vertical FETS with variable bottom spacer recess
- Patent number 10,283,416
- Issue date May 7, 2019
- International Business Machines Corporation
- Hari V. Mallela
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for high throughput using beam scan size and beam position i...
- Patent number 10,256,095
- Issue date Apr 9, 2019
- TEL Epion Inc.
- Soo Doo Chae
- G05 - CONTROLLING REGULATING
Information Patent Grant
Method of producing semiconductor epitaxial wafer and method of pro...
- Patent number 10,224,203
- Issue date Mar 5, 2019
- Sumco Corporation
- Ryo Hirose
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Treatment method for defect reduction in a substrate and substrates...
- Patent number 10,209,617
- Issue date Feb 19, 2019
- Exogenesis Corporation
- Sean R. Kirkpatrick
- B24 - GRINDING POLISHING
Information Patent Grant
Methods, apparatus and system for gate cut process using a stress m...
- Patent number 10,176,995
- Issue date Jan 8, 2019
- GLOBALFOUNDRIES Inc.
- Xusheng Wu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of producing semiconductor epitaxial wafer, semiconductor ep...
- Patent number 10,153,323
- Issue date Dec 11, 2018
- Sumco Corporation
- Ryosuke Okuyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Stacked nanowire device width adjustment by gas cluster ion beam (G...
- Patent number 10,096,674
- Issue date Oct 9, 2018
- International Business Machines Corporation
- Kangguo Cheng
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
METHOD OF PRODUCING SEMICONDUCTOR EPITAXIAL WAFER, SEMICONDUCTOR EP...
- Publication number 20240297201
- Publication date Sep 5, 2024
- SUMCO CORPORATION
- Takeshi Kadono
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF PRODUCING SEMICONDUCTOR EPITAXIAL WAFER, SEMICONDUCTOR EP...
- Publication number 20240282801
- Publication date Aug 22, 2024
- SUMCO CORPORATION
- Takeshi KADONO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
INORGANIC ALIGNMENT FILM FORMING APPARATUS FOR LCOS DISPLAY
- Publication number 20220011636
- Publication date Jan 13, 2022
- VISIONAID INC.
- Kyo Wung LEE
- G02 - OPTICS
Information Patent Application
INHIBITING BACTERIA COLONIZATION WITHOUT ANTIBIOTICS
- Publication number 20210405523
- Publication date Dec 30, 2021
- Exogenesis Corporation
- Joseph Khoury
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR EPITAXIAL WAFER AND METHOD OF PRODUCING SEMICONDUCTOR...
- Publication number 20210358755
- Publication date Nov 18, 2021
- SUMCO CORPORATION
- Ryosuke OKUYAMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR FORMING SUBSTRATE SURFACES WITH EXPOSED CR...
- Publication number 20210225661
- Publication date Jul 22, 2021
- Exogenesis Corporation
- Sean R. Kirkpatrick
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS AND TECHNIQUES FOR SUBSTRATE PROCESSING USING INDEPENDENT...
- Publication number 20210166946
- Publication date Jun 3, 2021
- Applied Materials, Inc.
- Anthony Renau
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE AND FORMATION METHOD THEREOF
- Publication number 20200411670
- Publication date Dec 31, 2020
- Semiconductor Manufacturing International (Shanghai) Corporation
- Haiyang ZHANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF PRODUCING SEMICONDUCTOR EPITAXIAL WAFER AND METHOD OF PRO...
- Publication number 20200373158
- Publication date Nov 26, 2020
- SUMCO CORPORATION
- Ryosuke OKUYAMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF SMOOTHING AND PLANARIZING OF ALTIC SURFACES
- Publication number 20200273715
- Publication date Aug 27, 2020
- TEL Manufacturing and Engineering of America, Inc.
- Luis Fernandez
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR NEUTRAL BEAM PROCESSING BASED ON GAS CLUST...
- Publication number 20200249565
- Publication date Aug 6, 2020
- Exogenesis Corporation
- Sean R. Kirkpatrick
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD OF PRODUCING SEMICONDUCTOR EPITAXIAL WAFER, SEMICONDUCTOR EP...
- Publication number 20200219929
- Publication date Jul 9, 2020
- SUMCO CORPORATION
- Ryosuke OKUYAMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF PRODUCING SEMICONDUCTOR EPITAXIAL WAFER, SEMICONDUCTOR EP...
- Publication number 20200203418
- Publication date Jun 25, 2020
- SUMCO CORPORATION
- Takeshi Kadono
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF EVALUATING IMPURITY GETTERING CAPABILITY OF EPITAXIAL SIL...
- Publication number 20200203178
- Publication date Jun 25, 2020
- SUMCO CORPORATION
- Satoshi SHIGEMATSU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF PRODUCING SEMICONDUCTOR EPITAXIAL WAFER, SEMICONDUCTOR EP...
- Publication number 20200127043
- Publication date Apr 23, 2020
- SUMCO CORPORATION
- Takeshi Kadono
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR PRODUCING SEMICONDUCTOR EPITAXIAL WAFER, SEMICONDUCTOR E...
- Publication number 20200127044
- Publication date Apr 23, 2020
- SUMCO CORPORATION
- Takeshi Kadono
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
LINER PLANARIZATION-FREE PROCESS FLOW FOR FABRICATING METALLIC INTE...
- Publication number 20190279873
- Publication date Sep 12, 2019
- International Business Machines Corporation
- Chih-Chao Yang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR NEUTRAL BEAM PROCESSING BASED ON GAS CLUSTER ION BEAM TE...
- Publication number 20190279872
- Publication date Sep 12, 2019
- Exogenesis Corporation
- Sean R. Kirkpatrick
- C03 - GLASS MINERAL OR SLAG WOOL
Information Patent Application
DRUG DELIVERY SYSTEM AND METHOD OF MANUFACTURING THEREOF
- Publication number 20190171098
- Publication date Jun 6, 2019
- Exogenesis Corporation
- Sean R. Kirkpatrick
- B24 - GRINDING POLISHING
Information Patent Application
Method for modifying the wettability and/or other biocompatibility...
- Publication number 20190137868
- Publication date May 9, 2019
- Joseph B. Khoury
- B24 - GRINDING POLISHING
Information Patent Application
METHOD OF PRODUCING SEMICONDUCTOR EPITAXIAL WAFER, SEMICONDUCTOR EP...
- Publication number 20190027533
- Publication date Jan 24, 2019
- SUMCO CORPORATION
- Ryosuke OKUYAMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR PRODUCING SEMICONDUCTOR EPITAXIAL WAFER AND METHOD OF PR...
- Publication number 20180374891
- Publication date Dec 27, 2018
- SUMCO CORPORATION
- Takeshi KADONO
- C30 - CRYSTAL GROWTH
Information Patent Application
MEDICAL DEVICE FOR BONE IMPLANT AND METHOD FOR PRODUCING SUCH A DEVICE
- Publication number 20180321583
- Publication date Nov 8, 2018
- Laurence B. Tarrant
- B24 - GRINDING POLISHING
Information Patent Application
METHOD AND APPARATUS FOR NEUTRAL BEAM PROCESSING BASED ON GAS CLUST...
- Publication number 20180299771
- Publication date Oct 18, 2018
- Exogenesis Corporation
- Sean R. Kirkpatrick
- B24 - GRINDING POLISHING
Information Patent Application
ENHANCED HIGH ASPECT RATIO ETCH PERFORMANCE USING ACCELERATED NEUTR...
- Publication number 20180292745
- Publication date Oct 11, 2018
- Exogenesis Corporation
- Sean R. Kirkpatrick
- B24 - GRINDING POLISHING
Information Patent Application
EPITAXIAL WAFER MANUFACTURING METHOD AND EPITAXIAL WAFER
- Publication number 20180286677
- Publication date Oct 4, 2018
- SUMCO CORPORATION
- Takuro IWANAGA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS FOR DOPING A SUB-FIN REGION OF A SEMICONDUCTOR STRUCTURE BY...
- Publication number 20180248005
- Publication date Aug 30, 2018
- Intel Corporation
- Aaron D. LILAK
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
STACKED NANOWIRE DEVICE WIDTH ADJUSTMENT BY GAS CLUSTER ION BEAM (G...
- Publication number 20180212024
- Publication date Jul 26, 2018
- International Business Machines Corporation
- Kangguo Cheng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VERTICAL FETS WITH VARIABLE BOTTOM SPACER RECESS
- Publication number 20180138091
- Publication date May 17, 2018
- International Business Machines Corporation
- Hari V. Mallela
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LINER PLANARIZATION-FREE PROCESS FLOW FOR FABRICATING METALLIC INTE...
- Publication number 20180108610
- Publication date Apr 19, 2018
- International Business Machines Corporation
- Chih-Chao Yang
- H01 - BASIC ELECTRIC ELEMENTS

of a cluster

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Semiconductor epitaxial wafer and method of producing semiconductor...

Epitaxial wafer manufacturing method and epitaxial wafer

Method and apparatus for forming substrate surfaces with exposed cr...

Method for modifying the wettability and/or other biocompatibility...

Semiconductor epitaxial wafer and method of producing semiconductor...

Semiconductor device and formation method thereof

Method of producing semiconductor epitaxial wafer, semiconductor ep...

Method and apparatus for neutral beam processing based on gas clust...

Method of producing semiconductor epitaxial wafer and method of pro...

Semiconductor epitaxial wafer and method of producing semiconductor...

Method and apparatus for neutral beam processing based on gas clust...

Method for ultra-shallow etching using neutral beam processing base...

Method of evaluating impurity gettering capability of epitaxial sil...

Method for neutral beam processing based on gas cluster ion beam te...

Liner planarization-free process flow for fabricating metallic inte...

Enhanced high aspect ratio etch performance using accelerated neutr...

Method of producing semiconductor epitaxial wafer, semiconductor ep...

Methods for doping a sub-fin region of a semiconductor structure by...

Epitaxial wafer manufacturing method and epitaxial wafer

Liner planarization-free process flow for fabricating metallic inte...

Method and apparatus for neutral beam processing based on gas clust...

Method for producing semiconductor epitaxial wafer and method of pr...

Stacked nanowire device width adjustment by gas cluster ion beam (G...

Vertical FETS with variable bottom spacer recess

Method for high throughput using beam scan size and beam position i...

Method of producing semiconductor epitaxial wafer and method of pro...

Treatment method for defect reduction in a substrate and substrates...

Methods, apparatus and system for gate cut process using a stress m...

Method of producing semiconductor epitaxial wafer, semiconductor ep...

Stacked nanowire device width adjustment by gas cluster ion beam (G...

Patents Applicationslast 30 patents

METHOD OF PRODUCING SEMICONDUCTOR EPITAXIAL WAFER, SEMICONDUCTOR EP...

METHOD OF PRODUCING SEMICONDUCTOR EPITAXIAL WAFER, SEMICONDUCTOR EP...

INORGANIC ALIGNMENT FILM FORMING APPARATUS FOR LCOS DISPLAY

INHIBITING BACTERIA COLONIZATION WITHOUT ANTIBIOTICS

SEMICONDUCTOR EPITAXIAL WAFER AND METHOD OF PRODUCING SEMICONDUCTOR...

METHOD AND APPARATUS FOR FORMING SUBSTRATE SURFACES WITH EXPOSED CR...

APPARATUS AND TECHNIQUES FOR SUBSTRATE PROCESSING USING INDEPENDENT...

SEMICONDUCTOR DEVICE AND FORMATION METHOD THEREOF

METHOD OF PRODUCING SEMICONDUCTOR EPITAXIAL WAFER AND METHOD OF PRO...

METHOD OF SMOOTHING AND PLANARIZING OF ALTIC SURFACES

METHOD AND APPARATUS FOR NEUTRAL BEAM PROCESSING BASED ON GAS CLUST...

METHOD OF PRODUCING SEMICONDUCTOR EPITAXIAL WAFER, SEMICONDUCTOR EP...

METHOD OF PRODUCING SEMICONDUCTOR EPITAXIAL WAFER, SEMICONDUCTOR EP...

METHOD OF EVALUATING IMPURITY GETTERING CAPABILITY OF EPITAXIAL SIL...

METHOD OF PRODUCING SEMICONDUCTOR EPITAXIAL WAFER, SEMICONDUCTOR EP...

METHOD FOR PRODUCING SEMICONDUCTOR EPITAXIAL WAFER, SEMICONDUCTOR E...

LINER PLANARIZATION-FREE PROCESS FLOW FOR FABRICATING METALLIC INTE...

METHOD FOR NEUTRAL BEAM PROCESSING BASED ON GAS CLUSTER ION BEAM TE...

DRUG DELIVERY SYSTEM AND METHOD OF MANUFACTURING THEREOF

Method for modifying the wettability and/or other biocompatibility...

METHOD OF PRODUCING SEMICONDUCTOR EPITAXIAL WAFER, SEMICONDUCTOR EP...

METHOD FOR PRODUCING SEMICONDUCTOR EPITAXIAL WAFER AND METHOD OF PR...

MEDICAL DEVICE FOR BONE IMPLANT AND METHOD FOR PRODUCING SUCH A DEVICE

METHOD AND APPARATUS FOR NEUTRAL BEAM PROCESSING BASED ON GAS CLUST...

ENHANCED HIGH ASPECT RATIO ETCH PERFORMANCE USING ACCELERATED NEUTR...

EPITAXIAL WAFER MANUFACTURING METHOD AND EPITAXIAL WAFER

METHODS FOR DOPING A SUB-FIN REGION OF A SEMICONDUCTOR STRUCTURE BY...

STACKED NANOWIRE DEVICE WIDTH ADJUSTMENT BY GAS CLUSTER ION BEAM (G...

VERTICAL FETS WITH VARIABLE BOTTOM SPACER RECESS

LINER PLANARIZATION-FREE PROCESS FLOW FOR FABRICATING METALLIC INTE...