of batches of workpieces

Industry

CPC
H01J37/32779

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Parent Industries

HELECTRICITY H01Electric elements H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge

Current Industry

H01J37/32779of batches of workpieces

Industries

Patents Grantslast 30 patents

Information Patent Grant
Carrier with vertical grid for supporting substrates in coater
- Patent number 12,068,142
- Issue date Aug 20, 2024
- View, Inc.
- Bo Neilan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Device, method and use for the coating of lenses
- Patent number 11,842,889
- Issue date Dec 12, 2023
- Schneider GmbH & Co. KG
- Gunter Schneider
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Line-of-sight coating fixture and apparatus
- Patent number 11,702,732
- Issue date Jul 18, 2023
- Raytheon Technologies Corporation
- Eric Jorzik
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Carrier with vertical grid for supporting substrates in coater
- Patent number 11,688,589
- Issue date Jun 27, 2023
- View, Inc.
- Bo Garrett Neilan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Coating apparatus and coating method
- Patent number 11,646,182
- Issue date May 9, 2023
- Jiangsu Favored Nanotechnology Co., LTD
- Jian Zong
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Carrier with vertical grid for supporting substrates in coater
- Patent number 11,424,109
- Issue date Aug 23, 2022
- View, Inc.
- Bo Neilan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film forming method and film forming apparatus
- Patent number 11,367,611
- Issue date Jun 21, 2022
- Tokyo Electron Limited
- Yuji Nishino
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
High throughput vacuum deposition sources and system
- Patent number 11,359,284
- Issue date Jun 14, 2022
- Ascentool, Inc.
- George Xinsheng Guo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Shaped electrodes for improved plasma exposure from vertical plasma...
- Patent number 11,315,763
- Issue date Apr 26, 2022
- Applied Materials, Inc.
- Kallol Bera
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing system
- Patent number 11,251,056
- Issue date Feb 15, 2022
- EUGENE TECHNOLOGY CO., LTD.
- Sung Ho Kang
- F27 - FURNACES KILNS OVENS RETORTS
Information Patent Grant
Glass pallet for sputtering systems
- Patent number 11,133,158
- Issue date Sep 28, 2021
- View, Inc.
- Trevor Frank
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus for coating substrates
- Patent number 11,131,019
- Issue date Sep 28, 2021
- IHI Hauzer Techno Coating B.V.
- Don Derckx
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma processing apparatus
- Patent number 11,127,574
- Issue date Sep 21, 2021
- Shibaura Mechatronics Corporation
- Yoshio Kawamata
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus, method of manufacturing semiconduct...
- Patent number 11,072,859
- Issue date Jul 27, 2021
- Kokusai Electric Corporation
- Tsuyoshi Takeda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electrostatic chuck and semiconductor/liquid crystal manufacturing...
- Patent number 11,037,811
- Issue date Jun 15, 2021
- Shinko Electric Industries Co., Ltd.
- Norio Shiraiwa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Batch type substrate processing apparatus
- Patent number 11,031,214
- Issue date Jun 8, 2021
- EUGENE TECHNOLOGY CO., LTD.
- Jeong Hee Jo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing apparatus
- Patent number 11,004,665
- Issue date May 11, 2021
- Shibaura Mechatronics Corporation
- Yoshio Kawamata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
High throughput vacuum deposition sources and system
- Patent number 10,954,598
- Issue date Mar 23, 2021
- George Xinsheng Guo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Pretreatment assembly and method for treating work pieces
- Patent number 10,913,995
- Issue date Feb 9, 2021
- Stolle Machinery Company, LLC
- James W. Dominico
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Film formation apparatus
- Patent number 10,903,059
- Issue date Jan 26, 2021
- Shibaura Mechatronics Corporation
- Daisuke Ono
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for treating objects with plasma, use of this apparatus a...
- Patent number 10,903,058
- Issue date Jan 26, 2021
- COATING PLASMA INDUSTRIE
- Jocelyn Viard
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Vacuum processing apparatus and method for vacuum processing substr...
- Patent number 10,889,890
- Issue date Jan 12, 2021
- EVATEC AG
- Silvia Schwyn-Thony
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Shaped electrodes for improved plasma exposure from vertical plasma...
- Patent number 10,763,085
- Issue date Sep 1, 2020
- Applied Materials, Inc.
- Kallol Bera
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Planetary gear assembly for sputtering multiple balloon catheter di...
- Patent number 10,758,716
- Issue date Sep 1, 2020
- BIOSENSE WEBSTER (ISRAEL) LTD.
- Assaf Govari
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus
- Patent number 10,720,312
- Issue date Jul 21, 2020
- Tokyo Electron Limited
- Hiromi Nitadori
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus
- Patent number 10,636,627
- Issue date Apr 28, 2020
- Tokyo Electron Limited
- Hirofumi Kaneko
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 10,604,845
- Issue date Mar 31, 2020
- Tokyo Electron Limited
- Takayuki Karakawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus
- Patent number 10,584,416
- Issue date Mar 10, 2020
- Tokyo Electron Limited
- Hitoshi Kato
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma treatment apparatus and method of plasma treating a substrat...
- Patent number 10,515,784
- Issue date Dec 24, 2019
- Samsung Display Co., Ltd.
- Youngsik Yoon
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for forming a protective film
- Patent number 10,458,016
- Issue date Oct 29, 2019
- Tokyo Electron Limited
- Takeshi Kumagai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
METHOD AND DEVICES FOR PLASMA TREATMENT
- Publication number 20240222088
- Publication date Jul 4, 2024
- VOESTALPINE STAHL GMBH
- Pierre VANDEN BRANDE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
BATCH TYPE SUBSTRATE PROCESSING APPARATUS
- Publication number 20230282459
- Publication date Sep 7, 2023
- EUGENE TECHNOLOGY CO., LTD.
- Jeong Hee JO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CARRIER WITH VERTICAL GRID FOR SUPPORTING SUBSTRATES IN COATER
- Publication number 20230282458
- Publication date Sep 7, 2023
- VIEW, INC.
- Bo Garrett Neilan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CARRIER WITH VERTICAL GRID FOR SUPPORTING SUBSTRATES IN COATER
- Publication number 20220351950
- Publication date Nov 3, 2022
- VIEW, INC.
- Bo Garrett Neilan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GLASS PALLET FOR SPUTTERING SYSTEMS
- Publication number 20220037130
- Publication date Feb 3, 2022
- VIEW, INC.
- Trevor Frank
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
High throughput Vacuum Deposition Sources and System
- Publication number 20210164099
- Publication date Jun 3, 2021
- Ascentool, Inc.
- George Xinsheng Guo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Shaped Electrodes For Improved Plasma Exposure From Vertical Plasma...
- Publication number 20200395194
- Publication date Dec 17, 2020
- Applied Materials, Inc.
- Kallol Bera
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLANETARY GEAR ASSEMBLY FOR SPUTTERING MULTIPLE BALLOON CATHETER DI...
- Publication number 20200391015
- Publication date Dec 17, 2020
- BIOSENSE WEBSTER (ISRAEL) LTD.
- Assaf Govari
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CARRIER WITH VERTICAL GRID FOR SUPPORTING SUBSTRATES IN COATER
- Publication number 20200381223
- Publication date Dec 3, 2020
- VIEW, INC.
- Bo Neilan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
BATCH TYPE SUBSTRATE PROCESSING APPARATUS
- Publication number 20200350145
- Publication date Nov 5, 2020
- EUGENE TECHNOLOGY CO., LTD.
- Jeong Hee JO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEVICE, METHOD AND USE FOR THE COATING OF LENSES
- Publication number 20200140992
- Publication date May 7, 2020
- SCHNEIDER GMBH & CO. KG
- Gunter SCHNEIDER
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SYSTEM, METHOD AND SUPPORT FOR COATING EYEGLASS LENSES
- Publication number 20200140994
- Publication date May 7, 2020
- SCHNEIDER GMBH & CO. KG
- Gunter SCHNEIDER
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE SUPPORTS FOR A SPUTTERING DEVICE
- Publication number 20190382883
- Publication date Dec 19, 2019
- Corning Incorporated
- Xu Ouyang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA PROCESSING APPARATUS
- Publication number 20180286644
- Publication date Oct 4, 2018
- SHIBAURA MECHATRONICS CORPORATION
- Yoshio KAWAMATA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS FOR VACUUM DEPOSITION ON A SUBSTRATE AND METHOD FOR MASKI...
- Publication number 20180258519
- Publication date Sep 13, 2018
- Applied Materials, Inc.
- John M. White
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
VACUUM PROCESSING APPARATUS AND METHOD FOR VACUUM PROCESSING SUBSTR...
- Publication number 20180245212
- Publication date Aug 30, 2018
- Evatec AG
- Silvia Schwyn-Thony
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLANETARY GEAR ASSEMBLY FOR SPUTTERING MULTIPLE BALLOON CATHETER DI...
- Publication number 20180229011
- Publication date Aug 16, 2018
- BIOSENSE WEBSTER (ISRAEL) LTD.
- Assaf Govari
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Application
LARGE AREA ENERGETIC ION SOURCE
- Publication number 20180096823
- Publication date Apr 5, 2018
- INTEVAC, INC.
- Terry Bluck
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS FOR TREATING OBJECTS WITH PLASMA, USE OF THIS APPARATUS A...
- Publication number 20180053639
- Publication date Feb 22, 2018
- COATING PLASMA INDUSTRIE
- Jocelyn VIARD
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate Processing Apparatus and Substrate Processing Method
- Publication number 20180037995
- Publication date Feb 8, 2018
- TOKYO ELECTRON LIMITED
- Takayuki KARAKAWA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Device for Processing Plasma with a Circulation of Process Gas in M...
- Publication number 20170069468
- Publication date Mar 9, 2017
- MEYER BURGER (GERMANY) AG
- Hermann SCHLEMM
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
LINEAR SCANNING SPUTTERING SYSTEM AND METHOD
- Publication number 20160268110
- Publication date Sep 15, 2016
- INTEVAC, INC.
- David Ward Brown
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GLASS PALLET FOR SPUTTERING SYSTEMS
- Publication number 20160111260
- Publication date Apr 21, 2016
- VIEW, INC.
- Trevor Frank
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS AND SUBSTRATE PROCESSING APPARATUS PROV...
- Publication number 20150255258
- Publication date Sep 10, 2015
- TOKYO ELECTRON LIMITED
- Toshihisa Nozawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS AND METHOD FOR ETCHING ORGANIC LAYER
- Publication number 20140357087
- Publication date Dec 4, 2014
- SAMSUNG DISPLAY CO., LTD.
- Yoshiaki SAKAMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SPUTTERING SYSTEM AND METHOD USING COUNTERWEIGHT
- Publication number 20140332376
- Publication date Nov 13, 2014
- INTEVAC, INC.
- Vinay Shah
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method and Apparatus for Producing a Reflection-Reducing Layer on a...
- Publication number 20140329095
- Publication date Nov 6, 2014
- Harro Hagedorn
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA CVD APPARATUS
- Publication number 20140318454
- Publication date Oct 30, 2014
- Kabushiki Kaisha Kobe Seiko Sho (Kobe Steel, Ltd.)
- Hiroshi Tamagaki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SPUTTERING SYSTEM AND METHOD USING DIRECTION-DEPENDENT SCAN SPEED O...
- Publication number 20140311893
- Publication date Oct 23, 2014
- INTEVAC, INC.
- Vinay Shah
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Deposition System With A Rotating Drum
- Publication number 20140262765
- Publication date Sep 18, 2014
- Vaeco, Inc.
- Richard DeVito
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

of batches of workpieces

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Carrier with vertical grid for supporting substrates in coater

Device, method and use for the coating of lenses

Line-of-sight coating fixture and apparatus

Carrier with vertical grid for supporting substrates in coater

Coating apparatus and coating method

Carrier with vertical grid for supporting substrates in coater

Film forming method and film forming apparatus

High throughput vacuum deposition sources and system

Shaped electrodes for improved plasma exposure from vertical plasma...

Substrate processing system

Glass pallet for sputtering systems

Apparatus for coating substrates

Plasma processing apparatus

Substrate processing apparatus, method of manufacturing semiconduct...

Electrostatic chuck and semiconductor/liquid crystal manufacturing...

Batch type substrate processing apparatus

Plasma processing apparatus

High throughput vacuum deposition sources and system

Pretreatment assembly and method for treating work pieces

Film formation apparatus

Apparatus for treating objects with plasma, use of this apparatus a...

Vacuum processing apparatus and method for vacuum processing substr...

Shaped electrodes for improved plasma exposure from vertical plasma...

Planetary gear assembly for sputtering multiple balloon catheter di...

Substrate processing apparatus

Substrate processing apparatus

Substrate processing apparatus and substrate processing method

Substrate processing apparatus

Plasma treatment apparatus and method of plasma treating a substrat...

Method for forming a protective film

Patents Applicationslast 30 patents

METHOD AND DEVICES FOR PLASMA TREATMENT

BATCH TYPE SUBSTRATE PROCESSING APPARATUS

CARRIER WITH VERTICAL GRID FOR SUPPORTING SUBSTRATES IN COATER

CARRIER WITH VERTICAL GRID FOR SUPPORTING SUBSTRATES IN COATER

GLASS PALLET FOR SPUTTERING SYSTEMS

High throughput Vacuum Deposition Sources and System

Shaped Electrodes For Improved Plasma Exposure From Vertical Plasma...

PLANETARY GEAR ASSEMBLY FOR SPUTTERING MULTIPLE BALLOON CATHETER DI...

CARRIER WITH VERTICAL GRID FOR SUPPORTING SUBSTRATES IN COATER

BATCH TYPE SUBSTRATE PROCESSING APPARATUS

DEVICE, METHOD AND USE FOR THE COATING OF LENSES

SYSTEM, METHOD AND SUPPORT FOR COATING EYEGLASS LENSES

SUBSTRATE SUPPORTS FOR A SPUTTERING DEVICE

PLASMA PROCESSING APPARATUS

APPARATUS FOR VACUUM DEPOSITION ON A SUBSTRATE AND METHOD FOR MASKI...

VACUUM PROCESSING APPARATUS AND METHOD FOR VACUUM PROCESSING SUBSTR...

PLANETARY GEAR ASSEMBLY FOR SPUTTERING MULTIPLE BALLOON CATHETER DI...

LARGE AREA ENERGETIC ION SOURCE

APPARATUS FOR TREATING OBJECTS WITH PLASMA, USE OF THIS APPARATUS A...

Substrate Processing Apparatus and Substrate Processing Method

Device for Processing Plasma with a Circulation of Process Gas in M...

LINEAR SCANNING SPUTTERING SYSTEM AND METHOD

GLASS PALLET FOR SPUTTERING SYSTEMS

PLASMA PROCESSING APPARATUS AND SUBSTRATE PROCESSING APPARATUS PROV...

APPARATUS AND METHOD FOR ETCHING ORGANIC LAYER

SPUTTERING SYSTEM AND METHOD USING COUNTERWEIGHT

Method and Apparatus for Producing a Reflection-Reducing Layer on a...

PLASMA CVD APPARATUS

SPUTTERING SYSTEM AND METHOD USING DIRECTION-DEPENDENT SCAN SPEED O...

Deposition System With A Rotating Drum