of conductive layers

Industry

CPC
H01L21/28506

This industry / category may be too specific. Please go to a parent level for more data

Parent Industries

HELECTRICITY H01Electric elements H01LSEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Current Industry

H01L21/28506of conductive layers

Industries

Please log in for detailed analytics

Patents Grantslast 30 patents

Information Patent Grant
Semiconductor structure with air gap in pattern- dense region and m...
- Patent number 12,249,512
- Issue date Mar 11, 2025
- NANYA TECHNOLOGY CORPORATION
- Jar-Ming Ho
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor structure with air gap in pattern-dense region and me...
- Patent number 12,131,908
- Issue date Oct 29, 2024
- NANYA TECHNOLOGY CORPORATION
- Jar-Ming Ho
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Self-assembled borophene/graphene nanoribbon mixed-dimensional hete...
- Patent number 12,116,279
- Issue date Oct 15, 2024
- Northwestern University
- Mark C. Hersam
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Vapor deposition processes
- Patent number 12,065,739
- Issue date Aug 20, 2024
- ASM IP Holding B.V.
- Timo Hatanpää
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for chemical vapour deposition
- Patent number 11,970,765
- Issue date Apr 30, 2024
- Ionautics AB
- Henrik Pedersen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Deposition mask group, manufacturing method of electronic device, a...
- Patent number 11,939,659
- Issue date Mar 26, 2024
- Dai Nippon Printing Co., Ltd.
- Takuya Higuchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Enhanced spatial ALD of metals through controlled precursor mixing
- Patent number 11,887,856
- Issue date Jan 30, 2024
- Applied Materials, Inc.
- Kelvin Chan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for depositing fluorine/carbon-free conformal tungsten
- Patent number 11,887,855
- Issue date Jan 30, 2024
- Applied Materials, Inc.
- Xinyu Fu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Memory device and method for manufacturing the same
- Patent number 11,854,880
- Issue date Dec 26, 2023
- CHANGXIN MEMORY TECHNOLOGIES, INC.
- Tao Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
CVD based oxide-metal multi structure for 3D NAND memory devices
- Patent number 11,817,320
- Issue date Nov 14, 2023
- Applied Materials, Inc.
- Susmit Singha Roy
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Atomic layer deposition method for metal thin films
- Patent number 11,807,939
- Issue date Nov 7, 2023
- KOJUNDO CHEMICAL LABORATORY CO., LTD.
- Fumikazu Mizutani
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for preparing semiconductor device with air gap in pattern-d...
- Patent number 11,742,209
- Issue date Aug 29, 2023
- NANYA TECHNOLOGY CORPORATION
- Jar-Ming Ho
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Deposition mask group, manufacturing method of electronic device, a...
- Patent number 11,649,539
- Issue date May 16, 2023
- Dai Nippon Printing Co., Ltd.
- Takuya Higuchi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Deposition mask group, manufacturing method of electronic device, a...
- Patent number 11,566,316
- Issue date Jan 31, 2023
- Dai Nippon Printing Co., Ltd.
- Takuya Higuchi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
RF grounding configuration for pedestals
- Patent number 11,569,072
- Issue date Jan 31, 2023
- Applied Materials, Inc.
- Satya Thokachichu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Deposition of tellurium-containing thin films
- Patent number 11,408,068
- Issue date Aug 9, 2022
- Applied Materials, Inc.
- Thomas Knisley
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor device with air gap in pattern-dense region and metho...
- Patent number 11,309,186
- Issue date Apr 19, 2022
- NANYA TECHNOLOGY CORPORATION
- Jar-Ming Ho
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of processing substrate
- Patent number 11,236,425
- Issue date Feb 1, 2022
- Tokyo Electron Limited
- Kennan Mo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for depositing a metal layer on a wafer
- Patent number 11,222,785
- Issue date Jan 11, 2022
- United Semiconductor (Xiamen) Co., Ltd.
- Xijun Guo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Thin film transistor and manufacturing method thereof, gate driving...
- Patent number 11,205,726
- Issue date Dec 21, 2021
- Hefei Xinsheng Optoelectronics Technology Co., Ltd.
- Jufeng Yu
- G11 - INFORMATION STORAGE
Information Patent Grant
Processing system and method of forming a contact
- Patent number 11,114,320
- Issue date Sep 7, 2021
- Applied Materials, Inc.
- Gaurav Thareja
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Biosensor device and method for manufacturing thereof and method fo...
- Patent number 11,105,765
- Issue date Aug 31, 2021
- NEAT BIOTECH, INC.
- Chiun-Jye Yuan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Enhanced spatial ALD of metals through controlled precursor mixing
- Patent number 11,043,386
- Issue date Jun 22, 2021
- Applied Materials, Inc.
- Kelvin Chan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus, substrate holder and mounting tool
- Patent number 11,031,270
- Issue date Jun 8, 2021
- Kokusai Electric Corporation
- Atsushi Hirano
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Tuning work function of p-metal work function films through vapor d...
- Patent number 11,018,009
- Issue date May 25, 2021
- Applied Materials, Inc.
- Guoqiang Jian
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of manufacturing semiconductor device
- Patent number 11,018,004
- Issue date May 25, 2021
- Mitsubishi Electric Corporation
- Takahiro Ueno
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Metal insulator metal capacitor with extended capacitor plates
- Patent number 10,998,227
- Issue date May 4, 2021
- International Business Machines Corporation
- Chih-Chao Yang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods for depositing fluorine/carbon-free conformal tungsten
- Patent number 10,985,023
- Issue date Apr 20, 2021
- Applied Materials, Inc.
- Xinyu Fu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing semiconductor device and non-transitory com...
- Patent number 10,978,310
- Issue date Apr 13, 2021
- Kokusai Electric Corporation
- Tsukasa Kamakura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Selective deposition of hardmask
- Patent number 10,923,334
- Issue date Feb 16, 2021
- Applied Materials, Inc.
- Satya Thokachichu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
SEMICONDUCTOR MANUFACTURING APPARATUS WITH IMPROVED PRODUCTION YIELD
- Publication number 20240384404
- Publication date Nov 21, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Jia-Wei XU
- B08 - CLEANING
Information Patent Application
Vapor Deposition Processes
- Publication number 20240368763
- Publication date Nov 7, 2024
- ASM IP HOLDING B.V.
- Timo Hatanpää
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR APPARATUS, POWER CONVERTER AND MANUFACTURING METHOD F...
- Publication number 20240355874
- Publication date Oct 24, 2024
- Mitsubishi Electric Corporation
- Atsufumi INOUE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...
- Publication number 20240344194
- Publication date Oct 17, 2024
- Kokusai Electric Corporation
- Atsuhiko ASHITANI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR STRUCTURE WITH AIR GAP IN PATTERN-DENSE REGION AND ME...
- Publication number 20240339325
- Publication date Oct 10, 2024
- NANYA TECHNOLOGY CORPORATION
- JAR-MING HO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTRONIC PACKAGE STRUCTURE
- Publication number 20240304450
- Publication date Sep 12, 2024
- Advanced Semiconductor Engineering, Inc.
- An-Hsuan HSU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate and Preparation Method thereof, Integrated Passive Device...
- Publication number 20240266235
- Publication date Aug 8, 2024
- BEIJING BOE OPTOELECTRONICS TECHNOLOGY CO., LTD.
- Yifan WU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD, METHOD OF MANUFACTURING SEMICONDUCTOR...
- Publication number 20240247367
- Publication date Jul 25, 2024
- Kodusai Electric Corporation
- Koei KURIBAYASHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR PACKAGING METHOD
- Publication number 20240234151
- Publication date Jul 11, 2024
- Jusung Engineering Co., Ltd.
- Eick Hyun LIM
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS TO IMPROVE PRODUCTIVITY OF ADVANCED CVD W GAPFILL PROCESS
- Publication number 20240222128
- Publication date Jul 4, 2024
- Applied Materials, Inc.
- Mingrui ZHAO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR PACKAGING METHOD
- Publication number 20240136190
- Publication date Apr 25, 2024
- Jusung Engineering Co., Ltd.
- Eick Hyun LIM
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ATOMIC LAYER DEPOSITION METHOD FOR METAL THIN FILMS
- Publication number 20240060180
- Publication date Feb 22, 2024
- KOJUNDO CHEMICAL LABORATORY CO., LTD.
- Fumikazu MIZUTANI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR STRUCTURE WITH AIR GAP IN PATTERN-DENSE REGION AND ME...
- Publication number 20240055261
- Publication date Feb 15, 2024
- NANYA TECHNOLOGY CORPORATION
- JAR-MING HO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF DEPOSITING ATOMIC LAYER AND METHOD OF MANUFACTURING SEMIC...
- Publication number 20230420248
- Publication date Dec 28, 2023
- Samsung Electronics Co., Ltd.
- Hyunjun AHN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR STRUCTURE WITH AIR GAP IN PATTERN-DENSE REGION AND ME...
- Publication number 20230352307
- Publication date Nov 2, 2023
- NANYA TECHNOLOGY CORPORATION
- JAR-MING HO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR FORMING A COMPOSITE METAL FILM USING ATOMIC LAYER DEPOSI...
- Publication number 20230265559
- Publication date Aug 24, 2023
- Industry-University Cooperation Foundation Hanyang University ERICA Campus
- Tae Joo Park
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING METHOD, METHOD OF MANUFACTURING SEMICONDUCTOR...
- Publication number 20230268181
- Publication date Aug 24, 2023
- Kokusai Electric Corporation
- Arito OGAWA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ENHANCEMENT-MODE HEMT AND MANUFACTURING PROCESS OF THE SAME
- Publication number 20230246100
- Publication date Aug 3, 2023
- STMicroelectronics S.r.l.
- Ferdinando IUCOLANO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
RF GROUNDING CONFIGURATION FOR PEDESTALS
- Publication number 20230170190
- Publication date Jun 1, 2023
- Applied Materials, Inc.
- Satya THOKACHICHU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEPOSITION MASK GROUP, MANUFACTURING METHOD OF ELECTRONIC DEVICE, A...
- Publication number 20230132323
- Publication date Apr 27, 2023
- DAI NIPPON PRINTING CO., LTD.
- Takuya HIGUCHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Vapor Deposition Processes
- Publication number 20230063199
- Publication date Mar 2, 2023
- ASM IP HOLDING, B.V.
- Timo Hatanpää
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SELF-ASSEMBLED BOROPHENE/GRAPHENE NANORIBBON MIXED-DIMENSIONAL HETE...
- Publication number 20230008590
- Publication date Jan 12, 2023
- Northwestern University
- Mark C. Hersam
- B82 - NANO-TECHNOLOGY
Information Patent Application
FILM FORMING METHOD AND HEAT TREATMENT APPARATUS
- Publication number 20230009720
- Publication date Jan 12, 2023
- TOKYO ELECTRON LIMITED
- Yasuaki KIKUCHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
BACKSIDE REACTIVE INHIBITION GAS
- Publication number 20220415711
- Publication date Dec 29, 2022
- LAM RESEARCH CORPORATION
- Gang LIU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR MANUFACTURING APPARATUS WITH IMPROVED PRODUCTION YIELD
- Publication number 20220333236
- Publication date Oct 20, 2022
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Jia-Wei XU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR DEVICE WITH DUAL BARRIER LAYERS AND METHOD FOR FABRIC...
- Publication number 20220319991
- Publication date Oct 6, 2022
- NANYA TECHNOLOGY CORPORATION
- LIANG-PIN CHOU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MEMORY DEVICE AND METHOD FOR MANUFACTURING THE SAME
- Publication number 20220270922
- Publication date Aug 25, 2022
- CHANGXIN MEMORY TECHNOLOGIES, INC
- Tao CHEN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEPOSITION MASK GROUP, MANUFACTURING METHOD OF ELECTRONIC DEVICE, A...
- Publication number 20220106676
- Publication date Apr 7, 2022
- DAI NIPPON PRINTING CO., LTD.
- Takuya HIGUCHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
A METHOD AND APPARATUS FOR CHEMICAL VAPOUR DEPOSITION
- Publication number 20220098725
- Publication date Mar 31, 2022
- Ionautics AB
- Henrik Pedersen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR PREPARING SEMICONDUCTOR DEVICE WITH AIR GAP IN PATTERN-D...
- Publication number 20220059355
- Publication date Feb 24, 2022
- NANYA TECHNOLOGY CORPORATION
- JAR-MING HO
- H01 - BASIC ELECTRIC ELEMENTS

of conductive layers

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Semiconductor structure with air gap in pattern- dense region and m...

Semiconductor structure with air gap in pattern-dense region and me...

Self-assembled borophene/graphene nanoribbon mixed-dimensional hete...

Vapor deposition processes

Method and apparatus for chemical vapour deposition

Deposition mask group, manufacturing method of electronic device, a...

Enhanced spatial ALD of metals through controlled precursor mixing

Methods for depositing fluorine/carbon-free conformal tungsten

Memory device and method for manufacturing the same

CVD based oxide-metal multi structure for 3D NAND memory devices

Atomic layer deposition method for metal thin films

Method for preparing semiconductor device with air gap in pattern-d...

Deposition mask group, manufacturing method of electronic device, a...

Deposition mask group, manufacturing method of electronic device, a...

RF grounding configuration for pedestals

Deposition of tellurium-containing thin films

Semiconductor device with air gap in pattern-dense region and metho...

Method of processing substrate

Method for depositing a metal layer on a wafer

Thin film transistor and manufacturing method thereof, gate driving...

Processing system and method of forming a contact

Biosensor device and method for manufacturing thereof and method fo...

Enhanced spatial ALD of metals through controlled precursor mixing

Substrate processing apparatus, substrate holder and mounting tool

Tuning work function of p-metal work function films through vapor d...

Method of manufacturing semiconductor device

Metal insulator metal capacitor with extended capacitor plates

Methods for depositing fluorine/carbon-free conformal tungsten

Method of manufacturing semiconductor device and non-transitory com...

Selective deposition of hardmask

Patents Applicationslast 30 patents

SEMICONDUCTOR MANUFACTURING APPARATUS WITH IMPROVED PRODUCTION YIELD

Vapor Deposition Processes

SEMICONDUCTOR APPARATUS, POWER CONVERTER AND MANUFACTURING METHOD F...

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...

SEMICONDUCTOR STRUCTURE WITH AIR GAP IN PATTERN-DENSE REGION AND ME...

ELECTRONIC PACKAGE STRUCTURE

Substrate and Preparation Method thereof, Integrated Passive Device...

SUBSTRATE PROCESSING METHOD, METHOD OF MANUFACTURING SEMICONDUCTOR...

SEMICONDUCTOR PACKAGING METHOD

METHODS TO IMPROVE PRODUCTIVITY OF ADVANCED CVD W GAPFILL PROCESS

SEMICONDUCTOR PACKAGING METHOD

ATOMIC LAYER DEPOSITION METHOD FOR METAL THIN FILMS

SEMICONDUCTOR STRUCTURE WITH AIR GAP IN PATTERN-DENSE REGION AND ME...

METHOD OF DEPOSITING ATOMIC LAYER AND METHOD OF MANUFACTURING SEMIC...

SEMICONDUCTOR STRUCTURE WITH AIR GAP IN PATTERN-DENSE REGION AND ME...

METHOD FOR FORMING A COMPOSITE METAL FILM USING ATOMIC LAYER DEPOSI...

SUBSTRATE PROCESSING METHOD, METHOD OF MANUFACTURING SEMICONDUCTOR...

ENHANCEMENT-MODE HEMT AND MANUFACTURING PROCESS OF THE SAME

RF GROUNDING CONFIGURATION FOR PEDESTALS

DEPOSITION MASK GROUP, MANUFACTURING METHOD OF ELECTRONIC DEVICE, A...

Vapor Deposition Processes

SELF-ASSEMBLED BOROPHENE/GRAPHENE NANORIBBON MIXED-DIMENSIONAL HETE...

FILM FORMING METHOD AND HEAT TREATMENT APPARATUS

BACKSIDE REACTIVE INHIBITION GAS

SEMICONDUCTOR MANUFACTURING APPARATUS WITH IMPROVED PRODUCTION YIELD

SEMICONDUCTOR DEVICE WITH DUAL BARRIER LAYERS AND METHOD FOR FABRIC...

MEMORY DEVICE AND METHOD FOR MANUFACTURING THE SAME

DEPOSITION MASK GROUP, MANUFACTURING METHOD OF ELECTRONIC DEVICE, A...

A METHOD AND APPARATUS FOR CHEMICAL VAPOUR DEPOSITION

METHOD FOR PREPARING SEMICONDUCTOR DEVICE WITH AIR GAP IN PATTERN-D...