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Electric elements
H01L
SEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
H01L21/00
Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
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H01L21/28506
of conductive layers
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last 30 patents
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Patent Grant
Method and apparatus for chemical vapour deposition
Patent number
11,970,765
Issue date
Apr 30, 2024
Ionautics AB
Henrik Pedersen
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Deposition mask group, manufacturing method of electronic device, a...
Patent number
11,939,659
Issue date
Mar 26, 2024
Dai Nippon Printing Co., Ltd.
Takuya Higuchi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Enhanced spatial ALD of metals through controlled precursor mixing
Patent number
11,887,856
Issue date
Jan 30, 2024
Applied Materials, Inc.
Kelvin Chan
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Methods for depositing fluorine/carbon-free conformal tungsten
Patent number
11,887,855
Issue date
Jan 30, 2024
Applied Materials, Inc.
Xinyu Fu
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Memory device and method for manufacturing the same
Patent number
11,854,880
Issue date
Dec 26, 2023
CHANGXIN MEMORY TECHNOLOGIES, INC.
Tao Chen
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
CVD based oxide-metal multi structure for 3D NAND memory devices
Patent number
11,817,320
Issue date
Nov 14, 2023
Applied Materials, Inc.
Susmit Singha Roy
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Atomic layer deposition method for metal thin films
Patent number
11,807,939
Issue date
Nov 7, 2023
KOJUNDO CHEMICAL LABORATORY CO., LTD.
Fumikazu Mizutani
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method for preparing semiconductor device with air gap in pattern-d...
Patent number
11,742,209
Issue date
Aug 29, 2023
NANYA TECHNOLOGY CORPORATION
Jar-Ming Ho
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Deposition mask group, manufacturing method of electronic device, a...
Patent number
11,649,539
Issue date
May 16, 2023
Dai Nippon Printing Co., Ltd.
Takuya Higuchi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Deposition mask group, manufacturing method of electronic device, a...
Patent number
11,566,316
Issue date
Jan 31, 2023
Dai Nippon Printing Co., Ltd.
Takuya Higuchi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
RF grounding configuration for pedestals
Patent number
11,569,072
Issue date
Jan 31, 2023
Applied Materials, Inc.
Satya Thokachichu
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Deposition of tellurium-containing thin films
Patent number
11,408,068
Issue date
Aug 9, 2022
Applied Materials, Inc.
Thomas Knisley
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Semiconductor device with air gap in pattern-dense region and metho...
Patent number
11,309,186
Issue date
Apr 19, 2022
NANYA TECHNOLOGY CORPORATION
Jar-Ming Ho
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of processing substrate
Patent number
11,236,425
Issue date
Feb 1, 2022
Tokyo Electron Limited
Kennan Mo
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for depositing a metal layer on a wafer
Patent number
11,222,785
Issue date
Jan 11, 2022
United Semiconductor (Xiamen) Co., Ltd.
Xijun Guo
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Thin film transistor and manufacturing method thereof, gate driving...
Patent number
11,205,726
Issue date
Dec 21, 2021
Hefei Xinsheng Optoelectronics Technology Co., Ltd.
Jufeng Yu
G11 - INFORMATION STORAGE
Information
Patent Grant
Processing system and method of forming a contact
Patent number
11,114,320
Issue date
Sep 7, 2021
Applied Materials, Inc.
Gaurav Thareja
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Biosensor device and method for manufacturing thereof and method fo...
Patent number
11,105,765
Issue date
Aug 31, 2021
NEAT BIOTECH, INC.
Chiun-Jye Yuan
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Enhanced spatial ALD of metals through controlled precursor mixing
Patent number
11,043,386
Issue date
Jun 22, 2021
Applied Materials, Inc.
Kelvin Chan
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Substrate processing apparatus, substrate holder and mounting tool
Patent number
11,031,270
Issue date
Jun 8, 2021
Kokusai Electric Corporation
Atsushi Hirano
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Tuning work function of p-metal work function films through vapor d...
Patent number
11,018,009
Issue date
May 25, 2021
Applied Materials, Inc.
Guoqiang Jian
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of manufacturing semiconductor device
Patent number
11,018,004
Issue date
May 25, 2021
Mitsubishi Electric Corporation
Takahiro Ueno
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Metal insulator metal capacitor with extended capacitor plates
Patent number
10,998,227
Issue date
May 4, 2021
International Business Machines Corporation
Chih-Chao Yang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Methods for depositing fluorine/carbon-free conformal tungsten
Patent number
10,985,023
Issue date
Apr 20, 2021
Applied Materials, Inc.
Xinyu Fu
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method of manufacturing semiconductor device and non-transitory com...
Patent number
10,978,310
Issue date
Apr 13, 2021
Kokusai Electric Corporation
Tsukasa Kamakura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Selective deposition of hardmask
Patent number
10,923,334
Issue date
Feb 16, 2021
Applied Materials, Inc.
Satya Thokachichu
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Semiconductor device and method for manufacturing the same
Patent number
10,916,430
Issue date
Feb 9, 2021
Semiconductor Energy Laboratory Co., Ltd.
Shunpei Yamazaki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Array substrate of thin-film transistor liquid crystal display devi...
Patent number
10,914,998
Issue date
Feb 9, 2021
Shenzhen China Star Optoelectronics Technology Co., Ltd.
Xiangyang Xu
G09 - EDUCATION CRYPTOGRAPHY DISPLAY ADVERTISING SEALS
Information
Patent Grant
Methods, apparatus, and system for protecting cobalt formations fro...
Patent number
10,854,515
Issue date
Dec 1, 2020
GLOBALFOUNDRIES, INC.
Vimal Kamineni
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Workpiece processing technique
Patent number
10,847,372
Issue date
Nov 24, 2020
Varian Semiconductor Equipment Associates, Inc.
Morgan D. Evans
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
SEMICONDUCTOR PACKAGING METHOD
Publication number
20240136190
Publication date
Apr 25, 2024
Jusung Engineering Co., Ltd.
Eick Hyun LIM
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
ATOMIC LAYER DEPOSITION METHOD FOR METAL THIN FILMS
Publication number
20240060180
Publication date
Feb 22, 2024
KOJUNDO CHEMICAL LABORATORY CO., LTD.
Fumikazu MIZUTANI
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SEMICONDUCTOR STRUCTURE WITH AIR GAP IN PATTERN-DENSE REGION AND ME...
Publication number
20240055261
Publication date
Feb 15, 2024
NANYA TECHNOLOGY CORPORATION
JAR-MING HO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF DEPOSITING ATOMIC LAYER AND METHOD OF MANUFACTURING SEMIC...
Publication number
20230420248
Publication date
Dec 28, 2023
Samsung Electronics Co., Ltd.
Hyunjun AHN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR STRUCTURE WITH AIR GAP IN PATTERN-DENSE REGION AND ME...
Publication number
20230352307
Publication date
Nov 2, 2023
NANYA TECHNOLOGY CORPORATION
JAR-MING HO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR FORMING A COMPOSITE METAL FILM USING ATOMIC LAYER DEPOSI...
Publication number
20230265559
Publication date
Aug 24, 2023
Industry-University Cooperation Foundation Hanyang University ERICA Campus
Tae Joo Park
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SUBSTRATE PROCESSING METHOD, METHOD OF MANUFACTURING SEMICONDUCTOR...
Publication number
20230268181
Publication date
Aug 24, 2023
Kokusai Electric Corporation
Arito OGAWA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
ENHANCEMENT-MODE HEMT AND MANUFACTURING PROCESS OF THE SAME
Publication number
20230246100
Publication date
Aug 3, 2023
STMicroelectronics S.r.l.
Ferdinando IUCOLANO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
RF GROUNDING CONFIGURATION FOR PEDESTALS
Publication number
20230170190
Publication date
Jun 1, 2023
Applied Materials, Inc.
Satya THOKACHICHU
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
DEPOSITION MASK GROUP, MANUFACTURING METHOD OF ELECTRONIC DEVICE, A...
Publication number
20230132323
Publication date
Apr 27, 2023
DAI NIPPON PRINTING CO., LTD.
Takuya HIGUCHI
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Vapor Deposition Processes
Publication number
20230063199
Publication date
Mar 2, 2023
ASM IP HOLDING, B.V.
Timo Hatanpää
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SELF-ASSEMBLED BOROPHENE/GRAPHENE NANORIBBON MIXED-DIMENSIONAL HETE...
Publication number
20230008590
Publication date
Jan 12, 2023
Northwestern University
Mark C. Hersam
B82 - NANO-TECHNOLOGY
Information
Patent Application
FILM FORMING METHOD AND HEAT TREATMENT APPARATUS
Publication number
20230009720
Publication date
Jan 12, 2023
TOKYO ELECTRON LIMITED
Yasuaki KIKUCHI
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
BACKSIDE REACTIVE INHIBITION GAS
Publication number
20220415711
Publication date
Dec 29, 2022
LAM RESEARCH CORPORATION
Gang LIU
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SEMICONDUCTOR MANUFACTURING APPARATUS WITH IMPROVED PRODUCTION YIELD
Publication number
20220333236
Publication date
Oct 20, 2022
Taiwan Semiconductor Manufacturing Co., Ltd.
Jia-Wei XU
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SEMICONDUCTOR DEVICE WITH DUAL BARRIER LAYERS AND METHOD FOR FABRIC...
Publication number
20220319991
Publication date
Oct 6, 2022
NANYA TECHNOLOGY CORPORATION
LIANG-PIN CHOU
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MEMORY DEVICE AND METHOD FOR MANUFACTURING THE SAME
Publication number
20220270922
Publication date
Aug 25, 2022
CHANGXIN MEMORY TECHNOLOGIES, INC
Tao CHEN
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
DEPOSITION MASK GROUP, MANUFACTURING METHOD OF ELECTRONIC DEVICE, A...
Publication number
20220106676
Publication date
Apr 7, 2022
DAI NIPPON PRINTING CO., LTD.
Takuya HIGUCHI
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
A METHOD AND APPARATUS FOR CHEMICAL VAPOUR DEPOSITION
Publication number
20220098725
Publication date
Mar 31, 2022
Ionautics AB
Henrik Pedersen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR PREPARING SEMICONDUCTOR DEVICE WITH AIR GAP IN PATTERN-D...
Publication number
20220059355
Publication date
Feb 24, 2022
NANYA TECHNOLOGY CORPORATION
JAR-MING HO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...
Publication number
20210388487
Publication date
Dec 16, 2021
Kokusai Electric Corporation
Atsuhiko ASHITANI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
DEPOSITION MASK GROUP, MANUFACTURING METHOD OF ELECTRONIC DEVICE, A...
Publication number
20210371968
Publication date
Dec 2, 2021
DAI NIPPON PRINTING CO., LTD.
Takuya HIGUCHI
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SEMICONDUCTOR DEVICE WITH AIR GAP IN PATTERN-DENSE REGION AND METHO...
Publication number
20210335614
Publication date
Oct 28, 2021
NANYA TECHNOLOGY CORPORATION
JAR-MING HO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ENHANCED SPATIAL ALD OF METALS THROUGH CONTROLLED PRECURSOR MIXING
Publication number
20210305052
Publication date
Sep 30, 2021
Applied Materials, Inc.
Kelvin Chan
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
ORGANOMETALLIC ADDUCT COMPOUND AND METHOD OF MANUFACTURING INTEGRAT...
Publication number
20210284667
Publication date
Sep 16, 2021
ADEKA CORPORATION
Seungmin RYU
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
DEPOSITION OF TELLURIUM-CONTAINING THIN FILMS
Publication number
20210262084
Publication date
Aug 26, 2021
Applied Materials, Inc.
Thomas Knisley
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Methods For Depositing Fluorine/Carbon-Free Conformal Tungsten
Publication number
20210225655
Publication date
Jul 22, 2021
Applied Materials, Inc.
Xinyu Fu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
THIN FILM TRANSISTOR AND MANUFACTURING METHOD THEREOF, GATE DRIVING...
Publication number
20210167217
Publication date
Jun 3, 2021
HEFEI XINSHENG OPTOELECTRONICS TECHNOLOGY CO., LTD.
Jufeng YU
G09 - EDUCATION CRYPTOGRAPHY DISPLAY ADVERTISING SEALS
Information
Patent Application
BIS(ALKYLTETRAMETHYLCYCLOPENTADIENYL)ZINC, PRECURSOR FOR CHEMICAL V...
Publication number
20210163519
Publication date
Jun 3, 2021
KOJUNDO CHEMICAL LABORATORY CO., LTD.
Nobutaka TAKAHASHI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
GROUP VI METAL DEPOSITION PROCESS
Publication number
20210062331
Publication date
Mar 4, 2021
Entegris, Inc.
Philip S.H. CHEN
H01 - BASIC ELECTRIC ELEMENTS