of plane surfaces on abrasive tools

Industry

CPC
B24B53/02

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Parent Industries

BPERFORMING OPERATIONS TRANSPORTING B24Grinding technology B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING DRESSING OR CONDITIONING OF ABRADING SURFACES FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS B24B53/00Devices or means for dressing or conditioning abrasive surfaces

Current Industry

B24B53/02of plane surfaces on abrasive tools

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Carrier head having abrasive structure on retainer ring
- Patent number 12,011,803
- Issue date Jun 18, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Chang-Sheng Lin
- B24 - GRINDING POLISHING
Information Patent Grant
Planar grinder
- Patent number 12,000,764
- Issue date Jun 4, 2024
- Illinois Tool Works Inc.
- Kurt G. Adair
- G01 - MEASURING TESTING
Information Patent Grant
Polishing system with annular platen or polishing pad
- Patent number 11,780,046
- Issue date Oct 10, 2023
- Applied Materials, Inc.
- Paul D. Butterfield
- B24 - GRINDING POLISHING
Information Patent Grant
Conditioner and chemical mechanical polishing apparatus including t...
- Patent number 11,577,364
- Issue date Feb 14, 2023
- Samsung Electronics Co., Ltd.
- Yong-Hee Lee
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing system with support post and annular platen or polishing pad
- Patent number 11,511,388
- Issue date Nov 29, 2022
- Applied Materials, Inc.
- Paul D. Butterfield
- B24 - GRINDING POLISHING
Information Patent Grant
Method for dressing polishing pads
- Patent number 11,148,250
- Issue date Oct 19, 2021
- Siltronic AG
- Vladimir Dutschke
- B24 - GRINDING POLISHING
Information Patent Grant
Cleaning system for a polishing film
- Patent number 10,814,356
- Issue date Oct 27, 2020
- Tyco Electronics (Shanghai) Co. Ltd.
- Liming Xin
- B08 - CLEANING
Information Patent Grant
Surface grinding method and surface grinding device
- Patent number 10,751,852
- Issue date Aug 25, 2020
- Koyo Machine Industries Co., Ltd.
- Takahiro Hasegawa
- B24 - GRINDING POLISHING
Information Patent Grant
Method for microbially dressing a super abrasive tool
- Patent number 10,576,607
- Issue date Mar 3, 2020
- HUAQIAO UNIVERSITY
- Hui Huang
- C12 - BIOCHEMISTRY BEER SPIRITS WINE VINEGAR MICROBIOLOGY ENZYMOLOGY MUTATION...
Information Patent Grant
Polishing system with annular platen or polishing pad for substrate...
- Patent number 10,562,147
- Issue date Feb 18, 2020
- Applied Materials, Inc.
- Paul D. Butterfield
- B24 - GRINDING POLISHING
Information Patent Grant
Processing apparatus and processing method for workpiece
- Patent number 10,532,445
- Issue date Jan 14, 2020
- Disco Corporation
- Kazuma Sekiya
- B24 - GRINDING POLISHING
Information Patent Grant
CMP apparatus having polishing pad surface property measuring device
- Patent number 10,369,675
- Issue date Aug 6, 2019
- Ebara Corporation
- Hisanori Matsuo
- B24 - GRINDING POLISHING
Information Patent Grant
Carrier head having abrasive structure on retainer ring
- Patent number 10,300,578
- Issue date May 28, 2019
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chang-Sheng Lin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Chemical mechanical polishing system
- Patent number 10,265,829
- Issue date Apr 23, 2019
- Taiwan Semiconductor Manufacturing Co., Ltd
- Yu-Yi Tsai
- B24 - GRINDING POLISHING
Information Patent Grant
Self-sharpening polishing device with magnetorheological flexible p...
- Patent number 10,118,269
- Issue date Nov 6, 2018
- GUANGDONG UNIVERSITY OF TECHNOLOGY
- Jisheng Pan
- B24 - GRINDING POLISHING
Information Patent Grant
Method of CMP pad conditioning
- Patent number 9,908,213
- Issue date Mar 6, 2018
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Hsiu-Ming Yeh
- B24 - GRINDING POLISHING
Information Patent Grant
Method to shape the surface of chemical mechanical polishing pads
- Patent number 9,802,293
- Issue date Oct 31, 2017
- Rohm and Haas Electronic Materials CMP Holdings, Inc.
- Jeffrey James Hendron
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing pad cleaning systems employing fluid outlets oriented to...
- Patent number 9,687,960
- Issue date Jun 27, 2017
- Applied Materials, Inc.
- Paul D. Butterfield
- B24 - GRINDING POLISHING
Information Patent Grant
Carrier head having abrasive structure on retainer ring
- Patent number 9,604,340
- Issue date Mar 28, 2017
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chang-Sheng Lin
- B24 - GRINDING POLISHING
Information Patent Grant
Method and apparatus for conditioning a polishing pad
- Patent number 9,533,395
- Issue date Jan 3, 2017
- Ebara Corporation
- Mutsumi Tanikawa
- B24 - GRINDING POLISHING
Information Patent Grant
Method and apparatus for conditioning a polishing pad
- Patent number 9,469,013
- Issue date Oct 18, 2016
- Ebara Corporation
- Mutsumi Tanikawa
- B24 - GRINDING POLISHING
Information Patent Grant
Superbrasvie tools containing uniformly leveled superabrasive parti...
- Patent number 9,463,552
- Issue date Oct 11, 2016
- Chien-Min Sung
- B24 - GRINDING POLISHING
Information Patent Grant
Pad conditioning tool
- Patent number 9,457,450
- Issue date Oct 4, 2016
- Tera Xtal Technology Corporation
- Jun-Wen Chung
- B24 - GRINDING POLISHING
Information Patent Grant
Method of obtaining a sliding distance distribution of a dresser on...
- Patent number 9,108,292
- Issue date Aug 18, 2015
- Ebara Corporation
- Takahiro Shimano
- B24 - GRINDING POLISHING
Information Patent Grant
Grinding wheel dressing system
- Patent number 8,657,650
- Issue date Feb 25, 2014
- White Drive Products, Inc.
- Hollis N. White
- B24 - GRINDING POLISHING
Information Patent Grant
Grinding wheel dressing system
- Patent number 8,480,458
- Issue date Jul 9, 2013
- White Drive Products, Inc.
- Hollis N. White
- B24 - GRINDING POLISHING
Information Patent Grant
System for measuring and controlling the level of vacuum applied to...
- Patent number 8,025,555
- Issue date Sep 27, 2011
- TBW Industries Inc.
- Stephen J. Benner
- B24 - GRINDING POLISHING
Information Patent Grant
Method for controlling the forces applied to a vacuum-assisted pad...
- Patent number 7,901,267
- Issue date Mar 8, 2011
- TBW Industries, Inc.
- Stephen J. Benner
- B24 - GRINDING POLISHING
Information Patent Grant
Vacuum-assisted pad conditioning system
- Patent number 7,575,503
- Issue date Aug 18, 2009
- TBW Industries, Inc.
- Stephen J. Benner
- B24 - GRINDING POLISHING
Information Patent Grant
Dresser and apparatus for chemical mechanical polishing and method...
- Patent number 7,559,827
- Issue date Jul 14, 2009
- Elpida Memory, Inc.
- Toshiya Saito
- B24 - GRINDING POLISHING

Patents Applicationslast 30 patents

Information Patent Application
DRESSING MEMBER
- Publication number 20240308025
- Publication date Sep 19, 2024
- Disco Corporation
- Masaru NAGAMI
- B24 - GRINDING POLISHING
Information Patent Application
POLISHING SYSTEM WITH ANNULAR PLATEN OR POLISHING PAD
- Publication number 20220410335
- Publication date Dec 29, 2022
- Applied Materials, Inc.
- Paul D. Butterfield
- B24 - GRINDING POLISHING
Information Patent Application
POLISHING SYSTEM AND DRESSING DEVICE THEREOF
- Publication number 20220379433
- Publication date Dec 1, 2022
- Ta Liang Technology Co., Ltd.
- Chao-Chang Chen
- B24 - GRINDING POLISHING
Information Patent Application
PLANAR GRINDER
- Publication number 20200284700
- Publication date Sep 10, 2020
- Illinois Tool Works Inc.
- Kurt G. ADAIR
- B24 - GRINDING POLISHING
Information Patent Application
POLISHING SYSTEM WITH SUPPORT POST AND ANNULAR PLATEN OR POLISHING PAD
- Publication number 20200114487
- Publication date Apr 16, 2020
- Applied Materials, Inc.
- Paul D. Butterfield
- B24 - GRINDING POLISHING
Information Patent Application
MULTIPLE ZONE PAD CONDITIONING DISK
- Publication number 20200094375
- Publication date Mar 26, 2020
- Cana Diamond Technology, LLC
- Stan D. Tsai
- B24 - GRINDING POLISHING
Information Patent Application
COUPLING MECHANISM WITH SPHERICAL BEARING, METHOD OF DETERMINING BE...
- Publication number 20200039030
- Publication date Feb 6, 2020
- EBARA CORPORATION
- Hiroyuki SHINOZAKI
- B24 - GRINDING POLISHING
Information Patent Application
CARRIER HEAD HAVING ABRASIVE STRUCTURE ON RETAINER RING
- Publication number 20190270180
- Publication date Sep 5, 2019
- Taiwan Semiconductor Manufacturing Co., LTD
- Chang-Sheng Lin
- B24 - GRINDING POLISHING
Information Patent Application
METHOD FOR POLISHING WAFER
- Publication number 20190247974
- Publication date Aug 15, 2019
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Yu-Yi TSAI
- B24 - GRINDING POLISHING
Information Patent Application
SURFACE GRINDING METHOD AND SURFACE GRINDING DEVICE
- Publication number 20180257195
- Publication date Sep 13, 2018
- Koyo Machine Industries Co., Ltd.
- Takahiro HASEGAWA
- B24 - GRINDING POLISHING
Information Patent Application
PROCESSING APPARATUS AND PROCESSING METHOD FOR WORKPIECE
- Publication number 20180099377
- Publication date Apr 12, 2018
- Disco Corporation
- Kazuma SEKIYA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
POLISHING SYSTEM WITH ANNULAR PLATEN OR POLISHING PAD FOR SUBSTRATE...
- Publication number 20180056477
- Publication date Mar 1, 2018
- Applied Materials, Inc.
- Paul D. Butterfield
- B24 - GRINDING POLISHING
Information Patent Application
A SELF-SHARPENING POLISHING DEVICE WITH MAGNETORHEOLOGICAL FLEXIBLE...
- Publication number 20180021910
- Publication date Jan 25, 2018
- Guangdong University of Technology
- Jisheng PAN
- B24 - GRINDING POLISHING
Information Patent Application
PAD CONDITIONING TOOL HAVING SAPPHIRE DRESSING PARTICLES
- Publication number 20150044950
- Publication date Feb 12, 2015
- TERA XTAL TECHNOLOGY CORPORATION
- Wen-Yen Shen
- B24 - GRINDING POLISHING
Information Patent Application
METHOD OF OBTAINING A SLIDING DISTANCE DISTRIBUTION OF A DRESSER ON...
- Publication number 20140342642
- Publication date Nov 20, 2014
- Takahiro SHIMANO
- B24 - GRINDING POLISHING
Information Patent Application
PAD CONDITIONING TOOL AND METHOD OF MANUFACTURING THE SAME
- Publication number 20140256236
- Publication date Sep 11, 2014
- TERA XTAL TECHNOLOGY CORPORATION
- Jun-Wen Chung
- B24 - GRINDING POLISHING
Information Patent Application
GRINDING WHEEL DRESSING SYSTEM
- Publication number 20130295820
- Publication date Nov 7, 2013
- Hollis N. White
- B24 - GRINDING POLISHING
Information Patent Application
GRINDING WHEEL DRESSING SYSTEM
- Publication number 20130065492
- Publication date Mar 14, 2013
- WHITE DRIVE PRODUCTS, INC.
- Hollis N. White
- B24 - GRINDING POLISHING
Information Patent Application
METHOD AND APPARATUS FOR CONDITIONING A POLISHING PAD
- Publication number 20120315829
- Publication date Dec 13, 2012
- Mutsumi TANIKAWA
- B24 - GRINDING POLISHING
Information Patent Application
Superbrasvie Tools Containing Uniformly Leveled Superabrasive Parti...
- Publication number 20110293905
- Publication date Dec 1, 2011
- Chien-Min Sung
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
METHOD FOR MANUFACTURING GLASS SUBSTRATE FOR MAGNETIC RECORDING MEDIUM
- Publication number 20110189505
- Publication date Aug 4, 2011
- Asahi Glass Company, Limited
- Takeaki ONO
- B24 - GRINDING POLISHING
Information Patent Application
POLISHING APPARATUS, POLISHING AUXILIARY APPARATUS AND POLISHING ME...
- Publication number 20110034112
- Publication date Feb 10, 2011
- Showa Denko K.K.
- Susumu Sugano
- B24 - GRINDING POLISHING
Information Patent Application
POLISHING APPARATUS AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVIC...
- Publication number 20100240285
- Publication date Sep 23, 2010
- Satoko SETA
- B24 - GRINDING POLISHING
Information Patent Application
LAPPING PLATE-CONDITIONING GRINDSTONE SEGMENT, LAPPING PLATE-CONDIT...
- Publication number 20100190418
- Publication date Jul 29, 2010
- Kai YASUOKA
- B24 - GRINDING POLISHING
Information Patent Application
Diagnostic Methods During CMP Pad Dressing and Associated Systems
- Publication number 20090137187
- Publication date May 28, 2009
- Chien-Min Sung
- B24 - GRINDING POLISHING
Information Patent Application
PAD CONDITIONER OF SEMICONDUCTOR WAFER POLISHING APPARATUS AND MANU...
- Publication number 20090042494
- Publication date Feb 12, 2009
- SAMSUNG ELECTRONICS CO., LTD.
- Sung-Taek Moon
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
DRESSER AND APPARATUS FOR CHEMICAL MECHANICAL POLISHING AND METHOD...
- Publication number 20080233842
- Publication date Sep 25, 2008
- Elpida Memory, Inc.
- Toshiya Saito
- B24 - GRINDING POLISHING
Information Patent Application
Vacuum-assisted pad conditioning system and method utilizing an ape...
- Publication number 20070281592
- Publication date Dec 6, 2007
- Stephen J. Benner
- B24 - GRINDING POLISHING
Information Patent Application
CMP pad conditioner
- Publication number 20070218821
- Publication date Sep 20, 2007
- NORITAKE CO., LIMITED
- Tetsuya Nonoshita
- B24 - GRINDING POLISHING
Information Patent Application
Dressing method in vertical duplex-head surface grinding machine
- Publication number 20070021041
- Publication date Jan 25, 2007
- Yasutsugu Muranishi
- B24 - GRINDING POLISHING

of plane surfaces on abrasive tools

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Carrier head having abrasive structure on retainer ring

Planar grinder

Polishing system with annular platen or polishing pad

Conditioner and chemical mechanical polishing apparatus including t...

Polishing system with support post and annular platen or polishing pad

Method for dressing polishing pads

Cleaning system for a polishing film

Surface grinding method and surface grinding device

Method for microbially dressing a super abrasive tool

Polishing system with annular platen or polishing pad for substrate...

Processing apparatus and processing method for workpiece

CMP apparatus having polishing pad surface property measuring device

Carrier head having abrasive structure on retainer ring

Chemical mechanical polishing system

Self-sharpening polishing device with magnetorheological flexible p...

Method of CMP pad conditioning

Method to shape the surface of chemical mechanical polishing pads

Polishing pad cleaning systems employing fluid outlets oriented to...

Carrier head having abrasive structure on retainer ring

Method and apparatus for conditioning a polishing pad

Method and apparatus for conditioning a polishing pad

Superbrasvie tools containing uniformly leveled superabrasive parti...

Pad conditioning tool

Method of obtaining a sliding distance distribution of a dresser on...

Grinding wheel dressing system

Grinding wheel dressing system

System for measuring and controlling the level of vacuum applied to...

Method for controlling the forces applied to a vacuum-assisted pad...

Vacuum-assisted pad conditioning system

Dresser and apparatus for chemical mechanical polishing and method...

Patents Applicationslast 30 patents

DRESSING MEMBER

POLISHING SYSTEM WITH ANNULAR PLATEN OR POLISHING PAD

POLISHING SYSTEM AND DRESSING DEVICE THEREOF

PLANAR GRINDER

POLISHING SYSTEM WITH SUPPORT POST AND ANNULAR PLATEN OR POLISHING PAD

MULTIPLE ZONE PAD CONDITIONING DISK

COUPLING MECHANISM WITH SPHERICAL BEARING, METHOD OF DETERMINING BE...

CARRIER HEAD HAVING ABRASIVE STRUCTURE ON RETAINER RING

METHOD FOR POLISHING WAFER

SURFACE GRINDING METHOD AND SURFACE GRINDING DEVICE

PROCESSING APPARATUS AND PROCESSING METHOD FOR WORKPIECE

POLISHING SYSTEM WITH ANNULAR PLATEN OR POLISHING PAD FOR SUBSTRATE...

A SELF-SHARPENING POLISHING DEVICE WITH MAGNETORHEOLOGICAL FLEXIBLE...

PAD CONDITIONING TOOL HAVING SAPPHIRE DRESSING PARTICLES

METHOD OF OBTAINING A SLIDING DISTANCE DISTRIBUTION OF A DRESSER ON...

PAD CONDITIONING TOOL AND METHOD OF MANUFACTURING THE SAME

GRINDING WHEEL DRESSING SYSTEM

GRINDING WHEEL DRESSING SYSTEM

METHOD AND APPARATUS FOR CONDITIONING A POLISHING PAD

Superbrasvie Tools Containing Uniformly Leveled Superabrasive Parti...

METHOD FOR MANUFACTURING GLASS SUBSTRATE FOR MAGNETIC RECORDING MEDIUM

POLISHING APPARATUS, POLISHING AUXILIARY APPARATUS AND POLISHING ME...

POLISHING APPARATUS AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVIC...

LAPPING PLATE-CONDITIONING GRINDSTONE SEGMENT, LAPPING PLATE-CONDIT...

Diagnostic Methods During CMP Pad Dressing and Associated Systems

PAD CONDITIONER OF SEMICONDUCTOR WAFER POLISHING APPARATUS AND MANU...

DRESSER AND APPARATUS FOR CHEMICAL MECHANICAL POLISHING AND METHOD...

Vacuum-assisted pad conditioning system and method utilizing an ape...

CMP pad conditioner

Dressing method in vertical duplex-head surface grinding machine