of refractory metals or yttrium

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CPC
C23C16/405

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CCHEMISTRY METALLURGY C23Surface treatment C23CCOATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating

Current Industry

C23C16/405of refractory metals or yttrium

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Methods of producing composite vehicle braking components including...
- Patent number 12,366,274
- Issue date Jul 22, 2025
- GM Global Technology Operations LLC
- Zhongyi Liu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and system for forming metal-insulator-metal capacitors
- Patent number 12,369,336
- Issue date Jul 22, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd
- Wei-Liang Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Group 4 metal element-containing compound, precursor composition in...
- Patent number 12,365,700
- Issue date Jul 22, 2025
- Hansol Chemical Co., Ltd.
- Hyun-Kee Kim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor chamber components with advanced coating techniques
- Patent number 12,362,150
- Issue date Jul 15, 2025
- Applied Materials, Inc.
- Laksheswar Kalita
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film formation method and film formation apparatus
- Patent number 12,341,004
- Issue date Jun 24, 2025
- Tokyo Electron Limited
- Yumiko Kawano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Anti-reflective optical coatings and methods of forming the same
- Patent number 12,339,421
- Issue date Jun 24, 2025
- Corning Incorporated
- Ming-Huang Huang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Liquid discharge head, liquid discharge device, liquid discharge ap...
- Patent number 12,319,059
- Issue date Jun 3, 2025
- Ricoh Company, Ltd.
- Satoshi Mizukami
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for filling gap using atomic layer deposition
- Patent number 12,312,686
- Issue date May 27, 2025
- Samsung Electronics Co., Ltd.
- Eunhyoung Cho
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Pharmaceutical container with pH protective layer deposited by atom...
- Patent number 12,303,461
- Issue date May 20, 2025
- INNOVATIVE SCIENTIFIC PRODUCTS, INC.
- Robert Abrams
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Low refractive index surface layers and related methods
- Patent number 12,281,384
- Issue date Apr 22, 2025
- UChicago Argonne, LLC
- Elena Shevchenko
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate with fluorinated yttrium coatings, and methods of prepari...
- Patent number 12,270,104
- Issue date Apr 8, 2025
- Entegris, Inc.
- Nilesh Gunda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
FeCoV alloy and method for producing a strip from an FeCoV alloy
- Patent number 12,264,386
- Issue date Apr 1, 2025
- Vacuumschmelze GmbH & Co. KG
- Niklas Volbers
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for forming thin film
- Patent number 12,252,788
- Issue date Mar 18, 2025
- Soulbrain Co., Ltd.
- Changbong Yeon
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Smoothing surface roughness using atomic layer deposition
- Patent number 12,215,419
- Issue date Feb 4, 2025
- Eagle Technology, LLC
- James Throckmorton
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Zone-controlled rare-earth oxide ALD and CVD coatings
- Patent number 12,209,307
- Issue date Jan 28, 2025
- Applied Materials, Inc.
- Xiaowei Wu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for cleaning chamber of substrate processing apparatus
- Patent number 12,198,901
- Issue date Jan 14, 2025
- Jusung Engineering Co., Ltd.
- Yong Hyun Kim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Reactive thermal barrier coating
- Patent number 12,196,109
- Issue date Jan 14, 2025
- RTX Corporation
- Brian T. Hazel
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Multilayer coating for corrosion resistance
- Patent number 12,191,120
- Issue date Jan 7, 2025
- Applied Materials, Inc.
- Amir H. Tavakoli
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Protection method and device for secondary battery, secondary batte...
- Patent number 12,191,458
- Issue date Jan 7, 2025
- CONTEMPORARY AMPEREX TECHNOLOGY (HONG KONG) LIMITED
- Ting Li
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Soft-magnetic powder comprising coated particles
- Patent number 12,180,568
- Issue date Dec 31, 2024
- BASF SE
- Robert Prunchak
- B22 - CASTING POWDER METALLURGY
Information Patent Grant
Group VI precursor compounds
- Patent number 12,173,014
- Issue date Dec 24, 2024
- Entegris, Inc.
- David M. Ermert
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate comprising a silver-plated surface protected against silv...
- Patent number 12,163,217
- Issue date Dec 10, 2024
- The Swatch Group Research and Development Ltd.
- Christian Manasterski
- C22 - METALLURGY FERROUS OR NON-FERROUS ALLOYS TREATMENT OF ALLOYS OR NON-FER...
Information Patent Grant
Deposition of oxide thin films
- Patent number 12,154,785
- Issue date Nov 26, 2024
- ASM IP Holding B.V.
- Suvi P. Haukka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electrocatalyst with a NiMoO4 layer with nanoflower morphology
- Patent number 12,139,798
- Issue date Nov 12, 2024
- King Fahd University of Petroleum & Minerals
- Muhammad Ali Ehsan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Superconductor flux pinning without columnar defects
- Patent number 12,120,964
- Issue date Oct 15, 2024
- MetOx International, Inc.
- Mikhail Novozhilov
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Arene molybdenum (0) precursors for deposition of molybdenum films
- Patent number 12,116,376
- Issue date Oct 15, 2024
- Applied Materials, Inc.
- Andrea Leoncini
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Pharmaceutical container with pH protective layer deposited by atom...
- Patent number 12,109,173
- Issue date Oct 8, 2024
- INNOVATIVE SCIENTIFIC PRODUCTS, INC.
- Robert Abrams
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Atomic layer deposition of protective coatings for semiconductor pr...
- Patent number 12,104,246
- Issue date Oct 1, 2024
- Applied Materials, Inc.
- David Fenwick
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Patterning of complex metal oxide structures
- Patent number 12,099,294
- Issue date Sep 24, 2024
- University of Massachusetts
- James J. Watkins
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Methods of making nanopowders, nanoceramic materials and nanocerami...
- Patent number 12,098,107
- Issue date Sep 24, 2024
- Applied Materials, Inc.
- Guodong Zhan
- C01 - INORGANIC CHEMISTRY

Patents Applicationslast 30 patents

Information Patent Application
METHOD OF FILLING A GAP
- Publication number 20250232974
- Publication date Jul 17, 2025
- ASM IP HOLDING B.V.
- Sungdae Woo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS OF FORMING INDIUM MOLYBDENUM OXIDE LAYERS AND ASSOCIATED IN...
- Publication number 20250215558
- Publication date Jul 3, 2025
- ASM IP HOLDING B.V.
- Hameeda Jagalur Basheer
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PHOTOPROTECTIVE COATING FILMS AND METHODS FOR MANUFACTURING THEREOF
- Publication number 20250197994
- Publication date Jun 19, 2025
- Picosun Oy
- Ilkka MANNINEN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS AND SYSTEMS FOR REAL-TIME OPTIMIZATION AND CONTROL OF SUBST...
- Publication number 20250188616
- Publication date Jun 12, 2025
- TATA CONSULTANCY SERVICES LIMITED
- Utkarsh Prateek Brajesh SINHA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SELECTIVE NON-PLASMA DEPOSITION OF MASK PROTECTION MATERIAL
- Publication number 20250188608
- Publication date Jun 12, 2025
- TOKYO ELECTRON LIMITED
- Yu-Hao Tsai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SHIELDING COMPOUND, METHOD OF FORMING THIN FILM USING SHIELDING COM...
- Publication number 20250188599
- Publication date Jun 12, 2025
- Soulbrain Co., LTD
- Seung Hyun LEE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Smoothing Surface Roughness Using Atomic Layer Deposition
- Publication number 20250179631
- Publication date Jun 5, 2025
- Eagle Technology, LLC
- James THROCKMORTON
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COMPOSITION FOR DEPOSITING A MOLYBDENUM-CONTAINING THIN FILM, METHO...
- Publication number 20250179627
- Publication date Jun 5, 2025
- DNF CO., LTD.
- Jaewoon Kim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Robust Anode Materials, Anode Layers and Methods of Making and Form...
- Publication number 20250149559
- Publication date May 8, 2025
- Forge Nano, Inc.
- Jaime DuMont
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ANTI-PLASMA COATING
- Publication number 20250149302
- Publication date May 8, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chih-Kai Hu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CARBON-BASED CATALYTIC DEVICES
- Publication number 20250146148
- Publication date May 8, 2025
- Regents of the University of Minnesota
- Paul Jakob Dauenhauer
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COATINGS FOR ENHANCEMENT OF PROPERTIES AND PERFORMANCE OF SUBSTRATE...
- Publication number 20250129485
- Publication date Apr 24, 2025
- Bryan C. Hendrix
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
METHODS FOR TREATMENT OF HIGH-K MATERIALS TO REDUCE LEAKAGE CURRENT...
- Publication number 20250132147
- Publication date Apr 24, 2025
- Applied Materials, Inc.
- Jae Young PARK
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PRECURSOR FOR FORMING YTTRIUM- OR SCANDIUM-CONTAINING THIN FILM, ME...
- Publication number 20250122619
- Publication date Apr 17, 2025
- SK TRI CHEM CO., LTD.
- Han Sol OH
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PRECURSOR FOR FORMING SCANDIUM- OR YTTRIUM-CONTAINING THIN FILM, ME...
- Publication number 20250122613
- Publication date Apr 17, 2025
- SK TRI CHEM CO., LTD.
- Han Sol OH
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM DEPOSITING COMPOSITION INCLUDING GROUP 4 METAL ELEMENT-CONTAIN...
- Publication number 20250109496
- Publication date Apr 3, 2025
- UP CHEMICAL CO., LTD.
- Byung Kwan KIM
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CORROSION-RESISTANT MEMBER PRODUCTION METHOD AND LASER CVD DEVICE
- Publication number 20250101591
- Publication date Mar 27, 2025
- NIPPON LIGHT METAL COMPANY, LTD.
- Masanori ENDO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF MANUFACTURING DEHYDROGENATION CATALYST USING ATOMIC LAYER...
- Publication number 20250101587
- Publication date Mar 27, 2025
- Korea Institute of Science and Technology
- Yong Min KIM
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS FOR FORMING A DOPED HAFNIUM ZIRCONIUM OXIDE LAYER ON A SUBS...
- Publication number 20250101579
- Publication date Mar 27, 2025
- ASM IP HOLDING B.V.
- Alessandra Leonhardt
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SELECTIVE DEPOSITION OF GRAPHENE ON COBALT-CAPPED COPPER DUAL DAMAS...
- Publication number 20250096036
- Publication date Mar 20, 2025
- LAM RESEARCH CORPORATION
- Asish Parbatani
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTILAYER COATING FOR CORROSION RESISTANCE
- Publication number 20250069857
- Publication date Feb 27, 2025
- Applied Materials, Inc.
- Amir H. Tavakoli
- C04 - CEMENTS CONCRETE ARTIFICIAL STONE CERAMICS REFRACTORIES
Information Patent Application
THIN FILM MANUFACTURING METHOD AND THIN FILM
- Publication number 20250069886
- Publication date Feb 27, 2025
- Jusung Engineering Co., Ltd.
- Duck Ho KIM
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS OF FORMING CONFORMAL TRANSITION METAL DICHALCOGENIDE FILMS
- Publication number 20250051902
- Publication date Feb 13, 2025
- Applied Materials, Inc.
- Chandan Das
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FIELD-ASSISTED THERMAL CYCLICAL VAPOR DEPOSITION OF A HZO FILM
- Publication number 20250043419
- Publication date Feb 6, 2025
- ASM IP HOLDING B.V.
- Jerome Innocent
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Two-Axis Printing for More Uniform Films in an Atmospheric-Pressure...
- Publication number 20250034706
- Publication date Jan 30, 2025
- The Regents of the University of Michigan
- Neil P. Dasgupta
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEPOSITION OF OXIDE THIN FILMS
- Publication number 20250037995
- Publication date Jan 30, 2025
- ASM IP HOLDING B.V.
- Suvi P. Haukka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Anti-Coking Iron Spinel Surface
- Publication number 20250019816
- Publication date Jan 16, 2025
- NOVA CHEMICALS (INTERNATIONAL) S.A.
- Evan Mah
- C22 - METALLURGY FERROUS OR NON-FERROUS ALLOYS TREATMENT OF ALLOYS OR NON-FER...
Information Patent Application
ATOMIC LAYER DEPOSITION METHODS FOR MAKING OMNIDIRECTIONAL STRUCTUR...
- Publication number 20250011928
- Publication date Jan 9, 2025
- Toyota Motor Engineering & Manufacturing North America, Inc.
- Songtao Wu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
INTERFACE TUNING FOR EROSION AND CORROSION RESISTANT COATINGS FOR S...
- Publication number 20250003061
- Publication date Jan 2, 2025
- Applied Materials, Inc.
- Nitin Deepak
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING METHOD, METHOD OF MANUFACTURING SEMICONDUCTOR...
- Publication number 20250006490
- Publication date Jan 2, 2025
- Kokusai Electric Corporation
- Yoshimasa NAGATOMI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

of refractory metals or yttrium

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Methods of producing composite vehicle braking components including...

Method and system for forming metal-insulator-metal capacitors

Group 4 metal element-containing compound, precursor composition in...

Semiconductor chamber components with advanced coating techniques

Film formation method and film formation apparatus

Anti-reflective optical coatings and methods of forming the same

Liquid discharge head, liquid discharge device, liquid discharge ap...

Method and apparatus for filling gap using atomic layer deposition

Pharmaceutical container with pH protective layer deposited by atom...

Low refractive index surface layers and related methods

Substrate with fluorinated yttrium coatings, and methods of prepari...

FeCoV alloy and method for producing a strip from an FeCoV alloy

Method for forming thin film

Smoothing surface roughness using atomic layer deposition

Zone-controlled rare-earth oxide ALD and CVD coatings

Method for cleaning chamber of substrate processing apparatus

Reactive thermal barrier coating

Multilayer coating for corrosion resistance

Protection method and device for secondary battery, secondary batte...

Soft-magnetic powder comprising coated particles

Group VI precursor compounds

Substrate comprising a silver-plated surface protected against silv...

Deposition of oxide thin films

Electrocatalyst with a NiMoO4 layer with nanoflower morphology

Superconductor flux pinning without columnar defects

Arene molybdenum (0) precursors for deposition of molybdenum films

Pharmaceutical container with pH protective layer deposited by atom...

Atomic layer deposition of protective coatings for semiconductor pr...

Patterning of complex metal oxide structures

Methods of making nanopowders, nanoceramic materials and nanocerami...

Patents Applicationslast 30 patents

METHOD OF FILLING A GAP

METHODS OF FORMING INDIUM MOLYBDENUM OXIDE LAYERS AND ASSOCIATED IN...

PHOTOPROTECTIVE COATING FILMS AND METHODS FOR MANUFACTURING THEREOF

METHODS AND SYSTEMS FOR REAL-TIME OPTIMIZATION AND CONTROL OF SUBST...

SELECTIVE NON-PLASMA DEPOSITION OF MASK PROTECTION MATERIAL

SHIELDING COMPOUND, METHOD OF FORMING THIN FILM USING SHIELDING COM...

Smoothing Surface Roughness Using Atomic Layer Deposition

COMPOSITION FOR DEPOSITING A MOLYBDENUM-CONTAINING THIN FILM, METHO...

Robust Anode Materials, Anode Layers and Methods of Making and Form...

ANTI-PLASMA COATING

CARBON-BASED CATALYTIC DEVICES

COATINGS FOR ENHANCEMENT OF PROPERTIES AND PERFORMANCE OF SUBSTRATE...

METHODS FOR TREATMENT OF HIGH-K MATERIALS TO REDUCE LEAKAGE CURRENT...

PRECURSOR FOR FORMING YTTRIUM- OR SCANDIUM-CONTAINING THIN FILM, ME...

PRECURSOR FOR FORMING SCANDIUM- OR YTTRIUM-CONTAINING THIN FILM, ME...

FILM DEPOSITING COMPOSITION INCLUDING GROUP 4 METAL ELEMENT-CONTAIN...

CORROSION-RESISTANT MEMBER PRODUCTION METHOD AND LASER CVD DEVICE

METHOD OF MANUFACTURING DEHYDROGENATION CATALYST USING ATOMIC LAYER...

METHODS FOR FORMING A DOPED HAFNIUM ZIRCONIUM OXIDE LAYER ON A SUBS...

SELECTIVE DEPOSITION OF GRAPHENE ON COBALT-CAPPED COPPER DUAL DAMAS...

MULTILAYER COATING FOR CORROSION RESISTANCE

THIN FILM MANUFACTURING METHOD AND THIN FILM

METHODS OF FORMING CONFORMAL TRANSITION METAL DICHALCOGENIDE FILMS

FIELD-ASSISTED THERMAL CYCLICAL VAPOR DEPOSITION OF A HZO FILM

Two-Axis Printing for More Uniform Films in an Atmospheric-Pressure...

DEPOSITION OF OXIDE THIN FILMS

Anti-Coking Iron Spinel Surface

ATOMIC LAYER DEPOSITION METHODS FOR MAKING OMNIDIRECTIONAL STRUCTUR...

INTERFACE TUNING FOR EROSION AND CORROSION RESISTANT COATINGS FOR S...

SUBSTRATE PROCESSING METHOD, METHOD OF MANUFACTURING SEMICONDUCTOR...