of semiconducting materials

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CPC
C25F3/30

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CCHEMISTRY METALLURGY C25Electrolytic processing C25FPROCESSES FOR THE ELECTROLYTIC REMOVAL OF MATERIALS FROM OBJECTS APPARATUS THEREFOR C25F3/00Electrolytic etching or polishing

Current Industry

C25F3/30of semiconducting materials

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Controlled induced warping of electronic substrates via electroplating
- Patent number 11,236,436
- Issue date Feb 1, 2022
- Rockwell Collins, Inc.
- Richard Korneisel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Distribution system for chemical and/or electrolytic surface treatment
- Patent number 11,105,014
- Issue date Aug 31, 2021
- SEMSYSCO GMBH
- Andreas Gleissner
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and method for plating and/or polishing wafer
- Patent number 10,227,705
- Issue date Mar 12, 2019
- ACM Research (Shanghai) Inc.
- Jian Wang
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
Method and apparatus for pulse electrochemical polishing
- Patent number 9,865,476
- Issue date Jan 9, 2018
- ACM Research (Shanghai) Inc.
- Jian Wang
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
Nozzle for stress-free polishing metal layers on semiconductor wafers
- Patent number 9,724,803
- Issue date Aug 8, 2017
- ACM Research (Shanghai) Inc.
- Jian Wang
- B24 - GRINDING POLISHING
Information Patent Grant
Electrochemical polishing solution, process for electrochemically p...
- Patent number 9,551,085
- Issue date Jan 24, 2017
- BOE Technology Group Co., Ltd.
- Meiling Liao
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
Method and apparatus for electroplating
- Patent number 9,309,604
- Issue date Apr 12, 2016
- Novellus Systems, Inc.
- Steven Mayer
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Electro-polishing and porosification
- Patent number 9,249,523
- Issue date Feb 2, 2016
- SunPower Corporation
- Seung Bum Rim
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
Enhanced porosification
- Patent number 9,217,206
- Issue date Dec 22, 2015
- SunPower Corporation
- Joseph Behnke
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
Method and apparatus for simultaneously removing multiple conductiv...
- Patent number 9,214,359
- Issue date Dec 15, 2015
- Micron Technology, Inc.
- Dinesh Chopra
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Method and apparatus for electroplating
- Patent number 8,475,636
- Issue date Jul 2, 2013
- Novellus Systems, Inc.
- Steven Mayer
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for electroplating
- Patent number 8,475,644
- Issue date Jul 2, 2013
- Novellus Systems, Inc.
- Steven Mayer
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Topography reduction and control by selective accelerator removal
- Patent number 8,470,191
- Issue date Jun 25, 2013
- Novellus Systems, Inc.
- Steven T. Mayer
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Apparatus and methods for electrochemical processing of microfeatur...
- Patent number 8,313,631
- Issue date Nov 20, 2012
- Applied Materials Inc.
- Paul R. McHugh
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
Topography reduction and control by selective accelerator removal
- Patent number 8,158,532
- Issue date Apr 17, 2012
- Novellus Systems, Inc.
- Steven T. Mayer
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Apparatus and methods for electrochemical processing of microfeatur...
- Patent number 7,842,173
- Issue date Nov 30, 2010
- Semitool, Inc.
- Paul R. McHugh
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
Pad-assisted electropolishing
- Patent number 7,686,935
- Issue date Mar 30, 2010
- Novellus Systems, Inc.
- Steven T. Mayer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor processing methods of removing conductive material
- Patent number 7,367,871
- Issue date May 6, 2008
- Micron Technology, Inc.
- Trung Tri Doan
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Methods of producing and polishing semiconductor device and polishi...
- Patent number 7,186,322
- Issue date Mar 6, 2007
- Sony Corporation
- Shuzo Sato
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Method for simultaneously removing multiple conductive materials fr...
- Patent number 7,129,160
- Issue date Oct 31, 2006
- Micron Technology, Inc.
- Dinesh Chopra
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Semiconductor processing methods of removing conductive material
- Patent number 7,056,194
- Issue date Jun 6, 2006
- Micron Technology, Inc.
- Trung Tri Doan
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Methods of producing and polishing semiconductor device and polishi...
- Patent number 6,797,623
- Issue date Sep 28, 2004
- Sony Corporation
- Shuzo Sato
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Semiconductor processing methods of removing conductive material
- Patent number 6,790,130
- Issue date Sep 14, 2004
- Micron Technology, Inc.
- Trung Tri Doan
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Semiconductor processing methods of removing conductive material
- Patent number 6,582,281
- Issue date Jun 24, 2003
- Micron Technology, Inc.
- Trung Tri Doan
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Apparatus for photoelectrochemical polishing of silicon wafers
- Patent number 6,319,370
- Issue date Nov 20, 2001
- Rodel Holdings Inc.
- Lizhong Sun
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
Method for photoelectrochemical polishing of silicon wafers
- Patent number 6,074,546
- Issue date Jun 13, 2000
- Rodel Holdings, Inc.
- Lizhong Sun
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
Method of fabricating a semiconductor structure
- Patent number 5,911,864
- Issue date Jun 15, 1999
- Northrop Grumman Corporation
- Graeme W. Eldridge
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
3293162
- Patent number 3,293,162
- Issue date Dec 20, 1966
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
3073764
- Patent number 3,073,764
- Issue date Jan 15, 1963
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
3010885
- Patent number 3,010,885
- Issue date Nov 28, 1961
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR

Patents Applicationslast 30 patents

Information Patent Application
Polishing Device for Indium Phosphide Substrate, and Polishing Process
- Publication number 20240035192
- Publication date Feb 1, 2024
- THE 13TH RESEARCH INSTITUTE OF CHINA ELECTRONICS TECHNOLOGY GROUP CORPORATION
- Shujie WANG
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
METHOD FOR PLANARIZING CIS-BASED THIN FILM, CIS-BASED THIN FILM MAN...
- Publication number 20230290899
- Publication date Sep 14, 2023
- Korea Institute of Science and Technology
- Doh Kwon LEE
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
Controlled Induced Warping of Electronic Substrates via Electroplating
- Publication number 20210230765
- Publication date Jul 29, 2021
- Rockwell Collins, Inc.
- Richard Korneisel
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
DISTRIBUTION SYSTEM FOR CHEMICAL AND/OR ELECTROLYTIC SURFACE TREATMENT
- Publication number 20190032240
- Publication date Jan 31, 2019
- Semsysco GmbH
- ANDREAS GLEISSNER
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
APPARATUS AND METHOD FOR PLATING AND/OR POLISHING WAFER
- Publication number 20160115613
- Publication date Apr 28, 2016
- ACM Research (Shanghai) Inc.
- Jian Wang
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
ELECTROCHEMICAL POLISHING SOLUTION, PROCESS FOR ELECTROCHEMICALLY P...
- Publication number 20150247255
- Publication date Sep 3, 2015
- BOE TECHNOLOGY GROUP CO., LTD.
- Meiling Liao
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
METHOD AND APPARATUS FOR PULSE ELECTROCHEMICAL POLISHING
- Publication number 20150155183
- Publication date Jun 4, 2015
- ACM Research (Shanghai) Inc.
- Jian Wang
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
ELECTRO-POLISHING AND POROSIFICATION
- Publication number 20150090605
- Publication date Apr 2, 2015
- Seung Bum Rim
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
ENHANCED POROSIFICATION
- Publication number 20150090606
- Publication date Apr 2, 2015
- Joseph Behnke
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
METHOD AND APPARATUS FOR SIMULTANEOUSLY REMOVING MULTIPLE CONDUCTIV...
- Publication number 20140377953
- Publication date Dec 25, 2014
- Dinesh Chopra
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
METHOD AND APPARATUS FOR ELECTROPLATING
- Publication number 20130327650
- Publication date Dec 12, 2013
- Steven Mayer
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
APPARATUS AND METHODS FOR ELECTROCHEMICAL PROCESSING OF MICROFEATUR...
- Publication number 20130075265
- Publication date Mar 28, 2013
- Applied Materials Inc.
- Paul R. McHugh
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
APPARATUS AND METHODS FOR ELECTROCHEMICAL PROCESSING OF MICROFEATUR...
- Publication number 20110042224
- Publication date Feb 24, 2011
- Semitool, Inc.
- Paul R. McHugh
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
METHOD OF REAR SURFACE TREATMENT, ANALYSIS METHOD OF INTEGRATED CIR...
- Publication number 20100193373
- Publication date Aug 5, 2010
- NEC ELECTRONICS CORPORATION
- HIDEKI KITAHATA
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
METHOD OF REAR SURFACE TREATMENT, ANALYSIS METHOD OF INTEGRATED CIR...
- Publication number 20100193374
- Publication date Aug 5, 2010
- NEC ELECTRONICS CORPORATION
- HIDEKI KITAHATA
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
METHOD AND APPARATUS FOR ELECTROPLATING
- Publication number 20100116672
- Publication date May 13, 2010
- Novellus Systems, Inc.
- Steven Mayer
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
METHOD AND APPARATUS FOR ELECTROPLATING
- Publication number 20100044236
- Publication date Feb 25, 2010
- Novellus Systems, Inc.
- Steven Mayer
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
Polishing Composition and Polishing Method Using the Same
- Publication number 20100038584
- Publication date Feb 18, 2010
- FUJIMI INCORPORATED
- Tianbao DU
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
METHOD OF FORMING AN ELECTRONIC DEVICE INCLUDING REMOVING A DIFFERE...
- Publication number 20090280588
- Publication date Nov 12, 2009
- Leo Mathew
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
Topography reduction and control by selective accelerator removal
- Publication number 20090277867
- Publication date Nov 12, 2009
- Novellus Systems, Inc.
- Steven T. Mayer
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
Topography reduction and control by selective accelerator removal
- Publication number 20090280649
- Publication date Nov 12, 2009
- Novellus Systems, Inc.
- Steven T. Mayer
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
Pad-assisted electropolishing
- Publication number 20090277802
- Publication date Nov 12, 2009
- Novellus Systems, Inc.
- Steven T. Mayer
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
Pad-assisted electropolishing
- Publication number 20090266707
- Publication date Oct 29, 2009
- Novellus Systems, Inc.
- Steven T. Mayer
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
Electrolytic polishing method of substrate
- Publication number 20090107851
- Publication date Apr 30, 2009
- Akira Kodera
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
Method and system for controlled material removal by electrochemica...
- Publication number 20090020437
- Publication date Jan 22, 2009
- Bulent M. Basol
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
Ultrasonic electropolishing of conductive material
- Publication number 20080213995
- Publication date Sep 4, 2008
- Tatyana N. Andryushchenko
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
Apparatus and methods for electrochemical processing of microfeatur...
- Publication number 20080179180
- Publication date Jul 31, 2008
- Paul R. McHugh
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
ELECTROLYTE FORMULATION FOR ELECTROCHEMICAL MECHANICAL PLANARIZATION
- Publication number 20080142375
- Publication date Jun 19, 2008
- Francois Doniat
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
METHOD AND APPARATUS FOR SIMULTANEOUSLY REMOVING MULTIPLE CONDUCTIV...
- Publication number 20080045009
- Publication date Feb 21, 2008
- Micron Technology, Inc.
- Dinesh Chopra
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
Semiconductor processing methods of removing conductive material
- Publication number 20060223425
- Publication date Oct 5, 2006
- Trung Tri Doan
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR

of semiconducting materials

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Controlled induced warping of electronic substrates via electroplating

Distribution system for chemical and/or electrolytic surface treatment

Apparatus and method for plating and/or polishing wafer

Method and apparatus for pulse electrochemical polishing

Nozzle for stress-free polishing metal layers on semiconductor wafers

Electrochemical polishing solution, process for electrochemically p...

Method and apparatus for electroplating

Electro-polishing and porosification

Enhanced porosification

Method and apparatus for simultaneously removing multiple conductiv...

Method and apparatus for electroplating

Method and apparatus for electroplating

Topography reduction and control by selective accelerator removal

Apparatus and methods for electrochemical processing of microfeatur...

Topography reduction and control by selective accelerator removal

Apparatus and methods for electrochemical processing of microfeatur...

Pad-assisted electropolishing

Semiconductor processing methods of removing conductive material

Methods of producing and polishing semiconductor device and polishi...

Method for simultaneously removing multiple conductive materials fr...

Semiconductor processing methods of removing conductive material

Methods of producing and polishing semiconductor device and polishi...

Semiconductor processing methods of removing conductive material

Semiconductor processing methods of removing conductive material

Apparatus for photoelectrochemical polishing of silicon wafers

Method for photoelectrochemical polishing of silicon wafers

Method of fabricating a semiconductor structure

3293162

3073764

3010885

Patents Applicationslast 30 patents

Polishing Device for Indium Phosphide Substrate, and Polishing Process

METHOD FOR PLANARIZING CIS-BASED THIN FILM, CIS-BASED THIN FILM MAN...

Controlled Induced Warping of Electronic Substrates via Electroplating

DISTRIBUTION SYSTEM FOR CHEMICAL AND/OR ELECTROLYTIC SURFACE TREATMENT

APPARATUS AND METHOD FOR PLATING AND/OR POLISHING WAFER

ELECTROCHEMICAL POLISHING SOLUTION, PROCESS FOR ELECTROCHEMICALLY P...

METHOD AND APPARATUS FOR PULSE ELECTROCHEMICAL POLISHING

ELECTRO-POLISHING AND POROSIFICATION

ENHANCED POROSIFICATION

METHOD AND APPARATUS FOR SIMULTANEOUSLY REMOVING MULTIPLE CONDUCTIV...

METHOD AND APPARATUS FOR ELECTROPLATING

APPARATUS AND METHODS FOR ELECTROCHEMICAL PROCESSING OF MICROFEATUR...

APPARATUS AND METHODS FOR ELECTROCHEMICAL PROCESSING OF MICROFEATUR...

METHOD OF REAR SURFACE TREATMENT, ANALYSIS METHOD OF INTEGRATED CIR...

METHOD OF REAR SURFACE TREATMENT, ANALYSIS METHOD OF INTEGRATED CIR...

METHOD AND APPARATUS FOR ELECTROPLATING

METHOD AND APPARATUS FOR ELECTROPLATING

Polishing Composition and Polishing Method Using the Same

METHOD OF FORMING AN ELECTRONIC DEVICE INCLUDING REMOVING A DIFFERE...

Topography reduction and control by selective accelerator removal

Topography reduction and control by selective accelerator removal

Pad-assisted electropolishing

Pad-assisted electropolishing

Electrolytic polishing method of substrate

Method and system for controlled material removal by electrochemica...

Ultrasonic electropolishing of conductive material

Apparatus and methods for electrochemical processing of microfeatur...

ELECTROLYTE FORMULATION FOR ELECTROCHEMICAL MECHANICAL PLANARIZATION

METHOD AND APPARATUS FOR SIMULTANEOUSLY REMOVING MULTIPLE CONDUCTIV...

Semiconductor processing methods of removing conductive material