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3073764
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Patent Grant
3073764
References
Source
Patent Number
3,073,764
Date Filed
Not available
Date Issued
Tuesday, January 15, 1963
61 years ago
CPC
H01L21/3063 - Electrolytic etching
C25F3/30 - of semiconducting materials
C25F7/00 - Constructional parts, or assemblies thereof, of cells for electrolytic removal of material from objects Servicing or operating
US Classifications
205 - Electrolysis: processes, compositions used therein, and methods of preparing the compositions
204 - Chemistry: electrical and wave energy
257 - Active solid-state devices
438 - Semiconductor device manufacturing: process
451 - Abrading
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