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WAFER PROCESSING METHOD
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Publication number 20230360977
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Publication date Nov 9, 2023
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Taiwan Semiconductor Manufacturing Co., Ltd.
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Yan-Hong LIU
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H01 - BASIC ELECTRIC ELEMENTS
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Semiconductor Device and Method
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Publication number 20230352563
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Publication date Nov 2, 2023
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Taiwan Semiconductor Manufacturing Co., Ltd.
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De-Wei Yu
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H01 - BASIC ELECTRIC ELEMENTS
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ETCHING METHOD
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Publication number 20230268191
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Publication date Aug 24, 2023
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TOKYO ELECTRON LIMITED
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Maju TOMURA
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H01 - BASIC ELECTRIC ELEMENTS
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HIGHLY SELECTIVE SILICON ETCHING
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Publication number 20230260802
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Publication date Aug 17, 2023
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Applied Materials, Inc.
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Daekyoung Kim
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H01 - BASIC ELECTRIC ELEMENTS
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CONTROL OF MASK CD
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Publication number 20230230807
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Publication date Jul 20, 2023
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LAM RESEARCH CORPORATION
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Beibei Jiang
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H01 - BASIC ELECTRIC ELEMENTS
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Semiconductor Device and Method
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Publication number 20230207665
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Publication date Jun 29, 2023
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Taiwan Semiconductor Manufacturing Co., Ltd.
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Chih-Teng Liao
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H01 - BASIC ELECTRIC ELEMENTS