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H01J2237/2605
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H
ELECTRICITY
H01
Electric elements
H01J
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
H01J2237/00
Discharge tubes exposing object to beam
Current Industry
H01J2237/2605
operating at elevated pressures
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Patents Grants
last 30 patents
Information
Patent Grant
Diffraction pattern detection in a transmission charged particle mi...
Patent number
11,004,655
Issue date
May 11, 2021
FEI Company
Bart Buijsse
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Vacuum condition controlling apparatus, system and method for speci...
Patent number
10,699,874
Issue date
Jun 30, 2020
Focus-eBeam Technology (Beijing) Co., Ltd.
Wei He
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Wide field atmospheric scanning electron microscope
Patent number
10,262,832
Issue date
Apr 16, 2019
Gerasimos Daniel Danilatos
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle beam device, sample observation method, sample pla...
Patent number
10,241,062
Issue date
Mar 26, 2019
Hitachi High-Technologies Corporation
Yusuke Ominami
G01 - MEASURING TESTING
Information
Patent Grant
Electron scanning microscope and image generation method
Patent number
10,157,724
Issue date
Dec 18, 2018
Hitachi High-Technologies Corporation
Shinsuke Kawanishi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Electron scanning microscope and image generation method
Patent number
9,875,877
Issue date
Jan 23, 2018
Hitachi High-Technologies Corporation
Shinsuke Kawanishi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle optical apparatus having a selectively positionabl...
Patent number
9,741,528
Issue date
Aug 22, 2017
Carl Zeiss Microscopy GmbH
Michael Albiez
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Electron beam microscope with improved imaging gas and method of use
Patent number
9,633,816
Issue date
Apr 25, 2017
FEI Company
Toby Shanley
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Diaphragm mounting member and charged particle beam device
Patent number
9,633,817
Issue date
Apr 25, 2017
Hitachi High-Technologies Corporation
Shinsuke Kawanishi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of using an environmental transmission electron microscope
Patent number
9,570,270
Issue date
Feb 14, 2017
FEI Company
Peter Christiaan Tiemeijer
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Holder assembly for cooperating with an environmental cell and an e...
Patent number
9,524,850
Issue date
Dec 20, 2016
FEI Company
Hendrik Willem Zandbergen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Observation apparatus and optical axis adjustment method
Patent number
9,466,457
Issue date
Oct 11, 2016
Hitachi High-Technologies Corporation
Yusuke Ominami
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Scanning electron microscope
Patent number
9,466,458
Issue date
Oct 11, 2016
B-NANO LTD.
Dov Shachal
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Scanning electron microscope, an interface and a method for observi...
Patent number
9,431,213
Issue date
Aug 30, 2016
B-Nano Ltd.
Dov Shachal
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle beam device and sample observation method
Patent number
9,418,818
Issue date
Aug 16, 2016
Hitachi High-Technologies Corporation
Yusuke Ominami
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle beam apparatus and sample observation method
Patent number
9,362,083
Issue date
Jun 7, 2016
Hitachi High-Technologies Corporation
Yusuke Ominami
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle beam instrument
Patent number
9,318,300
Issue date
Apr 19, 2016
Jeol Ltd.
Yasushi Hiroki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle beam device
Patent number
9,263,232
Issue date
Feb 16, 2016
Hitachi High-Technologies Corporation
Yusuke Ominami
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle beam device and sample observation method
Patent number
9,240,305
Issue date
Jan 19, 2016
Hitachi High-Technologies Corporation
Yusuke Ominami
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Detection method for use in charged-particle microscopy
Patent number
9,153,416
Issue date
Oct 6, 2015
FEI Company
Petr Hlavenka
G01 - MEASURING TESTING
Information
Patent Grant
Interface, a method for observing an object within a non-vacuum env...
Patent number
9,076,631
Issue date
Jul 7, 2015
Dov Shachal
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
High pressure charged particle beam system
Patent number
8,921,811
Issue date
Dec 30, 2014
FEI Company
Milos Toth
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Inspection system using scanning electron microscope
Patent number
8,890,067
Issue date
Nov 18, 2014
Samsung Display Co., Ltd.
Young-Gil Park
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Interface, a method for observing an object within a non-vacuum env...
Patent number
8,779,358
Issue date
Jul 15, 2014
Dov Shachal
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Detector for use in charged-particle microscopy
Patent number
8,735,849
Issue date
May 27, 2014
FEI Company
Petr Hlavenka
G01 - MEASURING TESTING
Information
Patent Grant
Electron microscope with an emitter operating in medium vacuum
Patent number
8,729,470
Issue date
May 20, 2014
DLA Instruments
David L. Adler
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for scanning electron microscope observation of sample float...
Patent number
8,698,079
Issue date
Apr 15, 2014
Hitachi High-Technologies Corporation
Masamichi Shiono
G01 - MEASURING TESTING
Information
Patent Grant
Charged particle radiation device
Patent number
8,692,195
Issue date
Apr 8, 2014
Hitachi High-Technologies Corporation
Sukehiro Ito
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Particle beam system
Patent number
8,598,525
Issue date
Dec 3, 2013
Carl Zeiss Microscopy GmbH
Dirk Zeidler
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Scanning transmission electron microscope using gas amplification
Patent number
8,299,432
Issue date
Oct 30, 2012
FEI Company
Milos Toth
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
DIFFRACTION PATTERN DETECTION IN A TRANSMISSION CHARGED PARTICLE MI...
Publication number
20200144022
Publication date
May 7, 2020
FEI Company
Bart BUIJSSE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
VACUUM CONDITION CONTROLLING APPARATUS, SYSTEM AND METHOD FOR SPECI...
Publication number
20200035448
Publication date
Jan 30, 2020
Focus-eBeam Technology (Beijing) Co., Ltd.
Wei He
G01 - MEASURING TESTING
Information
Patent Application
ELECTRON SCANNING MICROSCOPE AND IMAGE GENERATION METHOD
Publication number
20180122617
Publication date
May 3, 2018
Hitachi High-Technologies Corporation
Shinsuke KAWANISHI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ELECTRON BEAM MICROSCOPE WITH IMPROVED IMAGING GAS AND METHOD OF USE
Publication number
20160343537
Publication date
Nov 24, 2016
FEI Company
Toby Shanley
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ELECTRON SCANNING MICROSCOPE AND IMAGE GENERATION METHOD
Publication number
20160343538
Publication date
Nov 24, 2016
Hitachi High-Technologies Corporation
Shinsuke KAWANISHI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Charged Particle Beam Device and Sample Observation Method
Publication number
20150235803
Publication date
Aug 20, 2015
Hitachi High-Technologies Corpration
Yusuke Ominami
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Charged Particle Beam Instrument
Publication number
20150137001
Publication date
May 21, 2015
JEOL Ltd.
Yasushi Hiroki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
DETECTION METHOD FOR USE IN CHARGED-PARTICLE MICROSCOPY
Publication number
20140374593
Publication date
Dec 25, 2014
FEI Company
Petr Hlavenka
G01 - MEASURING TESTING
Information
Patent Application
INTERFACE, A METHOD FOR OBSERVING AN OBJECT WITHIN A NON-VACUUM ENV...
Publication number
20140361166
Publication date
Dec 11, 2014
Dov Shachal
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
INSPECTION SYSTEM USING SCANNING ELECTRON MICROSCOPE
Publication number
20140291514
Publication date
Oct 2, 2014
SAMSUNG DISPLAY CO., LTD.
Dong-Hyun GONG
G01 - MEASURING TESTING
Information
Patent Application
SCANNING ELECTRON MICROSCOPE, AN INTERFACE AND A METHOD FOR OBSERVI...
Publication number
20140117232
Publication date
May 1, 2014
B-NANO LTD.
Dov SHACHAL
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
INSPECTION SYSTEM USING SCANNING ELECTRON MICROSCOPE
Publication number
20130320211
Publication date
Dec 5, 2013
Young-Gil Park
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SCANNING ELECTRON MICROSCOPE
Publication number
20130284923
Publication date
Oct 31, 2013
Hitachi High-Technologies Corporation
Haruhiko Hatano
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR SCANNING ELECTRON MICROSCOPE OBSERVATION OF SAMPLE FLOAT...
Publication number
20130221217
Publication date
Aug 29, 2013
Hitachi High-Technologies Corporation
Masamichi Shiono
G01 - MEASURING TESTING
Information
Patent Application
Holder Assembly for Cooperating with an Environmental Cell and an E...
Publication number
20130213439
Publication date
Aug 22, 2013
DELFT UNIVERSITY OF TECHNOLOGY
Hendrik Willem Zandbergen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CHARGED PARTICLE RADIATION DEVICE
Publication number
20130026363
Publication date
Jan 31, 2013
Hitachi High-Technologies Corporation
Junichi KATANE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
INTERFACE, A METHOD FOR OBSERVING AN OBJECT WITHIN A NON-VACUUM ENV...
Publication number
20120241608
Publication date
Sep 27, 2012
Dov Shachal
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Detector for Use in Charged-Particle Microscopy
Publication number
20120205539
Publication date
Aug 16, 2012
FEI Company
Petr Hlavenka
G01 - MEASURING TESTING
Information
Patent Application
Particle Beam System
Publication number
20120199740
Publication date
Aug 9, 2012
CARL ZEISS NTS GMBH
Dirk Zeidler
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CHARGED PARTICLE RADIATION DEVICE
Publication number
20110291010
Publication date
Dec 1, 2011
Junichi Katane
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Electron Microscope
Publication number
20110139986
Publication date
Jun 16, 2011
JEOL Ltd.
Shigemasa Ohta
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
HIGH PRESSURE CHARGED PARTICLE BEAM SYSTEM
Publication number
20110031394
Publication date
Feb 10, 2011
FEI Company
William Ralph Knowles
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Electron Beam Apparatus
Publication number
20110006209
Publication date
Jan 13, 2011
JEOL Ltd.
Mitsutoshi Yoshikawa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Electron microscope with an emitter operating in medium vacuum
Publication number
20100314540
Publication date
Dec 16, 2010
David L. Adler
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
LAYERED SCANNING CHARGED PARTICLE APPARATUS PACKAGE HAVING AN EMBED...
Publication number
20100224778
Publication date
Sep 9, 2010
Lawrence P. Muray
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
LAYERED SCANNING CHARGED PARTICLE MICROSCOPE WITH DIFFERENTIAL PUMP...
Publication number
20100224777
Publication date
Sep 9, 2010
James P. Spallas
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
INTERFACE, A METHOD FOR OBSERVING AN OBJECT WITHIN A NON-VACUUM ENV...
Publication number
20100140470
Publication date
Jun 10, 2010
Dov Shachal
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SCANNING TRANSMISSION ELECTRON MICROSCOPE USING GAS AMPLIFICATION
Publication number
20100108881
Publication date
May 6, 2010
FEI Company
MILOS TOTH
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SCANNING ELECTRON MICROSCOPE
Publication number
20100090109
Publication date
Apr 15, 2010
Michio Hatano
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA AND ELECTRON BEAM ETCHING DEVICE AND METHOD
Publication number
20090288603
Publication date
Nov 26, 2009
Neal R. Rueger
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...