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operating with cathodic sputtering
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CPC
H01J37/34
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Parent Industries
H
ELECTRICITY
H01
Electric elements
H01J
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
H01J37/00
Discharge tubes with provision for introducing objects or material to be exposed to the discharge
Current Industry
H01J37/34
operating with cathodic sputtering
Industries
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Patents Grants
last 30 patents
Information
Patent Grant
Sputtering apparatus
Patent number
11,978,615
Issue date
May 7, 2024
Samsung Display Co., Ltd.
Hyun-Woo Kim
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Shielding device and thin-film-deposition equipment with the same
Patent number
11,972,936
Issue date
Apr 30, 2024
SKY TECH INC.
Jing-Cheng Lin
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method for manufacturing sputtering target, method for forming oxid...
Patent number
11,967,505
Issue date
Apr 23, 2024
Semiconductor Energy Laboratory Co., Ltd.
Shunpei Yamazaki
B82 - NANO-TECHNOLOGY
Information
Patent Grant
System and method for detecting abnormality of thin-film deposition...
Patent number
11,965,237
Issue date
Apr 23, 2024
Taiwan Semiconductor Manufacturing Company, Ltd
Wen-Hao Cheng
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of forming nickel silicide materials
Patent number
11,965,236
Issue date
Apr 23, 2024
Applied Materials, Inc.
Minrui Yu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Cr—Si sintered body
Patent number
11,967,493
Issue date
Apr 23, 2024
Tosoh Corporation
Hiroyuki Hara
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method and apparatus for controlling stress variation in a material...
Patent number
11,961,722
Issue date
Apr 16, 2024
SPTS Technologies Limited
Anthony Wilby
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Shielding device and thin-film-deposition equipment with the same
Patent number
11,961,724
Issue date
Apr 16, 2024
SKY TECH INC.
Jing-Cheng Lin
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Process kit having tall deposition ring for PVD chamber
Patent number
11,961,723
Issue date
Apr 16, 2024
Applied Materials, Inc.
David Gunther
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Plasma processing apparatus
Patent number
11,961,710
Issue date
Apr 16, 2024
Canon Anelva Corporation
Tadashi Inoue
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Liquid sputter target
Patent number
11,952,654
Issue date
Apr 9, 2024
EVATEC AG
Dominik Jaeger
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
High power pulse systems for surface processing
Patent number
11,955,324
Issue date
Apr 9, 2024
Jefferson Science Associates, LLC
Hui Tian
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Isolated volume seals and method of forming an isolated volume with...
Patent number
11,955,355
Issue date
Apr 9, 2024
Applied Materials, Inc.
Kirankumar Neelasandra Savandaiah
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
PVD system and collimator
Patent number
11,952,656
Issue date
Apr 9, 2024
Taiwan Semiconductor Manufacturing Company, Ltd
Kuan-Lin Chen
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Film formation apparatus
Patent number
11,955,367
Issue date
Apr 9, 2024
SHIBAURA MECHATRONICS CORPORATION
Shohei Tanabe
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Electromagnet pulsing effect on PVD step coverage
Patent number
11,952,655
Issue date
Apr 9, 2024
Applied Materials, Inc.
Kevin Kashefi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Tilted PVD source with rotating pedestal
Patent number
11,948,784
Issue date
Apr 2, 2024
Applied Materials, Inc.
Harish Penmethsa
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Chalcogenide sputtering target and method of making the same
Patent number
11,946,132
Issue date
Apr 2, 2024
Honeywell International Inc.
Michael R. Pinter
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Magnet arrangement for a plasma source for performing plasma treatm...
Patent number
11,942,311
Issue date
Mar 26, 2024
OERLIKON SURFACE SOLUTIONS AG, PFAFFIKON
Jörg Vetter
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Magnetic film and perpendicular magnetic recording medium
Patent number
11,939,663
Issue date
Mar 26, 2024
JX Metals Corporation
Manami Masuda
C22 - METALLURGY FERROUS OR NON-FERROUS ALLOYS TREATMENT OF ALLOYS OR NON-FER...
Information
Patent Grant
Process kit geometry for particle reduction in PVD processes
Patent number
11,935,732
Issue date
Mar 19, 2024
Applied Materials, Inc.
Adolph M. Allen
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method for particle removal from wafers through plasma modification...
Patent number
11,932,934
Issue date
Mar 19, 2024
Applied Materials, Inc.
Halbert Chong
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Sputtering system with a plurality of cathode assemblies
Patent number
11,932,932
Issue date
Mar 19, 2024
Alluxa, Inc.
Michael A. Scobey
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Shielding mechanism and thin-film-deposition equipment using the same
Patent number
11,929,242
Issue date
Mar 12, 2024
SKY TECH INC.
Jing-Cheng Lin
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Apparatus and a method of controlling thickness variation in a mate...
Patent number
11,913,109
Issue date
Feb 27, 2024
SPTS Technologies Limited
Tony Wilby
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Methods and apparatus for reducing sputtering of a grounded shield...
Patent number
11,915,917
Issue date
Feb 27, 2024
Applied Materials, Inc.
Alan Ritchie
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Methods and apparatus for processing a substrate
Patent number
11,913,107
Issue date
Feb 27, 2024
Applied Materials, Inc.
Yueh Sheng Ow
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method and device for homogeneously coating 3D substrates
Patent number
11,913,108
Issue date
Feb 27, 2024
FHR Anlagenbau GmbH
Sven Häberlein
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Multipactor plasma ignition devices and techniques
Patent number
11,915,916
Issue date
Feb 27, 2024
Eric Benjamin Frederick Gilbert
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Cleaning of sin with CCP plasma or RPS clean
Patent number
11,915,918
Issue date
Feb 27, 2024
Applied Materials, Inc.
Jothilingam Ramalingam
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
Information
Patent Application
TUNGSTEN SUBOXIDE CERAMIC TARGET
Publication number
20240133024
Publication date
Apr 25, 2024
SOLERAS ADVANCED COATINGS BV
Ignacio CARETTI GIANGASPRO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
DEPOSITION OF NON-STOICHIOMETRIC METAL COMPOUND LAYER
Publication number
20240133025
Publication date
Apr 25, 2024
SOLERAS ADVANCED COATINGS BV
Wilmert DE BOSSCHER
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SPUTTERING APPARATUS FOR COATING OF 3D-OBJECTS
Publication number
20240136156
Publication date
Apr 25, 2024
Evatec AG
Stephan VOSER
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
HOT-ROLLED COPPER ALLOY SHEET AND SPUTTERING TARGET
Publication number
20240124955
Publication date
Apr 18, 2024
MITSUBISHI MATERIALS CORPORATION
Yosuke NAKASATO
B22 - CASTING POWDER METALLURGY
Information
Patent Application
PLACING TABLE AND SUBSTRATE PROCESSING APPARATUS
Publication number
20240120182
Publication date
Apr 11, 2024
TOKYO ELECTRON LIMITED
Yusuke KIKUCHI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Deposition Of Piezoelectric Films
Publication number
20240114800
Publication date
Apr 4, 2024
Applied Materials, Inc.
Vijay Bhan Sharma
C04 - CEMENTS CONCRETE ARTIFICIAL STONE CERAMICS REFRACTORIES
Information
Patent Application
THIN FILM FORMING APPARATUS AND METHOD
Publication number
20240112897
Publication date
Apr 4, 2024
SEMES CO., LTD.
Sun Il KIM
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHODS AND APPARATUS FOR PHYSICAL VAPOR DEPOSITION (PVD) DIELECTRI...
Publication number
20240105433
Publication date
Mar 28, 2024
Applied Materials, Inc.
Jothilingam RAMALINGAM
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Semiconductor Device, Method and Machine of Manufacture
Publication number
20240093357
Publication date
Mar 21, 2024
Taiwan Semiconductor Manufacturing Co., Ltd.
Jen-Chun Wang
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SEMICONDUCTOR PROCESSING TOOL AND METHODS OF OPERATION
Publication number
20240096609
Publication date
Mar 21, 2024
Taiwan Semiconductor Manufacturing Company, Ltd.
Yen-Liang LIN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ION BEAM DEPOSITION OF A LOW RESISTIVITY METAL
Publication number
20240093356
Publication date
Mar 21, 2024
VEECO INSTRUMENTS INC.
Narasimhan SRINIVASAN
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SPUTTERING TARGET AND SPUTTERING APPARATUS INCLUDING THE SAME
Publication number
20240084441
Publication date
Mar 14, 2024
SAMSUNG DISPLAY CO., LTD.
HYUNEOK SHIN
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
MULTIPLE PLASMA ION SOURCE FOR INLINE SECONDARY ION MASS SPECTROMETRY
Publication number
20240090111
Publication date
Mar 14, 2024
Ming Hong YANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR FORMING AN LICOO2 FILM AND DEVICE FOR CARRYING OUT SAME
Publication number
20240084438
Publication date
Mar 14, 2024
Iaroslav Anatolevich Korolenko
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
PERMEANCE MAGNETIC ASSEMBLY
Publication number
20240087861
Publication date
Mar 14, 2024
Taiwan Semiconductor Manufacturing Co., LTD
Tsung-Jen YANG
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
DEPOSITION EQUIPMENT WITH SHIELDING MECHANISM
Publication number
20240068089
Publication date
Feb 29, 2024
SKY TECH INC.
JING-CHENG LIN
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SPUTTERING APPARATUS
Publication number
20240063003
Publication date
Feb 22, 2024
Canon ANELVA Corporation
Susumu KARINO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ION BEAM SOURCE, SUBSTRATE PROCESS APPARATUS INCLUDING THE SAME, AN...
Publication number
20240062996
Publication date
Feb 22, 2024
Samsung Electronics Co., Ltd.
SeungWan YOO
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
POTASSIUM SODIUM NIOBATE SPUTTERING TARGET AND PRODUCTION METHOD TH...
Publication number
20240052478
Publication date
Feb 15, 2024
JX Metals Corporation
Ryosuke Sakashita
C01 - INORGANIC CHEMISTRY
Information
Patent Application
DEPOSITION APPARATUS
Publication number
20240052477
Publication date
Feb 15, 2024
Canon ANELVA Corporation
Masahiro ATSUMI
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD OF DEPOSITING SILICON NITRIDE FILM, APPARATUS FOR DEPOSITING...
Publication number
20240055239
Publication date
Feb 15, 2024
Ulvac, Inc.
Yuta Ando
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
EROSION RATE MONITORING FOR WAFER FABRICATION EQUIPMENT
Publication number
20240030006
Publication date
Jan 25, 2024
Micron Technology, Inc.
Synn Nee Chow
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
COATED CUTTING TOOL WITH AN ALTERNATING LAYER COMPOSITION
Publication number
20240024957
Publication date
Jan 25, 2024
WALTER AG
Veit SCHIER
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Sputtering Target and Method for Producing Sputtering Target
Publication number
20240026525
Publication date
Jan 25, 2024
JX NIPPON MINING & METALS CORPORATION
Shuhei Murata
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
VACUUM DEPOSITION INTO TRENCHES AND VIAS
Publication number
20240021421
Publication date
Jan 18, 2024
Ascentool, Inc.
George Xinsheng Guo
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
DEVICE FOR REDUCING MISALIGNMENT BETWEEN SPUTTERING TARGET AND SHIELD
Publication number
20240021422
Publication date
Jan 18, 2024
Honeywell International Inc.
Bo Liu
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
FILM FORMING APPARATUS AND METHOD OF CONTROLLING FILM FORMING APPAR...
Publication number
20240021423
Publication date
Jan 18, 2024
TOKYO ELECTRON LIMITED
Yasuhiko KOJIMA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
Publication number
20240014005
Publication date
Jan 11, 2024
TOKYO ELECTRON LIMITED
Hiroyuki MATSUURA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Apparatus and a Method of Controlling Thickness Variation in a Mate...
Publication number
20240014018
Publication date
Jan 11, 2024
SPTS TECHNOLOGIES LIMITED
Tony WILBY
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
DEPOSITION APPARATUS, DEPOSITION TARGET STRUCTURE, AND METHOD
Publication number
20240014019
Publication date
Jan 11, 2024
Taiwan Semiconductor Manufacturing Co., Ltd.
Chia-Hsi WANG
H01 - BASIC ELECTRIC ELEMENTS