 
                 CPC
 CPC
                     H01J37/22
 H01J37/22
                     HITACHI HIGH-TECH CORPORATION
                                    HITACHI HIGH-TECH CORPORATION
                                 Keisuke  Igarashi
                                    Keisuke  Igarashi
                                 H01 - BASIC ELECTRIC ELEMENTS
                                    H01 - BASIC ELECTRIC ELEMENTS
                                 FEI Company
                                    FEI Company
                                 John J. Flanagan
                                    John J. Flanagan
                                 H01 - BASIC ELECTRIC ELEMENTS
                                    H01 - BASIC ELECTRIC ELEMENTS
                                 Jeol Ltd.
                                    Jeol Ltd.
                                 Tomohiro  Mihira
                                    Tomohiro  Mihira
                                 H01 - BASIC ELECTRIC ELEMENTS
                                    H01 - BASIC ELECTRIC ELEMENTS
                                 Samsung Electronics Co., Ltd.
                                    Samsung Electronics Co., Ltd.
                                 Jaehyung  Ahn
                                    Jaehyung  Ahn
                                 H01 - BASIC ELECTRIC ELEMENTS
                                    H01 - BASIC ELECTRIC ELEMENTS
                                 NuFlare Technology, Inc.
                                    NuFlare Technology, Inc.
                                 Masataka  Shiratsuchi
                                    Masataka  Shiratsuchi
                                 H01 - BASIC ELECTRIC ELEMENTS
                                    H01 - BASIC ELECTRIC ELEMENTS
                                 HITACHI HIGH-TECH CORPORATION
                                    HITACHI HIGH-TECH CORPORATION
                                 Masaki  Sugie
                                    Masaki  Sugie
                                 H01 - BASIC ELECTRIC ELEMENTS
                                    H01 - BASIC ELECTRIC ELEMENTS
                                 HITACHI HIGH-TECH CORPORATION
                                    HITACHI HIGH-TECH CORPORATION
                                 Wei Chean Tan
                                    Wei Chean Tan
                                 H01 - BASIC ELECTRIC ELEMENTS
                                    H01 - BASIC ELECTRIC ELEMENTS
                                 HITACHI HIGH-TECH CORPORATION
                                    HITACHI HIGH-TECH CORPORATION
                                 Yutaka  Okuyama
                                    Yutaka  Okuyama
                                 G06 - COMPUTING CALCULATING COUNTING
                                    G06 - COMPUTING CALCULATING COUNTING
                                 FEI Company
                                    FEI Company
                                 Yuchen  Deng
                                    Yuchen  Deng
                                 G06 - COMPUTING CALCULATING COUNTING
                                    G06 - COMPUTING CALCULATING COUNTING
                                 HITACHI HIGH-TECH CORPORATION
                                    HITACHI HIGH-TECH CORPORATION
                                 U  Oh
                                    U  Oh
                                 G06 - COMPUTING CALCULATING COUNTING
                                    G06 - COMPUTING CALCULATING COUNTING
                                 ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
                                    ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
                                 Dominik  Ehberger
                                    Dominik  Ehberger
                                 H01 - BASIC ELECTRIC ELEMENTS
                                    H01 - BASIC ELECTRIC ELEMENTS
                                 Carl Zeiss Microscopy GmbH
                                    Carl Zeiss Microscopy GmbH
                                 Josef  Biberger
                                    Josef  Biberger
                                 H01 - BASIC ELECTRIC ELEMENTS
                                    H01 - BASIC ELECTRIC ELEMENTS
                                 NuFlare Technology, Inc.
                                    NuFlare Technology, Inc.
                                 Koichi  Ishii
                                    Koichi  Ishii
                                 H01 - BASIC ELECTRIC ELEMENTS
                                    H01 - BASIC ELECTRIC ELEMENTS
                                 FEI Company
                                    FEI Company
                                 Pavel  Potocek
                                    Pavel  Potocek
                                 G06 - COMPUTING CALCULATING COUNTING
                                    G06 - COMPUTING CALCULATING COUNTING
                                 Carl Zeiss SMT GmbH
                                    Carl Zeiss SMT GmbH
                                 Amir  Avishai
                                    Amir  Avishai
                                 G06 - COMPUTING CALCULATING COUNTING
                                    G06 - COMPUTING CALCULATING COUNTING
                                 HITACHI HIGH-TECH CORPORATION
                                    HITACHI HIGH-TECH CORPORATION
                                 Mai  Yoshihara
                                    Mai  Yoshihara
                                 H01 - BASIC ELECTRIC ELEMENTS
                                    H01 - BASIC ELECTRIC ELEMENTS
                                 Carl Zeiss Microscopy GmbH
                                    Carl Zeiss Microscopy GmbH
                                 Stephan  Hiller
                                    Stephan  Hiller
                                 B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
                                    B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
                                 Germán  Sciaini
                                    Germán  Sciaini
                                 H01 - BASIC ELECTRIC ELEMENTS
                                    H01 - BASIC ELECTRIC ELEMENTS
                                 KLA Corporation
                                    KLA Corporation
                                 Xinrong  Jiang
                                    Xinrong  Jiang
                                 H01 - BASIC ELECTRIC ELEMENTS
                                    H01 - BASIC ELECTRIC ELEMENTS
                                 SCREEN Holdings Co., Ltd.
                                    SCREEN Holdings Co., Ltd.
                                 Yuji  Okita
                                    Yuji  Okita
                                 G06 - COMPUTING CALCULATING COUNTING
                                    G06 - COMPUTING CALCULATING COUNTING
                                 Applied Materials Israel Ltd.
                                    Applied Materials Israel Ltd.
                                 Guy  Shwartz
                                    Guy  Shwartz
                                 H01 - BASIC ELECTRIC ELEMENTS
                                    H01 - BASIC ELECTRIC ELEMENTS
                                 Imec VZW
                                    Imec VZW
                                 Gian Francesco Lorusso
                                    Gian Francesco Lorusso
                                 H01 - BASIC ELECTRIC ELEMENTS
                                    H01 - BASIC ELECTRIC ELEMENTS
                                 Jeol Ltd.
                                    Jeol Ltd.
                                 Motohiro  Nakamura
                                    Motohiro  Nakamura
                                 H01 - BASIC ELECTRIC ELEMENTS
                                    H01 - BASIC ELECTRIC ELEMENTS
                                 Applied Materials Israel Ltd.
                                    Applied Materials Israel Ltd.
                                 Ilya  Blayvas
                                    Ilya  Blayvas
                                 H01 - BASIC ELECTRIC ELEMENTS
                                    H01 - BASIC ELECTRIC ELEMENTS
                                 FEI Company
                                    FEI Company
                                 Mark  Najarian
                                    Mark  Najarian
                                 G06 - COMPUTING CALCULATING COUNTING
                                    G06 - COMPUTING CALCULATING COUNTING
                                 Jeol Ltd.
                                    Jeol Ltd.
                                 Takeshi  Otsuka
                                    Takeshi  Otsuka
                                 H01 - BASIC ELECTRIC ELEMENTS
                                    H01 - BASIC ELECTRIC ELEMENTS
                                 FIBICS INCORPORATED
                                    FIBICS INCORPORATED
                                 Michael William Phaneuf
                                    Michael William Phaneuf
                                 G06 - COMPUTING CALCULATING COUNTING
                                    G06 - COMPUTING CALCULATING COUNTING
                                 ASML Netherlands B.V.
                                    ASML Netherlands B.V.
                                 Thomas Jarik Huisman
                                    Thomas Jarik Huisman
                                 G06 - COMPUTING CALCULATING COUNTING
                                    G06 - COMPUTING CALCULATING COUNTING
                                 FEI Company
                                    FEI Company
                                 Umesh  Adiga
                                    Umesh  Adiga
                                 G06 - COMPUTING CALCULATING COUNTING
                                    G06 - COMPUTING CALCULATING COUNTING
                                 HITACHI HIGH-TECH CORPORATION
                                    HITACHI HIGH-TECH CORPORATION
                                 Takahiro  Nishihata
                                    Takahiro  Nishihata
                                 H01 - BASIC ELECTRIC ELEMENTS
                                    H01 - BASIC ELECTRIC ELEMENTS
                                 HITACHI HIGH-TECH CORPORATION
                                    HITACHI HIGH-TECH CORPORATION
                                 Takafumi  MIWA
                                    Takafumi  MIWA
                                 H01 - BASIC ELECTRIC ELEMENTS
                                    H01 - BASIC ELECTRIC ELEMENTS
                                 Taiwan Semiconductor Manufacturing Company, Ltd.
                                    Taiwan Semiconductor Manufacturing Company, Ltd.
                                 Jian-Ming  Zheng
                                    Jian-Ming  Zheng
                                 H01 - BASIC ELECTRIC ELEMENTS
                                    H01 - BASIC ELECTRIC ELEMENTS
                                 ASML NETHERLANDS B.V.
                                    ASML NETHERLANDS B.V.
                                 Hindrik Willem MOOK
                                    Hindrik Willem MOOK
                                 H01 - BASIC ELECTRIC ELEMENTS
                                    H01 - BASIC ELECTRIC ELEMENTS
                                 Hitachi High-Tech Corporation
                                    Hitachi High-Tech Corporation
                                 Minami  UCHIHO
                                    Minami  UCHIHO
                                 H01 - BASIC ELECTRIC ELEMENTS
                                    H01 - BASIC ELECTRIC ELEMENTS
                                 The University of Liverpool
                                    The University of Liverpool
                                 Nigel  BROWNING
                                    Nigel  BROWNING
                                 H01 - BASIC ELECTRIC ELEMENTS
                                    H01 - BASIC ELECTRIC ELEMENTS
                                 Axcelis Technologies, Inc.
                                    Axcelis Technologies, Inc.
                                 Scott Edwin Galica
                                    Scott Edwin Galica
                                 H01 - BASIC ELECTRIC ELEMENTS
                                    H01 - BASIC ELECTRIC ELEMENTS
                                 APPLIED MATERIALS ISRAEL LTD.
                                    APPLIED MATERIALS ISRAEL LTD.
                                 Ilya  Blayvas
                                    Ilya  Blayvas
                                 H01 - BASIC ELECTRIC ELEMENTS
                                    H01 - BASIC ELECTRIC ELEMENTS
                                 Applied Materials, Inc.
                                    Applied Materials, Inc.
                                 Roger B. Fish
                                    Roger B. Fish
                                 H01 - BASIC ELECTRIC ELEMENTS
                                    H01 - BASIC ELECTRIC ELEMENTS
                                 FEI Company
                                    FEI Company
                                 Pavel  Potocek
                                    Pavel  Potocek
                                 G06 - COMPUTING CALCULATING COUNTING
                                    G06 - COMPUTING CALCULATING COUNTING
                                 Applied Materials, Inc.
                                    Applied Materials, Inc.
                                 Roger B. Fish
                                    Roger B. Fish
                                 H01 - BASIC ELECTRIC ELEMENTS
                                    H01 - BASIC ELECTRIC ELEMENTS
                                 FEI Company
                                    FEI Company
                                 Tomáลก  Onderlicka
                                    Tomáลก  Onderlicka
                                 H01 - BASIC ELECTRIC ELEMENTS
                                    H01 - BASIC ELECTRIC ELEMENTS
                                 Carl Zeiss SMT GMBH
                                    Carl Zeiss SMT GMBH
                                 Michael  Budach
                                    Michael  Budach
                                 H01 - BASIC ELECTRIC ELEMENTS
                                    H01 - BASIC ELECTRIC ELEMENTS
                                 ASML NETHERLANDS B.V.
                                    ASML NETHERLANDS B.V.
                                 Wei  FANG
                                    Wei  FANG
                                 G06 - COMPUTING CALCULATING COUNTING
                                    G06 - COMPUTING CALCULATING COUNTING
                                 Fibics Incorporated
                                    Fibics Incorporated
                                 Michael William Phaneuf
                                    Michael William Phaneuf
                                 G06 - COMPUTING CALCULATING COUNTING
                                    G06 - COMPUTING CALCULATING COUNTING
                                 HITACHI HIGH-TECH CORPORATION
                                    HITACHI HIGH-TECH CORPORATION
                                 Hidenori  MACHIYA
                                    Hidenori  MACHIYA
                                 H01 - BASIC ELECTRIC ELEMENTS
                                    H01 - BASIC ELECTRIC ELEMENTS
                                 Hitachi, Ltd
                                    Hitachi, Ltd
                                 Fumiaki  ICHIHASHI
                                    Fumiaki  ICHIHASHI
                                 H01 - BASIC ELECTRIC ELEMENTS
                                    H01 - BASIC ELECTRIC ELEMENTS
                                 FEI Company
                                    FEI Company
                                 Sean M. Kellogg
                                    Sean M. Kellogg
                                 H01 - BASIC ELECTRIC ELEMENTS
                                    H01 - BASIC ELECTRIC ELEMENTS
                                 RENISHAW PLC
                                    RENISHAW PLC
                                 Timothy  BATTEN
                                    Timothy  BATTEN
                                 H01 - BASIC ELECTRIC ELEMENTS
                                    H01 - BASIC ELECTRIC ELEMENTS
                                 NuFlare Technology, Inc.
                                    NuFlare Technology, Inc.
                                 Koichi  ISHII
                                    Koichi  ISHII
                                 H01 - BASIC ELECTRIC ELEMENTS
                                    H01 - BASIC ELECTRIC ELEMENTS
                                 HITACHI HIGH-TECH SCIENCE CORPORATION
                                    HITACHI HIGH-TECH SCIENCE CORPORATION
                                 Satoshi  TOMIMATSU
                                    Satoshi  TOMIMATSU
                                 H01 - BASIC ELECTRIC ELEMENTS
                                    H01 - BASIC ELECTRIC ELEMENTS
                                 Hitachi High-Tech Corporation
                                    Hitachi High-Tech Corporation
                                 Hiromi  FUJITA
                                    Hiromi  FUJITA
                                 H01 - BASIC ELECTRIC ELEMENTS
                                    H01 - BASIC ELECTRIC ELEMENTS
                                 Carl Zeiss MultiSEM GmbH
                                    Carl Zeiss MultiSEM GmbH
                                 Dirk  Zeidler
                                    Dirk  Zeidler
                                 H01 - BASIC ELECTRIC ELEMENTS
                                    H01 - BASIC ELECTRIC ELEMENTS
                                 Hitachi High-Tech Corporation
                                    Hitachi High-Tech Corporation
                                 Hiroyuki  YAMAMOTO
                                    Hiroyuki  YAMAMOTO
                                 G06 - COMPUTING CALCULATING COUNTING
                                    G06 - COMPUTING CALCULATING COUNTING
                                 FEI Company
                                    FEI Company
                                 Erik  Franken
                                    Erik  Franken
                                 G06 - COMPUTING CALCULATING COUNTING
                                    G06 - COMPUTING CALCULATING COUNTING
                                 ASML NETHERLANDS B.V.
                                    ASML NETHERLANDS B.V.
                                 Marco Jan-Jaco WIELAND
                                    Marco Jan-Jaco WIELAND
                                 H01 - BASIC ELECTRIC ELEMENTS
                                    H01 - BASIC ELECTRIC ELEMENTS
                                 Beijing Youzhuju Network Technology Co., Ltd.
                                    Beijing Youzhuju Network Technology Co., Ltd.
                                 Jing  YUAN
                                    Jing  YUAN
                                 G06 - COMPUTING CALCULATING COUNTING
                                    G06 - COMPUTING CALCULATING COUNTING
                                 FEI Company
                                    FEI Company
                                 Christopher  Thompson
                                    Christopher  Thompson
                                 H01 - BASIC ELECTRIC ELEMENTS
                                    H01 - BASIC ELECTRIC ELEMENTS
                                 Applied Materials, Inc.
                                    Applied Materials, Inc.
                                 Ori  Noked
                                    Ori  Noked
                                 H01 - BASIC ELECTRIC ELEMENTS
                                    H01 - BASIC ELECTRIC ELEMENTS
                                 Hitachi High-Tech Corporation
                                    Hitachi High-Tech Corporation
                                 Hang  DU
                                    Hang  DU
                                 H01 - BASIC ELECTRIC ELEMENTS
                                    H01 - BASIC ELECTRIC ELEMENTS
                                 FEI Company
                                    FEI Company
                                 Umesh  ADIGA
                                    Umesh  ADIGA
                                 G06 - COMPUTING CALCULATING COUNTING
                                    G06 - COMPUTING CALCULATING COUNTING