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ELECTRICITY
H01
Electric elements
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ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
H01J37/00
Discharge tubes with provision for introducing objects or material to be exposed to the discharge
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H01J37/22
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Patents Grants
last 30 patents
Information
Patent Grant
Charged particle beam system and overlay misalignment measurement m...
Patent number
12,183,541
Issue date
Dec 31, 2024
HITACHI HIGH-TECH CORPORATION
Takuma Yamamoto
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Systems and methods of determining aberrations in images obtained b...
Patent number
12,183,540
Issue date
Dec 31, 2024
ASML Netherlands B.V.
Yifeng Shao
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Transmission electron microscope and imaging method
Patent number
12,183,542
Issue date
Dec 31, 2024
HITACHI HIGH-TECH CORPORATION
Hiroki Kawamoto
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method, device and system for reducing off-axial aberration in elec...
Patent number
12,176,179
Issue date
Dec 24, 2024
FEI Company
Maarten Bischoff
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Pattern inspecting device
Patent number
12,176,181
Issue date
Dec 24, 2024
HITACHI HIGH-TECH CORPORATION
Wei Sun
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Automated operational control of micro-tooling devices
Patent number
12,176,182
Issue date
Dec 24, 2024
Carl Zeiss SMT GmbH
Ramani Pichumani
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Charged particle microscope device and method for adjusting field-o...
Patent number
12,170,183
Issue date
Dec 17, 2024
HITACHI HIGH-TECH CORPORATION
Mitsutoshi Kobayashi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
System and method for scanning a sample using multi-beam inspection...
Patent number
12,165,837
Issue date
Dec 10, 2024
ASML Netherlands B.V.
Martinus Gerardus Maria Johannes Maassen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Joint electron-optical columns for flood-charging and image-forming...
Patent number
12,165,838
Issue date
Dec 10, 2024
KLA Corporation
Xinrong Jiang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and apparatus for Schottky TFE inspection
Patent number
12,165,834
Issue date
Dec 10, 2024
NUFLARE TECHNOLOGY, INC.
Victor Katsap
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Systems and methods of profiling charged-particle beams
Patent number
12,165,836
Issue date
Dec 10, 2024
ASML Netherlands B.V.
Maikel Robert Goosen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Electron gun and electron beam application apparatus
Patent number
12,165,828
Issue date
Dec 10, 2024
HITACHI HIGH-TECH CORPORATION
Takashi Ohshima
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Observation method by means of scanning transmission electron micro...
Patent number
12,154,758
Issue date
Nov 26, 2024
The University of Tokyo
Naoya Shibata
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Ion beam device
Patent number
12,148,593
Issue date
Nov 19, 2024
HITACHI HIGH-TECH CORPORATION
Shinichi Matsubara
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle beam apparatus and image acquiring method
Patent number
12,148,594
Issue date
Nov 19, 2024
Jeol Ltd.
Takeshi Otsuka
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle beam device
Patent number
12,142,457
Issue date
Nov 12, 2024
HITACHI HIGH-TECH CORPORATION
Takahiro Nishihata
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Detection of probabilistic process windows
Patent number
12,142,454
Issue date
Nov 12, 2024
Fractilla, LLC
Chris Mack
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Electron microscope and specimen contamination prevention method
Patent number
12,131,881
Issue date
Oct 29, 2024
Jeol Ltd.
Takeshi Kaneko
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle beam device
Patent number
12,125,667
Issue date
Oct 22, 2024
HITACHI HIGH-TECH CORPORATION
Yasuhiro Shirasaki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Target and algorithm to measure overlay by modeling back scattering...
Patent number
12,100,574
Issue date
Sep 24, 2024
KLA Corporation
Nadav Gutman
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle microscope for examining a specimen, and method of...
Patent number
12,080,512
Issue date
Sep 3, 2024
FEI Company
Lubomir Tuma
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Cross-talk cancellation in multiple charged-particle beam inspection
Patent number
12,080,513
Issue date
Sep 3, 2024
ASML Netherlands B.V.
Wei Fang
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Methods for high-performance electron microscopy
Patent number
12,073,541
Issue date
Aug 27, 2024
The Board of Regents of the University of Texas System
Zbyszek Otwinowski
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Inspection apparatus and method
Patent number
12,072,181
Issue date
Aug 27, 2024
ASML Netherlands B.V.
Yan Wang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing apparatus and plasma processing method
Patent number
12,074,076
Issue date
Aug 27, 2024
HITACHI HIGH-TECH CORPORATION
Soichiro Eto
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Automating cryo-electron microscopy data collection
Patent number
12,057,289
Issue date
Aug 6, 2024
New York Structural Biology Center
Paul T. Kim
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Electron beam inspection apparatus and electron beam inspection method
Patent number
12,046,445
Issue date
Jul 23, 2024
NuFlare Technology, Inc.
Takuro Nagao
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Charged particle beam device
Patent number
12,046,446
Issue date
Jul 23, 2024
HITACHI HIGH-TECH CORPORATION
Hiroyuki Chiba
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Cost effective probing in high volume manufacture of micro LEDs
Patent number
12,014,896
Issue date
Jun 18, 2024
ATTOLIGHT AG
Matthew J. Davies
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and system for cross-sectioning a sample with a preset thick...
Patent number
RE50001
Issue date
Jun 4, 2024
FIBICS INCORPORATED
Michael William Phaneuf
Patents Applications
last 30 patents
Information
Patent Application
Correction Method and Correction Device
Publication number
20250014858
Publication date
Jan 9, 2025
Hitachi High-Tech Corporation
Tomoaki YAMAZAKI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
FOCUS STACKING APPLICATIONS FOR SAMPLE PREPARATION
Publication number
20250005714
Publication date
Jan 2, 2025
FEI Company
Matej Dolník
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
CHARGED PARTICLE BEAM DEVICE
Publication number
20250006454
Publication date
Jan 2, 2025
HITACHI HIGH-TECH CORPORATION
Yuta IMAI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR OPERATING A PARTICLE BEAM MICROSCOPE
Publication number
20250006455
Publication date
Jan 2, 2025
CARL ZEISS MICROSCOPY GMBH
Bjoern Gamm
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR DETERMINING A DISTORTION-CORRECTED POSITION OF A FEATURE...
Publication number
20250006459
Publication date
Jan 2, 2025
Carl Zeiss MultiSEM GmbH
Daniel Weiss
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
SYSTEMS AND METHODS FOR DEFECT DETECTION AND DEFECT LOCATION IDENTI...
Publication number
20250005739
Publication date
Jan 2, 2025
ASML NETHERLANDS B.V.
Shengcheng JIN
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
CROSS-TALK CANCELLATION IN MULTIPLE CHARGED-PARTICLE BEAM INSPECTION
Publication number
20250006456
Publication date
Jan 2, 2025
ASML NETHERLANDS B.V.
Wei FANG
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
DISCHARGING A REGION OF A SAMPLE
Publication number
20240420917
Publication date
Dec 19, 2024
APPLIED MATERIALS ISRAEL LTD.
Roey Levy
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR MANUFACTURING DEVICE AND CONTROL OF THE SAME
Publication number
20240412407
Publication date
Dec 12, 2024
Samsung Electronics Co., Ltd.
Junghee Cho
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
AUTOFOCUS METHOD FOR SINGLE BEAM AND MULTI-BEAM SYSTEMS
Publication number
20240412944
Publication date
Dec 12, 2024
KLA Corporation
Weijie Huang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTING COLD PHOTOCATHODE DEVICE USING ELECTRIC FIELD TO CON...
Publication number
20240412938
Publication date
Dec 12, 2024
ATTOLIGHT AG
Nicolas Tappy
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CHARGED PARTICLE BEAM AXIAL CALIBRATION
Publication number
20240404783
Publication date
Dec 5, 2024
Multibeam Corporation
Jeffery Michael Dech
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHODS AND SYSTEMS FOR IMPROVING PLASMA IGNITION STABILITY
Publication number
20240404834
Publication date
Dec 5, 2024
Taiwan Semiconductor Manufacturing Company, Ltd.
Ping-Hsun Lin
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Automating cryo-electron microscopy data collection
Publication number
20240395497
Publication date
Nov 28, 2024
New York Structural Biology Center
Paul T. Kim
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
FIVE-DIMENSIONAL ELECTRON MICROSCOPE AND ANALYSIS METHOD THEREFOR
Publication number
20240395499
Publication date
Nov 28, 2024
RINKEN
Takahiro SHIMOJIMA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CHARGED PARTICLE MICROSCOPE FOR EXAMINING A SPECIMEN, AND METHOD OF...
Publication number
20240395496
Publication date
Nov 28, 2024
FEI Company
Lubomir Tuma
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
System and Method for Fully Integrated Microcrystal Electron Diffra...
Publication number
20240387141
Publication date
Nov 21, 2024
The Regents of the University of California
Tamir Gonen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CONTROL METHOD, CHARGED PARTICLE BEAM DEVICE, AND PROGRAM
Publication number
20240379323
Publication date
Nov 14, 2024
HITACHI HIGH-TECH SCIENCE CORPORATION
Toshiyuki NAGAMINE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
INSPECTION APPARATUS AND METHOD
Publication number
20240369356
Publication date
Nov 7, 2024
ASML NETHERLANDS B.V.
Yan WANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CHARGED PARTICLE BEAM DEVICE
Publication number
20240363306
Publication date
Oct 31, 2024
HITACHI HIGH-TECH CORPORATION
Minami SHOUJI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
IN-VACUUM CHAMBER CONTROLLED-GAS-FILM DEVICE TO REDUCE LASER ABLATI...
Publication number
20240363304
Publication date
Oct 31, 2024
FEI Company
Jaroslav Velcovský
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
HEIGHT SENSING SYSTEM FOR ELECTRON BEAM METROLOGY TOOL
Publication number
20240355579
Publication date
Oct 24, 2024
KLA Corporation
Yeishin Tung
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SOFTWARE, METHODS, AND SYSTEMS FOR DETERMINATION OF A LOCAL FOCUS P...
Publication number
20240355578
Publication date
Oct 24, 2024
ASML NETHERLANDS B.V.
Te-Sheng WANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHODS AND SYSTEMS FOR EVENT MODULATED ELECTRON MICROSCOPY
Publication number
20240355581
Publication date
Oct 24, 2024
Integrated Dynamic Electron Solutions, Inc.
Bryan Walter REED
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SYSTEMS AND METHODS OF CLEANING ELECTRON SOURCES IN CHARGED-PARTICL...
Publication number
20240347313
Publication date
Oct 17, 2024
ASML NETHERLANDS B.V.
Zhidong DU
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ANALYSIS METHOD, COMPUTER-READABLE MEDIUM, AND MANUFACTURING METHOD...
Publication number
20240347315
Publication date
Oct 17, 2024
Fuji Electric Co., Ltd.
Yusuke SHIMIZU
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
FLOW FOR HIGH RESOLUTION STEREOSCOPIC MEASUREMENTS
Publication number
20240339289
Publication date
Oct 10, 2024
APPLIED MATERIALS ISRAEL LTD.
Adar Sonn-Segev
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
CHARGED-PARTICLE OPTICAL APPARATUS AND PROJECTION METHOD
Publication number
20240339294
Publication date
Oct 10, 2024
ASML NETHERLANDS B.V.
Marijke SCOTUZZI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
IMPROVED NAVIGATION FOR ELECTRON MICROSCOPY
Publication number
20240339293
Publication date
Oct 10, 2024
Oxford Instruments Nanotechnology Tools Limited
Peter Statham
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CHARGED-PARTICLE OPTICAL DEVICE
Publication number
20240321547
Publication date
Sep 26, 2024
ASML NETHERLANDS B.V.
Marco Jan-Jaco WIELAND
H01 - BASIC ELECTRIC ELEMENTS