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H01J37/22
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ELECTRICITY
H01
Electric elements
H01J
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
H01J37/00
Discharge tubes with provision for introducing objects or material to be exposed to the discharge
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H01J37/22
Optical or photographic arrangements associated with the tube
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Patents Grants
last 30 patents
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Patent Grant
Multiple electron beam image acquisition method, multiple electron...
Patent number
12,288,666
Issue date
Apr 29, 2025
NuFlare Technology, Inc.
Koichi Ishii
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Live-assisted image acquisition method and system with charged part...
Patent number
12,288,667
Issue date
Apr 29, 2025
FEI Company
Pavel Potocek
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
FIB-SEM 3D tomography for measuring shape deviations of HAR structures
Patent number
12,288,705
Issue date
Apr 29, 2025
Carl Zeiss SMT GmbH
Amir Avishai
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Charged particle beam device
Patent number
12,283,458
Issue date
Apr 22, 2025
HITACHI HIGH-TECH CORPORATION
Mai Yoshihara
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Material processing method and material processing system for perfo...
Patent number
12,280,445
Issue date
Apr 22, 2025
Carl Zeiss Microscopy GmbH
Stephan Hiller
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Nanofluidic cell and loading platform
Patent number
12,283,459
Issue date
Apr 22, 2025
Germán Sciaini
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Creating multiple electron beams with a photocathode film
Patent number
12,283,453
Issue date
Apr 22, 2025
KLA Corporation
Xinrong Jiang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate holder state detection device and substrate holder state...
Patent number
12,278,083
Issue date
Apr 15, 2025
SCREEN Holdings Co., Ltd.
Yuji Okita
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Hybrid scanning electron microscopy and acousto-optic based metrology
Patent number
12,278,085
Issue date
Apr 15, 2025
Applied Materials Israel Ltd.
Guy Shwartz
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Pattern height metrology using an e-beam system
Patent number
12,278,086
Issue date
Apr 15, 2025
Imec VZW
Gian Francesco Lorusso
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Electron microscope and image generation method
Patent number
12,278,084
Issue date
Apr 15, 2025
Jeol Ltd.
Motohiro Nakamura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
3D metrology from 3D datacube created from stack of registered imag...
Patent number
12,272,518
Issue date
Apr 8, 2025
Applied Materials Israel Ltd.
Ilya Blayvas
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
3D fiducial for precision 3D NAND channel tilt/shift analysis
Patent number
12,260,583
Issue date
Mar 25, 2025
FEI Company
Mark Najarian
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Scanning electron microscope and image generation method using scan...
Patent number
12,255,043
Issue date
Mar 18, 2025
Jeol Ltd.
Takeshi Otsuka
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Fiducial guided cross-sectioning and lamella preparation with tomog...
Patent number
12,255,044
Issue date
Mar 18, 2025
FIBICS INCORPORATED
Michael William Phaneuf
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Numerically compensating SEM-induced charging using diffusion-based...
Patent number
12,255,042
Issue date
Mar 18, 2025
ASML Netherlands B.V.
Thomas Jarik Huisman
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Shape invariant method for accurate fiducial finding
Patent number
12,254,645
Issue date
Mar 18, 2025
FEI Company
Umesh Adiga
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Method, apparatus, and program for determining condition related to...
Patent number
12,243,711
Issue date
Mar 4, 2025
HITACHI HIGH-TECH CORPORATION
Takahiro Nishihata
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method, computer program product, computer-readable medium and syst...
Patent number
12,235,428
Issue date
Feb 25, 2025
Carl Zeiss Microscopy GmbH
Daniel Haase
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Charged particle beam device and inspection device
Patent number
12,237,145
Issue date
Feb 25, 2025
HITACHI HIGH-TECH CORPORATION
Atsuko Shintani
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Methods for determining the virtual source location of a liquid met...
Patent number
12,237,142
Issue date
Feb 25, 2025
FEI Company
Sean M. Kellogg
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Determining a depth of a hidden structural element background
Patent number
12,237,146
Issue date
Feb 25, 2025
Applied Materials Israel Ltd.
Lior Akerman
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Methods and systems for event modulated electron microscopy
Patent number
12,237,147
Issue date
Feb 25, 2025
INTEGRATED DYNAMIC ELECTRON SOLUTIONS, INC.
Bryan Walter Reed
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle beam apparatus and cell evaluation method
Patent number
12,215,308
Issue date
Feb 4, 2025
HITACHI HIGH-TECH CORPORATION
Akira Ikeuchi
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Data acquisition and processing techniques for three-dimensional re...
Patent number
12,211,666
Issue date
Jan 28, 2025
FEI Company
Oleksii Kaplenko
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Charged particle beam device
Patent number
12,211,668
Issue date
Jan 28, 2025
HITACHI HIGH-TECH CORPORATION
Kohei Suzuki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Deep learning based sample localization
Patent number
12,205,318
Issue date
Jan 21, 2025
FEI Company
Sven Beunen
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Charged particle beam system and overlay misalignment measurement m...
Patent number
12,183,541
Issue date
Dec 31, 2024
HITACHI HIGH-TECH CORPORATION
Takuma Yamamoto
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Systems and methods of determining aberrations in images obtained b...
Patent number
12,183,540
Issue date
Dec 31, 2024
ASML Netherlands B.V.
Yifeng Shao
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Transmission electron microscope and imaging method
Patent number
12,183,542
Issue date
Dec 31, 2024
HITACHI HIGH-TECH CORPORATION
Hiroki Kawamoto
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
CHARGED PARTICLE BEAM DEVICE
Publication number
20250140513
Publication date
May 1, 2025
HITACHI HIGH-TECH SCIENCE CORPORATION
Satoshi TOMIMATSU
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Recipe Creating System, Length Measurement System, and Recipe Creat...
Publication number
20250140516
Publication date
May 1, 2025
Hitachi High-Tech Corporation
Hiromi FUJITA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MULTI-BEAM CHARGED PARTICLE MICROSCOPE DESIGN WITH MIRROR FOR FIELD...
Publication number
20250132124
Publication date
Apr 24, 2025
Carl Zeiss MultiSEM GmbH
Dirk Zeidler
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Charged Particle Beam Device
Publication number
20250132123
Publication date
Apr 24, 2025
Hitachi High-Tech Corporation
Hiroyuki YAMAMOTO
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
CORRECTION OF OPTICAL ABERRATIONS IN CHARGED PARTICLE BEAM MICROSCOPY
Publication number
20250125116
Publication date
Apr 17, 2025
FEI Company
Erik Franken
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
CHARGED PARTICLE ASSESSMENT SYSTEM AND METHOD
Publication number
20250118528
Publication date
Apr 10, 2025
ASML NETHERLANDS B.V.
Marco Jan-Jaco WIELAND
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CRYO-ELECTRON MICROSCOPY IMAGE PROCESSING METHOD AND APPARATUS, TER...
Publication number
20250112021
Publication date
Apr 3, 2025
Beijing Youzhuju Network Technology Co., Ltd.
Jing YUAN
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
SAMPLE CARRIER AND USES THEREOF
Publication number
20250104962
Publication date
Mar 27, 2025
FEI Company
Christopher Thompson
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF PROCESSING DATA DERIVED FROM A SAMPLE
Publication number
20250095133
Publication date
Mar 20, 2025
ASML NETHERLANDS B.V.
Vincent Sylvester KUIPER
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
AUTOMATED REGION SELECTION FOR AUTO SWEEP
Publication number
20250095159
Publication date
Mar 20, 2025
FEI Company
Umesh ADIGA
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
CONOSCOPIC WAFER ORIENTATION APPARATUS AND ION IMPLANTER INCLUDING...
Publication number
20250095952
Publication date
Mar 20, 2025
Applied Materials, Inc.
Ori Noked
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CHARGED PARTICLE BEAM INSPECTION SYSTEM AND CHARGED PARTICLE BEAM I...
Publication number
20250095956
Publication date
Mar 20, 2025
Hitachi High-Tech Corporation
Hang DU
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CONOSCOPIC WAFER ORIENTATION FOR ION IMPLANTATION
Publication number
20250095958
Publication date
Mar 20, 2025
Applied Materials, Inc.
Frank SINCLAIR
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD AND SYSTEM FOR CALIBRATION OF DIFFRACTION ANGLES
Publication number
20250095955
Publication date
Mar 20, 2025
APPLIED MATERIALS ISRAEL LTD.
Konstantin Chirko
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
DATA PROCESSING DEVICE AND METHOD, CHARGED PARTICLE ASSESSMENT SYST...
Publication number
20250087444
Publication date
Mar 13, 2025
ASML NETHERLANDS B.V.
Marco Jan-Jaco WIELAND
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CHARGED PARTICLE-OPTICAL APPARATUS
Publication number
20250087445
Publication date
Mar 13, 2025
ASML NETHERLANDS B.V.
Marco Jan-Jaco WIELAND
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Optics for In-Situ Scanning Electron Microscope Repair
Publication number
20250087450
Publication date
Mar 13, 2025
KLA Corporation
Tomas Plettner
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
TECHNIQUES FOR WAVEFORM DETECTION OF PERIODIC SIGNALS USING VOLTAGE...
Publication number
20250069842
Publication date
Feb 27, 2025
FEI Company
Neel Leslie
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Detection of Probabilistic Process Windows
Publication number
20250069843
Publication date
Feb 27, 2025
FRACTILIA, LLC
Chris Mack
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
METHODS FOR HIGH-PERFORMANCE ELECTRON MICROSCOPY
Publication number
20250069208
Publication date
Feb 27, 2025
The Board of Regents of the University of Texas System
Zbyszek Otwinowski
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
TECHNIQUES FOR IMAGING LOW DUTY CYCLE SIGNALS USING A SCANNING ELEC...
Publication number
20250069845
Publication date
Feb 27, 2025
FEI Company
Neel Leslie
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CHARGED PARTICLE BEAM APPARATUS AND CONTROL METHOD THEREOF
Publication number
20250069848
Publication date
Feb 27, 2025
KIOXIA Corporation
Kazuya HATANO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
LASER-BASED CONTRAST CONTROL IN TRANSMISSION ELECTRON MICROSCOPY
Publication number
20250062099
Publication date
Feb 20, 2025
Yeda Research and Development Co. Ltd.
Osip SCHWARTZ
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD TO MORE PRECISELY CALIBRATE THE MECHANICAL TILT AND ROTATION...
Publication number
20250054726
Publication date
Feb 13, 2025
APPLIED MATERIALS ISRAEL LTD.
Yehuda Zur
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MICROSECOND MELTING AND REVITRIFICATION OF CRYO SAMPLES WITH A CORR...
Publication number
20250052992
Publication date
Feb 13, 2025
ECOLE POLYTECHNIQUE FEDERALE DE LAUSANNE (EPFL)
Gabriele BONGIOVANNI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CHARGED PARTICLE BEAM APPARATUS
Publication number
20250046564
Publication date
Feb 6, 2025
Korea Research Institute of Standards and Science
Takashi OGAWA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Ion Milling Device
Publication number
20250046567
Publication date
Feb 6, 2025
Hitachi High-Tech Corporation
Shota AIDA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Optical Apparatus and Charged Particle Beam Apparatus
Publication number
20250046566
Publication date
Feb 6, 2025
HITACHI HIGH-TECH CORPORATION
Masao YAMAMOTO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
INSPECTION DEVICE AND FILM QUALITY INSPECTION METHOD
Publication number
20250046569
Publication date
Feb 6, 2025
Hitachi High-Tech Corporation
Yasuhiro SHIRASAKI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
DEEP STRUCTURE SIGNAL DETECTION AND ENHANCEMENT BY SEPARATION TO UP...
Publication number
20250035438
Publication date
Jan 30, 2025
ETROLOGY, LLC
Vladislav Kaplan
H01 - BASIC ELECTRIC ELEMENTS