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Optical or photographic arrangements associated with the tube
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H01J37/22
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H
ELECTRICITY
H01
Electric elements
H01J
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
H01J37/00
Discharge tubes with provision for introducing objects or material to be exposed to the discharge
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H01J37/22
Optical or photographic arrangements associated with the tube
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Patents Grants
last 30 patents
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Patent Grant
Electron microscope and specimen contamination prevention method
Patent number
12,131,881
Issue date
Oct 29, 2024
Jeol Ltd.
Takeshi Kaneko
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle beam device
Patent number
12,125,667
Issue date
Oct 22, 2024
HITACHI HIGH-TECH CORPORATION
Yasuhiro Shirasaki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Target and algorithm to measure overlay by modeling back scattering...
Patent number
12,100,574
Issue date
Sep 24, 2024
KLA Corporation
Nadav Gutman
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle microscope for examining a specimen, and method of...
Patent number
12,080,512
Issue date
Sep 3, 2024
FEI Company
Lubomir Tuma
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Cross-talk cancellation in multiple charged-particle beam inspection
Patent number
12,080,513
Issue date
Sep 3, 2024
ASML Netherlands B.V.
Wei Fang
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Inspection apparatus and method
Patent number
12,072,181
Issue date
Aug 27, 2024
ASML Netherlands B.V.
Yan Wang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Methods for high-performance electron microscopy
Patent number
12,073,541
Issue date
Aug 27, 2024
The Board of Regents of the University of Texas System
Zbyszek Otwinowski
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Plasma processing apparatus and plasma processing method
Patent number
12,074,076
Issue date
Aug 27, 2024
HITACHI HIGH-TECH CORPORATION
Soichiro Eto
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Automating cryo-electron microscopy data collection
Patent number
12,057,289
Issue date
Aug 6, 2024
New York Structural Biology Center
Paul T. Kim
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Electron beam inspection apparatus and electron beam inspection method
Patent number
12,046,445
Issue date
Jul 23, 2024
NuFlare Technology, Inc.
Takuro Nagao
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Charged particle beam device
Patent number
12,046,446
Issue date
Jul 23, 2024
HITACHI HIGH-TECH CORPORATION
Hiroyuki Chiba
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Cost effective probing in high volume manufacture of micro LEDs
Patent number
12,014,896
Issue date
Jun 18, 2024
ATTOLIGHT AG
Matthew J. Davies
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Adjusting method of charged particle beam device and charged partic...
Patent number
12,001,521
Issue date
Jun 4, 2024
HITACHI HIGH-TECH CORPORATION
Heita Kimizuka
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Method and system for cross-sectioning a sample with a preset thick...
Patent number
RE50001
Issue date
Jun 4, 2024
FIBICS INCORPORATED
Michael William Phaneuf
Information
Patent Grant
System and method for generating and analyzing roughness measuremen...
Patent number
11,996,265
Issue date
May 28, 2024
Fractilla, LLC
Chris Mack
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Use of optical polarization states to control a ponderomotive phase...
Patent number
11,990,313
Issue date
May 21, 2024
The Regents of the University of California
Jeremy J. Axelrod
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Wafer positioning method and apparatus
Patent number
11,978,677
Issue date
May 7, 2024
Taiwan Semiconductor Manufacturing Co., Ltd
Chia-Cheng Chen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for calibrating a scanning charged particle microscope
Patent number
11,972,922
Issue date
Apr 30, 2024
ASML Netherlands B.V.
Hermanus Adrianus Dillen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle beam device
Patent number
11,961,699
Issue date
Apr 16, 2024
HITACHI HIGH-TECH CORPORATION
Hideo Morishita
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle beam device and operation method therefor
Patent number
11,961,701
Issue date
Apr 16, 2024
HITACHI HIGH-TECH CORPORATION
Tomoharu Nagashima
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Systems and methods for image enhancement for a multi-beam charged-...
Patent number
11,961,700
Issue date
Apr 16, 2024
ASML Netherlands B.V.
Maikel Robert Goosen
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Vibration isolation system with one or more magnetic actuators
Patent number
11,953,073
Issue date
Apr 9, 2024
Integrated Dynamics Engineering GmbH
Han Hartgers
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Machine learning on wafer defect review
Patent number
11,935,722
Issue date
Mar 19, 2024
Taiwan Semiconductor Manufacturing Co., Ltd
Chung-Pin Chou
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Analysis method and analysis system of voltage contrast defect
Patent number
11,927,625
Issue date
Mar 12, 2024
Powerchip Semiconductor Manufacturing Corporation
Yue-Ying Yen
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Devices, systems, and methods for using an imaging device to calibr...
Patent number
11,925,983
Issue date
Mar 12, 2024
Arcam AB
Anders Snis
B22 - CASTING POWDER METALLURGY
Information
Patent Grant
Lateral recess measurement in a semiconductor specimen
Patent number
11,921,063
Issue date
Mar 5, 2024
Applied Materials Israel Ltd.
Michael Chemama
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Microscopy imaging method for 3D tomography with predictive drift t...
Patent number
11,923,168
Issue date
Mar 5, 2024
FIBICS INCORPORATED
Michael William Phaneuf
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Detection and correction of system responses in real-time
Patent number
11,894,214
Issue date
Feb 6, 2024
KLA Corporation
Henning Stoschus
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Method and apparatus for inspection
Patent number
11,875,966
Issue date
Jan 16, 2024
ASML Netherlands B.V.
Bernardo Kastrup
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle beam device
Patent number
11,869,745
Issue date
Jan 9, 2024
HITACHI HIGH-TECH CORPORATION
Minami Shouji
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
HEIGHT SENSING SYSTEM FOR ELECTRON BEAM METROLOGY TOOL
Publication number
20240355579
Publication date
Oct 24, 2024
KLA Corporation
Yeishin Tung
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SOFTWARE, METHODS, AND SYSTEMS FOR DETERMINATION OF A LOCAL FOCUS P...
Publication number
20240355578
Publication date
Oct 24, 2024
ASML NETHERLANDS B.V.
Te-Sheng WANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHODS AND SYSTEMS FOR EVENT MODULATED ELECTRON MICROSCOPY
Publication number
20240355581
Publication date
Oct 24, 2024
Integrated Dynamic Electron Solutions, Inc.
Bryan Walter REED
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SYSTEMS AND METHODS OF CLEANING ELECTRON SOURCES IN CHARGED-PARTICL...
Publication number
20240347313
Publication date
Oct 17, 2024
ASML NETHERLANDS B.V.
Zhidong DU
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ANALYSIS METHOD, COMPUTER-READABLE MEDIUM, AND MANUFACTURING METHOD...
Publication number
20240347315
Publication date
Oct 17, 2024
Fuji Electric Co., Ltd.
Yusuke SHIMIZU
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
FLOW FOR HIGH RESOLUTION STEREOSCOPIC MEASUREMENTS
Publication number
20240339289
Publication date
Oct 10, 2024
APPLIED MATERIALS ISRAEL LTD.
Adar Sonn-Segev
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
CHARGED-PARTICLE OPTICAL APPARATUS AND PROJECTION METHOD
Publication number
20240339294
Publication date
Oct 10, 2024
ASML NETHERLANDS B.V.
Marijke SCOTUZZI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
IMPROVED NAVIGATION FOR ELECTRON MICROSCOPY
Publication number
20240339293
Publication date
Oct 10, 2024
Oxford Instruments Nanotechnology Tools Limited
Peter Statham
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CHARGED-PARTICLE OPTICAL DEVICE
Publication number
20240321547
Publication date
Sep 26, 2024
ASML NETHERLANDS B.V.
Marco Jan-Jaco WIELAND
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SYSTEM AND METHOD FOR GENERATING AND ANALYZING ROUGHNESS MEASUREMEN...
Publication number
20240312757
Publication date
Sep 19, 2024
FRACTILIA, LLC
Chris MACK
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
Optimizing Image Distortion in a Multi Beam Charged Particle Proces...
Publication number
20240304413
Publication date
Sep 12, 2024
IMS Nanofabrication GmbH
Christoph Spengler
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR STRUCTURE, INSPECTION METHOD AND INSPECTION SYSTEM
Publication number
20240304411
Publication date
Sep 12, 2024
WINBOND ELECTRONICS CORP.
Yen-Chiao CHEN
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
ALIGNING A DISTORTED IMAGE
Publication number
20240297013
Publication date
Sep 5, 2024
ASML NETHERLANDS B.V.
Jasper Frans Mathijs VAN RENS
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CHARGED PARTICLE BEAM DEVICE AND INSPECTION DEVICE
Publication number
20240297012
Publication date
Sep 5, 2024
Hitachi High-Tech Corporation
Atsuko Shintani
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA MONITORING SYSTEM
Publication number
20240290590
Publication date
Aug 29, 2024
SAMSUNG DISPLAY CO., LTD.
YOUNGGIL PARK
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR EVALUATING THERMIONIC ELECTRON EMITTER IN SITU
Publication number
20240290594
Publication date
Aug 29, 2024
NUFLARE TECHNOLOGY, INC.
Victor KATSAP
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
USE OF OPTICAL POLARIZATION STATES TO CONTROL A PONDEROMOTIVE PHASE...
Publication number
20240282549
Publication date
Aug 22, 2024
The Regents of the University of California
Jeremy J. Axelrod
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MACHINE LEARNING BASED YIELD PREDICTION
Publication number
20240281958
Publication date
Aug 22, 2024
APPLIED MATERIALS ISRAEL LTD.
Boris LEVANT
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
Electron Microscope, Aberration Correction Method, And Imaging Method
Publication number
20240274402
Publication date
Aug 15, 2024
JEOL Ltd.
Motofumi Saitoh
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE POSITION MONITORING DEVICES
Publication number
20240274401
Publication date
Aug 15, 2024
KLA Corporation
James Richard Bella
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
WAFER POSITIONING METHOD AND APPARATUS
Publication number
20240274478
Publication date
Aug 15, 2024
Taiwan Semiconductor Manufacturing Co., Ltd.
Chia-Cheng Chen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR DETERMINING A POSITION OF AN OBJECT IN A BEAM APPARATUS,...
Publication number
20240258068
Publication date
Aug 1, 2024
CARL ZEISS MICROSCOPY GMBH
Josef Biberger
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF OPERATING A PARTICLE BEAM SYSTEM AND COMPUTER PROGRAM PRO...
Publication number
20240258065
Publication date
Aug 1, 2024
CARL ZEISS MICROSCOPY GMBH
Dirk Preikszas
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
Sample Inspection Apparatus
Publication number
20240255556
Publication date
Aug 1, 2024
Hitachi High-Tech Corporation
Tomoko SHIMAMORI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SYSTEM AND METHOD OF CONVERTING DIFFRACTION PATTERN IMAGE FOR INTER...
Publication number
20240257318
Publication date
Aug 1, 2024
LightVision Inc.
Jin Ha JEONG
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
Method of Dispositioning and Control of a Semiconductor Manufacturi...
Publication number
20240258066
Publication date
Aug 1, 2024
FRACTILIA, LLC
Chris Mack
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
FILLING EMPTY STRUCTURES BY DEPOSITION UNDER SEM - BALANCING PARAME...
Publication number
20240249909
Publication date
Jul 25, 2024
APPLIED MATERIALS ISRAEL LTD.
Yehuda Zur
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR DEFECT DETECTION IN A SEMICONDUCTOR SAMPLE IN SAMPLE IMA...
Publication number
20240242334
Publication date
Jul 18, 2024
Carl Zeiss MultiSEM GmbH
Thomas Korb
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
CHARGED PARTICLE BEAM DEVICE, AND SAMPLE OBSERVATION METHOD EMPLOYI...
Publication number
20240242925
Publication date
Jul 18, 2024
Hitachi, Ltd
Shunya TANAKA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Charged Particle Beam Device and Method for Controlling Same
Publication number
20240242928
Publication date
Jul 18, 2024
Hitachi High-Tech Corporation
Koichi KURODA
G06 - COMPUTING CALCULATING COUNTING