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H01J2237/3171

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Parent Industries

HELECTRICITY H01Electric elements H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS H01J2237/00Discharge tubes exposing object to beam

Current Industry

H01J2237/3171patterned

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Transmission electron microscope and imaging method
- Patent number 12,183,542
- Issue date Dec 31, 2024
- HITACHI HIGH-TECH CORPORATION
- Hiroki Kawamoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Energy filter element for ion implantation systems for the use in t...
- Patent number 12,080,510
- Issue date Sep 3, 2024
- MI2-FACTORY GMBH
- Florian Krippendorf
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Energy filter element for ion implantation systems for the use in t...
- Patent number 11,837,430
- Issue date Dec 5, 2023
- MI2-FACTORY GMBH
- Florian Krippendorf
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Feature patterning using pitch relaxation and directional end-pushi...
- Patent number 11,688,610
- Issue date Jun 27, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd
- Tzung-Hua Lin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Fabricating non-uniform diffraction gratings
- Patent number 11,609,365
- Issue date Mar 21, 2023
- Magic Leap, Inc.
- Mauro Melli
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion implanter irradiating ion mean onto wafer and ion implantation...
- Patent number 11,603,590
- Issue date Mar 14, 2023
- Sumitomo Heavy Industries Ion Technology Co., Ltd.
- Kazuhisa Ishibashi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Energy filter element for ion implantation systems for the use in t...
- Patent number 11,183,358
- Issue date Nov 23, 2021
- MI2-FACTORY GMBH
- Florian Krippendorf
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Method and device for implanting ions in wafers
- Patent number 11,056,309
- Issue date Jul 6, 2021
- MI2-FACTORY GMBH
- Florian Krippendorf
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Ion beam quality control using a movable mass resolving device
- Patent number 11,049,691
- Issue date Jun 29, 2021
- Varian Semiconductor Equipment Associates, Inc.
- Bon-Woong Koo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi-piece substrate holder and alignment mechanism
- Patent number 10,854,772
- Issue date Dec 1, 2020
- Intevac, Inc.
- Hoang Huy Vu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Energy filter element for ion implantation systems for the use in t...
- Patent number 10,847,338
- Issue date Nov 24, 2020
- MI2-FACTORY GMBH
- Florian Krippendorf
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Microstructure manufacturing method and microstructure manufacturin...
- Patent number 10,546,721
- Issue date Jan 28, 2020
- Hitachi, Ltd.
- Keiji Watanabe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion implantation to alter etch rate
- Patent number 10,325,754
- Issue date Jun 18, 2019
- FEI Company
- David Foord
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Isotope tagging for workpiece authentication
- Patent number 10,269,464
- Issue date Apr 23, 2019
- Board of Trustees of Michigan State University
- Wolfgang Bauer
- G09 - EDUCATION CRYPTOGRAPHY DISPLAY ADVERTISING SEALS
Information Patent Grant
Manufacturing method of semiconductor device and semiconductor manu...
- Patent number 10,008,390
- Issue date Jun 26, 2018
- TOSHIBA MEMORY CORPORATION
- Yukiteru Matsui
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Continuous writing of pattern
- Patent number 9,960,013
- Issue date May 1, 2018
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Shih-Ming Chang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
System and method for controlling ion implanter
- Patent number 9,870,896
- Issue date Jan 16, 2018
- Taiwan Semiconductor Manufacturing Co., Ltd
- Po-Feng Tsai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Techniques for processing a substrate
- Patent number 9,863,032
- Issue date Jan 9, 2018
- Varian Semiconductor Equipment Associates, Inc.
- Kevin M. Daniels
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Complementary traveling masks
- Patent number 9,722,129
- Issue date Aug 1, 2017
- Varian Semiconductor Equipment Associates, Inc.
- Nicholas P T Bateman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for generating parameter pattern, ion implantation method an...
- Patent number 9,697,989
- Issue date Jul 4, 2017
- Taiwan Semiconductor Manufacturing Company Ltd.
- Cheng-Ta Wu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Imaging and processing for plasma ion source
- Patent number 9,691,583
- Issue date Jun 27, 2017
- FEI Company
- Thomas G. Miller
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion implantation apparatus and ion implantation method
- Patent number 9,601,314
- Issue date Mar 21, 2017
- Sen Corporation
- Shiro Ninomiya
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Exposure method using control of settling times and methods of manu...
- Patent number 9,583,305
- Issue date Feb 28, 2017
- Samsung Electronics Co., Ltd.
- Yong-Seok Jung
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Blanking aperture array device for multi-beams, and fabrication met...
- Patent number 9,530,610
- Issue date Dec 27, 2016
- NuFlare Technology, Inc.
- Kazuhiro Chiba
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Shot data generation method and multi charged particle beam writing...
- Patent number 9,514,914
- Issue date Dec 6, 2016
- NuFlare Technology, Inc.
- Hideo Inoue
- G11 - INFORMATION STORAGE
Information Patent Grant
Modification of magnetic properties of films using ion and neutral...
- Patent number 9,508,375
- Issue date Nov 29, 2016
- Applied Materials, Inc.
- Majeed A. Foad
- B82 - NANO-TECHNOLOGY
Information Patent Grant
High-throughput ion implanter
- Patent number 9,437,392
- Issue date Sep 6, 2016
- Varian Semiconductor Equipment Associates, Inc.
- William T. Weaver
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Grant
Method of manufacturing magnetic recording medium, and magnetic rec...
- Patent number 9,424,873
- Issue date Aug 23, 2016
- WD Media (Singapore) Pte. Ltd.
- Masanori Aniya
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Multi-part mask for implanting workpieces
- Patent number 9,333,733
- Issue date May 10, 2016
- Varian Semiconductor Equipment Associates, Inc.
- Aaron P. Webb
- B32 - LAYERED PRODUCTS
Information Patent Grant
Multi charged particle beam writing method, and multi charged parti...
- Patent number 9,275,824
- Issue date Mar 1, 2016
- NuFlare Technology, Inc.
- Hiroshi Matsumoto
- G11 - INFORMATION STORAGE

Patents Applicationslast 30 patents

Information Patent Application
ENERGY FILTER ELEMENT FOR ION IMPLANTATION SYSTEMS FOR THE USE IN T...
- Publication number 20250014854
- Publication date Jan 9, 2025
- mi2-factory GmbH
- Florian KRIPPENDORF
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ENERGY FILTER ELEMENT FOR ION IMPLANTATION SYSTEMS FOR THE USE IN T...
- Publication number 20240055217
- Publication date Feb 15, 2024
- mi2-factory GmbH
- Florian KRIPPENDORF
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FEATURE PATTERNING USING PITCH RELAXATION AND DIRECTIONAL END-PUSHI...
- Publication number 20230298901
- Publication date Sep 21, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Tzung-Hua LIN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Transmission Electron Microscope and Imaging Method
- Publication number 20220359153
- Publication date Nov 10, 2022
- Hitachi High-Tech Corporation
- Hiroki KAWAMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FEATURE PATTERNING USING PITCH RELAXATION AND DIRECTIONAL END-PUSHI...
- Publication number 20220102162
- Publication date Mar 31, 2022
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Tzung-Hua LIN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ENERGY FILTER ELEMENT FOR ION IMPLANTATION SYSTEMS FOR THE USE IN T...
- Publication number 20220020556
- Publication date Jan 20, 2022
- mi2-factory GmbH
- Florian KRIPPENDORF
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Application
ION IMPLANTER AND ION IMPLANTATION METHOD
- Publication number 20210040604
- Publication date Feb 11, 2021
- Sumitomo Heavy Industries Ion Technology Co., Ltd.
- Kazuhisa Ishibashi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ENERGY FILTER ELEMENT FOR ION IMPLANTATION SYSTEMS FOR THE USE IN T...
- Publication number 20210027975
- Publication date Jan 28, 2021
- mi2-factory GmbH
- Florian KRIPPENDORF
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Ion Beam Quality Control Using A Movable Mass Resolving Device
- Publication number 20190198292
- Publication date Jun 27, 2019
- Varian Semiconductor Equipment Associates, Inc.
- Bon-Woong Koo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE AND SEMICONDUCTOR MANU...
- Publication number 20180277388
- Publication date Sep 27, 2018
- Toshiba Memory Corporation
- Yukiteru MATSUI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
APPARATUS AND METHOD FOR PROCESSING OR IMAGING A SAMPLE
- Publication number 20180033586
- Publication date Feb 1, 2018
- MAPPER LITHOGRAPHY IP BV
- Paul IJmert SCHEFFERS
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Continuous Writing of Pattern
- Publication number 20170200584
- Publication date Jul 13, 2017
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Shih-Ming Chang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM DRAWING APPARATUS AND CHARGED PARTICLE BEAM D...
- Publication number 20160343535
- Publication date Nov 24, 2016
- NuFlare Technology, Inc.
- Hideki MATSUI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Multi-Beam Writing Using Inclined Exposure Stripes
- Publication number 20160336147
- Publication date Nov 17, 2016
- IMS Nanofabrication AG
- Elmar Platzgummer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Bi-Directional Double-Pass Multi-Beam Writing
- Publication number 20160276131
- Publication date Sep 22, 2016
- IMS Nanofabrication AG
- Elmar Platzgummer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR GENERATING PARAMETER PATTERN, ION IMPLANTATION METHOD AN...
- Publication number 20160254122
- Publication date Sep 1, 2016
- Taiwan Semiconductor Manufacturing company Ltd.
- CHENG-TA WU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ACTIVATION CHAMBER AND KIT USED IN TREATMENT DEVICE FOR LOWERING EL...
- Publication number 20160172144
- Publication date Jun 16, 2016
- NATIONAL UNIVERSITY CORPORATION NAGOYA UNIVERSITY
- Tomohiro NISHITANI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
BLANKING APERTURE ARRAY DEVICE FOR MULTI-BEAMS, AND FABRICATION MET...
- Publication number 20160155600
- Publication date Jun 2, 2016
- NuFlare Technology, Inc.
- Kazuhiro CHIBA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR GENERATING WRITING DATA
- Publication number 20160155609
- Publication date Jun 2, 2016
- NuFlare Technology, Inc.
- Shigehiro HARA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTIPLE CHARGED PARTICLE BEAM LITHOGRAPHY APPARATUS AND MULTIPLE C...
- Publication number 20160155610
- Publication date Jun 2, 2016
- NuFlare Technology, Inc.
- Ryoh KAWANA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM EXPOSURE APPARATUS SUITABLE FOR DRAWING ON LI...
- Publication number 20160133438
- Publication date May 12, 2016
- Advantest Corporation
- Akio Yamada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
NANOSTRUCTURE ARRAY DIFFRACTIVE OPTICS FOR RGB AND CMYK COLOR DISPLAYS
- Publication number 20160107471
- Publication date Apr 21, 2016
- IDIT TECHNOLOGIES CORP.
- Clinton K. LANDROCK
- B42 - BOOKBINDING ALBUMS FILES SPECIAL PRINTED MATTER
Information Patent Application
METHOD OF MEASURING BEAM POSITION OF MULTI CHARGED PARTICLE BEAM, A...
- Publication number 20160086764
- Publication date Mar 24, 2016
- NuFlare Technology, Inc.
- Osamu IIZUKA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
BEAM GRID LAYOUT
- Publication number 20160071696
- Publication date Mar 10, 2016
- MAPPER LITHOGRAPHY IP BV
- Vincent Sylvester KUIPER
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
BLANKING DEVICE FOR MULTI CHARGED PARTICLE BEAMS, MULTI CHARGED PAR...
- Publication number 20160064179
- Publication date Mar 3, 2016
- NuFlare Technology, Inc.
- Hiroshi YAMASHITA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION IMPLANTER, ION IMPLANTATION METHOD, AND BEAM MEASUREMENT APPARATUS
- Publication number 20160042915
- Publication date Feb 11, 2016
- Sumitomo Heavy Industries Ion Technology Co., Ltd.
- Makoto Sano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE AND SEMICONDUCTOR MANU...
- Publication number 20160027660
- Publication date Jan 28, 2016
- Kabushiki Kaisha Toshiba
- YUKITERU MATSUI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM DRAWING APPARATUS AND CHARGED PARTICLE BEAM D...
- Publication number 20150380213
- Publication date Dec 31, 2015
- NuFlare Technology, Inc.
- Hideyuki TSURUMAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LITHOGRAPHY APPARATUS AND METHOD OF MANUFACTURING ARTICLE
- Publication number 20150357944
- Publication date Dec 10, 2015
- Canon Kabushiki Kaisha
- Yoshinori Makita
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Application
MULTI CHARGED PARTICLE BEAM WRITING METHOD, AND MULTI CHARGED PARTI...
- Publication number 20150348741
- Publication date Dec 3, 2015
- NuFlare Technology, Inc.
- Hiroshi MATSUMOTO
- H01 - BASIC ELECTRIC ELEMENTS

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Transmission electron microscope and imaging method

Energy filter element for ion implantation systems for the use in t...

Energy filter element for ion implantation systems for the use in t...

Feature patterning using pitch relaxation and directional end-pushi...

Fabricating non-uniform diffraction gratings

Ion implanter irradiating ion mean onto wafer and ion implantation...

Energy filter element for ion implantation systems for the use in t...

Method and device for implanting ions in wafers

Ion beam quality control using a movable mass resolving device

Multi-piece substrate holder and alignment mechanism

Energy filter element for ion implantation systems for the use in t...

Microstructure manufacturing method and microstructure manufacturin...

Ion implantation to alter etch rate

Isotope tagging for workpiece authentication

Manufacturing method of semiconductor device and semiconductor manu...

Continuous writing of pattern

System and method for controlling ion implanter

Techniques for processing a substrate

Complementary traveling masks

Method for generating parameter pattern, ion implantation method an...

Imaging and processing for plasma ion source

Ion implantation apparatus and ion implantation method

Exposure method using control of settling times and methods of manu...

Blanking aperture array device for multi-beams, and fabrication met...

Shot data generation method and multi charged particle beam writing...

Modification of magnetic properties of films using ion and neutral...

High-throughput ion implanter

Method of manufacturing magnetic recording medium, and magnetic rec...

Multi-part mask for implanting workpieces

Multi charged particle beam writing method, and multi charged parti...

Patents Applicationslast 30 patents

ENERGY FILTER ELEMENT FOR ION IMPLANTATION SYSTEMS FOR THE USE IN T...

ENERGY FILTER ELEMENT FOR ION IMPLANTATION SYSTEMS FOR THE USE IN T...

FEATURE PATTERNING USING PITCH RELAXATION AND DIRECTIONAL END-PUSHI...

Transmission Electron Microscope and Imaging Method

FEATURE PATTERNING USING PITCH RELAXATION AND DIRECTIONAL END-PUSHI...

ENERGY FILTER ELEMENT FOR ION IMPLANTATION SYSTEMS FOR THE USE IN T...

ION IMPLANTER AND ION IMPLANTATION METHOD

ENERGY FILTER ELEMENT FOR ION IMPLANTATION SYSTEMS FOR THE USE IN T...

Ion Beam Quality Control Using A Movable Mass Resolving Device

MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE AND SEMICONDUCTOR MANU...

APPARATUS AND METHOD FOR PROCESSING OR IMAGING A SAMPLE

Continuous Writing of Pattern

CHARGED PARTICLE BEAM DRAWING APPARATUS AND CHARGED PARTICLE BEAM D...

Multi-Beam Writing Using Inclined Exposure Stripes

Bi-Directional Double-Pass Multi-Beam Writing

METHOD FOR GENERATING PARAMETER PATTERN, ION IMPLANTATION METHOD AN...

ACTIVATION CHAMBER AND KIT USED IN TREATMENT DEVICE FOR LOWERING EL...

BLANKING APERTURE ARRAY DEVICE FOR MULTI-BEAMS, AND FABRICATION MET...

METHOD FOR GENERATING WRITING DATA

MULTIPLE CHARGED PARTICLE BEAM LITHOGRAPHY APPARATUS AND MULTIPLE C...

CHARGED PARTICLE BEAM EXPOSURE APPARATUS SUITABLE FOR DRAWING ON LI...

NANOSTRUCTURE ARRAY DIFFRACTIVE OPTICS FOR RGB AND CMYK COLOR DISPLAYS

METHOD OF MEASURING BEAM POSITION OF MULTI CHARGED PARTICLE BEAM, A...

BEAM GRID LAYOUT

BLANKING DEVICE FOR MULTI CHARGED PARTICLE BEAMS, MULTI CHARGED PAR...

ION IMPLANTER, ION IMPLANTATION METHOD, AND BEAM MEASUREMENT APPARATUS

MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE AND SEMICONDUCTOR MANU...

CHARGED PARTICLE BEAM DRAWING APPARATUS AND CHARGED PARTICLE BEAM D...

LITHOGRAPHY APPARATUS AND METHOD OF MANUFACTURING ARTICLE

MULTI CHARGED PARTICLE BEAM WRITING METHOD, AND MULTI CHARGED PARTI...