Pellicles, pellicle rings or continuous protective layers

Industry

CPC
G03F1/142

This industry / category may be too specific. Please go to a parent level for more data

Parent Industries

GPHYSICS G03Photography G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES G03F1/00Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles Mask blanks or pellicles therefor Containers specially adapted therefor Preparation thereof

Current Industry

G03F1/142Pellicles, pellicle rings or continuous protective layers

Industries

Please log in for detailed analytics

Patents Grantslast 30 patents

Information Patent Grant
Method for manufacturing a membrane assembly
- Patent number 10,712,657
- Issue date Jul 14, 2020
- ASML Netherlands B.V.
- Johan Hendrik Klootwijk
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Pellicle and method of using the same
- Patent number 10,670,959
- Issue date Jun 2, 2020
- Taiwan Semiconductor Manufacturing Company, Ltd
- Chue San Yoo
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Pellicle frame and a pellicle using the same
- Patent number 10,649,326
- Issue date May 12, 2020
- Shin-Etsu Chemical Co., Ltd.
- Akinori Nishimura
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Pellicle support frame and production method
- Patent number 10,642,151
- Issue date May 5, 2020
- NIPPON LIGHT METAL COMPANY, LTD.
- Nobuyuki Ishito
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Pellicle, pellicle production method and exposure method using pell...
- Patent number 10,585,348
- Issue date Mar 10, 2020
- Mitsui Chemicals, Inc.
- Kazuo Kohmura
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Pellicle assembly and method for advanced lithography
- Patent number 10,534,256
- Issue date Jan 14, 2020
- Taiwan Semiconductor Manufacturing Company, Ltd
- Amo Chen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method for bonding a pellicle, and a bonding apparatus used in this...
- Patent number 9,645,487
- Issue date May 9, 2017
- Shin-Etsu Chemical Co., Ltd.
- Yuichi Hamada
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Pellicle
- Patent number 9,594,300
- Issue date Mar 14, 2017
- Shin-Etsu Chemical Co., Ltd.
- Jun Horikoshi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Agglutinant for pellicle and a pellicle including the same
- Patent number 9,581,896
- Issue date Feb 28, 2017
- Shin-Etsu Chemical Co., Ltd.
- Jun Horikoshi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Apparatus for protecting extreme ultra violet mask and extreme ultr...
- Patent number 9,575,421
- Issue date Feb 21, 2017
- Samsung Electronics Co., Ltd.
- Myung-soo Hwang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of fabricating a pellicle frame
- Patent number 9,436,077
- Issue date Sep 6, 2016
- Samsung Electronics Co., Ltd.
- Jeong jin Kim
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Pellicle for EUV, and an assembly including the pellicle, and a met...
- Patent number 9,405,184
- Issue date Aug 2, 2016
- Shin-Etsu Chemical Co., Ltd.
- Motoyuki Yamada
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Pellicle and an assembly of photomask plus pellicle
- Patent number 9,389,499
- Issue date Jul 12, 2016
- Shin-Etsu Chemical Co., Ltd.
- Kazutoshi Sekihara
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Determining position and curvature information directly from a surf...
- Patent number 9,377,700
- Issue date Jun 28, 2016
- ASML Holding N.V.
- Mark Josef Schuster
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Pellicle structure and method for forming the same
- Patent number 9,360,749
- Issue date Jun 7, 2016
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Yun-Yue Lin
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Pellicle for lithography
- Patent number 9,341,943
- Issue date May 17, 2016
- Shin-Etsu Chemical Co., Ltd.
- Jun Horikoshi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Pellicle for lithogrpahy
- Patent number 9,268,213
- Issue date Feb 23, 2016
- Shin-Etsu Chemical Co., Ltd.
- Toru Shirasaki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Pellicle for lithography, pellicle-mounted photomask, and exposure...
- Patent number 9,223,200
- Issue date Dec 29, 2015
- Asahi Glass Company, Limited
- Yoko Takebe
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Pellicle for EUV
- Patent number 9,195,130
- Issue date Nov 24, 2015
- Shin-Etsu Chemical Co., Ltd.
- Motoyuki Yamada
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Pellicle
- Patent number 9,176,374
- Issue date Nov 3, 2015
- Shin-Etsu Chemical Co., Ltd.
- Kazutoshi Sekihara
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
EUV pellicle frame with holes and method of forming
- Patent number 9,140,975
- Issue date Sep 22, 2015
- GLOBALFOUNDRIES Inc.
- Lei Sun
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Pellicle for lithography and a method of making thereof
- Patent number 8,956,788
- Issue date Feb 17, 2015
- Shin-Etsu Chemical Co., Ltd.
- Yoshihiko Nagata
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Pellicle for lithography
- Patent number 8,722,285
- Issue date May 13, 2014
- Shin-Etsu Chemical Co., Ltd.
- Junichi Tsukada
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Pellicle for lithography
- Patent number 8,426,084
- Issue date Apr 23, 2013
- Shin-Etsu Chemical Co., Ltd.
- Toru Shirasaki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Pellicle frame, pellicle, lithography apparatus, and method of fabr...
- Patent number 8,404,405
- Issue date Mar 26, 2013
- Samsung Electronics Co., Ltd.
- Jung-jin Kim
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Pellicle for lithography and a method for making the same
- Patent number 8,293,433
- Issue date Oct 23, 2012
- Shin-Etsu Chemical Co., Ltd.
- Junichi Tsukada
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Pellicle frame and lithographic pellicle
- Patent number 8,221,944
- Issue date Jul 17, 2012
- Shin-Etsu Chemical Co., Ltd.
- Toru Shirasaki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Pellicle frame and lithographic pellicle
- Patent number 8,221,945
- Issue date Jul 17, 2012
- Shin-Etsu Chemical Co., Ltd.
- Toru Shirasaki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Pellicle for photolithography
- Patent number 8,192,899
- Issue date Jun 5, 2012
- Shin-Etsu Chemical Co., Ltd.
- Yoshihiko Nagata
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Pellicle and method for producing pellicle
- Patent number 7,919,217
- Issue date Apr 5, 2011
- Shin-Etsu Chemical Co., Ltd.
- Yoshihiro Kubota
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
DETECTION METHOD AND SYSTEM FOR PELLICLE MEMBRANE OF PHOTOMASK
- Publication number 20210181619
- Publication date Jun 17, 2021
- SOUTHERN TAIWAN UNIVERSITY OF SCIENCE AND TECHNOLOGY
- YU-CHING LEE
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PELLICLE FOR EUV LITHOGRAPHY AND METHOD FOR MANUFACTURING THE SAME
- Publication number 20210096458
- Publication date Apr 1, 2021
- S&S TECH CO., LTD.
- Kee-Soo NAM
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EUV PELLICLES
- Publication number 20200341365
- Publication date Oct 29, 2020
- ASML NETHERLANDS B.V.
- Zomer Silvester HOUWELING
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
APPARATUS AND METHOD FOR DETERMINING A CONDITION ASSOCIATED WITH A...
- Publication number 20200341366
- Publication date Oct 29, 2020
- ASML NETHERLANDS B.V.
- Derk Servatius Gertruda BROUNS
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD FOR MANUFACTURING A MEMBRANE ASSEMBLY
- Publication number 20200301269
- Publication date Sep 24, 2020
- ASML NETHERLANDS B.V.
- Johan Hendrik KLOOTWIJK
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PELLICLE AND METHOD OF USING THE SAME
- Publication number 20200264505
- Publication date Aug 20, 2020
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chue San YOO
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PELLICLE AND METHOD FOR MANUFACTURING PELLICLE
- Publication number 20200166831
- Publication date May 28, 2020
- AIR WATER INC.
- Hidehiko OKU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Pellicle Assembly and Method for Advanced Lithography
- Publication number 20200150527
- Publication date May 14, 2020
- Taiwan Semiconductor Manufacturing Company, Ltd.
- AMO CHEN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
APPARATUS FOR REMOVING A PELLICLE FRAME FROM A PHOTOMASK AND THE ME...
- Publication number 20200073231
- Publication date Mar 5, 2020
- Taiwan Semiconductor Manufacturing company Ltd.
- Wei Cheng HUANG
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD FOR DETECTING EUV PELLICLE RUPTURE
- Publication number 20200057383
- Publication date Feb 20, 2020
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chih-Tsung SHIH
- G01 - MEASURING TESTING
Information Patent Application
PELLICLE FRAME, PELLICLE, AND METHOD FOR PELLING PELLICLE
- Publication number 20190107775
- Publication date Apr 11, 2019
- Shin-Etsu Chemical Co., Ltd.
- Yu YANASE
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD FOR MANUFACTURING A MEMBRANE ASSEMBLY
- Publication number 20180203345
- Publication date Jul 19, 2018
- ASML NETHERLANDS B.V.
- Johan Hendrik KLOOTWIJK
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PHOTOMASK BLANK, AND PREPARATION METHOD THEREOF
- Publication number 20180180985
- Publication date Jun 28, 2018
- Shin-Etsu Chemical Co., Ltd.
- Takuro KOSAKA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PELLICLE FRAME AND A PELLICLE USING THE SAME
- Publication number 20180180991
- Publication date Jun 28, 2018
- Shin-Etsu Chemical Co., Ltd.
- Akinori Nishimura
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PELLICLE AND AN ASSEMBLY OF PHOTOMASK PLUS PELLICLE
- Publication number 20140315122
- Publication date Oct 23, 2014
- Shin-Etsu Chemical Co., Ltd.
- Kazutoshi Sekihara
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Application
DETERMINING POSITION AND CURVATURE INFORMATION DIRECTLY FROM A SURF...
- Publication number 20140307246
- Publication date Oct 16, 2014
- ASML Holding N.V.
- Mark Josef Schuster
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PELLICLE FOR LITHOGRPAHY
- Publication number 20140178805
- Publication date Jun 26, 2014
- Shin-Etsu Chemical Co., Ltd.
- Toru Shirasaki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PLASMA SHIELD SURFACE PROTECTION
- Publication number 20140162465
- Publication date Jun 12, 2014
- Board of Trustees of the University of Illinois
- John R. SPORRE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PELLICLE FOR LITHOGRAPHY, PELLICLE-MOUNTED PHOTOMASK, AND EXPOSURE...
- Publication number 20140147773
- Publication date May 29, 2014
- Asahi Glass Company, Limited
- Yoko TAKEBE
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PELLICLE
- Publication number 20140106265
- Publication date Apr 17, 2014
- Shin-Etsu Chemical Co., Ltd.
- Kazutoshi Sekihara
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Application
PELLICLE FOR EUV
- Publication number 20140065525
- Publication date Mar 6, 2014
- Shin-Etsu Chemical Co., Ltd.
- Motoyuki YAMADA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD OF FABRICATING THE PELLICLE FRAME
- Publication number 20130202993
- Publication date Aug 8, 2013
- FINE SEMITECH CORP.
- Jung-jin KIM
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
Method And Device for The Depollution Of A Pelliculated Reticle
- Publication number 20130152977
- Publication date Jun 20, 2013
- ADIXEN VACUUM PRODUCTS
- Arnaud Favre
- B08 - CLEANING
Information Patent Application
PELLICLE FOR LITHOGRAPHY AND A METHOD OF MAKING THEREOF
- Publication number 20130065164
- Publication date Mar 14, 2013
- Shin-Etsu Chemical Co., Ltd.
- Yoshihiko Nagata
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PELLICLE FOR LITHOGRAPHY
- Publication number 20120276473
- Publication date Nov 1, 2012
- Shin-Etsu Chemical Co., Ltd.
- Junichi Tsukada
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PELLICLE FOR LITHOGRAPHY
- Publication number 20110129767
- Publication date Jun 2, 2011
- Shin-Etsu Chemical Co., Ltd.
- Toru Shirasaki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Pellicle for lithography and a method for making the same
- Publication number 20110081604
- Publication date Apr 7, 2011
- SHIN-ETSU CHEMICAL CO., LTD.
- Junichi Tsukada
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PELLICLE
- Publication number 20110081603
- Publication date Apr 7, 2011
- Shin-Etsu Chemical Co., Ltd.
- Toru SHIRASAKI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PELLICLE FRAME, PELLICLE, LITHOGRAPHY APPARATUS, AND METHOD OF FABR...
- Publication number 20110063601
- Publication date Mar 17, 2011
- Jung-jin KIM
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
PELLICLE INSPECTION DEVICE, EXPOSURE APPARATUS USING SAME, AND DEVI...
- Publication number 20110014577
- Publication date Jan 20, 2011
- Canon Kabushiki Kaisha
- Tsutomu Hashimoto
- G01 - MEASURING TESTING

Pellicles, pellicle rings or continuous protective layers

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Method for manufacturing a membrane assembly

Pellicle and method of using the same

Pellicle frame and a pellicle using the same

Pellicle support frame and production method

Pellicle, pellicle production method and exposure method using pell...

Pellicle assembly and method for advanced lithography

Method for bonding a pellicle, and a bonding apparatus used in this...

Pellicle

Agglutinant for pellicle and a pellicle including the same

Apparatus for protecting extreme ultra violet mask and extreme ultr...

Method of fabricating a pellicle frame

Pellicle for EUV, and an assembly including the pellicle, and a met...

Pellicle and an assembly of photomask plus pellicle

Determining position and curvature information directly from a surf...

Pellicle structure and method for forming the same

Pellicle for lithography

Pellicle for lithogrpahy

Pellicle for lithography, pellicle-mounted photomask, and exposure...

Pellicle for EUV

Pellicle

EUV pellicle frame with holes and method of forming

Pellicle for lithography and a method of making thereof

Pellicle for lithography

Pellicle for lithography

Pellicle frame, pellicle, lithography apparatus, and method of fabr...

Pellicle for lithography and a method for making the same

Pellicle frame and lithographic pellicle

Pellicle frame and lithographic pellicle

Pellicle for photolithography

Pellicle and method for producing pellicle

Patents Applicationslast 30 patents

DETECTION METHOD AND SYSTEM FOR PELLICLE MEMBRANE OF PHOTOMASK

PELLICLE FOR EUV LITHOGRAPHY AND METHOD FOR MANUFACTURING THE SAME

EUV PELLICLES

APPARATUS AND METHOD FOR DETERMINING A CONDITION ASSOCIATED WITH A...

METHOD FOR MANUFACTURING A MEMBRANE ASSEMBLY

PELLICLE AND METHOD OF USING THE SAME

PELLICLE AND METHOD FOR MANUFACTURING PELLICLE

Pellicle Assembly and Method for Advanced Lithography

APPARATUS FOR REMOVING A PELLICLE FRAME FROM A PHOTOMASK AND THE ME...

METHOD FOR DETECTING EUV PELLICLE RUPTURE

PELLICLE FRAME, PELLICLE, AND METHOD FOR PELLING PELLICLE

METHOD FOR MANUFACTURING A MEMBRANE ASSEMBLY

PHOTOMASK BLANK, AND PREPARATION METHOD THEREOF

PELLICLE FRAME AND A PELLICLE USING THE SAME

PELLICLE AND AN ASSEMBLY OF PHOTOMASK PLUS PELLICLE

DETERMINING POSITION AND CURVATURE INFORMATION DIRECTLY FROM A SURF...

PELLICLE FOR LITHOGRPAHY

PLASMA SHIELD SURFACE PROTECTION

PELLICLE FOR LITHOGRAPHY, PELLICLE-MOUNTED PHOTOMASK, AND EXPOSURE...

PELLICLE

PELLICLE FOR EUV

METHOD OF FABRICATING THE PELLICLE FRAME

Method And Device for The Depollution Of A Pelliculated Reticle

PELLICLE FOR LITHOGRAPHY AND A METHOD OF MAKING THEREOF

PELLICLE FOR LITHOGRAPHY

PELLICLE FOR LITHOGRAPHY

Pellicle for lithography and a method for making the same

PELLICLE

PELLICLE FRAME, PELLICLE, LITHOGRAPHY APPARATUS, AND METHOD OF FABR...

PELLICLE INSPECTION DEVICE, EXPOSURE APPARATUS USING SAME, AND DEVI...