Piezoelectric devices

Industry

CPC
H01J2237/20264

This industry / category may be too specific. Please go to a parent level for more data

Parent Industries

HELECTRICITY H01Electric elements H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS H01J2237/00Discharge tubes exposing object to beam

Current Industry

H01J2237/20264Piezoelectric devices

Industries

Please log in for detailed analytics

Patents Grantslast 30 patents

Information Patent Grant
Systems and methods of hysteresis compensation
- Patent number 12,183,537
- Issue date Dec 31, 2024
- FEI Company
- Edwin Verschueren
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor substrate support leveling apparatus
- Patent number 12,131,934
- Issue date Oct 29, 2024
- Applied Materials, Inc.
- Katherine Woo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Systems and methods of clamp compensation
- Patent number 12,057,286
- Issue date Aug 6, 2024
- FEI Company
- Edwin Verschueren
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Systems and methods of clamp compensation
- Patent number 11,562,877
- Issue date Jan 24, 2023
- FEI Company
- Edwin Verschueren
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Systems and methods of hysteresis compensation
- Patent number 11,538,652
- Issue date Dec 27, 2022
- FEI Company
- Edwin Verschueren
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Stage driving system and apparatus or device such as apparatus of c...
- Patent number 11,355,312
- Issue date Jun 7, 2022
- BORRIES PTE. LTD.
- Zhongwei Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Linear structure for displacement transmission, and one-dimensional...
- Patent number 11,087,952
- Issue date Aug 10, 2021
- Korea Research Institute of Standards and Science
- Dal Hyun Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Sensor and adjuster for a consumable
- Patent number 10,985,078
- Issue date Apr 20, 2021
- Lam Research Corporation
- Ian Kenworthy
- G05 - CONTROLLING REGULATING
Information Patent Grant
Actuator-assisted positioning systems and methods
- Patent number 10,825,646
- Issue date Nov 3, 2020
- FEI Company
- Graham LeGrove
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
High-precision scanning device
- Patent number 10,634,698
- Issue date Apr 28, 2020
- Nederlandse Organisatie voor toegepast-natuurwetenschappelijk onderzoek TNO
- Albert Dekker
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Vibration control system and optical equipment equipped therewith
- Patent number 10,607,810
- Issue date Mar 31, 2020
- NuFlare Technology, Inc.
- Michihiro Kawaguchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Micro stage for particle beam column using piezo elements as actuator
- Patent number 9,837,245
- Issue date Dec 5, 2017
- CEBT CO., LTD.
- Ho Seob Kim
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Stage apparatus and sample observation apparatus
- Patent number 9,171,695
- Issue date Oct 27, 2015
- Hitachi High-Technologies Corporation
- Yasuyuki Momoi
- G05 - CONTROLLING REGULATING
Information Patent Grant
Method for electron tomography
- Patent number 9,147,551
- Issue date Sep 29, 2015
- FEI Company
- Uwe Luecken
- G01 - MEASURING TESTING
Information Patent Grant
Charged particle beam lithography system and target positioning device
- Patent number 8,957,395
- Issue date Feb 17, 2015
- Mapper Lithography IP B.V.
- Jerry Peijster
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam lithography system and target positioning device
- Patent number 8,796,644
- Issue date Aug 5, 2014
- Mapper Lithography IP B.V.
- Jerry Peijster
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam lithography system and target positioning device
- Patent number 8,779,392
- Issue date Jul 15, 2014
- Mapper Lithography IP B.V.
- Jerry Peijster
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Stage drive device
- Patent number 8,638,026
- Issue date Jan 28, 2014
- Hitachi High-Technologies Corporation
- Masashi Shibahara
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Transmission electron microscope apparatus comprising electron spec...
- Patent number 8,530,858
- Issue date Sep 10, 2013
- Hitachi High-Technologies Corporation
- Shohei Terada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Actuatable capacitive transducer for quantitative nanoindentation c...
- Patent number 8,453,498
- Issue date Jun 4, 2013
- Hysitron, Inc.
- Oden L. Warren
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Speciman holder and speciman holder movement device
- Patent number 8,148,700
- Issue date Apr 3, 2012
- Hiroya Miyazaka
- Hiroya Miyazaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Installation and method of nanofabrication
- Patent number 8,101,925
- Issue date Jan 24, 2012
- Centre National de la Recherche Scientifique CNRS
- Jacques Gierak
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Dynamically tilting specimen holder for stereo and tomographic imag...
- Patent number 8,089,053
- Issue date Jan 3, 2012
- Dudley Sean Finch
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Motorized manipulator for positioning a TEM specimen
- Patent number 7,851,769
- Issue date Dec 14, 2010
- The Regents of the University of California
- Andreas Karl Schmid
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Actuatable capacitive transducer for quantitative nanoindentation c...
- Patent number 7,798,011
- Issue date Sep 21, 2010
- Hysitron, Inc.
- Oden L. Warren
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Stage mechanism, electron microscope having the stage mechanism and...
- Patent number 7,791,043
- Issue date Sep 7, 2010
- Hitachi High-Technologies Corporation
- Eiichi Seya
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Micro stage using piezoelectric element
- Patent number 7,732,985
- Issue date Jun 8, 2010
- Electronics and Telecommunications Research Institute
- Sang Kuk Choi
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Probe and small sample pick up mechanism
- Patent number 7,404,339
- Issue date Jul 29, 2008
- Sii Nano Technology Inc.
- Masanao Munekane
- G01 - MEASURING TESTING
Information Patent Grant
Micropositioning device
- Patent number 6,917,140
- Issue date Jul 12, 2005
- Nanofactory Instruments AB
- Håkan Olin
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Stage-actuators that do not generate fluctuating magnetic fields, a...
- Patent number 6,838,808
- Issue date Jan 4, 2005
- Nikon Corporation
- Keiichi Tanaka
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER

Patents Applicationslast 30 patents

Information Patent Application
APPARATUS AND METHOD FOR MANIPULATING A MICROSCOPIC SAMPLE
- Publication number 20250022677
- Publication date Jan 16, 2025
- FEI Company
- Joseph M. Lebow
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS AND METHODS OF CLAMP COMPENSATION
- Publication number 20240339286
- Publication date Oct 10, 2024
- FEI Company
- Edwin Verschueren
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MEMS PLATFORM FOR THIN FILM NANOMECHANICS CHARACTERIZATION
- Publication number 20230187167
- Publication date Jun 15, 2023
- Carnegie Mellon University
- Maarten de Boer
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method for Controlling Position of Sample in Charged Particle Beam...
- Publication number 20230178330
- Publication date Jun 8, 2023
- Hitachi High-Tech Corporation
- Kazuki ISHIZAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS AND METHODS OF CLAMP COMPENSATION
- Publication number 20230120177
- Publication date Apr 20, 2023
- FEI Company
- Edwin Verschueren
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS AND METHODS OF HYSTERESIS COMPENSATION
- Publication number 20230101676
- Publication date Mar 30, 2023
- FEI Company
- Edwin Verschueren
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
NOVEL STAGE DRIVING SYSTEM AND APPARATUS OR DEVICE SUCH AS APPARATU...
- Publication number 20220108869
- Publication date Apr 7, 2022
- BORRIES PTE. LTD.
- Zhongwei Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS AND METHODS OF CLAMP COMPENSATION
- Publication number 20210151276
- Publication date May 20, 2021
- FEI Company
- Edwin Verschueren
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS AND METHODS OF HYSTERESIS COMPENSATION
- Publication number 20210151277
- Publication date May 20, 2021
- FEI Company
- Edwin Verschueren
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ACTUATOR-ASSISTED POSITIONING SYSTEMS AND METHODS
- Publication number 20200312605
- Publication date Oct 1, 2020
- FEI Company
- Graham LeGrove
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HIGH-PRECISION SCANNING DEVICE
- Publication number 20190353679
- Publication date Nov 21, 2019
- NEDERLANDSE ORGANISATIE VOOR TOEGEPAST- NATUURWETENSCHAPPELIJK ONDERZOEK TNO
- Albert DEKKER
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VIBRATION CONTROL SYSTEM AND OPTICAL EQUIPMENT EQUIPPED THEREWITH
- Publication number 20190214224
- Publication date Jul 11, 2019
- NuFlare Technology, Inc.
- Michihiro Kawaguchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SENSOR AND ADJUSTER FOR A CONSUMABLE
- Publication number 20170133283
- Publication date May 11, 2017
- LAM RESEARCH CORPORATION
- Ian KENWORTHY
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Micro Stage using piezo elements
- Publication number 20160268929
- Publication date Sep 15, 2016
- Ho Seob KIM
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Application
Method for Electron Tomography
- Publication number 20150069231
- Publication date Mar 12, 2015
- FEI Company
- Uwe Luecken
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SAMPLE POSITIONING APPARATUS, SAMPLE STAGE, AND CHARGED PARTICLE BE...
- Publication number 20140312246
- Publication date Oct 23, 2014
- Hitachi High-Technologies Corporation
- Motohiro Takahashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Charged Particle Beam Lithography System and Target Positioning Device
- Publication number 20140203187
- Publication date Jul 24, 2014
- Jerry Peijster
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM LITHOGRAPHY SYSTEM AND TARGET POSITIONING DEVICE
- Publication number 20120056100
- Publication date Mar 8, 2012
- Jerry Peijster
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
STAGE DRIVE DEVICE
- Publication number 20110260558
- Publication date Oct 27, 2011
- Masashi Shibahara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SPECIMEN HOLDER ASSEMBLY
- Publication number 20110253905
- Publication date Oct 20, 2011
- University of Sheffield
- Guenter Moebus
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Application
TRANSMISSION ELECTRON MICROSCOPE APPARATUS COMPRISING ELECTRON SPEC...
- Publication number 20110155906
- Publication date Jun 30, 2011
- Shohei Terada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ACTUATABLE CAPACITIVE TRANSDUCER FOR QUANTITATIVE NANOINDENTATION C...
- Publication number 20110005306
- Publication date Jan 13, 2011
- Hysitron Incorporated
- Oden L. Warren
- G01 - MEASURING TESTING
Information Patent Application
SAFE MOTION
- Publication number 20100230608
- Publication date Sep 16, 2010
- NANOFACTORY INSTRUMENTS AB
- Paul Bengtsson
- G01 - MEASURING TESTING
Information Patent Application
NANOROBOT MODULE, AUTOMATION AND EXCHANGE
- Publication number 20100140473
- Publication date Jun 10, 2010
- Volker Klocke
- G01 - MEASURING TESTING
Information Patent Application
Charged Particle Beam Lithography System and Target Positioning Device
- Publication number 20100044578
- Publication date Feb 25, 2010
- Jerry Peijster
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SPECIMAN HOLDER AND SPECIMAN HOLDER MOVEMENT DEVICE
- Publication number 20100006771
- Publication date Jan 14, 2010
- Hiroya Miyazaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
STAGE AND ELECTRON MICROSCOPE APPARATUS
- Publication number 20090236540
- Publication date Sep 24, 2009
- Hitachi High-Technologies Corporation
- Eiichi Seya
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Motorized Manipulator for Positioning a TEM Specimen
- Publication number 20090146075
- Publication date Jun 11, 2009
- Regents of the University of California
- Andreas Karl Schmid
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INSTALLATION AND METHOD OF NANOFABRICATION
- Publication number 20090095923
- Publication date Apr 16, 2009
- CENTRE NATIONAL DE LA RECHERCHESECIENTIFQUE-CNRS
- Jacques Gierak
- G01 - MEASURING TESTING
Information Patent Application
Movement Platform for Carrier With 5 Degrees of Freedom
- Publication number 20080304142
- Publication date Dec 11, 2008
- Jacob Frederik Friso Klinkhamer
- H01 - BASIC ELECTRIC ELEMENTS

Piezoelectric devices

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Systems and methods of hysteresis compensation

Semiconductor substrate support leveling apparatus

Systems and methods of clamp compensation

Systems and methods of clamp compensation

Systems and methods of hysteresis compensation

Stage driving system and apparatus or device such as apparatus of c...

Linear structure for displacement transmission, and one-dimensional...

Sensor and adjuster for a consumable

Actuator-assisted positioning systems and methods

High-precision scanning device

Vibration control system and optical equipment equipped therewith

Micro stage for particle beam column using piezo elements as actuator

Stage apparatus and sample observation apparatus

Method for electron tomography

Charged particle beam lithography system and target positioning device

Charged particle beam lithography system and target positioning device

Charged particle beam lithography system and target positioning device

Stage drive device

Transmission electron microscope apparatus comprising electron spec...

Actuatable capacitive transducer for quantitative nanoindentation c...

Speciman holder and speciman holder movement device

Installation and method of nanofabrication

Dynamically tilting specimen holder for stereo and tomographic imag...

Motorized manipulator for positioning a TEM specimen

Actuatable capacitive transducer for quantitative nanoindentation c...

Stage mechanism, electron microscope having the stage mechanism and...

Micro stage using piezoelectric element

Probe and small sample pick up mechanism

Micropositioning device

Stage-actuators that do not generate fluctuating magnetic fields, a...

Patents Applicationslast 30 patents

APPARATUS AND METHOD FOR MANIPULATING A MICROSCOPIC SAMPLE

SYSTEMS AND METHODS OF CLAMP COMPENSATION

MEMS PLATFORM FOR THIN FILM NANOMECHANICS CHARACTERIZATION

Method for Controlling Position of Sample in Charged Particle Beam...

SYSTEMS AND METHODS OF CLAMP COMPENSATION

SYSTEMS AND METHODS OF HYSTERESIS COMPENSATION

NOVEL STAGE DRIVING SYSTEM AND APPARATUS OR DEVICE SUCH AS APPARATU...

SYSTEMS AND METHODS OF CLAMP COMPENSATION

SYSTEMS AND METHODS OF HYSTERESIS COMPENSATION

ACTUATOR-ASSISTED POSITIONING SYSTEMS AND METHODS

HIGH-PRECISION SCANNING DEVICE

VIBRATION CONTROL SYSTEM AND OPTICAL EQUIPMENT EQUIPPED THEREWITH

SENSOR AND ADJUSTER FOR A CONSUMABLE

Micro Stage using piezo elements

Method for Electron Tomography

SAMPLE POSITIONING APPARATUS, SAMPLE STAGE, AND CHARGED PARTICLE BE...

Charged Particle Beam Lithography System and Target Positioning Device

CHARGED PARTICLE BEAM LITHOGRAPHY SYSTEM AND TARGET POSITIONING DEVICE

STAGE DRIVE DEVICE

SPECIMEN HOLDER ASSEMBLY

TRANSMISSION ELECTRON MICROSCOPE APPARATUS COMPRISING ELECTRON SPEC...

ACTUATABLE CAPACITIVE TRANSDUCER FOR QUANTITATIVE NANOINDENTATION C...

SAFE MOTION

NANOROBOT MODULE, AUTOMATION AND EXCHANGE

Charged Particle Beam Lithography System and Target Positioning Device

SPECIMAN HOLDER AND SPECIMAN HOLDER MOVEMENT DEVICE

STAGE AND ELECTRON MICROSCOPE APPARATUS

Motorized Manipulator for Positioning a TEM Specimen

INSTALLATION AND METHOD OF NANOFABRICATION

Movement Platform for Carrier With 5 Degrees of Freedom