Planarisation of the insulating layers

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H01L21/31051

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HELECTRICITY H01Electric elements H01LSEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

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H01L21/31051Planarisation of the insulating layers

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Patents Grantslast 30 patents

Information Patent Grant
Method of manufacturing semiconductor device
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Planarization process, planarization system, and method of manufact...
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Information Patent Grant
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Information Patent Grant
Formation of hybrid isolation regions through recess and re-deposition
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3DIC formation with dies bonded to formed RDLs
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Non-planar semiconductor device having doped sub-fin region and met...
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- Pengkai Xu
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MULTI LEVEL CONTACT ETCH
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COMPRESSIVE FILMS FOR LARGE AREA GAPFILL
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PLANARIZATION PROCESS, PLANARIZATION SYSTEM, AND METHOD OF MANUFACT...
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- Hua Hong Semiconductor (Wuxi) Limited
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- Taiwan Semiconductor Manufacturing Co., Ltd.
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- Publication number 20230246421
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- Seth J. Bamesberger
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- Pinyen LIN
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METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE AND A SEMICONDUCTOR...
- Publication number 20230060763
- Publication date Mar 2, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Hsu Ming HSIAO
- H01 - BASIC ELECTRIC ELEMENTS

Planarisation of the insulating layers

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Method of manufacturing semiconductor device

Hybrid isolation regions having upper and lower portions with seams

Methods of forming a semiconductor device including active patterns...

Multilevel interconnection structure and method for forming the same

Display device and method of manufacturing the same

Methods for forming self-aligned contacts using spin-on silicon car...

Method of manufacturing a semiconductor device and a semiconductor...

Planarization process, planarization system, and method of manufact...

Insulated metal substrate and method for manufacturing same

Method for forming semiconductor-on-insulator (SOI) substrate by cl...

Method for forming lead wires in hybrid-bonded semiconductor devices

Planarization system, planarization process, and method of manufact...

Contacts for semiconductor devices and methods of forming the same

Formation method of semiconductor device with dielectric isolation...

Local epitaxy nanofilms for nanowire stack GAA device

Structure of flash memory cell and method for fabricating the same

Formation of hybrid isolation regions through recess and re-deposition

3DIC formation with dies bonded to formed RDLs

Spacer-defined process for lithography-etch double patterning for i...

Gate structure and method with dielectric gates and gate-cut features

Fin field-effect transistor device and method

Dielectric isolated fin with improved fin profile

Method for forming semiconductor structure

Area selective organic material removal

Method for forming lead wires in hybrid-bonded semiconductor devices

Semiconductor device structure with fine conductive contact and met...

Method for forming planarization layer and pattern forming method u...

Non-planar semiconductor device having doped sub-fin region and met...

Semiconductor lasers and processes for the planarization of semicon...

Semiconductor device and method for manufacturing the same

Patents Applicationslast 30 patents

SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME

HIGH CRACK THRESHOLD PLANARIZING COATINGS AND PROCESSES TO FILL WID...

Isolation Structures Of Semiconductor Devices

METHODS FOR REDUCING SCRATCH DEFECTS IN CHEMICAL MECHANICAL PLANARI...

HYBRID ISOLATION REGIONS HAVING UPPER AND LOWER PORTIONS WITH SEAMS

PLANARIZATION APPARATUS, PLANARIZATION METHOD, AND PRODUCT MANUFACT...

MULTI LEVEL CONTACT ETCH

COMPRESSIVE FILMS FOR LARGE AREA GAPFILL

PLANARIZATION PROCESS, PLANARIZATION SYSTEM, AND METHOD OF MANUFACT...

METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE AND A SEMICONDUCTOR...

METHOD FOR FORMING SEMICONDUCTOR-ON-INSULATOR (SOI) SUBSTRATE

CONTACTS FOR SEMICONDUCTOR DEVICES AND METHODS OF FORMING THE SAME

STRUCTURE OF FLASH MEMORY CELL

Formation of Hybrid Isolation Regions Through Recess and Re-Deposition

INERTIAL SENSOR, METHOD OF MANUFACTURING INERTIAL SENSOR, AND INERT...

Semiconductor Structure and Method for Forming the Same

METHODS FOR REDUCING SCRATCH DEFECTS IN CHEMICAL MECHANICAL PLANARI...

POLISHING COMPOSTION FOR SEMICONDUCTOR PROCESS, MANUFACTURING METHO...

METHOD FOR FORMING SEMICONDUCTOR STRUCTURE

AREA SELECTIVE ORGANIC MATERIAL REMOVAL

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE

SEMICONDUCTOR LASERS AND PROCESSES FOR THE PLANARIZATION OF SEMICON...

NON-PLANAR SEMICONDUCTOR DEVICE HAVING DOPED SUB-FIN REGION AND MET...

PLANARIZATION PROCESS, APPARATUS AND METHOD OF MANUFACTURING AN ART...

APPARATUS INCLUDING A SUBSTRATE CHUCK, A DISPENSER, AND A PLANARIZA...

METHOD FOR INHIBITING FORMABLE MATERIAL EVAPORATION, SYSTEM FOR INH...

SEMICONDUCTOR WAFER SEAL RING

METHOD OF SHAPING A SURFACE, SHAPING SYSTEM, AND METHOD OF MANUFACU...

ISOLATION STRUCTURES OF SEMICONDUCTOR DEVICES

METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE AND A SEMICONDUCTOR...