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Planarisation of the insulating layers
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Electric elements
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SEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
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H01L21/31051
Planarisation of the insulating layers
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last 30 patents
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Planarization system, planarization process, and method of manufact...
Patent number
11,972,976
Issue date
Apr 30, 2024
Canon Kabushiki Kaisha
Byung-Jin Choi
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Contacts for semiconductor devices and methods of forming the same
Patent number
11,961,893
Issue date
Apr 16, 2024
Taiwan Semiconductor Manufacturing Co., Ltd
Te-Chih Hsiung
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Formation method of semiconductor device with dielectric isolation...
Patent number
11,942,329
Issue date
Mar 26, 2024
Taiwan Semiconductor Manufacturing Company, Ltd
Wan-Yi Kao
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Local epitaxy nanofilms for nanowire stack GAA device
Patent number
11,855,141
Issue date
Dec 26, 2023
Taiwan Semiconductor Manufacturing Co., Ltd
Ling-Yen Yeh
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Structure of flash memory cell and method for fabricating the same
Patent number
11,855,156
Issue date
Dec 26, 2023
United Microelectronics Corp.
Chih-Jung Chen
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Formation of hybrid isolation regions through recess and re-deposition
Patent number
11,837,505
Issue date
Dec 5, 2023
Taiwan Semiconductor Manufacturing Co., Ltd
Chung-Ting Ko
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
3DIC formation with dies bonded to formed RDLs
Patent number
11,810,899
Issue date
Nov 7, 2023
Taiwan Semiconductor Manufacturing Company, Ltd.
Chen-Hua Yu
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Spacer-defined process for lithography-etch double patterning for i...
Patent number
11,804,401
Issue date
Oct 31, 2023
International Business Machines Corporation
Nelson Felix
H01 - BASIC ELECTRIC ELEMENTS
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Gate structure and method with dielectric gates and gate-cut features
Patent number
11,791,217
Issue date
Oct 17, 2023
Taiwan Semiconductor Manufacturing Co., Ltd
Ta-Chun Lin
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Fin field-effect transistor device and method
Patent number
11,735,430
Issue date
Aug 22, 2023
Taiwan Semiconductor Manufacturing Company, Ltd
Yin Wang
H01 - BASIC ELECTRIC ELEMENTS
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Dielectric isolated fin with improved fin profile
Patent number
11,728,428
Issue date
Aug 15, 2023
International Business Machines Corporation
Kangguo Cheng
H01 - BASIC ELECTRIC ELEMENTS
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Method for forming semiconductor structure
Patent number
11,715,638
Issue date
Aug 1, 2023
Taiwan Semiconductor Manufacturing Company, Ltd
Yu-Chen Chang
H01 - BASIC ELECTRIC ELEMENTS
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Area selective organic material removal
Patent number
11,694,903
Issue date
Jul 4, 2023
ASM IP Holding B.V.
Mikko Ritala
H01 - BASIC ELECTRIC ELEMENTS
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Method for forming lead wires in hybrid-bonded semiconductor devices
Patent number
11,670,543
Issue date
Jun 6, 2023
Yangtze Memory Technologies Co., Ltd.
Meng Yan
H01 - BASIC ELECTRIC ELEMENTS
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Semiconductor device structure with fine conductive contact and met...
Patent number
11,652,151
Issue date
May 16, 2023
NANYA TECHNOLOGY CORPORATION
Cheng-Ling Yang
H01 - BASIC ELECTRIC ELEMENTS
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Method for forming planarization layer and pattern forming method u...
Patent number
11,651,968
Issue date
May 16, 2023
SK Hynix Inc.
Ji Sok Lee
H01 - BASIC ELECTRIC ELEMENTS
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Non-planar semiconductor device having doped sub-fin region and met...
Patent number
11,631,673
Issue date
Apr 18, 2023
Tahoe Research, LTD.
Tahir Ghani
H01 - BASIC ELECTRIC ELEMENTS
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Semiconductor lasers and processes for the planarization of semicon...
Patent number
11,605,933
Issue date
Mar 14, 2023
MACOM Technology Solutions Holdings, Inc.
Ali Badar Alamin Dow
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Semiconductor device and method for manufacturing the same
Patent number
11,600,493
Issue date
Mar 7, 2023
Shanghai Huali Microelectronics Corporation
Pengkai Xu
H01 - BASIC ELECTRIC ELEMENTS
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Methods for forming self-aligned contacts using spin-on silicon car...
Patent number
11,482,454
Issue date
Oct 25, 2022
Tokyo Electron Limited
Junling Sun
H01 - BASIC ELECTRIC ELEMENTS
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Substrate polishing apparatus
Patent number
11,472,002
Issue date
Oct 18, 2022
Ebara Corporation
Hiroyuki Shinozaki
H01 - BASIC ELECTRIC ELEMENTS
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Multilevel interconnection structure and method for forming the same
Patent number
11,469,170
Issue date
Oct 11, 2022
Taiwan Semiconductor Manufacturing Co., Ltd
Zhang-Ying Yan
H01 - BASIC ELECTRIC ELEMENTS
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Semiconductor device and method of fabricating the same
Patent number
11,450,603
Issue date
Sep 20, 2022
Taiwan Semiconductor Manufacturing Company, Ltd
Sih-Hao Liao
H01 - BASIC ELECTRIC ELEMENTS
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FinFET device and method of forming
Patent number
11,424,364
Issue date
Aug 23, 2022
Taiwan Semiconductor Manufacturing Company, Ltd.
Xi-Zong Chen
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Method for fabricating flash memory
Patent number
11,417,734
Issue date
Aug 16, 2022
United Microelectronics Corp.
Chih-Jung Chen
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Formation of hybrid isolation regions through recess and re-deposition
Patent number
11,404,323
Issue date
Aug 2, 2022
Taiwan Semiconductor Manufacturing Co., Ltd
Chung-Ting Ko
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Fin structures having varied fin heights for semiconductor device
Patent number
11,387,347
Issue date
Jul 12, 2022
Taiwan Semiconductor Manufacturing Co., Ltd.
Kuo-Cheng Chiang
H01 - BASIC ELECTRIC ELEMENTS
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Semiconductor device and fabrication method thereof
Patent number
11,322,353
Issue date
May 3, 2022
Semiconductor Manufacturing International (Shanghai) Corporation
Jisong Jin
H01 - BASIC ELECTRIC ELEMENTS
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Method for forming lead wires in hybrid-bonded semiconductor devices
Patent number
11,322,392
Issue date
May 3, 2022
Yangtze Memory Technologies Co., Ltd.
Meng Yan
H01 - BASIC ELECTRIC ELEMENTS
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Embedded transistor
Patent number
11,315,931
Issue date
Apr 26, 2022
Taiwan Semiconductor Manufacturing Company, Ltd.
Yu-Wei Ting
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
STRUCTURE OF FLASH MEMORY CELL
Publication number
20240072129
Publication date
Feb 29, 2024
United Microelectronics Corp.
Chih-Jung Chen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Formation of Hybrid Isolation Regions Through Recess and Re-Deposition
Publication number
20240021482
Publication date
Jan 18, 2024
Taiwan Semiconductor Manufacturing Co., Ltd.
Chung-Ting Ko
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
INERTIAL SENSOR, METHOD OF MANUFACTURING INERTIAL SENSOR, AND INERT...
Publication number
20240003933
Publication date
Jan 4, 2024
SEIKO EPSON CORPORATION
Teruo Takizawa
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
Semiconductor Structure and Method for Forming the Same
Publication number
20230420262
Publication date
Dec 28, 2023
Hua Hong Semiconductor (Wuxi) Limited
Tongqing CHEN
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
METHODS FOR REDUCING SCRATCH DEFECTS IN CHEMICAL MECHANICAL PLANARI...
Publication number
20230377898
Publication date
Nov 23, 2023
Taiwan Semiconductor Manufacturing Co., Ltd.
Wan-Chun Pan
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
POLISHING COMPOSTION FOR SEMICONDUCTOR PROCESS, MANUFACTURING METHO...
Publication number
20230332014
Publication date
Oct 19, 2023
SK enpulse Co., Ltd.
Han Teo PARK
B24 - GRINDING POLISHING
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Patent Application
METHOD FOR FORMING SEMICONDUCTOR STRUCTURE
Publication number
20230326756
Publication date
Oct 12, 2023
Taiwan Semiconductor Manufacturing Company, Ltd.
Yu-Chen CHANG
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
AREA SELECTIVE ORGANIC MATERIAL REMOVAL
Publication number
20230307247
Publication date
Sep 28, 2023
ASM IP HOLDING B.V.
Mikko Ritala
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
Publication number
20230298889
Publication date
Sep 21, 2023
RENESAS ELECTRONICS CORPORATION
Shibun TSUDA
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
SEMICONDUCTOR LASERS AND PROCESSES FOR THE PLANARIZATION OF SEMICON...
Publication number
20230246421
Publication date
Aug 3, 2023
MACOM Technology Solutions Holdings, Inc.
Ali Badar Alamin DOW
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
NON-PLANAR SEMICONDUCTOR DEVICE HAVING DOPED SUB-FIN REGION AND MET...
Publication number
20230223406
Publication date
Jul 13, 2023
Tahoe Research, Ltd.
Tahir GHANI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLANARIZATION PROCESS, APPARATUS AND METHOD OF MANUFACTURING AN ART...
Publication number
20230207326
Publication date
Jun 29, 2023
Canon Kabushiki Kaisha
Steven C. Shackleton
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
APPARATUS INCLUDING A SUBSTRATE CHUCK, A DISPENSER, AND A PLANARIZA...
Publication number
20230197463
Publication date
Jun 22, 2023
Canon Kabushiki Kaisha
Ozkan Ozturk
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
METHOD FOR INHIBITING FORMABLE MATERIAL EVAPORATION, SYSTEM FOR INH...
Publication number
20230197462
Publication date
Jun 22, 2023
Canon Kabushiki Kaisha
Steven C. Shackleton
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
SEMICONDUCTOR WAFER SEAL RING
Publication number
20230187294
Publication date
Jun 15, 2023
Taiwan Semiconductor Manufacturing Company, Ltd.
Ming-Che Lee
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
METHOD OF SHAPING A SURFACE, SHAPING SYSTEM, AND METHOD OF MANUFACU...
Publication number
20230095200
Publication date
Mar 30, 2023
Canon Kabushiki Kaisha
Seth J. Bamesberger
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
ISOLATION STRUCTURES OF SEMICONDUCTOR DEVICES
Publication number
20230065234
Publication date
Mar 2, 2023
Taiwan Semiconductor Manufacturing Co., Ltd.
Pinyen LIN
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE AND A SEMICONDUCTOR...
Publication number
20230060763
Publication date
Mar 2, 2023
Taiwan Semiconductor Manufacturing Company, Ltd.
Hsu Ming HSIAO
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
METHOD FOR FORMING SEMICONDUCTOR-ON-INSULATOR (SOI) SUBSTRATE
Publication number
20230066574
Publication date
Mar 2, 2023
Taiwan Semiconductor Manufacturing company Ltd.
YU-HUNG CHENG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Methods for Forming Self-Aligned Contacts Using Spin-on Silicon Car...
Publication number
20230044047
Publication date
Feb 9, 2023
TOKYO ELECTRON LIMITED
Junling Sun
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
SEMICONDUCTOR STRUCTURE AND MANUFACTURING METHOD THEREOF
Publication number
20230043874
Publication date
Feb 9, 2023
CHANGXIN MEMORY TECHNOLOGIES, INC
Peimeng WANG
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
SEMICONDUCTOR DEVICE STRUCTURE WITH FINE CONDUCTIVE CONTACT AND MET...
Publication number
20230034084
Publication date
Feb 2, 2023
NANYA TECHNOLOGY CORPORATION
CHENG-LING YANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
FORMATION METHOD OF SEMICONDUCTOR DEVICE WITH DIELECTRIC ISOLATION...
Publication number
20230025396
Publication date
Jan 26, 2023
Taiwan Semiconductor Manufacturing Company, Ltd.
Wan-Yi KAO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR FORMING SEMICONDUCTOR STRUCTURE
Publication number
20230015618
Publication date
Jan 19, 2023
Taiwan Semiconductor Manufacturing Company, Ltd.
Yu-Chen CHANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLANARIZATION PROCESS, PLANARIZATION SYSTEM, AND METHOD OF MANUFACT...
Publication number
20220384205
Publication date
Dec 1, 2022
Canon Kabushiki Kaisha
Steven C. Shackleton
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR DEVICE AND METHOD OF FABRICATING THE SAME
Publication number
20220367349
Publication date
Nov 17, 2022
Taiwan Semiconductor Manufacturing Company, Ltd.
Sih-Hao Liao
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Formation of Hybrid Isolation Regions Through Recess and Re-Deposition
Publication number
20220367286
Publication date
Nov 17, 2022
Taiwan Semiconductor Manufacturing, Ltd.
Chung-Ting Ko
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Contacts for Semiconductor Devices and Methods of Forming the Same
Publication number
20220352338
Publication date
Nov 3, 2022
Taiwan Semiconductor Manufacturing Co., Ltd.
Te-Chih Hsiung
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
FIN STRUCTURES HAVING VARIED FIN HEIGHTS FOR SEMICONDUCTOR DEVICE
Publication number
20220344495
Publication date
Oct 27, 2022
Taiwan Semiconductor Manufacturing Co., Ltd.
Kuo-Cheng CHIANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
STRUCTURE OF FLASH MEMORY CELL AND METHOD FOR FABRICATING THE SAME
Publication number
20220336596
Publication date
Oct 20, 2022
United Microelectronics Corp.
Chih-Jung Chen
H01 - BASIC ELECTRIC ELEMENTS