Plasma being used non-continuously in between ALD reactions

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CPC
C23C16/4554

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CCHEMISTRY METALLURGY C23Surface treatment C23CCOATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating

Current Industry

C23C16/4554Plasma being used non-continuously in between ALD reactions

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Metal deposition
- Patent number 12,203,168
- Issue date Jan 21, 2025
- Lam Research Corporation
- Ravi Vellanki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus with an injector
- Patent number 12,195,852
- Issue date Jan 14, 2025
- ASM IP Holding B.V.
- Kornelius Haanstra
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Thin layer deposition with plasma pulsing
- Patent number 12,195,851
- Issue date Jan 14, 2025
- Applied Materials, Inc.
- Cong Trinh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of depositing silicon oxide films
- Patent number 12,188,121
- Issue date Jan 7, 2025
- ASM Genitech Korea Ltd.
- Tae Ho Yoon
- C01 - INORGANIC CHEMISTRY
Information Patent Grant
Loading device, arrangement and method for loading a reaction chamber
- Patent number 12,180,588
- Issue date Dec 31, 2024
- Beneq Oy
- Johannes Wesslin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and methods to transfer substrates into and out of a spat...
- Patent number 12,183,618
- Issue date Dec 31, 2024
- Applied Materials, Inc.
- Sanjeev Baluja
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Vacuum chamber and arrangement for atomic layer deposition
- Patent number 12,180,587
- Issue date Dec 31, 2024
- Beneq Oy
- Johannes Wesslin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film formation method and film formation device
- Patent number 12,183,572
- Issue date Dec 31, 2024
- Tokyo Electron Limited
- Yumiko Kawano
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Processing apparatus and processing method
- Patent number 12,173,405
- Issue date Dec 24, 2024
- Tokyo Electron Limited
- Hiroki Iriuda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Deposition method and plasma processing apparatus
- Patent number 12,170,198
- Issue date Dec 17, 2024
- Tokyo Electron Limited
- Hiroyuki Matsuura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Deposition method and deposition apparatus
- Patent number 12,163,220
- Issue date Dec 10, 2024
- Tokyo Electron Limited
- Yu Komai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
System for continuous atomic layer deposition
- Patent number 12,163,221
- Issue date Dec 10, 2024
- UChicago Argonne, LLC
- Jeffrey W. Elam
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Depositing coatings on and within housings, apparatus, or tools uti...
- Patent number 12,163,222
- Issue date Dec 10, 2024
- Halliburton Energy Services, Inc.
- Christopher Michael Jones
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma processing apparatus and plasma processing method
- Patent number 12,165,846
- Issue date Dec 10, 2024
- Tokyo Electron Limited
- Eiki Kamata
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Thermal atomic layer deposition of silicon-containing films
- Patent number 12,157,945
- Issue date Dec 3, 2024
- Lam Research Corporation
- Awnish Gupta
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Particle coating methods and apparatus
- Patent number 12,146,217
- Issue date Nov 19, 2024
- Applied Materials, Inc.
- Kaushal Gangakhedkar
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Precursor container
- Patent number 12,146,218
- Issue date Nov 19, 2024
- Picosun Oy
- Tom Blomberg
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus
- Patent number 12,142,515
- Issue date Nov 12, 2024
- Jusung Engineering Co., Ltd.
- DongHyuk Oh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and method for cleaning reaction vessel for processing su...
- Patent number 12,139,787
- Issue date Nov 12, 2024
- Kokusai Electric Corporation
- Shinya Ebata
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Multilayer encapsulation thin-film
- Patent number 12,134,821
- Issue date Nov 5, 2024
- Research & Business Foundation Sungkyunkwan University
- Choelmin Jang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Selective processing with etch residue-based inhibitors
- Patent number 12,131,909
- Issue date Oct 29, 2024
- Lam Research Corporation
- Kashish Sharma
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods and apparatuses for flowable gap-fill
- Patent number 12,129,546
- Issue date Oct 29, 2024
- ASM IP Holding B.V.
- Shinya Yoshimoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Powder-atomic-layer-deposition device with knocker
- Patent number 12,123,092
- Issue date Oct 22, 2024
- SKY TECH INC.
- Jing-Cheng Lin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
PEALD nitride films
- Patent number 12,119,221
- Issue date Oct 15, 2024
- Applied Materials, Inc.
- Hanhong Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Atomic layer deposition reactor arrangement and a method for operat...
- Patent number 12,116,668
- Issue date Oct 15, 2024
- Beneq Oy
- Jonas Andersson
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus and method of manufacturing semicond...
- Patent number 12,116,666
- Issue date Oct 15, 2024
- Kokusai Electric Corporation
- Daigi Kamimura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Adjustable fluid inlet assembly for a substrate processing apparatu...
- Patent number 12,110,588
- Issue date Oct 8, 2024
- Picosun Oy
- Timo Malinen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and methods for wafer chucking on a susceptor for ALD
- Patent number 12,112,969
- Issue date Oct 8, 2024
- Applied Materials, Inc.
- Joseph Yudovsky
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Mass flow controller and flow control method therefor
- Patent number 12,111,671
- Issue date Oct 8, 2024
- BEIJING SEVENSTAR FLOW CO., LTD
- Bowen Deng
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus and method
- Patent number 12,112,927
- Issue date Oct 8, 2024
- Picosun Oy
- Väinö Kilpi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
PROCESS AND APPARATUS FOR RADICAL ENHANCED VAPOR DEPOSITION
- Publication number 20250029831
- Publication date Jan 23, 2025
- ASM IP HOLDING B.V.
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEPOSITION OF ULTRA-THIN FUNCTIONAL COATINGS ON FLEXIBLE MATERIALS
- Publication number 20250019826
- Publication date Jan 16, 2025
- NFINITE NANOTECHNOLOGY INC.
- Jhi Yong LOKE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20250022706
- Publication date Jan 16, 2025
- TOKYO ELECTRON LIMITED
- Tomohiko NIIZEKI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PEDESTALS FOR MODULATING FILM PROPERTIES IN ATOMIC LAYER DEPOSITION...
- Publication number 20250019825
- Publication date Jan 16, 2025
- LAM RESEARCH CORPORATION
- Adrien LAVOIE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS AND APPARATUSES FOR FLOWABLE GAP-FILL
- Publication number 20250011927
- Publication date Jan 9, 2025
- ASM IP HOLDING B.V.
- Shinya Yoshimoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SELECTIVE PROCESSING WITH ETCH RESIDUE-BASED INHIBITORS
- Publication number 20250014904
- Publication date Jan 9, 2025
- LAM RESEARCH CORPORATION
- Kashish Sharma
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, METHOD...
- Publication number 20250011929
- Publication date Jan 9, 2025
- Kokusai Electric Corporation
- Arito OGAWA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING METHOD, METHOD OF MANUFACTURING SEMICONDUCTOR...
- Publication number 20250003068
- Publication date Jan 2, 2025
- Kokusai Electric Corporation
- Kazuyuki OKUDA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20250003071
- Publication date Jan 2, 2025
- Kokusai Electric Corporation
- Takeo HANASHIMA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS AND APPARATUS FOR A VALVE ASSEMBLY
- Publication number 20250003073
- Publication date Jan 2, 2025
- ASM IP HOLDING B.V.
- Anirudhan Chandrasekaran
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEPOSITION DEVICE, SEMICONDUCTOR STRUCTURE AND METHOD FOR MANUFACTU...
- Publication number 20250006488
- Publication date Jan 2, 2025
- NANYA TECHNOLOGY CORPORATION
- Chao-Hsiu LI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING METHOD, METHOD OF MANUFACTURING SEMICONDUCTOR...
- Publication number 20250006490
- Publication date Jan 2, 2025
- Kokusai Electric Corporation
- Yoshimasa NAGATOMI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DRY PROCESS TOOL WITH ADJUSTABLE FLOW VALVE
- Publication number 20250003069
- Publication date Jan 2, 2025
- LAM RESEARCH CORPORATION
- Jon Garret JUDGE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE-PROCESSING APPARATUS AND FILM-FORMING METHOD
- Publication number 20250003070
- Publication date Jan 2, 2025
- TOKYO ELECTRON LIMITED
- Akira MATSUBARA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS AND SYSTEMS FOR PRECURSOR LEVEL MONITORING
- Publication number 20240425985
- Publication date Dec 26, 2024
- ASM IP HOLDING B.V.
- Antti Niskanen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ATOMIC LAYER DEPOSITION PART COATING CHAMBER
- Publication number 20240420926
- Publication date Dec 19, 2024
- Applied Materials, Inc.
- Michael R. RICE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
THERMAL IMAGING FOR ANALYSIS OF DEVICE FABRICATION TOOLS
- Publication number 20240410760
- Publication date Dec 12, 2024
- LAM RESEARCH CORPORATION
- Karl Frederick Leeser
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
SUBSTRATE-PROCESSING METHOD AND SUBSTRATE-PROCESSING APPARATUS
- Publication number 20240404795
- Publication date Dec 5, 2024
- TOKYO ELECTRON LIMITED
- Hitoshi KATO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SHOWER HEAD, SUBSTRATE PROCESSING APPARATUS, AND SUBSTRATE PROCESSI...
- Publication number 20240401200
- Publication date Dec 5, 2024
- TOKYO ELECTRON LIMITED
- Hideki NAGAOKA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD SYSTEM AND APPARATUS FOR REMOTE SOLID REFILL
- Publication number 20240401194
- Publication date Dec 5, 2024
- ASM IP HOLDING B.V.
- Shuaidi Zhang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
INJECTOR AND PROCESSING APPARATUS
- Publication number 20240392440
- Publication date Nov 28, 2024
- TOKYO ELECTRON LIMITED
- Reita IGARASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF FORMING CHROMIUM NITRIDE LAYER AND STRUCTURE INCLUDING TH...
- Publication number 20240395555
- Publication date Nov 28, 2024
- ASM IP HOLDING B.V.
- Qi Xie
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TRIM AND DEPOSITION PROFILE CONTROL WITH MULTI-ZONE HEATED SUBSTRAT...
- Publication number 20240392443
- Publication date Nov 28, 2024
- LAM RESEARCH CORPORATION
- Ramesh CHANDRASEKHARAN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE TREATING APPARATUS AND METHOD
- Publication number 20240392438
- Publication date Nov 28, 2024
- JIANGSU LEADMICRO NANO TECHNOLOGY CO., LTD.
- Xinyuan WU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VAPOR DEPOSITION APPARATUS AND SUBSTRATE TREATMENT METHOD
- Publication number 20240392437
- Publication date Nov 28, 2024
- Advanced Micro-Fabrication Equipment Inc. China
- Can XU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
REACTOR LID AND AN ATOMIC LAYER DEPOSITION APPARATUS USING THE SAME
- Publication number 20240392439
- Publication date Nov 28, 2024
- ASM IP HOLDING B.V.
- SungHoon Jun
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SHOWERHEAD ASSEMBLY FOR CYCLIC VAPOR DEPOSITION WITH ENHANCED GAS M...
- Publication number 20240384413
- Publication date Nov 21, 2024
- EUGENUS, INC.
- Martin J. Salinas
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SYSTEM AND METHOD FOR PLASMA ENHANCED ATOMIC LAYER DEPOSITION WITH...
- Publication number 20240384410
- Publication date Nov 21, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Wei-Hao LEE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM-FORMING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20240384412
- Publication date Nov 21, 2024
- TOKYO ELECTRON LIMITED
- Hiroki MURAKAMI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
THIN FILM DEPOSITION WITH IMPROVED CONTROL OF PRECURSOR
- Publication number 20240384417
- Publication date Nov 21, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Wen-Hao Cheng
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Plasma being used non-continuously in between ALD reactions

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Metal deposition

Substrate processing apparatus with an injector

Thin layer deposition with plasma pulsing

Method of depositing silicon oxide films

Loading device, arrangement and method for loading a reaction chamber

Apparatus and methods to transfer substrates into and out of a spat...

Vacuum chamber and arrangement for atomic layer deposition

Film formation method and film formation device

Processing apparatus and processing method

Deposition method and plasma processing apparatus

Deposition method and deposition apparatus

System for continuous atomic layer deposition

Depositing coatings on and within housings, apparatus, or tools uti...

Plasma processing apparatus and plasma processing method

Thermal atomic layer deposition of silicon-containing films

Particle coating methods and apparatus

Precursor container

Substrate processing apparatus

Apparatus and method for cleaning reaction vessel for processing su...

Multilayer encapsulation thin-film

Selective processing with etch residue-based inhibitors

Methods and apparatuses for flowable gap-fill

Powder-atomic-layer-deposition device with knocker

PEALD nitride films

Atomic layer deposition reactor arrangement and a method for operat...

Substrate processing apparatus and method of manufacturing semicond...

Adjustable fluid inlet assembly for a substrate processing apparatu...

Apparatus and methods for wafer chucking on a susceptor for ALD

Mass flow controller and flow control method therefor

Substrate processing apparatus and method

Patents Applicationslast 30 patents

PROCESS AND APPARATUS FOR RADICAL ENHANCED VAPOR DEPOSITION

DEPOSITION OF ULTRA-THIN FUNCTIONAL COATINGS ON FLEXIBLE MATERIALS

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

PEDESTALS FOR MODULATING FILM PROPERTIES IN ATOMIC LAYER DEPOSITION...

METHODS AND APPARATUSES FOR FLOWABLE GAP-FILL

SELECTIVE PROCESSING WITH ETCH RESIDUE-BASED INHIBITORS

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, METHOD...

SUBSTRATE PROCESSING METHOD, METHOD OF MANUFACTURING SEMICONDUCTOR...

METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCT...

METHODS AND APPARATUS FOR A VALVE ASSEMBLY

DEPOSITION DEVICE, SEMICONDUCTOR STRUCTURE AND METHOD FOR MANUFACTU...

SUBSTRATE PROCESSING METHOD, METHOD OF MANUFACTURING SEMICONDUCTOR...

DRY PROCESS TOOL WITH ADJUSTABLE FLOW VALVE

SUBSTRATE-PROCESSING APPARATUS AND FILM-FORMING METHOD

METHODS AND SYSTEMS FOR PRECURSOR LEVEL MONITORING

ATOMIC LAYER DEPOSITION PART COATING CHAMBER

THERMAL IMAGING FOR ANALYSIS OF DEVICE FABRICATION TOOLS

SUBSTRATE-PROCESSING METHOD AND SUBSTRATE-PROCESSING APPARATUS

SHOWER HEAD, SUBSTRATE PROCESSING APPARATUS, AND SUBSTRATE PROCESSI...

METHOD SYSTEM AND APPARATUS FOR REMOTE SOLID REFILL

INJECTOR AND PROCESSING APPARATUS

METHOD OF FORMING CHROMIUM NITRIDE LAYER AND STRUCTURE INCLUDING TH...

TRIM AND DEPOSITION PROFILE CONTROL WITH MULTI-ZONE HEATED SUBSTRAT...

SUBSTRATE TREATING APPARATUS AND METHOD

VAPOR DEPOSITION APPARATUS AND SUBSTRATE TREATMENT METHOD

REACTOR LID AND AN ATOMIC LAYER DEPOSITION APPARATUS USING THE SAME

SHOWERHEAD ASSEMBLY FOR CYCLIC VAPOR DEPOSITION WITH ENHANCED GAS M...

SYSTEM AND METHOD FOR PLASMA ENHANCED ATOMIC LAYER DEPOSITION WITH...

FILM-FORMING METHOD AND SUBSTRATE PROCESSING APPARATUS

THIN FILM DEPOSITION WITH IMPROVED CONTROL OF PRECURSOR