Plasma being used non-continuously in between ALD reactions

Industry

CPC
C23C16/4554

This industry / category may be too specific. Please go to a parent level for more data

Parent Industries

CCHEMISTRY METALLURGY C23Surface treatment C23CCOATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating

Current Industry

C23C16/4554Plasma being used non-continuously in between ALD reactions

Industries

Patents Grantslast 30 patents

Information Patent Grant
Showerhead for providing multiple materials to a process chamber
- Patent number 11,970,775
- Issue date Apr 30, 2024
- Applied Materials, Inc.
- Prashanth Kothnur
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Light emitting sealed body, light emitting unit, and light source d...
- Patent number 11,972,931
- Issue date Apr 30, 2024
- Hamamatsu Photonics K.K.
- Akio Suzuki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Vaporizer, substrate processing apparatus and method for manufactur...
- Patent number 11,970,771
- Issue date Apr 30, 2024
- Kokusai Electric Corporation
- Atsushi Morikawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film forming method and film forming apparatus
- Patent number 11,970,768
- Issue date Apr 30, 2024
- Tokyo Electron Limited
- Hideomi Hane
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for depositing a gap-fill layer by plasma-assisted deposition
- Patent number 11,972,944
- Issue date Apr 30, 2024
- ASM IP Holding B.V.
- Timothee Julien Vincent Blanquart
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Sequential infiltration synthesis apparatus
- Patent number 11,970,766
- Issue date Apr 30, 2024
- ASM IP Holding B.V.
- Ivo Johannes Raaijmakers
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and method for atomic layer deposition (ALD)
- Patent number 11,970,773
- Issue date Apr 30, 2024
- Beneq Oy
- Matti Malila
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of operating a deposition or cleaning apparatus
- Patent number 11,970,774
- Issue date Apr 30, 2024
- Picosun Oy
- Timo Malinen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of producing an alumina dispersible at a pH greater than 8
- Patent number 11,965,245
- Issue date Apr 23, 2024
- Allison L. Hann
- C01 - INORGANIC CHEMISTRY
Information Patent Grant
Method of manufacturing semiconductor device, substrate processing...
- Patent number 11,967,500
- Issue date Apr 23, 2024
- Kokusai Electric Corporation
- Arito Ogawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Atomic layer deposition method
- Patent number 11,961,716
- Issue date Apr 16, 2024
- Industrial Technology Research Institute
- Hsuan-Fu Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Selective cobalt deposition on copper surfaces
- Patent number 11,959,167
- Issue date Apr 16, 2024
- Applied Materials, Inc.
- Sang-Ho Yu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Capacitive sensor for monitoring gas concentration
- Patent number 11,959,868
- Issue date Apr 16, 2024
- Applied Materials, Inc.
- Xiaopu Li
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Precursor supply unit, substrate processing system, and method of f...
- Patent number 11,959,170
- Issue date Apr 16, 2024
- Samsung Electronics Co., Ltd.
- Soyoung Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing semiconductor device, substrate processing...
- Patent number 11,961,733
- Issue date Apr 16, 2024
- Kokusai Electric Corporation
- Tomiyuki Shimizu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Deposition method
- Patent number 11,952,661
- Issue date Apr 9, 2024
- Tokyo Electron Limited
- Hitoshi Kato
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Pad raising mechanism in wafer positioning pedestal for semiconduct...
- Patent number 11,955,366
- Issue date Apr 9, 2024
- Lam Research Corporation
- Paul Konkola
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Powder atomic layer deposition equipment with quick release function
- Patent number 11,952,662
- Issue date Apr 9, 2024
- SKY TECH INC.
- Jing-Cheng Lin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Cyclic deposition methods for forming metal-containing material and...
- Patent number 11,952,658
- Issue date Apr 9, 2024
- ASM IP Holding B.V.
- Katja Väyrynen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Low temperature deposition of iridium containing films
- Patent number 11,946,135
- Issue date Apr 2, 2024
- Applied Materials, Inc.
- Feng Q. Liu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Dynamic electrical and fluid delivery system with indexing motion f...
- Patent number 11,950,384
- Issue date Apr 2, 2024
- Applied Materials, Inc.
- Akshay Gunaji
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Vacuum valve and apparatus for fabricating semiconductor having the...
- Patent number 11,946,138
- Issue date Apr 2, 2024
- Samsung Electronics Co., Ltd.
- Jaeheung Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus for detecting or monitoring for a chemical precursor in a...
- Patent number 11,939,673
- Issue date Mar 26, 2024
- ASM IP Holding B.V.
- John Kevin Shugrue
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Microwave plasma source, microwave plasma processing apparatus and...
- Patent number 11,942,308
- Issue date Mar 26, 2024
- Tokyo Electron Limited
- Yasuaki Taniike
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Lids and lid assembly kits for atomic layer deposition chambers
- Patent number 11,932,939
- Issue date Mar 19, 2024
- Applied Materials, Inc.
- Muhammad M. Rasheed
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
High voltage, low pressure plasma enhanced atomic layer deposition
- Patent number 11,935,759
- Issue date Mar 19, 2024
- Lotus Applied Technology, LLC
- Eric R. Dickey
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Unconsumed precursor monitoring
- Patent number 11,929,270
- Issue date Mar 12, 2024
- Mohamed Buhary Rinzan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Atomic layer deposition apparatus
- Patent number 11,926,896
- Issue date Mar 12, 2024
- Beneq Oy
- Johannes Wesslin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Reactant vaporizer and related systems and methods
- Patent number 11,926,894
- Issue date Mar 12, 2024
- ASM IP Holding B.V.
- Mohith Verghese
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for depositing silicon-free carbon-containing film as gap-fi...
- Patent number 11,923,190
- Issue date Mar 5, 2024
- ASM IP Holding B.V.
- Timothee Julien Vincent Blanquart
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
FILM FORMING DEVICE AND FILM FORMING METHOD
- Publication number 20240133031
- Publication date Apr 25, 2024
- TOKYO ELECTRON LIMITED
- Jun YAMAWAKU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
NON-METAL INCORPORATION IN MOLYBDENUM ON DIELECTRIC SURFACES
- Publication number 20240136192
- Publication date Apr 25, 2024
- LAM RESEARCH CORPORATION
- Lawrence Schloss
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ALD DEPOSITION METHOD AND SYSTEM
- Publication number 20240133030
- Publication date Apr 25, 2024
- ASM IP HOLDING B.V.
- Dieter Pierreux
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TRANSITION METAL DEPOSITION METHOD
- Publication number 20240133032
- Publication date Apr 25, 2024
- ASM IP HOLDING B.V.
- Charles Dezelah
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CANISTER, PRECURSOR TRANSFER SYSTEM HAVING THE SAME AND METHOD FOR...
- Publication number 20240124972
- Publication date Apr 18, 2024
- Samsung Electronics Co., Ltd.
- Kyungrim KIM
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MANUFACTURING METHOD OF PLATINUM-BASED ALLOY CATALYST USING FLUIDIZ...
- Publication number 20240116044
- Publication date Apr 11, 2024
- Hyundai Motor Company
- Jung Yeon Park
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ATOMIC LAYER DEPOSITION COATING SYSTEM FOR INNER WALLS OF GAS LINES
- Publication number 20240117491
- Publication date Apr 11, 2024
- Hanish Kumar PANAVALAPPIL KUMARANKUTTY
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HALOGEN-RESISTANT THERMAL BARRIER COATING FOR PROCESSING CHAMBERS
- Publication number 20240117490
- Publication date Apr 11, 2024
- Applied Materials, Inc.
- Amir H. TAVAKOLI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PROCESS FOR DEPOSITION OF AN OUTER LAYER, REFLECTIVE OPTICAL ELEMEN...
- Publication number 20240111216
- Publication date Apr 4, 2024
- Carl Zeiss SMT GMBH
- Dirk EHM
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ATOMIC LAYER DEPOSITION WITH MULTIPLE UNIFORMLY HEATED CHARGE VOLUMES
- Publication number 20240110279
- Publication date Apr 4, 2024
- LAM RESEARCH CORPORATION
- Nitin KADAM
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE
- Publication number 20240102162
- Publication date Mar 28, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chun-Yi CHOU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND ME...
- Publication number 20240096669
- Publication date Mar 21, 2024
- KIOXIA Corporation
- Fumiki AISO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEFECT-REDUCING COATING METHOD
- Publication number 20240093364
- Publication date Mar 21, 2024
- MSSCORPS CO., LTD.
- CHI-LUN LIU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SYSTEMS AND METHODS FOR PULSE WIDTH MODULATED DOSE CONTROL
- Publication number 20240093365
- Publication date Mar 21, 2024
- LAM RESEARCH CORPORATION
- Mariusch GREGOR
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ATOMIC LAYER DEPOSITION PART COATING CHAMBER
- Publication number 20240093367
- Publication date Mar 21, 2024
- Sriharsha DHARMAPURA SATHYANARAYANAMURTHY
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PRECURSOR CONTAINER
- Publication number 20240084449
- Publication date Mar 14, 2024
- Picosun Oy
- Tom BLOMBERG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SYSTEMS AND METHODS FOR HOMOGENOUS INTERMIXING OF PRECURSORS IN ALL...
- Publication number 20240084443
- Publication date Mar 14, 2024
- LAM RESEARCH CORPORATION
- Ilanit FISHER
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20240068097
- Publication date Feb 29, 2024
- ASM IP HOLDING B.V.
- Subir Parui
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF PROCESSING SUBSTRATE, SUBSTRATE PROCESSING APPARATUS, MET...
- Publication number 20240071752
- Publication date Feb 29, 2024
- Kokusai Electric Corporation
- Takayuki WASEDA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS FOR PROCESSING A SUBSTRATE
- Publication number 20240060183
- Publication date Feb 22, 2024
- Samsung Electronics Co., Ltd.
- Youngjoon OH
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ATOMIC LAYER DEPOSITION DEVICE AND ATOMIC LAYER DEPOSITION METHOD
- Publication number 20240060179
- Publication date Feb 22, 2024
- MEIDEN NANOPROCESS INNOVATIONS, INC.
- Naoto KAMEDA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MEASURING DEVICE AND METHOD FOR MEASURING PARAMETERS OF A PIEZOELEC...
- Publication number 20240053301
- Publication date Feb 15, 2024
- Evatec AG
- Peter HORN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, NON-TRANSITORY COMPUT...
- Publication number 20240055259
- Publication date Feb 15, 2024
- Kokusai Electric Corporation
- Arito OGAWA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CYCLICAL DEPOSITION METHOD AND APPARATUS FOR FILLING A RECESS FORME...
- Publication number 20240047264
- Publication date Feb 8, 2024
- ASM IP HOLDING B.V.
- Zecheng Liu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ATOMIC LAYER DEPOSITION REACTOR ARRANGEMENT AND A METHOD FOR OPERAT...
- Publication number 20240043998
- Publication date Feb 8, 2024
- BENEQ OY
- Jonas ANDERSSON
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEPOSITING COATINGS ON AND WITHIN HOUSINGS, APPARATUS, OR TOOLS UTI...
- Publication number 20240035158
- Publication date Feb 1, 2024
- Halliburton Energy Services, Inc.
- Christopher Michael Jones
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SELECTIVE PROCESSING WITH ETCH RESIDUE-BASED INHIBITORS
- Publication number 20240038539
- Publication date Feb 1, 2024
- LAM RESEARCH CORPORATION
- Kashish Sharma
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
VACUUM SYSTEM CLUSTER TOOL
- Publication number 20240026534
- Publication date Jan 25, 2024
- EMPA EIDGENOSSISCHE MATERIALPRUFUNGS- UND FORSCHUNGSANSTALT
- Carlos GUERRA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
VACUUM CHAMBER AND ARRANGEMENT FOR ATOMIC LAYER DEPOSITION
- Publication number 20240026535
- Publication date Jan 25, 2024
- BENEQ OY
- Johannes WESSLIN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS FOR DEPOSITING GAP FILLING FLUIDS AND RELATED SYSTEMS AND D...
- Publication number 20240030064
- Publication date Jan 25, 2024
- ASM IP HOLDING B.V.
- Timothee Blanquart
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Plasma being used non-continuously in between ALD reactions

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Showerhead for providing multiple materials to a process chamber

Light emitting sealed body, light emitting unit, and light source d...

Vaporizer, substrate processing apparatus and method for manufactur...

Film forming method and film forming apparatus

Method for depositing a gap-fill layer by plasma-assisted deposition

Sequential infiltration synthesis apparatus

Apparatus and method for atomic layer deposition (ALD)

Method of operating a deposition or cleaning apparatus

Method of producing an alumina dispersible at a pH greater than 8

Method of manufacturing semiconductor device, substrate processing...

Atomic layer deposition method

Selective cobalt deposition on copper surfaces

Capacitive sensor for monitoring gas concentration

Precursor supply unit, substrate processing system, and method of f...

Method of manufacturing semiconductor device, substrate processing...

Deposition method

Pad raising mechanism in wafer positioning pedestal for semiconduct...

Powder atomic layer deposition equipment with quick release function

Cyclic deposition methods for forming metal-containing material and...

Low temperature deposition of iridium containing films

Dynamic electrical and fluid delivery system with indexing motion f...

Vacuum valve and apparatus for fabricating semiconductor having the...

Apparatus for detecting or monitoring for a chemical precursor in a...

Microwave plasma source, microwave plasma processing apparatus and...

Lids and lid assembly kits for atomic layer deposition chambers

High voltage, low pressure plasma enhanced atomic layer deposition

Unconsumed precursor monitoring

Atomic layer deposition apparatus

Reactant vaporizer and related systems and methods

Method for depositing silicon-free carbon-containing film as gap-fi...

Patents Applicationslast 30 patents

FILM FORMING DEVICE AND FILM FORMING METHOD

NON-METAL INCORPORATION IN MOLYBDENUM ON DIELECTRIC SURFACES

ALD DEPOSITION METHOD AND SYSTEM

TRANSITION METAL DEPOSITION METHOD

CANISTER, PRECURSOR TRANSFER SYSTEM HAVING THE SAME AND METHOD FOR...

MANUFACTURING METHOD OF PLATINUM-BASED ALLOY CATALYST USING FLUIDIZ...

ATOMIC LAYER DEPOSITION COATING SYSTEM FOR INNER WALLS OF GAS LINES

HALOGEN-RESISTANT THERMAL BARRIER COATING FOR PROCESSING CHAMBERS

PROCESS FOR DEPOSITION OF AN OUTER LAYER, REFLECTIVE OPTICAL ELEMEN...

ATOMIC LAYER DEPOSITION WITH MULTIPLE UNIFORMLY HEATED CHARGE VOLUMES

MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND ME...

DEFECT-REDUCING COATING METHOD

SYSTEMS AND METHODS FOR PULSE WIDTH MODULATED DOSE CONTROL

ATOMIC LAYER DEPOSITION PART COATING CHAMBER

PRECURSOR CONTAINER

SYSTEMS AND METHODS FOR HOMOGENOUS INTERMIXING OF PRECURSORS IN ALL...

SUBSTRATE PROCESSING APPARATUS

METHOD OF PROCESSING SUBSTRATE, SUBSTRATE PROCESSING APPARATUS, MET...

APPARATUS FOR PROCESSING A SUBSTRATE

ATOMIC LAYER DEPOSITION DEVICE AND ATOMIC LAYER DEPOSITION METHOD

MEASURING DEVICE AND METHOD FOR MEASURING PARAMETERS OF A PIEZOELEC...

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, NON-TRANSITORY COMPUT...

CYCLICAL DEPOSITION METHOD AND APPARATUS FOR FILLING A RECESS FORME...

ATOMIC LAYER DEPOSITION REACTOR ARRANGEMENT AND A METHOD FOR OPERAT...

DEPOSITING COATINGS ON AND WITHIN HOUSINGS, APPARATUS, OR TOOLS UTI...

SELECTIVE PROCESSING WITH ETCH RESIDUE-BASED INHIBITORS

VACUUM SYSTEM CLUSTER TOOL

VACUUM CHAMBER AND ARRANGEMENT FOR ATOMIC LAYER DEPOSITION

METHODS FOR DEPOSITING GAP FILLING FLUIDS AND RELATED SYSTEMS AND D...