Plasma treatment

Industry

CPC
C23C14/5826

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CCHEMISTRY METALLURGY C23Surface treatment C23CCOATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material

Current Industry

C23C14/5826Plasma treatment

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Manufacturing method of metal oxide and manufacturing method of sem...
- Patent number 12,176,210
- Issue date Dec 24, 2024
- Semiconductor Energy Laboratory Co., Ltd.
- Shunpei Yamazaki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Promoting adhesion of thin films
- Patent number 12,098,459
- Issue date Sep 24, 2024
- SY&SE SA
- Florian Telmont
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Al—Cr—O-based coatings with higher thermal stability and producing...
- Patent number 12,018,360
- Issue date Jun 25, 2024
- OERLIKON SURFACE SOLUTIONS AG, PFAFFIKON
- Robert Raab
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Treatment of a thin film by hydrogen plasma and polarisation in ord...
- Patent number 11,898,239
- Issue date Feb 13, 2024
- Commissariat a l'Energie Atomique et Aux Energies Alternatives
- Julien Delchevalrie
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Image sensor for immersion lithography
- Patent number 11,774,868
- Issue date Oct 3, 2023
- ASML Netherlands B.V.
- Nirupam Banerjee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for producing coated metallic substrates and coated metallic...
- Patent number 11,691,176
- Issue date Jul 4, 2023
- HEC High End Coating GmbH
- Matthias Koch
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Negative ion irradiation device
- Patent number 11,694,877
- Issue date Jul 4, 2023
- Sumitomo Heavy Industries, Ltd.
- Hisashi Kitami
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
High-refractive-index hydrogenated silicon film and methods for pre...
- Patent number 11,643,716
- Issue date May 9, 2023
- ZHEJIANG CRYSTAL-OPTECH CO., LTD.
- Ruizhi Zhang
- C03 - GLASS MINERAL OR SLAG WOOL
Information Patent Grant
System and method for vapor deposition of substrates with circular...
- Patent number 11,555,237
- Issue date Jan 17, 2023
- QUANTUM INNOVATIONS, INC.
- Norman L. Kester
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and methods for depositing durable optical coatings
- Patent number 11,466,362
- Issue date Oct 11, 2022
- UNIVERSITY OF THE WEST OF SCOTLAND
- Desmond Gibson
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Insulated radiant barriers in apparel
- Patent number 11,426,969
- Issue date Aug 30, 2022
- XEFCO PTY LTD
- Brian John Conolly
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for stabilizing palladium films
- Patent number 11,371,956
- Issue date Jun 28, 2022
- Materion Corporation
- Lee A. Donohue
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for reducing material overhang in a feature of a substrate
- Patent number 11,162,170
- Issue date Nov 2, 2021
- Applied Materials, Inc.
- Alan A. Ritchie
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Aluminum-boron nitride nanotube composites and method for making th...
- Patent number 11,148,201
- Issue date Oct 19, 2021
- The Florida International University Board of Trustees
- Arvind Agarwal
- B22 - CASTING POWDER METALLURGY
Information Patent Grant
Textured self-cleaning film system and method of forming same
- Patent number 11,067,721
- Issue date Jul 20, 2021
- GM Global Technology Operations LLC
- Thomas A. Seder
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Textured self-cleaning film system and method of forming same
- Patent number 10,754,067
- Issue date Aug 25, 2020
- GM Global Technology Operations LLC
- Thomas A. Seder
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
High-barrier, metal oxide films
- Patent number 10,718,046
- Issue date Jul 21, 2020
- Jindal Films Americas LLC
- Thierry J. L. Dabadie
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Bio control activity surface
- Patent number 10,617,120
- Issue date Apr 14, 2020
- GENCOA LTD.
- Victor Bellido-Gonzalez
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods of fabricating a multi-electrode array for spinal cord epid...
- Patent number 10,583,285
- Issue date Mar 10, 2020
- The Regents of the University of California
- Wentai Liu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Metal oxy-flouride films based on oxidation of metal flourides
- Patent number 10,563,303
- Issue date Feb 18, 2020
- Applied Materials, Inc.
- Xiaowei Wu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Oxidation barrier layer
- Patent number 10,487,391
- Issue date Nov 26, 2019
- OERLIKON SURFACE SOLUTIONS AG, PFAFFIKON
- Jürgen Ramm
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Flourination process to create sacrificial oxy-flouride layer
- Patent number 10,443,125
- Issue date Oct 15, 2019
- Applied Materials, Inc.
- Xiaowei Wu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Touch panel
- Patent number 10,300,679
- Issue date May 28, 2019
- Tsinghua University
- Yuan-Hao Jin
- C03 - GLASS MINERAL OR SLAG WOOL
Information Patent Grant
Wear resistant vapor deposited coating, method of coating depositio...
- Patent number 10,287,670
- Issue date May 14, 2019
- G & H TECHNOLOGIES, LLC
- Vladimir Gorokhovsky
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Demagnetization of magnetic media by C doping for HDD patterned med...
- Patent number 10,233,538
- Issue date Mar 19, 2019
- Applied Materials, Inc.
- Martin A. Hilkene
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Nanostructured vanadium oxide uncooled bolometers and method of fab...
- Patent number 10,184,839
- Issue date Jan 22, 2019
- The United States of America as represented by the Administrator of NASA
- Ari D. Brown
- G01 - MEASURING TESTING
Information Patent Grant
Interconnect structure and manufacturing method thereof
- Patent number 10,163,698
- Issue date Dec 25, 2018
- Taiwan Semiconductor Manufacturing Company Ltd.
- Ching-Fu Yeh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Insulated radiant barriers in apparel
- Patent number 10,160,184
- Issue date Dec 25, 2018
- Xefco Pty Ltd
- Brian John Conolly
- A41 - WEARING APPAREL
Information Patent Grant
Metal nanowires structure
- Patent number 10,124,561
- Issue date Nov 13, 2018
- Tsinghua University
- Yuan-Hao Jin
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Metal nitride material for thermistor, method for producing same, a...
- Patent number 10,054,497
- Issue date Aug 21, 2018
- Mitsubishi Materials Corporation
- Toshiaki Fujita
- C01 - INORGANIC CHEMISTRY

Patents Applicationslast 30 patents

Information Patent Application
GROWTH METHOD OF HIGHLY TWINNED SiGe ALLOY ON THE BASAL PLANE OF TR...
- Publication number 20250011920
- Publication date Jan 9, 2025
- United States of America as represented by the Administrator of NASA
- Hyun Jung Kim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
WINDOW, DISPLAY DEVICE INCLUDING THE SAME, AND METHOD OF MANUFACTUR...
- Publication number 20240368749
- Publication date Nov 7, 2024
- SAMSUNG DISPLAY CO., LTD.
- JONGHWAN CHO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMING METHOD AND FILM FORMING APPARATUS
- Publication number 20240175117
- Publication date May 30, 2024
- TOKYO ELECTRON LIMITED
- Ken OKOSHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TANTALA-RING-RESONATOR-BASED PHOTONIC DEVICE AND FREQUENCY-COMB GEN...
- Publication number 20240004262
- Publication date Jan 4, 2024
- The Regents of the University of Colorado, a body corporate
- Su-Peng Yu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TREATMENT OF A THIN FILM BY HYDROGEN PLASMA AND POLARISATION IN ORD...
- Publication number 20220325405
- Publication date Oct 13, 2022
- Commissariat A L'Energie Atomique et Aux Energies Alternatives
- Julien DELCHEVALRIE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEALANT COATING FOR PLASMA PROCESSING CHAMBER COMPONENTS
- Publication number 20220246404
- Publication date Aug 4, 2022
- LAM RESEARCH CORPORATION
- Benjamin Philip HEINE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PROMOTING ADHESION OF THIN FILMS
- Publication number 20220195590
- Publication date Jun 23, 2022
- SY&SE SA
- Florian TELMONT
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
IMAGE SENSOR FOR IMMERSION LITHOGRAPHY
- Publication number 20220163896
- Publication date May 26, 2022
- ASML NETHERLANDS B.V.
- Nirupam BANERJEE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MANUFACTURING METHOD OF METAL OXIDE AND MANUFACTURING METHOD OF SEM...
- Publication number 20210398809
- Publication date Dec 23, 2021
- Semiconductor Energy Laboratory Co., Ltd.
- Shunpei Yamazaki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TANTALA RING RESONATOR AND METHOD FOR FABRICATING NONLINEAR PHOTONI...
- Publication number 20210055627
- Publication date Feb 25, 2021
- Su-Peng Yu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
NEGATIVE ION IRRADIATION DEVICE
- Publication number 20200411295
- Publication date Dec 31, 2020
- Sumitomo Heavy Industries, Ltd.
- Hisashi Kitami
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TEXTURED SELF-CLEANING FILM SYSTEM AND METHOD OF FORMING SAME
- Publication number 20200200946
- Publication date Jun 25, 2020
- GM GLOBAL TECHNOLOGY OPERATIONS LLC
- Thomas A. Seder
- B08 - CLEANING
Information Patent Application
METAL OXY-FLOURIDE FILMS BASED ON OXIDATION OF METAL FLOURIDES
- Publication number 20200140996
- Publication date May 7, 2020
- Applied Materials, Inc.
- Xiaowei Wu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
THIN FILM PACKAGING METHOD, THIN FILM PACKAGING DEVICE, AND SOLAR CELL
- Publication number 20190378944
- Publication date Dec 12, 2019
- Hanergy New Material Technology Co., Ltd.
- Pengju Zhang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
High-Refractive-Index Hydrogenated Silicon Film And Methods For Pre...
- Publication number 20190352222
- Publication date Nov 21, 2019
- ZHEJIANG CRYSTAL-OPTECH CO., LTD.
- Ruizhi ZHANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MANUFACTURING METHOD OF HIGH REFLECTION MIRROR WITH POLYCRYSTALLINE...
- Publication number 20190172986
- Publication date Jun 6, 2019
- NATIONAL CHUNG-SHAN INSTITUTE OF SCIENCE AND TECHNOLOGY
- Chung-Yen Lu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COATINGS FOR SURGICAL INSTRUMENTS
- Publication number 20180334741
- Publication date Nov 22, 2018
- DePuy Synthes Products, Inc.
- Dayananda Sukadhare
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Application
METAL OXY-FLOURIDE FILMS FOR CHAMBER COMPONENTS
- Publication number 20180327892
- Publication date Nov 15, 2018
- Applied Materials, Inc.
- Xiaowei Wu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
WEAR RESISTANT VAPOR DEPOSITED COATING, METHOD OF COATING DEPOSITIO...
- Publication number 20180245202
- Publication date Aug 30, 2018
- G&H Technologies, LLC
- Vladimir GOROKHOVSKY
- C21 - METALLURGY OF IRON
Information Patent Application
TOUCH PANEL
- Publication number 20180244018
- Publication date Aug 30, 2018
- TSINGHUA UNIVERSITY
- Yuan-Hao Jin
- B32 - LAYERED PRODUCTS
Information Patent Application
EQUIPMENT FOR PRODUCING FILM
- Publication number 20180163296
- Publication date Jun 14, 2018
- NATIONAL CHUNG-SHAN INSTITUTE OF SCIENCE AND TECHNOLOGY
- WEN-CHUEH PAN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FLEXIBLE SUBSTRATE AND METHOD OF MANUFACTURING SAME
- Publication number 20170358763
- Publication date Dec 14, 2017
- Corning Precision Materials Co., Ltd.
- Jin Wook Chung
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ALUMINUM-BORON NITRIDE NANOTUBE COMPOSITES AND METHOD FOR MAKING TH...
- Publication number 20170355021
- Publication date Dec 14, 2017
- THE FLORIDA INTERNATIONAL UNIVERSITY BOARD OF TRUSTEES
- Arvind AGARWAL
- B82 - NANO-TECHNOLOGY
Information Patent Application
Methods and Apparatus for Coated Flowcells
- Publication number 20170341075
- Publication date Nov 30, 2017
- Idex Health & Science LLC
- Jim Sirkis
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS OF FABRICATING A MULTI-ELECTRODE ARRAY FOR SPINAL CORD EPID...
- Publication number 20170246450
- Publication date Aug 31, 2017
- The Regents of the University of California
- Wentai Liu
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
PLASMA SPRAY PHYSICAL VAPOR DEPOSITION DEPOSITED ENVIRONMENTAL BARR...
- Publication number 20170218506
- Publication date Aug 3, 2017
- Rolls-Royce Corporation
- Kang N. Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DISPLAY APPARATUS HAVING PIXELS AREAS WITH DIFFERENT THICKNESSES AN...
- Publication number 20170207283
- Publication date Jul 20, 2017
- SAMSUNG DISPLAY CO., LTD.
- Seonju Kim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METAL NANOWIRES STRUCTURE
- Publication number 20170173921
- Publication date Jun 22, 2017
- TSINGHUA UNIVERSITY
- YUAN-HAO JIN
- B32 - LAYERED PRODUCTS
Information Patent Application
METHOD FOR BONDING SUBSTRATES
- Publication number 20170117247
- Publication date Apr 27, 2017
- EV GROUP E. THALLNER GMBH
- Jurgen Burggraf
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CONDUCTIVE FILM AND METHOD OF MAKING SAME
- Publication number 20160358747
- Publication date Dec 8, 2016
- The University of Akron
- Yu Zhu
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR

Plasma treatment

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Manufacturing method of metal oxide and manufacturing method of sem...

Promoting adhesion of thin films

Al—Cr—O-based coatings with higher thermal stability and producing...

Treatment of a thin film by hydrogen plasma and polarisation in ord...

Image sensor for immersion lithography

Method for producing coated metallic substrates and coated metallic...

Negative ion irradiation device

High-refractive-index hydrogenated silicon film and methods for pre...

System and method for vapor deposition of substrates with circular...

Apparatus and methods for depositing durable optical coatings

Insulated radiant barriers in apparel

Methods for stabilizing palladium films

Methods for reducing material overhang in a feature of a substrate

Aluminum-boron nitride nanotube composites and method for making th...

Textured self-cleaning film system and method of forming same

Textured self-cleaning film system and method of forming same

High-barrier, metal oxide films

Bio control activity surface

Methods of fabricating a multi-electrode array for spinal cord epid...

Metal oxy-flouride films based on oxidation of metal flourides

Oxidation barrier layer

Flourination process to create sacrificial oxy-flouride layer

Touch panel

Wear resistant vapor deposited coating, method of coating depositio...

Demagnetization of magnetic media by C doping for HDD patterned med...

Nanostructured vanadium oxide uncooled bolometers and method of fab...

Interconnect structure and manufacturing method thereof

Insulated radiant barriers in apparel

Metal nanowires structure

Metal nitride material for thermistor, method for producing same, a...

Patents Applicationslast 30 patents

GROWTH METHOD OF HIGHLY TWINNED SiGe ALLOY ON THE BASAL PLANE OF TR...

WINDOW, DISPLAY DEVICE INCLUDING THE SAME, AND METHOD OF MANUFACTUR...

FILM FORMING METHOD AND FILM FORMING APPARATUS

TANTALA-RING-RESONATOR-BASED PHOTONIC DEVICE AND FREQUENCY-COMB GEN...

TREATMENT OF A THIN FILM BY HYDROGEN PLASMA AND POLARISATION IN ORD...

SEALANT COATING FOR PLASMA PROCESSING CHAMBER COMPONENTS

PROMOTING ADHESION OF THIN FILMS

IMAGE SENSOR FOR IMMERSION LITHOGRAPHY

MANUFACTURING METHOD OF METAL OXIDE AND MANUFACTURING METHOD OF SEM...

TANTALA RING RESONATOR AND METHOD FOR FABRICATING NONLINEAR PHOTONI...

NEGATIVE ION IRRADIATION DEVICE

TEXTURED SELF-CLEANING FILM SYSTEM AND METHOD OF FORMING SAME

METAL OXY-FLOURIDE FILMS BASED ON OXIDATION OF METAL FLOURIDES

THIN FILM PACKAGING METHOD, THIN FILM PACKAGING DEVICE, AND SOLAR CELL

High-Refractive-Index Hydrogenated Silicon Film And Methods For Pre...

MANUFACTURING METHOD OF HIGH REFLECTION MIRROR WITH POLYCRYSTALLINE...

COATINGS FOR SURGICAL INSTRUMENTS

METAL OXY-FLOURIDE FILMS FOR CHAMBER COMPONENTS

WEAR RESISTANT VAPOR DEPOSITED COATING, METHOD OF COATING DEPOSITIO...

TOUCH PANEL

EQUIPMENT FOR PRODUCING FILM

FLEXIBLE SUBSTRATE AND METHOD OF MANUFACTURING SAME

ALUMINUM-BORON NITRIDE NANOTUBE COMPOSITES AND METHOD FOR MAKING TH...

Methods and Apparatus for Coated Flowcells

METHODS OF FABRICATING A MULTI-ELECTRODE ARRAY FOR SPINAL CORD EPID...

PLASMA SPRAY PHYSICAL VAPOR DEPOSITION DEPOSITED ENVIRONMENTAL BARR...

DISPLAY APPARATUS HAVING PIXELS AREAS WITH DIFFERENT THICKNESSES AN...

METAL NANOWIRES STRUCTURE

METHOD FOR BONDING SUBSTRATES

CONDUCTIVE FILM AND METHOD OF MAKING SAME