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Pollution mitigation, i.e. mitigating effect of contamination or debris
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G03F7/70916
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PHYSICS
G03
Photography
G03F
PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES
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Photomechanical
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G03F7/70916
Pollution mitigation, i.e. mitigating effect of contamination or debris
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Patents Grants
last 30 patents
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Patent Grant
Semiconductor processing tool and methods of operation
Patent number
12,353,142
Issue date
Jul 8, 2025
Taiwan Semiconductor Manufacturing Company, Ltd
Cheng Hung Tsai
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Reticle of protecting from particle attacks
Patent number
12,353,143
Issue date
Jul 8, 2025
Taiwan Semiconductor Manufacturing Company, Ltd
Yao-Tang Lin
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Chamber device, gas laser device, and electronic device manufacturi...
Patent number
12,347,995
Issue date
Jul 1, 2025
Gigaphoton Inc.
Junichi Fujimoto
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Lithographic system provided with a deflection apparatus for changi...
Patent number
12,332,570
Issue date
Jun 17, 2025
ASML Holding N.V.
Ronald Peter Albright
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Extreme ultraviolet light source device and protection method for r...
Patent number
12,321,107
Issue date
Jun 3, 2025
USHIO DENKI KABUSHIKI KAISHA
Hironobu Yabuta
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Inner pod holding device conducive to reducing dust contamination a...
Patent number
12,306,550
Issue date
May 20, 2025
GUDENG EQUIPMENT CO., LTD.
Yin-Feng Chan
G01 - MEASURING TESTING
Information
Patent Grant
Method for operating an EUV lithography apparatus, and EUV lithogra...
Patent number
12,287,588
Issue date
Apr 29, 2025
Carl Zeiss SMT GmbH
Moritz Becker
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Grant
Photoresist inspection apparatus, photoresist inspection method usi...
Patent number
12,276,907
Issue date
Apr 15, 2025
Samsung Electronics Co., Ltd.
Sukjong Bae
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Semiconductor processing tool and methods of operation
Patent number
12,265,336
Issue date
Apr 1, 2025
Taiwan Semiconductor Manufacturing Company, Ltd
Kai-Chieh Chang
G02 - OPTICS
Information
Patent Grant
Device and method to remove debris from an extreme ultraviolet (EUV...
Patent number
12,216,413
Issue date
Feb 4, 2025
Taiwan Semiconductor Manufacturing Company, Ltd
Chun-Han Lin
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Extreme ultraviolet lithography system with heated tin vane bucket...
Patent number
12,207,381
Issue date
Jan 21, 2025
Taiwan Semiconductor Manufacturing Co., Ltd
Ssu-Yu Chen
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Vacuum system, low-pressure vacuum process device, and cutoff member
Patent number
12,191,167
Issue date
Jan 7, 2025
CHANGXIN MEMORY TECHNOLOGIES, INC.
Tao Chen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Cleaning a structure surface in an EUV chamber
Patent number
12,189,313
Issue date
Jan 7, 2025
ASML Netherlands B.V.
Chunguang Xia
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
System and method for performing extreme ultraviolet photolithograp...
Patent number
12,174,545
Issue date
Dec 24, 2024
Taiwan Semiconductor Manufacturing Co., Ltd
Tai-Yu Chen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
EUV light source and apparatus for lithography
Patent number
12,167,525
Issue date
Dec 10, 2024
Taiwan Semiconductor Manufacturing Company, Ltd
Shang-Chieh Chien
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Semiconductor processing tool and methods of operation
Patent number
12,164,235
Issue date
Dec 10, 2024
Taiwan Semiconductor Manufacturing Company, Ltd
Shao-Hua Wang
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
End-of-life monitoring of dynamic gas lock membranes and pupil face...
Patent number
12,158,705
Issue date
Dec 3, 2024
ASML Holding N.V. & ASML Netherlands B.V.
Joseph Harry Lyons
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Counterflow gas nozzle for contamination mitigation in extreme ultr...
Patent number
12,158,576
Issue date
Dec 3, 2024
KLA Corporation
Rudy F. Garcia
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Mitigating long-term energy decay of laser devices
Patent number
12,147,166
Issue date
Nov 19, 2024
Taiwan Semiconductor Manufacturing Company, Ltd
Chih-Ping Yen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method for avoiding a degradation of an optical element, projection...
Patent number
12,140,877
Issue date
Nov 12, 2024
Carl Zeiss SMT GmbH
Dirk Ehm
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
EUV lithography apparatus
Patent number
12,119,129
Issue date
Oct 15, 2024
Taiwan Semiconductor Manufacturing Company, Ltd
Cheng Hung Tsai
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Grant
System and method for cleaning an EUV mask
Patent number
12,099,310
Issue date
Sep 24, 2024
Taiwan Semiconductor Manufacturing Co., Ltd
Yen-Hui Li
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
System and method for monitoring and controlling extreme ultraviole...
Patent number
12,085,860
Issue date
Sep 10, 2024
Taiwan Semiconductor Manufacturing Co., Ltd
Tai-Yu Chen
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Grant
System and method for detecting debris in a photolithography system
Patent number
12,085,865
Issue date
Sep 10, 2024
Taiwan Semiconductor Manufacturing Co., Ltd
Shih-Yu Tu
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Operating method for preventing photomask particulate contamination
Patent number
12,066,765
Issue date
Aug 20, 2024
Taiwan Semiconductor Manufacturing Co., Ltd
Jui-Chieh Chen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Reticle-masking structure, extreme ultra violet apparatus, and meth...
Patent number
12,066,760
Issue date
Aug 20, 2024
Taiwan Semiconductor Manufacturing Company Ltd.
Ching-Hsiang Hsu
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Pellicle and pellicle assembly
Patent number
12,066,758
Issue date
Aug 20, 2024
ASML Netherlands B.V.
David Ferdinand Vles
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method and apparatus for mitigating tin debris
Patent number
12,061,423
Issue date
Aug 13, 2024
Taiwan Semiconductor Manufacturing Company, Ltd
Cheng Hung Tsai
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Extreme ultraviolet lithography system
Patent number
12,055,865
Issue date
Aug 6, 2024
Taiwan Semiconductor Manufacturing Company, Ltd
Ssu-Yu Chen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithography contamination control
Patent number
12,055,867
Issue date
Aug 6, 2024
Taiwan Semiconductor Manufacturing Co., Ltd
Chieh Hsieh
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Patents Applications
last 30 patents
Information
Patent Application
PASSIVE DUST TRAP, ILLUMINATION SYSTEM, AND LITHOGRAPHY SYSTEM
Publication number
20250216803
Publication date
Jul 3, 2025
CYMER, LLC
Sean Marcus Buczek
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
CONTAMINATION PREVENTION DEVICE FOR EXTREME ULTRA-VIOLET (EUV) RETI...
Publication number
20250218718
Publication date
Jul 3, 2025
Samsung Electronics Co., Ltd.
Hoonseop KIM
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
RETICLE CLAMPING MODULE
Publication number
20250199420
Publication date
Jun 19, 2025
GUDENG EQUIPMENT CO., LTD.
YU-LIN CHEN
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
HIGH-CLEANLINESS RETICLE CLAMPING MODULE
Publication number
20250181000
Publication date
Jun 5, 2025
GUDENG EQUIPMENT CO., LTD.
AN-PANG WANG
G01 - MEASURING TESTING
Information
Patent Application
TEST SYSTEM FOR A CAMERA, MASK INSPECTIONS SYSTEM AND METHOD FOR TE...
Publication number
20250175589
Publication date
May 29, 2025
Carl Zeiss SMT GMBH
Senthil Lakshmanan
H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information
Patent Application
FLUID FILTRATION FOR SEMICONDUCTOR PROCESSING
Publication number
20250161840
Publication date
May 22, 2025
Taiwan Semiconductor Manufacturing Company Limited
Chia Pao CHANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
RESIDUAL GAS ANALYSER, PROJECTION EXPOSURE APPARATUS COMPRISING A R...
Publication number
20250166983
Publication date
May 22, 2025
Carl Zeiss SMT GMBH
Achim SCHOELL
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
OPTICAL MEMBER AND PRODUCTION METHOD THEREFOR
Publication number
20250155796
Publication date
May 15, 2025
NIPPON LIGHT METAL COMPANY, LTD.
Takeshi OSHIMA
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
CLEANING APPARATUS, EXTREME ULTRAVIOLET LITHOGRAPHY SYSTEM, AND MET...
Publication number
20250147439
Publication date
May 8, 2025
Taiwan Semiconductor Manufacturing Company, Ltd.
Chun-Han LIN
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
RETICLE, RETICLE REPAIR METHOD, AND SUBSTRATE PROCESSING METHOD INC...
Publication number
20250138437
Publication date
May 1, 2025
Samsung Electronics Co., Ltd.
YOONKI HWANG
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
OPTICAL APPARATUS
Publication number
20250116943
Publication date
Apr 10, 2025
ASML NETHERLANDS B.V.
Debashis DE MUNSHI
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
ASSEMBLY FOR A LITHOGRAPHIC APPARATUS
Publication number
20250102902
Publication date
Mar 27, 2025
ASML NETHERLANDS B.V.
Tim Willem Johan VAN DE GOOR
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
CLEANING A STRUCTURE SURFACE IN AN EUV CHAMBER
Publication number
20250085643
Publication date
Mar 13, 2025
ASML NETHERLANDS B.V.
Chunguang Xia
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
EXTREME ULTRAVIOLET SOURCE CLEANING APPARATUS, EUV SOURCE CLEANING...
Publication number
20250076775
Publication date
Mar 6, 2025
SAMSUNG ELECTRONICS CO,. LTD.
CHULMIN CHO
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS, ILLUMINATION SYSTEM, AND CONNECTION SEALING...
Publication number
20250060682
Publication date
Feb 20, 2025
ASML NETHERLANDS B.V.
Armin Bernhard RIDINGER
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
A SYSTEM FOR USE IN A LITHOGRAPHIC APPARATUS
Publication number
20250060681
Publication date
Feb 20, 2025
Dzmitry LABETSKI
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
SEMICONDUCTOR PROCESSING TOOL AND METHODS OF OPERATION
Publication number
20250053103
Publication date
Feb 13, 2025
Taiwan Semiconductor Manufacturing Company, Ltd.
Shao-Hua WANG
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
SUBSTRATE TREATMENT SYSTEM AND SUBSTRATE TREATMENT METHOD
Publication number
20250028256
Publication date
Jan 23, 2025
TOKYO ELECTRON LIMITED
Keiichi YAHATA
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
TOP MODULE AND EXPOSING APPARATUS INCLUDING THE SAME
Publication number
20250021008
Publication date
Jan 16, 2025
Samsung Electronics Co., Ltd.
Yebin Nam
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
ELECTROSTATIC HOLDER, OBJECT TABLE AND LITHOGRAPHIC APPARATUS
Publication number
20250021022
Publication date
Jan 16, 2025
Tiannan GUAN
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
CLEANING METHOD, COMPUTER STORAGE MEDIUM, AND SUBSTRATE TREATMENT S...
Publication number
20250013159
Publication date
Jan 9, 2025
TOKYO ELECTRON LIMITED
Hayato KIKUCHI
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
PARTICLE TRANSFER BLOCKING DEVICE AND LITHOGRAPHY DEVICE USING ELEC...
Publication number
20240429015
Publication date
Dec 26, 2024
DERKWOO SEMITECH CO., LTD.
Ki Bum KIM
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
EXTREME ULTRAVIOLET LIGHT SOURCE WITH THERMAL STABILIZATION
Publication number
20240422888
Publication date
Dec 19, 2024
Taiwan Semiconductor Manufacturing Company, Ltd.
Chien-Hsing Lu
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
SEMICONDUCTOR PROCESSING TOOL AND METHODS OF OPERATION
Publication number
20240385540
Publication date
Nov 21, 2024
Taiwan Semiconductor Manufacturing Company, Ltd.
Kai-Chieh CHANG
G02 - OPTICS
Information
Patent Application
EUV LITHOGRAPHY SYSTEM HAVING A GAS-BINDING COMPONENT
Publication number
20240385541
Publication date
Nov 21, 2024
Carl Zeiss SMT GMBH
Wilbert KRUITHOF
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
MITIGATING LONG-TERM ENERGY DECAY OF LASER DEVICES
Publication number
20240385542
Publication date
Nov 21, 2024
Taiwan Semiconductor Manufacturing Company, Ltd.
Chih-Ping YEN
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
SYSTEM AND METHOD FOR MONITORING AND CONTROLLING EXTREME ULTRAVIOLE...
Publication number
20240377752
Publication date
Nov 14, 2024
Taiwan Semiconductor Manufacturing Co., Ltd.
Tai-Yu CHEN
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Application
SYSTEM AND METHOD FOR CLEANING AN EUV MASK
Publication number
20240377766
Publication date
Nov 14, 2024
Taiwan Semiconductor Manufacturing Co., Ltd.
Yen-Hui LI
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
SYSTEM AND METHOD FOR DETECTING DEBRIS IN A PHOTOLITHOGRAPHY SYSTEM
Publication number
20240377764
Publication date
Nov 14, 2024
Taiwan Semiconductor Manufacturing Co., Ltd.
Shih-Yu TU
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
EUV LITHOGRAPHY APPARATUS
Publication number
20240379259
Publication date
Nov 14, 2024
Taiwan Semiconductor Manufacturing Company, Ltd.
Cheng Hung TSAI
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING