Porous nozzles

Industry

CPC
C23C16/45568

This industry / category may be too specific. Please go to a parent level for more data

Parent Industries

CCHEMISTRY METALLURGY C23Surface treatment C23CCOATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating

Current Industry

C23C16/45568Porous nozzles

Industries

Please log in for detailed analytics

Patents Grantslast 30 patents

Information Patent Grant
Shower plate structure for supplying carrier and dry gas
- Patent number 11,149,350
- Issue date Oct 19, 2021
- ASM IP Holding B.V.
- Wataru Adachi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Porous showerhead for a processing chamber
- Patent number 11,111,582
- Issue date Sep 7, 2021
- Applied Materials, Inc.
- Sumit Agarwal
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Gas shower head with plural hole patterns and with corresponding di...
- Patent number 11,041,242
- Issue date Jun 22, 2021
- Taiwan Semiconductor Manufacturing Company Ltd.
- Chih-Hui Huang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Effective and novel design for lower particle count and better wafe...
- Patent number 10,808,310
- Issue date Oct 20, 2020
- Applied Mateirals, Inc.
- Vishwas Kumar Pandey
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Effective and novel design for lower particle count and better wafe...
- Patent number 10,619,235
- Issue date Apr 14, 2020
- Applied Materials, Inc.
- Vishwas Kumar Pandey
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Vertical system with vacuum pre-loaded deposition head
- Patent number 10,584,413
- Issue date Mar 10, 2020
- Eastman Kodak Company
- Todd Mathew Spath
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing an upper electrode of a plasma processing d...
- Patent number 10,081,090
- Issue date Sep 25, 2018
- Tokyo Electron Limited
- Tsuguo Kitajima
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Silicon carbide crystal growth in a CVD reactor using chlorinated c...
- Patent number 10,017,877
- Issue date Jul 10, 2018
- EPILUVAC AB
- Erik Janzén
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Shower plate sintered integrally with gas release hole member and m...
- Patent number 9,767,994
- Issue date Sep 19, 2017
- Tokyo Electron Limited
- Masahiro Okesaku
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods and apparatus for the deposition of materials on a substrate
- Patent number 9,499,905
- Issue date Nov 22, 2016
- Applied Materials, Inc.
- Mehmet Tugrul Samir
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for depositing LED organic film
- Patent number 9,385,322
- Issue date Jul 5, 2016
- Massachusetts Institute of Technology
- Vladimir Bulovic
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Batch type apparatus for manufacturing semiconductor devices
- Patent number 9,159,591
- Issue date Oct 13, 2015
- Samsung Electronics Co., Ltd.
- Cheol-Kyu Yang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Vapor deposition of anti-stiction layer for micromechanical devices
- Patent number 9,150,959
- Issue date Oct 6, 2015
- Kenneth A. Abbott
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Apparatus and method for depositing a material on a substrate
- Patent number 9,085,822
- Issue date Jul 21, 2015
- First Solar, Inc
- James F. Nolan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for depositing LED organic film
- Patent number 9,005,365
- Issue date Apr 14, 2015
- Massachusetts Institute of Technology
- Vladimir Bulovic
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Shower plate sintered integrally with gas release hole member and m...
- Patent number 8,915,999
- Issue date Dec 23, 2014
- Tokyo Electron Limited
- Masahiro Okesaku
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma stamp, plasma treatment device, method for plasma treatment...
- Patent number 8,904,956
- Issue date Dec 9, 2014
- Fraunhofer Gesellschaft zur Forderung der Angewandten Forschung E.V.
- Claus-Peter Klages
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Chemical vapor deposition of fluorocarbon polymers
- Patent number 8,889,225
- Issue date Nov 18, 2014
- The Gillette Company
- Andrew Vladimirovich Zhuk
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Microwave plasma processing device
- Patent number 8,680,424
- Issue date Mar 25, 2014
- Toyo Seikan Kaisha, Ltd.
- Akira Kobayashi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Shower plate, method for manufacturing the shower plate, plasma pro...
- Patent number 8,372,200
- Issue date Feb 12, 2013
- Tokyo Electron Ltd.
- Masahiro Okesaku
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Method and apparatus for reducing particle contamination in a depos...
- Patent number 8,268,078
- Issue date Sep 18, 2012
- Tokyo Electron Limited
- Kenji Suzuki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for depositing LED organic film
- Patent number 8,128,753
- Issue date Mar 6, 2012
- Massachusetts Institute of Technology
- Vladimir Bulovic
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Vapor deposition of anti-stiction layer for micromechanical devices
- Patent number 7,927,423
- Issue date Apr 19, 2011
- Kenneth A. Abbott
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Delivery device comprising gas diffuser for thin film deposition
- Patent number 7,789,961
- Issue date Sep 7, 2010
- Eastman Kodak Company
- Shelby F. Nelson
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and method for depositing a material on a substrate
- Patent number 7,780,787
- Issue date Aug 24, 2010
- First Solar, Inc
- James F. Nolan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Inlet system for an MOCVD reactor
- Patent number 7,625,448
- Issue date Dec 1, 2009
- Aixtron AG
- Martin Dauelsberg
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Microwave plasma processing device and plasma processing gas supply...
- Patent number 7,582,845
- Issue date Sep 1, 2009
- Toyo Seikan Kaisha Ltd.
- Akira Kobayashi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Gas reaction system and semiconductor processing apparatus
- Patent number 7,413,611
- Issue date Aug 19, 2008
- Tokyo Electron Limited
- Hachishiro Iizuka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Gas-admission element for CVD processes, and device
- Patent number 7,294,207
- Issue date Nov 13, 2007
- Aixtron AG
- Gerd Strauch
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Electrode member used in a plasma treating apparatus
- Patent number 7,138,034
- Issue date Nov 21, 2006
- Matsushita Electric Industrial Co., Ltd.
- Kiyoshi Arita
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
FLUIDIC BAFFLE FOR HIGH PRESSURE FLUID DISTRIBUTION AND SUBSTRATE P...
- Publication number 20240167156
- Publication date May 23, 2024
- SEMES CO., LTD.
- Hyungseok KANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WAFER SUPPORT PLATE AND SEMICONDUCTOR MANUFACTURING APPARATUS INCLU...
- Publication number 20240068100
- Publication date Feb 29, 2024
- United Semiconductor Japan Co., Ltd.
- Satoshi Inagaki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEVICE FOR DIFFUSING A PRECURSOR WITH A CONTAINER HAVING AT LEAST O...
- Publication number 20230332289
- Publication date Oct 19, 2023
- Commissariat A L'Energie Atomique et Aux Energies Alternatives
- Hicham MASKROT
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
POROUS SHOWERHEAD FOR A PROCESSING CHAMBER
- Publication number 20200283900
- Publication date Sep 10, 2020
- Applied Materials, Inc.
- Sumit AGARWAL
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
EFFECTIVE AND NOVEL DESIGN FOR LOWER PARTICLE COUNT AND BETTER WAFE...
- Publication number 20200199730
- Publication date Jun 25, 2020
- Applied Materials, Inc.
- Vishwas Kumar PANDEY
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
VAPOR PHASE FILM-FORMING APPARATUS
- Publication number 20180230595
- Publication date Aug 16, 2018
- HERMES-EPITEK CORPORATION
- Noboru Suda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PROCESS CHAMBER AND SUBSTRATE PROCESSING DEVICE
- Publication number 20150197851
- Publication date Jul 16, 2015
- INOCT CO., LTD
- Song Keun Yoon
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20150136028
- Publication date May 21, 2015
- WONIK IPS CO., LTD.
- Young Hoon PARK
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SILICON CARBIDE CRYSTAL GROWTH IN A CVD REACTOR USING CHLORINATED C...
- Publication number 20150013595
- Publication date Jan 15, 2015
- Erik Janzén
- C30 - CRYSTAL GROWTH
Information Patent Application
CHEMICAL VAPOR DEPOSITION OF FLUOROCARBON POLYMERS
- Publication number 20140178584
- Publication date Jun 26, 2014
- Andrew Vladimirovich Zhuk
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
PLASMA PROCESSING DEVICE
- Publication number 20140174662
- Publication date Jun 26, 2014
- TOKYO ELECTRON LIMITED
- Tsuguo Kitajima
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PROCESS GAS DIFFUSER ASSEMBLY FOR VAPOR DEPOSITION SYSTEM
- Publication number 20140116339
- Publication date May 1, 2014
- Ronald Nasman
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
BATCH TYPE APPARATUS FOR MANUFACTURING SEMICONDUCTOR DEVICES
- Publication number 20130167774
- Publication date Jul 4, 2013
- Cheol-Kyu Yang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SHOWER PLATE, MANUFACTURING METHOD OF THE SHOWER PLATE, AND PLASMA...
- Publication number 20130112337
- Publication date May 9, 2013
- NATIONAL UNIVERSITY CORPORATION TOHOKU UNIVERSITY
- Masahiro Okesaku
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
VAPOR TRANSPORT DEPOSITION METHOD AND SYSTEM FOR MATERIAL CO-DEPOSI...
- Publication number 20130089948
- Publication date Apr 11, 2013
- First Solar, Inc.
- Gang Xiong
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS AND APPARATUS FOR THE DEPOSITION OF MATERIALS ON A SUBSTRATE
- Publication number 20130019803
- Publication date Jan 24, 2013
- Applied Materials, Inc.
- TUGRUL SAMIR
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PROCESS GAS DIFFUSER ASSEMBLY FOR VAPOR DEPOSITION SYSTEM
- Publication number 20120312234
- Publication date Dec 13, 2012
- TOKYO ELECTRON LIMITED
- Ronald NASMAN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND APPARATUS FOR DEPOSITING LED ORGANIC FILM
- Publication number 20120148743
- Publication date Jun 14, 2012
- Massachusetts Institute of Technology
- Vladimir Bulovic
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Vapor Deposition of Anti-Stiction Layer for Micromechanical Devices
- Publication number 20120040095
- Publication date Feb 16, 2012
- Kenneth A. Abbott
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SYSTEMS AND METHODS FOR A GAS TREATMENT OF A NUMBER OF SUBSTRATES
- Publication number 20110305835
- Publication date Dec 15, 2011
- S. O. I. Tec Silicon on Insulator Technologies
- Ronald Thomas Bertram, JR.
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method and Apparatus for Depositing LED Organic Film
- Publication number 20110262624
- Publication date Oct 27, 2011
- Massachusetts Institute of Technology
- Vladimir Bulovic
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA STAMP, PLASMA TREATMENT DEVICE, METHOD FOR PLASMA TREATMENT...
- Publication number 20110147345
- Publication date Jun 23, 2011
- Claus-Peter Klages
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
Apparatus and Method for Depositing a Material on a Substrate
- Publication number 20110039401
- Publication date Feb 17, 2011
- First Solar, Inc.
- James F. Nolan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DELIVERY DEVICE COMPRISING GAS DIFFUSER FOR THIN FILM DEPOSITION
- Publication number 20100248423
- Publication date Sep 30, 2010
- Shelby F. Nelson
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Shower Plate, Method for Manufacturing the Shower Plate, Plasma Pro...
- Publication number 20100230387
- Publication date Sep 16, 2010
- Tokyo Electron Limited
- Masahiro Okesaku
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SHOWER PLATE SINTERED INTEGRALLY WITH GAS RELEASE HOLE MEMBER AND M...
- Publication number 20100178775
- Publication date Jul 15, 2010
- TOKYO ELECTRON LIMITED
- Masahiro Okesaku
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Microwave plasma processing device
- Publication number 20090250444
- Publication date Oct 8, 2009
- TOYO SEIKAN KAISHA LTD.
- Akira Kobayashi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Plasma processing apparatus
- Publication number 20090229755
- Publication date Sep 17, 2009
- TOKYO ELECTRON LIMITED
- Tadahiro Ohmi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR MANUFACTURING SHOWER PLATE, SHOWER PLATE MANUFACTURED US...
- Publication number 20090229753
- Publication date Sep 17, 2009
- TOKYO ELECTRON LIMITED
- Tadahiro OHMI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Shower Plate and Plasma Treatment Apparatus Using Shower Plate
- Publication number 20080318431
- Publication date Dec 25, 2008
- TOHOKU UNIVERSITY
- Tadahiro Ohmi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Porous nozzles

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Shower plate structure for supplying carrier and dry gas

Porous showerhead for a processing chamber

Gas shower head with plural hole patterns and with corresponding di...

Effective and novel design for lower particle count and better wafe...

Effective and novel design for lower particle count and better wafe...

Vertical system with vacuum pre-loaded deposition head

Method of manufacturing an upper electrode of a plasma processing d...

Silicon carbide crystal growth in a CVD reactor using chlorinated c...

Shower plate sintered integrally with gas release hole member and m...

Methods and apparatus for the deposition of materials on a substrate

Method and apparatus for depositing LED organic film

Batch type apparatus for manufacturing semiconductor devices

Vapor deposition of anti-stiction layer for micromechanical devices

Apparatus and method for depositing a material on a substrate

Method and apparatus for depositing LED organic film

Shower plate sintered integrally with gas release hole member and m...

Plasma stamp, plasma treatment device, method for plasma treatment...

Chemical vapor deposition of fluorocarbon polymers

Microwave plasma processing device

Shower plate, method for manufacturing the shower plate, plasma pro...

Method and apparatus for reducing particle contamination in a depos...

Method and apparatus for depositing LED organic film

Vapor deposition of anti-stiction layer for micromechanical devices

Delivery device comprising gas diffuser for thin film deposition

Apparatus and method for depositing a material on a substrate

Inlet system for an MOCVD reactor

Microwave plasma processing device and plasma processing gas supply...

Gas reaction system and semiconductor processing apparatus

Gas-admission element for CVD processes, and device

Electrode member used in a plasma treating apparatus

Patents Applicationslast 30 patents

FLUIDIC BAFFLE FOR HIGH PRESSURE FLUID DISTRIBUTION AND SUBSTRATE P...

WAFER SUPPORT PLATE AND SEMICONDUCTOR MANUFACTURING APPARATUS INCLU...

DEVICE FOR DIFFUSING A PRECURSOR WITH A CONTAINER HAVING AT LEAST O...

POROUS SHOWERHEAD FOR A PROCESSING CHAMBER

EFFECTIVE AND NOVEL DESIGN FOR LOWER PARTICLE COUNT AND BETTER WAFE...

VAPOR PHASE FILM-FORMING APPARATUS

PROCESS CHAMBER AND SUBSTRATE PROCESSING DEVICE

SUBSTRATE PROCESSING APPARATUS

SILICON CARBIDE CRYSTAL GROWTH IN A CVD REACTOR USING CHLORINATED C...

CHEMICAL VAPOR DEPOSITION OF FLUOROCARBON POLYMERS

PLASMA PROCESSING DEVICE

PROCESS GAS DIFFUSER ASSEMBLY FOR VAPOR DEPOSITION SYSTEM

BATCH TYPE APPARATUS FOR MANUFACTURING SEMICONDUCTOR DEVICES

SHOWER PLATE, MANUFACTURING METHOD OF THE SHOWER PLATE, AND PLASMA...

VAPOR TRANSPORT DEPOSITION METHOD AND SYSTEM FOR MATERIAL CO-DEPOSI...

METHODS AND APPARATUS FOR THE DEPOSITION OF MATERIALS ON A SUBSTRATE

PROCESS GAS DIFFUSER ASSEMBLY FOR VAPOR DEPOSITION SYSTEM

METHOD AND APPARATUS FOR DEPOSITING LED ORGANIC FILM

Vapor Deposition of Anti-Stiction Layer for Micromechanical Devices

SYSTEMS AND METHODS FOR A GAS TREATMENT OF A NUMBER OF SUBSTRATES

Method and Apparatus for Depositing LED Organic Film

PLASMA STAMP, PLASMA TREATMENT DEVICE, METHOD FOR PLASMA TREATMENT...

Apparatus and Method for Depositing a Material on a Substrate

DELIVERY DEVICE COMPRISING GAS DIFFUSER FOR THIN FILM DEPOSITION

Shower Plate, Method for Manufacturing the Shower Plate, Plasma Pro...

SHOWER PLATE SINTERED INTEGRALLY WITH GAS RELEASE HOLE MEMBER AND M...

Microwave plasma processing device

Plasma processing apparatus

METHOD FOR MANUFACTURING SHOWER PLATE, SHOWER PLATE MANUFACTURED US...

Shower Plate and Plasma Treatment Apparatus Using Shower Plate