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ELECTRICITY
H01
Electric elements
H01L
SEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
H01L21/00
Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
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H01L21/67259
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Patents Grants
last 30 patents
Information
Patent Grant
Electronic component test handler having flying scan function
Patent number
11,965,926
Issue date
Apr 23, 2024
ATECO INC.
Taek Seon Lee
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Apparatus with circuit-locating mechanism
Patent number
11,967,390
Issue date
Apr 23, 2024
Micron Technology, Inc.
Itamar Lavy
G11 - INFORMATION STORAGE
Information
Patent Grant
Overhead hoist transfer apparatus
Patent number
11,964,851
Issue date
Apr 23, 2024
Mirle Automation Corporation
Houng Sun
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Lithographic apparatus, metrology systems, phased array illuminatio...
Patent number
11,966,169
Issue date
Apr 23, 2024
ASML Holding N.V.
Mohamed Swillam
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of analyzing semiconductor structure
Patent number
11,959,958
Issue date
Apr 16, 2024
Taiwan Semiconductor Manufacturing Company Ltd.
Yi Min Liu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Photolithography method and photolithography system
Patent number
11,959,864
Issue date
Apr 16, 2024
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
Chi-Hung Liao
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Wafer detection device and wafer detection method using the same
Patent number
11,961,749
Issue date
Apr 16, 2024
HANGZHOU SIZONE ELECTRONIC TECHNOLOGY INC.
Ming Zhu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Telescoping linear extension robot
Patent number
11,955,364
Issue date
Apr 9, 2024
Kimball Electronics Indiana, Inc.
Lawrence A. Wise
B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information
Patent Grant
Processing system and transfer method
Patent number
11,955,356
Issue date
Apr 9, 2024
Tokyo Electron Limited
Norihiko Amikura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Adaptive focusing and transport system for electroplating
Patent number
11,942,341
Issue date
Mar 26, 2024
ASMPT NEXX, INC.
Arthur Keigler
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Automated substrate placement to chamber center
Patent number
11,942,345
Issue date
Mar 26, 2024
Applied Materials, Inc.
Wolfgang Aderhold
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus for processing substrate and operating method thereof
Patent number
11,938,493
Issue date
Mar 26, 2024
Semes Co., Ltd.
Noh Hoon Myoung
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Holding mechanism including Bernoulli pad
Patent number
11,935,778
Issue date
Mar 19, 2024
Disco Corporation
Yoshinori Kakinuma
B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information
Patent Grant
Apparatus and method of manufacturing a semiconductor device
Patent number
11,935,728
Issue date
Mar 19, 2024
Taiwan Semiconductor Manufacturing Company, Ltd
Tsung-Cheng Wu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Execution device and execution method
Patent number
11,933,826
Issue date
Mar 19, 2024
Tokyo Electron Limited
Yuto Usuki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Drying system with integrated substrate alignment stage
Patent number
11,929,264
Issue date
Mar 12, 2024
Applied Materials, Inc.
Justin Ho Kuen Wong
F26 - DRYING
Information
Patent Grant
Apparatus and method for inspecting wafer carriers
Patent number
11,929,271
Issue date
Mar 12, 2024
Taiwan Semiconductor Manufacturing Co., Ltd.
Cheng-Kang Hu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor packaging apparatus and method of manufacturing semic...
Patent number
11,923,214
Issue date
Mar 5, 2024
Samsung Electronics Co., Ltd.
Junghyun Cho
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Diagnostic disc with a high vacuum and temperature tolerant power s...
Patent number
11,924,972
Issue date
Mar 5, 2024
Applied Materials, Inc.
Phillip A. Criminale
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate transfer device and substrate gripping determination method
Patent number
11,923,222
Issue date
Mar 5, 2024
Tokyo Electron Limited
Toshiaki Kodama
B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information
Patent Grant
Position feedback for sealed environments
Patent number
11,923,729
Issue date
Mar 5, 2024
Brook Automation US, LLC
Jairo T. Moura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus, systems, and methods of measuring edge ring distance for...
Patent number
11,915,953
Issue date
Feb 27, 2024
Applied Materials, Inc.
Ole Luckner
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus and method for automated wafer carrier handling
Patent number
11,915,958
Issue date
Feb 27, 2024
Taiwan Semiconductor Manufacturing Company, Ltd
Ren-Hau Wu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Automatic teaching of substrate handling for production and process...
Patent number
11,908,722
Issue date
Feb 20, 2024
KLA Corporation
Avner Safrani
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and apparatus for insitu adjustment of wafer slip detection...
Patent number
11,904,431
Issue date
Feb 20, 2024
Axus Technology, LLC
Daniel Ray Trojan
B24 - GRINDING POLISHING
Information
Patent Grant
Method and apparatus for measuring placement of a substrate on a he...
Patent number
11,908,724
Issue date
Feb 20, 2024
Applied Materials, Inc.
Charles G. Potter
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Article transport facility
Patent number
11,904,915
Issue date
Feb 20, 2024
Daifuku Co., Ltd.
Takafumi Yamazaki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Transfer method and transfer system for transferring substrate betw...
Patent number
11,908,717
Issue date
Feb 20, 2024
Tokyo Electron Limited
Masakazu Yamamoto
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Chip transfer device capable of floatingly positioning a chip and m...
Patent number
11,901,213
Issue date
Feb 13, 2024
CHROMA ATE INC.
Chien-Ming Chen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Adaptive focusing and transport system for electroplating
Patent number
11,887,874
Issue date
Jan 30, 2024
ASMPT NEXX, INC.
Arthur Keigler
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
Semiconductor Device and Method of Making a Substrate with Improved...
Publication number
20240136217
Publication date
Apr 25, 2024
UTAC Headquarters Pte. Ltd.
Hua Hong Tan
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF CONTROLLING SUBSTRATE TRANSFER SYSTEM
Publication number
20240128110
Publication date
Apr 18, 2024
TOKYO ELECTRON LIMITED
Kosuke KINOSHITA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
RESOURCE MANAGEMENT WITH TIME AND EXPENSE TRACKING
Publication number
20240128115
Publication date
Apr 18, 2024
VueReal Inc.
Heidi Elizabeth Bailey
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
INTEGRATED OPTICAL SENSOR CONTROLLER FOR DEVICEMANUFACTURING MACHINES
Publication number
20240128114
Publication date
Apr 18, 2024
Applied Materials, Inc.
Kiyki-Shiy Shang
B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information
Patent Application
APPARATUS AND METHOD MONITORING SEMICONDUCTOR MANUFACTURING EQUIPMENT
Publication number
20240128102
Publication date
Apr 18, 2024
Samsung Electronics Co., Ltd.
SUNGHO JANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
WAFER TRANSPORT SYSTEM AND TRANSPORTING METHOD USING THE SAME
Publication number
20240128103
Publication date
Apr 18, 2024
Taiwan Semiconductor Manufacturing Company, Ltd.
Qun DENG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
APPARATUS FOR MANUFACTURING SEMICONDUCTOR DEVICE AND METHOD FOR MAN...
Publication number
20240128109
Publication date
Apr 18, 2024
Samsung Electronics Co., Ltd.
Ji Hun Kim
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ELECTRODE STRUCTURE OF ROLLER UNIT FOR TRANSFERRING SEMICONDUCTOR L...
Publication number
20240120218
Publication date
Apr 11, 2024
LG ELECTRONICS INC.
Kitae AN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
OFFSET ALIGNMENT AND REPAIR IN MICRO DEVICE TRANSFER
Publication number
20240120231
Publication date
Apr 11, 2024
VueReal Inc.
Gholamreza Chaji
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR MANUFACTURING EQUIPMENT, AND METHOD FOR TRANSPORTING...
Publication number
20240120224
Publication date
Apr 11, 2024
Samsung Electronics Co., Ltd.
Jin Hyuk CHOI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
BONDING APPARATUS AND BONDING METHOD
Publication number
20240120219
Publication date
Apr 11, 2024
SHINKAWA LTD.
Yuichiro NOGUCHI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PROCESSING DEVICE
Publication number
20240112929
Publication date
Apr 4, 2024
YAMAHA HATSUDOKI KABUSHIKI KAISHA
Yoshikuni SUZUKI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD AND APPARATUS FOR ALIGNING WAFER USING LASER SCANNER, SEMICO...
Publication number
20240112938
Publication date
Apr 4, 2024
SEMES CO., LTD.
Hee Jae BYUN
B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND HOLDING METHOD OF SUBSTRATE
Publication number
20240105497
Publication date
Mar 28, 2024
TOKYO ELECTRON LIMITED
Yosuke Omori
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF ELECTROSTATIC CHUCK MOTION CONTROL FOR WAFER BREAKAGE PRE...
Publication number
20240105494
Publication date
Mar 28, 2024
Junguo LI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE TREATING APPARATUS
Publication number
20240096673
Publication date
Mar 21, 2024
SCREEN Holdings Co., Ltd.
Takashi IZUTA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR OPERATING CONVEYING SYSTEM
Publication number
20240087934
Publication date
Mar 14, 2024
Taiwan Semiconductor Manufacturing company Ltd.
YONG-JYU LIN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
AUTOMATIC WAFER CENTERING METHOD AND APPARATUS
Publication number
20240087938
Publication date
Mar 14, 2024
BROOKS AUTOMATION US, LLC
Alexander KRUPYSHEV
B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information
Patent Application
Method of Manufacturing Semiconductor Device and Non-transitory Com...
Publication number
20240087929
Publication date
Mar 14, 2024
Kokusai Electric Corporation
Tomoyuki MIYADA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND ST...
Publication number
20240087926
Publication date
Mar 14, 2024
TOKYO ELECTRON LIMITED
Youngtai KANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PICK-AND-PLACE TOOL WITH WARPAGE-CORRECTION MECHANISM
Publication number
20240087943
Publication date
Mar 14, 2024
Taiwan Semiconductor Manufacturing Company, Ltd.
Jen-Yuan Chang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
TURNTABLE FOR WAFER TRANSPORT SYSTEM
Publication number
20240071797
Publication date
Feb 29, 2024
Taiwan Semiconductor Manufacturing Company, Ltd.
Guancyun Li
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR MANUFACTURING APPARATUS AND METHOD OF MANUFACTURING S...
Publication number
20240071789
Publication date
Feb 29, 2024
KIOXIA Corporation
Shoma OMURA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PLACEMENT OPTIMIZATION USING SUBSTRATE MEASUREMENTS
Publication number
20240069537
Publication date
Feb 29, 2024
Applied Materials, Inc.
Gautham Gururaj Bammanahalli
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
TRANSFER SYSTEM AND CONTROL METHOD THEREOF
Publication number
20240059497
Publication date
Feb 22, 2024
SEMES CO., LTD.
In Su JO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE TRANSFER DEVICE
Publication number
20240063042
Publication date
Feb 22, 2024
SEMES CO., LTD.
Kiwon HAN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
DETECTION OF A POSITION OF A WAFER WITHIN A TRANSFER ROBOT VACUUM C...
Publication number
20240063038
Publication date
Feb 22, 2024
Tower Semiconductor Ltd.
Slava Superfine
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
APPARATUS AND METHOD OF DETECTING WAFER EDGE USING LASER SCANNER, A...
Publication number
20240063039
Publication date
Feb 22, 2024
SEMES CO., LTD.
Hee Jae BYUN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING SYSTEM AND ITS CONTROL METHOD
Publication number
20240055283
Publication date
Feb 15, 2024
Canon Kabushiki Kaisha
TAICHI YOSHIOKA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CONTROL OF WAFER BOW IN MULTIPLE STATIONS
Publication number
20240055285
Publication date
Feb 15, 2024
LAM RESEARCH CORPORATION
Edward Augustyniak
H01 - BASIC ELECTRIC ELEMENTS