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ELECTRICITY
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Electric elements
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SEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
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Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
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H01L21/76814
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last 30 patents
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Patent Grant
Etch damage and ESL free dual damascene metal interconnect
Patent number
11,955,376
Issue date
Apr 9, 2024
Taiwan Semiconductor Manufacturing Company, Ltd
Sunil Kumar Singh
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Methods and apparatus for forming dual metal interconnects
Patent number
11,948,885
Issue date
Apr 2, 2024
Applied Materials, Inc.
Suketu A Parikh
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Surface modification layer for conductive feature formation
Patent number
11,942,362
Issue date
Mar 26, 2024
Taiwan Semiconductor Manufacturing Company, Ltd
Jian-Jou Lian
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Methods for inhibiting line bending during conductive material depo...
Patent number
11,935,782
Issue date
Mar 19, 2024
Micron Technology, Inc.
Gurtej S. Sandhu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Contact window structure and method for forming contact window stru...
Patent number
11,929,280
Issue date
Mar 12, 2024
CHANGXIN MEMORY TECHNOLOGIES, INC.
Ping-Heng Wu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Methods of forming semiconductor device structures
Patent number
11,901,219
Issue date
Feb 13, 2024
Taiwan Semiconductor Manufacturing Company, Ltd
Yi-Wen Pan
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Implantations for forming source/drain regions of different transis...
Patent number
11,895,819
Issue date
Feb 6, 2024
Taiwan Semiconductor Manufacturing Company, Ltd
Dian-Sheg Yu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Multi-pass plating process with intermediate rinse and dry
Patent number
11,887,888
Issue date
Jan 30, 2024
Texas Instruments Incorporated
Peter John Holverson
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Melt anneal source and drain regions
Patent number
11,855,146
Issue date
Dec 26, 2023
Taiwan Semiconductor Manufacturing Company, Ltd
Su-Hao Liu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Anti-oxidation layer to prevent dielectric loss from planarization...
Patent number
11,854,822
Issue date
Dec 26, 2023
Taiwan Semiconductor Manufacturing Company, Ltd
Zhen Yu Guan
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor device structure with interconnect structure and meth...
Patent number
11,854,872
Issue date
Dec 26, 2023
Taiwan Semiconductor Manufacturing Company, Ltd
Chun-Hao Kung
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for fabricating electrode and semiconductor device
Patent number
11,791,201
Issue date
Oct 17, 2023
Semiconductor Energy Laboratory Co., Ltd.
Motomu Kurata
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Metallization lines on integrated circuit products
Patent number
11,791,263
Issue date
Oct 17, 2023
GLOBALFOUNDRIES U.S. INC.
Ruilong Xie
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Contact structure for semiconductor device
Patent number
11,776,847
Issue date
Oct 3, 2023
Taiwan Semiconductor Manufacturing Co., Ltd
Yun-Yu Hsieh
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor device and method of manufacture
Patent number
11,776,853
Issue date
Oct 3, 2023
Taiwan Semiconductor Manufacturing Company, Ltd.
Hung-Hao Chen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Multi-step pre-clean for selective metal gap fill
Patent number
11,776,806
Issue date
Oct 3, 2023
Applied Materials, Inc.
Xi Cen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Via landing on first and second barrier layers to reduce cleaning t...
Patent number
11,776,901
Issue date
Oct 3, 2023
Taiwan Semiconductor Manufacturing Company, Ltd
Te-Hsien Hsieh
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Contact plugs for semiconductor device
Patent number
11,756,864
Issue date
Sep 12, 2023
Taiwan Semiconductor Manufacturing Company, Ltd
Mrunal A Khaderbad
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Interconnection structure, fabricating method thereof, and semicond...
Patent number
11,749,603
Issue date
Sep 5, 2023
Taiwan Semiconductor Manufacturing Co., Ltd
Yu-Hung Lin
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Deposition window enlargement
Patent number
11,742,210
Issue date
Aug 29, 2023
Taiwan Semiconductor Manufacturing Co., Ltd
Meng-Han Chou
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
ALD (atomic layer deposition) liner for via profile control and rel...
Patent number
11,742,241
Issue date
Aug 29, 2023
Tokyo Electron Limited
Xinghua Sun
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor structure and fabrication method thereof
Patent number
11,735,476
Issue date
Aug 22, 2023
Semiconductor Manufacturing International (Shanghai) Corporation
Hailong Yu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Electrical device having conductive lines with air gaps therebetwee...
Patent number
11,735,524
Issue date
Aug 22, 2023
International Business Machines Corporation
Benjamin D. Briggs
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Split ash processes for via formation to suppress damage to low-K l...
Patent number
11,721,578
Issue date
Aug 8, 2023
Tokyo Electron Limited
Yen-Tien Lu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of forming semiconductor memory device
Patent number
11,711,916
Issue date
Jul 25, 2023
United Microelectronics Corp.
Yi-Wei Chen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Methods for controllable metal and barrier-liner recess
Patent number
11,705,366
Issue date
Jul 18, 2023
Micromaterials LLC
He Ren
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor device having contact plug
Patent number
11,694,924
Issue date
Jul 4, 2023
Taiwan Semiconductor Manufacturing Co., Ltd
Wen-Jia Hsieh
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Interconnect structure
Patent number
11,676,853
Issue date
Jun 13, 2023
Taiwan Semiconductor Manufacturing Co., Ltd.
Hung-Chih Yu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for preparing semiconductor structure having void between bo...
Patent number
11,676,857
Issue date
Jun 13, 2023
NANYA TECHNOLOGY CORPORATION
Hsih-Yang Chiu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Staircase structure in three-dimensional memory device and method f...
Patent number
11,670,592
Issue date
Jun 6, 2023
Yangtze Memory Technologies Co., Ltd.
Zhong Zhang
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
METHODS OF FORMING MICROELECTRONIC DEVICES, AND RELATED MICROELECTR...
Publication number
20240113012
Publication date
Apr 4, 2024
Micron Technology, Inc.
Collin Howder
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MIDDLE OF LINE DIELECTRIC LAYER ENGINEERING FOR VIA VOID PREVENTION
Publication number
20240105505
Publication date
Mar 28, 2024
Applied Materials, Inc.
Nicolas Louis BREIL
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF FORMING SEMICONDUCTOR DEVICE AND SUBSTRATE PROCESSING SYS...
Publication number
20240105456
Publication date
Mar 28, 2024
SEMES CO., LTD.
Hanglim LEE
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SEMICONDUCTOR STRUCTURE AND METHOD FOR MANUFACTURING THE SAME
Publication number
20240096691
Publication date
Mar 21, 2024
CHANGXIN MEMORY TECHNOLOGIES, INC
Mingming MA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ANTI-OXIDATION LAYER TO PREVENT DIELECTRIC LOSS FROM PLANARIZATION...
Publication number
20240087906
Publication date
Mar 14, 2024
Taiwan Semiconductor Manufacturing Company, Ltd.
Zhen Yu Guan
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MELT ANNEAL SOURCE AND DRAIN REGIONS
Publication number
20240088225
Publication date
Mar 14, 2024
Taiwan Semiconductor Manufacturing Co., Ltd.
Su-Hao Liu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Semiconductor Device Structure with Interconnect Structure and Meth...
Publication number
20240087951
Publication date
Mar 14, 2024
Taiwan Semiconductor Manufacturing Co., Ltd.
Chun-Hao Kung
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR DEVICE HAVING FUNNEL-SHAPED INTERCONNECT AND METHOD O...
Publication number
20240047352
Publication date
Feb 8, 2024
NANYA TECHNOLOGY CORPORATION
MIN-CHUNG CHENG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME
Publication number
20240047340
Publication date
Feb 8, 2024
NANYA TECHNOLOGY CORPORATION
Yi-Jen LO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METAL STRUCTURE HAVING FUNNEL-SHAPED INTERCONNECT AND METHOD OF MAN...
Publication number
20240047350
Publication date
Feb 8, 2024
NANYA TECHNOLOGY CORPORATION
MIN-CHUNG CHENG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CONTACT STRUCTURE FOR SEMICONDUCTOR DEVICE
Publication number
20240021474
Publication date
Jan 18, 2024
Taiwan Semiconductor Manufacturing Co., Lid.
Yun-Yu HSIEH
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CONTACT PLUGS FOR SEMICONDUCTOR DEVICE AND METHOD OF FORMING SAME
Publication number
20240021501
Publication date
Jan 18, 2024
Taiwan Semiconductor Manufacturing Co., Ltd.
Mrunal A. Khaderbad
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CONTACT FORMATION PROCESS FOR CMOS DEVICES
Publication number
20240014075
Publication date
Jan 11, 2024
Applied Materials, Inc.
Nicolas Louis BREIL
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
STRUCTURE AND METHOD FOR MAXIMIZING AIR GAP IN BACK END OF THE LINE...
Publication number
20240014133
Publication date
Jan 11, 2024
International Business Machines Corporation
Benjamin D. Briggs
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF
Publication number
20230420543
Publication date
Dec 28, 2023
Taiwan Semiconductor Manufacturing Company, Ltd.
Chia-Ling CHUNG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR FORMING SEMICONDUCTOR STRUCTURE AND SEMICONDUCTOR STRUCTURE
Publication number
20230402372
Publication date
Dec 14, 2023
CHANGXIN MEMORY TECHNOLOGIES, INC.
Tianlei MU
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CONDUCTIVE STRUCTURES
Publication number
20230395426
Publication date
Dec 7, 2023
Taiwan Semiconductor Manufacturing Company, Ltd.
Yi-Hsiang Chao
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR STRUCTURE AND METHOD FOR FORMING SEMICONDUCTOR STRUCTURE
Publication number
20230386892
Publication date
Nov 30, 2023
CHANGXIN MEMORY TECHNOLOGIES, INC
Peimeng WANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR STRUCTURE AND METHOD FOR FORMING THE SAME
Publication number
20230387189
Publication date
Nov 30, 2023
Taiwan Semiconductor Manufacturing company Ltd.
JUI-LIN CHU
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
INTERCONNECT STRUCTURE FOR SEMICONDUCTOR DEVICES
Publication number
20230386821
Publication date
Nov 30, 2023
Taiwan Semiconductor Manufacturing Co., Ltd.
Po-Chuan Wang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
DEPOSITION WINDOW ENLARGEMENT
Publication number
20230369055
Publication date
Nov 16, 2023
Taiwan Semiconductor Manufacturing Co., Ltd.
Meng-Han Chou
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
VIA LANDING ON FIRST AND SECOND BARRIER LAYERS TO REDUCE CLEANING T...
Publication number
20230361024
Publication date
Nov 9, 2023
Taiwan Semiconductor Manufacturing Company, Ltd.
Te-Hsien Hsieh
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR STRUCTURE AND SEMICONDUCTOR S...
Publication number
20230360963
Publication date
Nov 9, 2023
CHANGXIN MEMORY TECHNOLOGIES, INC.
Junsheng ZANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR DEVICE AND METHODS OF FORMATION
Publication number
20230343637
Publication date
Oct 26, 2023
Taiwan Semiconductor Manufacturing Company, Ltd.
Ying-Yu LAI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
LOW RESISTIVITY CONTACTS AND INTERCONNECTS
Publication number
20230326790
Publication date
Oct 12, 2023
LAM RESEARCH CORPORATION
Raihan M. TARAFDAR
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR DEVICE WITH COMPOSITE BARRIER STRUCTURE AND METHOD FO...
Publication number
20230317514
Publication date
Oct 5, 2023
NANYA TECHNOLOGY CORPORATION
WEI-CHEN PAN
C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information
Patent Application
REDUCING INTRALEVEL CAPACITANCE IN SEMICONDUCTOR DEVICES
Publication number
20230307290
Publication date
Sep 28, 2023
LAM RESEARCH CORPORATION
Joseph R. ABEL
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF FORMING SEMICONDUCTOR MEMORY DEVICE
Publication number
20230292498
Publication date
Sep 14, 2023
UNITED MICROELECTRONICS CORP.
Yi-Wei Chen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
INTERCONNECT STRUCTURE
Publication number
20230290675
Publication date
Sep 14, 2023
Taiwan Semiconductor Manufacturing Co., LTD
Hung-Chih YU
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR DEVICES AND METHODS OF MANUFACTURE
Publication number
20230268223
Publication date
Aug 24, 2023
Taiwan Semiconductor Manufacturing Co., Ltd.
Po-Chuan Wang
H01 - BASIC ELECTRIC ELEMENTS