TREA

Precursor deposition followed by after?-treatment

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Industry

  • CPC
  • H01L39/2451
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Parent Industries

HELECTRICITY H01Electric elements H01LSEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR H01L39/00Devices using superconductivity Processes or apparatus peculiar to the manufacture or treatment thereof or of parts thereof

Current Industry

H01L39/2451Precursor deposition followed by after?-treatment
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