Prisms

Industry

CPC
H01J2237/1523

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Parent Industries

HELECTRICITY H01Electric elements H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS H01J2237/00Discharge tubes exposing object to beam

Current Industry

H01J2237/1523Prisms

Industries

Patents Grantslast 30 patents

Information Patent Grant
Mirror pulse compressor for electron beam apparatus
- Patent number 9,406,479
- Issue date Aug 2, 2016
- Electron Optica, Inc.
- Marian Mankos
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Deflecting device for electron beams, magnetic deflecting unit for...
- Patent number 9,218,936
- Issue date Dec 22, 2015
- Ferrotec Europe GmbH
- Juergen Zinsstag
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Phase plate
- Patent number 9,076,562
- Issue date Jul 7, 2015
- Hitachi High-Technologies Corporation
- Arthur Blackburn
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Electron beam device with dispersion compensation, and method of op...
- Patent number 9,048,068
- Issue date Jun 2, 2015
- ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik GmbH
- Stefan Lanio
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron beam device with tilting and dispersion compensation, and...
- Patent number 8,866,102
- Issue date Oct 21, 2014
- ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
- Jürgen Frosien
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion implant apparatus and a method of implanting ions
- Patent number 8,759,803
- Issue date Jun 24, 2014
- GTAT Corporation
- Theodore Smick
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Ion beam bending magnet for a ribbon-shaped ion beam
- Patent number 8,723,135
- Issue date May 13, 2014
- Nissin Ion Equipment Co., Ltd.
- Hilton Frank Glavish
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion implant apparatus and a method of implanting ions
- Patent number 8,633,458
- Issue date Jan 21, 2014
- GTAT Corporation
- Theodore Smick
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Collimator magnet for ion implantation system
- Patent number 8,164,070
- Issue date Apr 24, 2012
- Nissin Ion Equipment Co., Ltd.
- Dan Nicolaescu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Magnetic scanning system with improved efficiency
- Patent number 8,138,484
- Issue date Mar 20, 2012
- Axcelis Technologies. Inc.
- Bo Vanderberg
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Post-decel magnetic energy filter for ion implantation systems
- Patent number 8,124,946
- Issue date Feb 28, 2012
- Axcelis Technologies. Inc.
- Geoffrey Ryding
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Particle optical device with magnet assembly
- Patent number 8,063,364
- Issue date Nov 22, 2011
- Carl Zeiss NTS GmbH
- Dirk Preikszas
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron beam device
- Patent number 7,923,685
- Issue date Apr 12, 2011
- Hitachi, Ltd.
- Ken Harada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Particle-optical arrangements and particle-optical systems
- Patent number 7,022,987
- Issue date Apr 4, 2006
- Carl Zeiss NIS GmbH
- Dirk Preikszas
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Prism array for electron beam inspection and defect review
- Patent number 6,878,937
- Issue date Apr 12, 2005
- KLA-Tencor Technologies Corporation
- Marian Mankos
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
TECHNIQUES FOR ELECTRON ENERGY LOSS SPECTROSCOPY AT HIGH ENERGY
- Publication number 20240347314
- Publication date Oct 17, 2024
- FEI Company
- Peter Christiaan Tiemeijer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION IMPLANT APPARATUS AND A METHOD OF IMPLANTING IONS
- Publication number 20140130741
- Publication date May 15, 2014
- GTAT CORPORATION
- Theodore Smick
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Ion Beam Bending Magnet for a Ribbon-Shaped Ion Beam
- Publication number 20130256552
- Publication date Oct 3, 2013
- NISSIN ION EQUIPMENT CO., LTD.
- Hilton Frank Glavish
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PHASE PLATE
- Publication number 20130193322
- Publication date Aug 1, 2013
- Hitachi High-Technologies Corporation
- Arthur BLACKBURN
- B82 - NANO-TECHNOLOGY
Information Patent Application
Ion Implant Apparatus and a Method of Implanting Ions
- Publication number 20130119263
- Publication date May 16, 2013
- TWIN CREEKS TECHNOLOGIES, INC.
- Theodore Smick
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Deflecting Device for Electron Beams, Magnetic Deflecting Unit for...
- Publication number 20120298041
- Publication date Nov 29, 2012
- Ferrotec GmbH
- Juergen Zinsstag
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ELECTRON BEAM DEVICE WITH TILTING AND DISPERSION COMPENSATION, AND...
- Publication number 20120006997
- Publication date Jan 12, 2012
- ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik GmbH
- Jürgen Frosien
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTRON BEAM DEVICE WITH DISPERSION COMPENSATION, AND METHOD OF OP...
- Publication number 20110272577
- Publication date Nov 10, 2011
- ICT Integrated Circuit Testing Gesellschaft fuer Halbleiterprueftechnik GmbH
- Stefan LANIO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Magnetic Scanning System with Improved Efficiency
- Publication number 20110266456
- Publication date Nov 3, 2011
- Axcelis Technologies, Inc.
- Bo Vanderberg
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PARTICLE OPTICAL DEVICE WITH MAGNET ASSEMBLY
- Publication number 20100155597
- Publication date Jun 24, 2010
- CARL ZEISS NTS GMBH
- Dirk PREIKSZAS
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COLLIMATOR MAGNET FOR ION IMPLANTATION SYSTEM
- Publication number 20100140494
- Publication date Jun 10, 2010
- NISSIN ION EQUIPMENT CO., LTD.
- Dan NICOLAESCU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
POST-DECEL MAGNETIC ENERGY FILTER FOR ION IMPLANTATION SYSTEMS
- Publication number 20090321630
- Publication date Dec 31, 2009
- Axcelis Technologies, Inc.
- Geoffrey Ryding
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTRON BEAM DEVICE
- Publication number 20090206256
- Publication date Aug 20, 2009
- Ken HARADA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Delivery of a Charged Particle Beam
- Publication number 20080116390
- Publication date May 22, 2008
- PYRAMID TECHNICAL CONSULTANTS, INC.
- John Stuart Gordon
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Application
Particle-optical arrangements and particle-optical systems
- Publication number 20040075053
- Publication date Apr 22, 2004
- LEO Elektronenmikroskopie GmbH
- Dirk Preikszas
- H01 - BASIC ELECTRIC ELEMENTS

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Mirror pulse compressor for electron beam apparatus

Deflecting device for electron beams, magnetic deflecting unit for...

Phase plate

Electron beam device with dispersion compensation, and method of op...

Electron beam device with tilting and dispersion compensation, and...

Ion implant apparatus and a method of implanting ions

Ion beam bending magnet for a ribbon-shaped ion beam

Ion implant apparatus and a method of implanting ions

Collimator magnet for ion implantation system

Magnetic scanning system with improved efficiency

Post-decel magnetic energy filter for ion implantation systems

Particle optical device with magnet assembly

Electron beam device

Particle-optical arrangements and particle-optical systems

Prism array for electron beam inspection and defect review

Patents Applicationslast 30 patents

TECHNIQUES FOR ELECTRON ENERGY LOSS SPECTROSCOPY AT HIGH ENERGY

ION IMPLANT APPARATUS AND A METHOD OF IMPLANTING IONS

Ion Beam Bending Magnet for a Ribbon-Shaped Ion Beam

PHASE PLATE

Ion Implant Apparatus and a Method of Implanting Ions

Deflecting Device for Electron Beams, Magnetic Deflecting Unit for...

ELECTRON BEAM DEVICE WITH TILTING AND DISPERSION COMPENSATION, AND...

ELECTRON BEAM DEVICE WITH DISPERSION COMPENSATION, AND METHOD OF OP...

Magnetic Scanning System with Improved Efficiency

PARTICLE OPTICAL DEVICE WITH MAGNET ASSEMBLY

COLLIMATOR MAGNET FOR ION IMPLANTATION SYSTEM

POST-DECEL MAGNETIC ENERGY FILTER FOR ION IMPLANTATION SYSTEMS

ELECTRON BEAM DEVICE

Delivery of a Charged Particle Beam

Particle-optical arrangements and particle-optical systems