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Process specially adapted to improve the resolution of the mask
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ELECTRICITY
H01
Electric elements
H01L
SEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
H01L21/00
Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
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H01L21/0338
Process specially adapted to improve the resolution of the mask
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Patents Grants
last 30 patents
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Patent Grant
Pitch reduction technology using alternating spacer depositions dur...
Patent number
11,935,756
Issue date
Mar 19, 2024
Baosuo Zhou
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor patterning and resulting structures
Patent number
11,929,254
Issue date
Mar 12, 2024
Taiwan Semiconductor Manufacturing Co., Ltd
Chun-Ming Lung
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of high-density pattern forming
Patent number
11,929,255
Issue date
Mar 12, 2024
CHANGXIN MEMORY TECHNOLOGIES, INC.
Chen En Wu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Methods of forming nanostructures utilizing self-assembled nucleic...
Patent number
11,923,197
Issue date
Mar 5, 2024
Micron Technology, Inc.
Gurtej S. Sandhu
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method and structure of middle layer removal
Patent number
11,923,199
Issue date
Mar 5, 2024
Taiwan Semiconductor Manufacturing Company, Ltd
Nai-Chia Chen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma etching of mask materials
Patent number
11,915,932
Issue date
Feb 27, 2024
Applied Materials, Inc.
Toi Yue Becky Leung
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Manufacturing method of semiconductor structure
Patent number
11,915,933
Issue date
Feb 27, 2024
CHANGXIN MEMORY TECHNOLOGIES, INC.
Qiang Wan
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for preparing semiconductor device structure with lining layer
Patent number
11,908,693
Issue date
Feb 20, 2024
NANYA TECHNOLOGY CORPORATION
Ping Hsu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor fabrication method and structure using multiple sacri...
Patent number
11,894,231
Issue date
Feb 6, 2024
Semiconductor Manufacturing International (Shanghai) Corporation
Haiyang Zhang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of fabricating semiconductor device with reduced trench dist...
Patent number
11,894,238
Issue date
Feb 6, 2024
Taiwan Semiconductor Manufacturing Company, Ltd
Yung-Sung Yen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Deposition tool and method for depositing metal oxide films on orga...
Patent number
11,887,846
Issue date
Jan 30, 2024
Lam Research Corporation
Akhil Singhal
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Semiconductor device and method of fabricating the same
Patent number
11,887,977
Issue date
Jan 30, 2024
Fujian Jinhua Integrated Circuit Co., Ltd.
Yifei Yan
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Film deposition apparatus for fine pattern forming
Patent number
11,881,379
Issue date
Jan 23, 2024
Tokyo Electron Limited
Kazuhide Hasebe
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Selective deposition of etch-stop layer for enhanced patterning
Patent number
11,869,770
Issue date
Jan 9, 2024
Lam Research Corporation
Nagraj Shankar
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method for manufacturing three-dimensional semiconductor device
Patent number
11,862,464
Issue date
Jan 2, 2024
Unisantis Electronics Singapore Pte. Ltd.
Fujio Masuoka
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Fine line patterning methods
Patent number
11,862,465
Issue date
Jan 2, 2024
Taiwan Semiconductor Manufacturing Company, Ltd
Shih-Chun Huang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Line-end extension method and device
Patent number
11,854,807
Issue date
Dec 26, 2023
Taiwan Semiconductor Manufacturing Co., Ltd
Chih-Min Hsiao
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Photo mask and lithography method using the same
Patent number
11,854,808
Issue date
Dec 26, 2023
Taiwan Semiconductor Manufacturing Company, Ltd
Bao-Chin Li
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for pattern reduction using a staircase spacer
Patent number
11,854,806
Issue date
Dec 26, 2023
Tokyo Electron Limited
Daniel Fulford
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor structure and method of forming the same
Patent number
11,848,210
Issue date
Dec 19, 2023
Winbond Electronics Corp.
Chih-Yu Chiang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Patterning semiconductor devices and structures resulting therefrom
Patent number
11,848,209
Issue date
Dec 19, 2023
Taiwan Semiconductor Manufacturing Co., Ltd
Chun-Yu Kao
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Methods of patterning small features
Patent number
11,837,471
Issue date
Dec 5, 2023
Tokyo Electron Limited
Katie Lutker-Lee
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor device and method of fabricating the same
Patent number
11,830,737
Issue date
Nov 28, 2023
Samsung Electronics Co., Ltd.
Hanhum Park
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for manufacturing static random access memory device
Patent number
11,832,431
Issue date
Nov 28, 2023
Taiwan Semiconductor Manufacturing Company, Ltd
Jhon Jhy Liaw
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Pattern forming method and method for manufacturing semiconductor d...
Patent number
11,798,806
Issue date
Oct 24, 2023
Kioxia Corporation
Yusuke Kasahara
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for pattern reduction using a staircase spacer
Patent number
11,776,812
Issue date
Oct 3, 2023
Tokyo Electron Limited
Daniel Fulford
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Dry non-plasma treatment system
Patent number
11,745,202
Issue date
Sep 5, 2023
Tokyo Electron Limited
Martin Kent
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Workpiece processing method
Patent number
11,735,423
Issue date
Aug 22, 2023
Tokyo Electron Limited
Masahiro Tabata
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Ultra-high modulus and etch selectivity boron-carbon hardmask films
Patent number
11,728,168
Issue date
Aug 15, 2023
Applied Materials, Inc.
Prashant Kumar Kulshreshtha
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Lithography method to reduce spacing between interconnect wires in...
Patent number
11,728,209
Issue date
Aug 15, 2023
Taiwan Semiconductor Manufacturing Company, Ltd
Yi-Nien Su
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
METHOD OF MANUFACTURING MEMORY DEVICE USING SELF-ALIGNED DOUBLE PAT...
Publication number
20240136185
Publication date
Apr 25, 2024
NANYA TECHNOLOGY CORPORATION
Chih-Ching LIN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF MANUFACTURING MEMORY DEVICE USING SELF-ALIGNED DOUBLE PAT...
Publication number
20240136186
Publication date
Apr 25, 2024
NANYA TECHNOLOGY CORPORATION
Chih-Ching LIN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF FABRICATING SEMICONDUCTOR DEVICE
Publication number
20240120329
Publication date
Apr 11, 2024
Fujian Jinhua Integrated Circuit Co., Ltd.
Yifei Yan
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
FILM DEPOSITION APPARATUS FOR FINE PATTERN FORMING
Publication number
20240096595
Publication date
Mar 21, 2024
TOKYO ELECTRON LIMITED
Kazuhide HASEBE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PHOTO MASK AND LITHOGRAPHY METHOD USING THE SAME
Publication number
20240096628
Publication date
Mar 21, 2024
Taiwan Semiconductor Manufacturing Company, Ltd.
Bao-Chin LI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHODS FOR FORMING MANDRELS AND SPACERS, RELATED STRUCTURES, AND S...
Publication number
20240087893
Publication date
Mar 14, 2024
ASM IP HOLDING, B.V.
Daniele Piumi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
LINE-END EXTENSION METHOD AND DEVICE
Publication number
20240087896
Publication date
Mar 14, 2024
Taiwan Semiconductor Manufacturing Co., Ltd.
Chih-Min HSIAO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Patterning a Semiconductor Substrate
Publication number
20240063019
Publication date
Feb 22, 2024
TOKYO ELECTRON LIMITED
Alexandra Krawicz
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Patterning Semiconductor Devices and Structures Resulting Therefrom
Publication number
20240063020
Publication date
Feb 22, 2024
Taiwan Semiconductor Manufacturing Co., Ltd.
Chun-Yu Kao
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR DEVICE, SEMICONDUCTOR STRUCTURE AND METHOD FOR FABRIC...
Publication number
20240047217
Publication date
Feb 8, 2024
NANYA TECHNOLOGY CORPORATION
HUAN-YUNG YEH
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CARBON HARDMASK OPENING USING BORON NITRIDE MASK
Publication number
20240014039
Publication date
Jan 11, 2024
Applied Materials, Inc.
Jeong Hwan Kim
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR STRUCTURE
Publication number
20240006178
Publication date
Jan 4, 2024
WINBOND ELECTRONICS CORP.
Pei-Hsiu Peng
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR FORMING PATTERNED MASK LAYER
Publication number
20230352303
Publication date
Nov 2, 2023
Taiwan Semiconductor Manufacturing Company, Ltd.
Yu-Chen CHANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
LITHOGRAPHY METHOD TO REDUCE SPACING BETWEEN INTERCONNECT WIRES IN...
Publication number
20230335433
Publication date
Oct 19, 2023
Taiwan Semiconductor Manufacturing Company, Ltd.
Yi-Nien Su
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR DEVICE, SEMICONDUCTOR STRUCTURE AND METHOD FOR FABRIC...
Publication number
20230335408
Publication date
Oct 19, 2023
NANYA TECHNOLOGY CORPORATION
HUAN-YUNG YEH
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Patterning Features with Metal Based Resists
Publication number
20230326755
Publication date
Oct 12, 2023
TOKYO ELECTRON LIMITED
Katie Lutker-Lee
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE
Publication number
20230317454
Publication date
Oct 5, 2023
SK HYNIX INC.
Ji Hoon KIM
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ULTRA-HIGH MODULUS AND ETCH SELECTIVITY BORON-CARBON HARDMASK FILMS
Publication number
20230317455
Publication date
Oct 5, 2023
Applied Materials, Inc.
Prashant Kumar KULSHRESHTHA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
COMPOSITION FOR FORMING SILICON-CONTAINING METAL HARD MASK AND PATT...
Publication number
20230305405
Publication date
Sep 28, 2023
Shin-Etsu Chemical Co., Ltd.
Naoki KOBAYASHI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR DEVICE AND METHOD OF FABRICATING THE SAME
Publication number
20230307435
Publication date
Sep 28, 2023
Fujian Jinhua Integrated Circuit Co., Ltd.
Yifei Yan
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD TO FORM NARROW SLOT CONTACTS
Publication number
20230274940
Publication date
Aug 31, 2023
TOKYO ELECTRON LIMITED
Michael MURPHY
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHODS FOR PREPARING SMALL FEATURES ON A SUBSTRATE
Publication number
20230253206
Publication date
Aug 10, 2023
Applied Materials, Inc.
Yongan XU
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Pitch Scaling in Microfabrication
Publication number
20230245890
Publication date
Aug 3, 2023
TOKYO ELECTRON LIMITED
Katie Lutker-Lee
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR STRUCTURE AND METHOD OF FORMING THE SAME
Publication number
20230230837
Publication date
Jul 20, 2023
WINBOND ELECTRONICS CORP.
Chih-Yu Chiang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SELF ALIGNED LITHO ETCH PROCESS PATTERNING METHOD
Publication number
20230230836
Publication date
Jul 20, 2023
Taiwan Semiconductor Manufacturing Company, Ltd.
Chih-Min HSIAO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MATERIAL FOR FORMING ORGANIC FILM, SUBSTRATE FOR MANUFACTURING SEMI...
Publication number
20230161258
Publication date
May 25, 2023
Shin-Etsu Chemical Co., Ltd.
Keisuke NIIDA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
FABRICATION TECHNIQUE FOR FORMING ULTRA-HIGH DENSITY INTEGRATED CIR...
Publication number
20230154751
Publication date
May 18, 2023
Synopsys, Inc.
XI-WEI LIN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
THREE DIMENSIONAL (3D) MEMORY DEVICE AND FABRICATION METHOD USING S...
Publication number
20230133691
Publication date
May 4, 2023
Yangtze Memory Technologies Co., Ltd.
Jin PENG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SELF-ALIGNED DOUBLE PATTERNING (SADP) INTEGRATION WITH WIDE LINE SP...
Publication number
20230136674
Publication date
May 4, 2023
International Business Machines Corporation
Shyng-Tsong Chen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Semiconductor Patterning and Resulting Structures
Publication number
20230108424
Publication date
Apr 6, 2023
Taiwan Semiconductor Manufacturing Co., Ltd.
Chun-Ming Lung
H01 - BASIC ELECTRIC ELEMENTS