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ELECTRICITY
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Electric elements
H01J
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
H01J2237/00
Discharge tubes exposing object to beam
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H01J2237/31
Processing objects on a macro-scale
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Patents Grants
last 30 patents
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Patent Grant
Linear accelerator coil including multiple fluid channels
Patent number
11,985,756
Issue date
May 14, 2024
Applied Materials, Inc.
Robert B. Vopat
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Methods and structures for semiconductor device testing
Patent number
11,982,709
Issue date
May 14, 2024
Yangtze Memory Technologies Co., Ltd.
Lin Qi
G01 - MEASURING TESTING
Information
Patent Grant
Analysis device, analysis method, and storage medium
Patent number
11,977,009
Issue date
May 7, 2024
Honda Motor Co., Ltd.
Atsushi Sakurai
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Systems and methods for performing sample lift-out for highly react...
Patent number
11,972,923
Issue date
Apr 30, 2024
FEI Company
Christopher Thompson
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Beam grid layout
Patent number
RE49952
Issue date
Apr 30, 2024
ASML Netherlands B.V.
Vincent Sylvester Kuiper
Information
Patent Grant
Multiple electron-beam image acquisition apparatus and multiple ele...
Patent number
11,961,703
Issue date
Apr 16, 2024
NuFlare Technology, Inc.
Chosaku Noda
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Grid structures of ion beam etching (IBE) systems
Patent number
11,961,706
Issue date
Apr 16, 2024
Taiwan Semiconductor Manufacturing Company, Ltd
Chansyun David Yang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle beam writing apparatus, charged particle beam writ...
Patent number
11,961,708
Issue date
Apr 16, 2024
NuFlare Technology, Inc.
Haruyuki Nomura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Transmission charged particle microscope with an electron energy lo...
Patent number
11,955,310
Issue date
Apr 9, 2024
FEI Company
Peter Christiaan Tiemeijer
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and device for preparing a microscopic sample from a volume...
Patent number
11,935,723
Issue date
Mar 19, 2024
Carl Zeiss Microscopy GmbH
Fabian Perez Willard
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus and method for metal contamination control in an ion impl...
Patent number
11,923,169
Issue date
Mar 5, 2024
Axcelis Technologies, Inc.
Causon Ko-Chuan Jen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Microscopy imaging method for 3D tomography with predictive drift t...
Patent number
11,923,168
Issue date
Mar 5, 2024
FIBICS INCORPORATED
Michael William Phaneuf
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Electron beam installation and method for working powdered material
Patent number
11,911,838
Issue date
Feb 27, 2024
pro-beam GmbH & Co. KGaA
Björn Hansen
B22 - CASTING POWDER METALLURGY
Information
Patent Grant
Ion beam implantation method and semiconductor device
Patent number
11,908,694
Issue date
Feb 20, 2024
Infineon Technologies AG
Moriz Jelinek
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and device for the surface treatment of substrates
Patent number
11,901,172
Issue date
Feb 13, 2024
EV Group E. Thallner GmbH
Nasser Razek
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Massive overlay metrology sampling with multiple measurement columns
Patent number
11,899,375
Issue date
Feb 13, 2024
KLA Corporation
Jonathan Madsen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Proximity effect correction in electron beam lithography
Patent number
11,899,373
Issue date
Feb 13, 2024
Taiwan Semiconductor Manufacturing Company, Ltd
Wen Lo
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of preparing and analyzing thin films
Patent number
11,894,216
Issue date
Feb 6, 2024
Yangtze Memory Technologies Co., Ltd.
Jing Liu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Textured surfaces for breast implants
Patent number
11,890,179
Issue date
Feb 6, 2024
Establishment Labs S.A.
Ardeshir Bayat
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Reduced charging by low negative voltage in FIB systems
Patent number
11,887,810
Issue date
Jan 30, 2024
Applied Materials Israel Ltd.
Yehuda Zur
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Angle control for neutral reactive species generated in a plasma
Patent number
11,881,378
Issue date
Jan 23, 2024
Applied Materials, Inc.
Glen F. R. Gilchrist
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and systems useful for producing aluminum ions
Patent number
11,881,376
Issue date
Jan 23, 2024
Entegris, Inc.
Ying Tang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Multi-beam writing method and multi-beam writing apparatus
Patent number
11,869,746
Issue date
Jan 9, 2024
NuFlare Technology, Inc.
Hiroshi Matsumoto
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Pattern formation method and template manufacturing method
Patent number
11,862,430
Issue date
Jan 2, 2024
Kioxia Corporation
Ryota Seki
B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information
Patent Grant
Method for measuring a sample and microscope implementing the method
Patent number
11,848,172
Issue date
Dec 19, 2023
Carl Zeiss SMT GmbH
Dmitry Klochkov
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Energy filter element for ion implantation systems for the use in t...
Patent number
11,837,430
Issue date
Dec 5, 2023
MI2-FACTORY GMBH
Florian Krippendorf
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Ion implanter and model generation method
Patent number
11,823,863
Issue date
Nov 21, 2023
SUMITOMO HEAVY INDUSTRIES ION TECHNOLOGY CO, LTD.
Kazuhisa Ishibashi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Methods for directed irradiation synthesis with ion and thermal beams
Patent number
11,814,720
Issue date
Nov 14, 2023
Purdue Research Foundation
Jean Paul Allain
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Depositive shielding for fiducial protection from redeposition
Patent number
11,817,395
Issue date
Nov 14, 2023
FEI Company
Sean Morgan-Jones
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method of material deposition
Patent number
11,798,804
Issue date
Oct 24, 2023
FEI Company
Brian Roberts Routh
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
Information
Patent Application
ION BEAM IMPLANTATION METHOD AND SEMICONDUCTOR DEVICE
Publication number
20240145247
Publication date
May 2, 2024
INFINEON TECHNOLOGIES AG
Moriz JELINEK
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD AND SYSTEMS USEFUL FOR PRODUCING ALUMINUM IONS
Publication number
20240136145
Publication date
Apr 25, 2024
Entegris, Inc.
Ying TANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR CREATING A SMOOTH DIAGONAL SURFACE USING A FOCUSED ION B...
Publication number
20240136150
Publication date
Apr 25, 2024
APPLIED MATERIALS ISRAEL LTD.
Yehuda Zur
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
A Method for the Simulation of an Energy-Filtered Ion Implantation...
Publication number
20240135066
Publication date
Apr 25, 2024
mi2-factory GmbH
Florian KRIPPENDORF
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
METHOD FOR PREPARING A MICROSCOPIC SAMPLE FOR FIB/SEM TOMOGRAPHY
Publication number
20240120175
Publication date
Apr 11, 2024
CARL ZEISS MICROSCOPY GMBH
Lorenz Lechner
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
HELICAL VOLTAGE STANDOFF
Publication number
20240112883
Publication date
Apr 4, 2024
Applied Materials, Inc.
Diana C. Gronski
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
DATA GENERATION APPARATUS, DATA GENERATION METHOD, AND COMPUTER-REA...
Publication number
20240105420
Publication date
Mar 28, 2024
KIOXIA Corporation
Katsuyoshi KODERA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ALTERING OPERATIONAL CHARACTERISTICS OF A SEMICONDUCTOR DEVICE USIN...
Publication number
20240105419
Publication date
Mar 28, 2024
Intel Corporation
Shida TAN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ENHANCED DEPOSITION RATE BY APPLYING A NEGATIVE VOLTAGE TO A GAS IN...
Publication number
20240105421
Publication date
Mar 28, 2024
APPLIED MATERIALS ISRAEL LTD.
Yehuda Zur
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
ELECTRON BEAM WRITING APPARATUS AND ELECTRON BEAM WRITING METHOD
Publication number
20240087845
Publication date
Mar 14, 2024
NuFlare Technology, Inc.
Haruyuki NOMURA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD AND SYSTEM FOR PREPARING A SPECIMEN
Publication number
20240071720
Publication date
Feb 29, 2024
FEI Company
Jamie Dee Gravell
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Focused Ion Beam Apparatus
Publication number
20240071718
Publication date
Feb 29, 2024
JEOL Ltd.
Yusuke Kagaya
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Application Management For Charged Particle Microscope Devices
Publication number
20240071717
Publication date
Feb 29, 2024
FEI Company
Pavel Potocek
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
DEVICE FOR IMAGING AND PROCESSING A SAMPLE USING A FOCUSED PARTICLE...
Publication number
20240062989
Publication date
Feb 22, 2024
Carl Zeiss SMT GMBH
Daniel Schwarz
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Charged Particle Beam Device
Publication number
20240055220
Publication date
Feb 15, 2024
Hitachi High-Tech Corporation
Yuka II
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ENERGY FILTER ELEMENT FOR ION IMPLANTATION SYSTEMS FOR THE USE IN T...
Publication number
20240055217
Publication date
Feb 15, 2024
mi2-factory GmbH
Florian KRIPPENDORF
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD AND APPARATUS FOR PREPARING SAMPLES FOR IMAGING
Publication number
20240038486
Publication date
Feb 1, 2024
Taiwan Semiconductor Manufacturing Company, Ltd.
Yu-Ching Chiu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF PROCESSING A SAMPLE, PARTICLE BEAM SYSTEM, AND COMPUTER P...
Publication number
20240029996
Publication date
Jan 25, 2024
CARL ZEISS MICROSCOPY GMBH
Andreas Schmaunz
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD AND SYSTEM FOR DETERMINING A CHARGED PARTICLE BEAM EXPOSURE...
Publication number
20230386784
Publication date
Nov 30, 2023
D2S, INC.
Akira Fujimura
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
GA IMPLANT PROCESS CONTROL FOR ENHANCED PARTICLE PERFORMANCE
Publication number
20230386786
Publication date
Nov 30, 2023
Applied Materials, Inc.
Frank Sinclair
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PROXIMITY EFFECT CORRECTION IN ELECTRON BEAM LITHOGRAPHY
Publication number
20230375941
Publication date
Nov 23, 2023
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
Wen Lo
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHODS AND STRUCTURES FOR SEMICONDUCTOR DEVICE TESTING
Publication number
20230375616
Publication date
Nov 23, 2023
Yangtze Memory Technologies Co., Ltd.
Lin QI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SYSTEMS AND METHODS FOR PRE-ALIGNING SAMPLES FOR MORE EFFICIENT PRO...
Publication number
20230377834
Publication date
Nov 23, 2023
FEI Company
Michal HROUZEK
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ANGLE CONTROL FOR NEUTRAL REACTIVE SPECIES GENERATED IN A PLASMA
Publication number
20230369013
Publication date
Nov 16, 2023
Applied Materials, Inc.
Glen F. R. Gilchrist
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
COVERAGE CALCULATING METHOD, CHARGED PARTICLE BEAM WRITING METHOD,...
Publication number
20230369015
Publication date
Nov 16, 2023
NuFlare Technology, Inc.
Kenichi YASUI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Multi-Beam Pattern Definition Device
Publication number
20230360880
Publication date
Nov 9, 2023
IMS Nanofabrication GmbH
Stefan Eder-Kapl
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR CROSS-SECTION SAMPLE PREPARATION
Publication number
20230358696
Publication date
Nov 9, 2023
Fibics Incorporated
Michael William PHANEUF
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MASSIVE OVERLAY METROLOGY SAMPLING WITH MULTIPLE MEASUREMENT COLUMNS
Publication number
20230359129
Publication date
Nov 9, 2023
Jonathan Madsen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
REDUCED CHARGING BY LOW NEGATIVE VOLTAGE IN FIB SYSTEMS
Publication number
20230343545
Publication date
Oct 26, 2023
APPLIED MATERIALS ISRAEL LTD.
Yehuda Zur
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
DEVICE AND METHOD FOR PREPARING MICROSCOPIC SAMPLES
Publication number
20230343546
Publication date
Oct 26, 2023
CARL ZEISS MICROSCOPY GMBH
Michele Nicoletti
H01 - BASIC ELECTRIC ELEMENTS