producing ion implantation

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CPC
H01L21/425

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Parent Industries

HELECTRICITY H01Electric elements H01LSEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Current Industry

H01L21/425producing ion implantation

Industries

Patents Grantslast 30 patents

Information Patent Grant
Method for manufacturing semiconductor device
- Patent number 12,136,654
- Issue date Nov 5, 2024
- Denso Corporation
- Hiroki Miyake
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device, method for manufacturing semiconductor device...
- Patent number 12,087,866
- Issue date Sep 10, 2024
- Semiconductor Energy Laboratory Co., Ltd.
- Kosei Noda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Manufacturing method of semiconductor device
- Patent number 12,027,377
- Issue date Jul 2, 2024
- Denso Corporation
- Shuhei Ichikawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ferroelectric memory device and method of forming the same
- Patent number 11,950,427
- Issue date Apr 2, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Chun-Chieh Lu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device and display device including the same
- Patent number 11,862,454
- Issue date Jan 2, 2024
- Semiconductor Energy Laboratory Co., Ltd.
- Shunpei Yamazaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for manufacturing semiconductor device having gallium oxide-...
- Patent number 11,862,477
- Issue date Jan 2, 2024
- Denso Corporation
- Shuhei Ichikawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Transistors with enhanced dopant profile and methods for forming th...
- Patent number 11,837,667
- Issue date Dec 5, 2023
- Taiwan Semiconductor Manufacturing Company Limited
- Min-Kun Dai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device and method for manufacturing the same
- Patent number 11,757,009
- Issue date Sep 12, 2023
- Denso Corporation
- Hiroki Miyake
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device and method for manufacturing the same
- Patent number 11,631,756
- Issue date Apr 18, 2023
- Semiconductor Energy Laboratory Co., Ltd.
- Yuta Endo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ferroelectric memory device and method of forming the same
- Patent number 11,515,332
- Issue date Nov 29, 2022
- Taiwan Semiconductor Manufacturing Company, Ltd
- Chun-Chieh Lu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Leakage-free implantation-free ETSOI transistors
- Patent number 11,502,171
- Issue date Nov 15, 2022
- International Business Machines Corporation
- Joel P. de Souza
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electrostatic filter providing reduced particle generation
- Patent number 11,437,215
- Issue date Sep 6, 2022
- Applied Materials, Inc.
- Alexandre Likhanskii
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Oxygen vacancy of amorphous indium gallium zinc oxide passivation b...
- Patent number 11,430,898
- Issue date Aug 30, 2022
- Applied Materials, Inc.
- Jose-Ignacio Del-Agua-Borniquel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Transistors with enhanced dopant profile and methods for forming th...
- Patent number 11,404,586
- Issue date Aug 2, 2022
- Taiwan Semiconductor Manufacturing Company Limited
- Min-Kun Dai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Implanting method and apparatus
- Patent number 11,340,530
- Issue date May 24, 2022
- XIA TAI XIN SEMICONDUCTOR (QING DAO) LTD.
- Jong-Moo Choi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Process and structure for a superjunction device
- Patent number 11,316,042
- Issue date Apr 26, 2022
- Power Integrations, Inc.
- Alexei Ankoudinov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Thin film transistor with selectively doped oxide thin film
- Patent number 11,257,956
- Issue date Feb 22, 2022
- Intel Corporation
- Abhishek A. Sharma
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device and display device including the same
- Patent number 11,158,745
- Issue date Oct 26, 2021
- Semiconductor Energy Laboratory Co., Ltd.
- Shunpei Yamazaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Structure and a manufacturing method of a MOSFET with an element of...
- Patent number 11,121,235
- Issue date Sep 14, 2021
- National Tsing Hua University
- Chih-Fang Huang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods for film modification
- Patent number 11,049,731
- Issue date Jun 29, 2021
- Applied Materials, Inc.
- Erica Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Devices and systems with string drivers including high band gap mat...
- Patent number 11,018,255
- Issue date May 25, 2021
- Micron Technology, Inc.
- Haitao Liu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for producing composite wafer having oxide single-crystal film
- Patent number 10,971,674
- Issue date Apr 6, 2021
- Shin-Etsu Chemical Co., Ltd.
- Shoji Akiyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Leakage-free implantation-free ETSOI transistors
- Patent number 10,937,864
- Issue date Mar 2, 2021
- International Business Machines Corporation
- Joel P. de Souza
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Oxide semiconductor device and method for manufacturing same
- Patent number 10,896,978
- Issue date Jan 19, 2021
- V Technology Co., Ltd.
- Tetsuya Goto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for doping layer, thin film transistor and method for fabric...
- Patent number 10,886,144
- Issue date Jan 5, 2021
- ORDOS YUANSHENG OPTOELECTRONICS CO., LTD.
- Xuewei Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device and method for manufacturing the same
- Patent number 10,872,982
- Issue date Dec 22, 2020
- Semiconductor Energy Laboratory Co., Ltd.
- Shinji Ohno
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device and method for manufacturing the same
- Patent number 10,811,522
- Issue date Oct 20, 2020
- Semiconductor Energy Laboratory Co., Ltd.
- Yuta Endo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Leakage-free implantation-free ETSOI transistors
- Patent number 10,651,273
- Issue date May 12, 2020
- International Business Machines Corporation
- Joel P. de Souza
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for manufacturing composite wafer provided with oxide single...
- Patent number 10,629,440
- Issue date Apr 21, 2020
- Shin-Etsu Chemical Co., Ltd.
- Shoji Akiyama
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Varied component density for thermal isolation
- Patent number 10,535,499
- Issue date Jan 14, 2020
- Varian Semiconductor Equipment Associates, Inc.
- Adam M. McLaughlin
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
PROCESS FOR PRODUCING ROLLS AND MEMBRANES OF SUBMICROMETRIC THICKNE...
- Publication number 20240304460
- Publication date Sep 12, 2024
- INSTITUTO SUPERIOR TECNICO
- Katharina LORENZ
- C30 - CRYSTAL GROWTH
Information Patent Application
FERROELECTRIC MEMORY DEVICE AND METHOD OF FORMING THE SAME
- Publication number 20240206185
- Publication date Jun 20, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chun-Chieh Lu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE AND DISPLAY DEVICE INCLUDING THE SAME
- Publication number 20240154041
- Publication date May 9, 2024
- Semiconductor Energy Laboratory Co., Ltd.
- Shunpei YAMAZAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE
- Publication number 20240113228
- Publication date Apr 4, 2024
- Japan Display Inc.
- Hajime WATAKABE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VERTICAL GALLIUM OXIDE TRANSISTOR AND PREPARATION METHOD THEREOF
- Publication number 20240079477
- Publication date Mar 7, 2024
- UNIVERSITY OF SCIENCE AND TECHNOLOGY OF CHINA
- Xuanze ZHOU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE, METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE...
- Publication number 20240047583
- Publication date Feb 8, 2024
- Semiconductor Energy Laboratory Co., Ltd.
- Kosei NODA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR MANUFACTURING SEMICONDUCTOR STRUCTURE WITH THIN FILM TRA...
- Publication number 20240038893
- Publication date Feb 1, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Marcus Johannes Henricus VAN DAL
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE
- Publication number 20240021695
- Publication date Jan 18, 2024
- Japan Display Inc.
- Hajime WATAKABE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
THREE-DIMENSIONAL NAND MEMORY DEVICE AND FABRICATION METHOD
- Publication number 20240015973
- Publication date Jan 11, 2024
- Yangtze Memory Technologies Co., Ltd.
- Longxiang YAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE
- Publication number 20230369417
- Publication date Nov 16, 2023
- DENSO CORPORATION
- Hiroki MIYAKE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SELF-FILLING SPACER STRUCTURE
- Publication number 20230178633
- Publication date Jun 8, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Kaochao Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Doped Aluminum-Alloyed Gallium Oxide And Ohmic Contacts
- Publication number 20230074175
- Publication date Mar 9, 2023
- The Regents of the University of Michigan
- Rebecca L. PETERSON
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
- Publication number 20230014283
- Publication date Jan 19, 2023
- Toyota Jidosha Kabushiki Kaisha
- Katsunori DANNO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR STRUCTURE WITH THIN FILM TRANSISTOR AND METHOD FOR MA...
- Publication number 20220393033
- Publication date Dec 8, 2022
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Marcus Johannes Henricus VAN DAL
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FERROELECTRIC MEMORY DEVICE AND METHOD OF FORMING THE SAME
- Publication number 20220359570
- Publication date Nov 10, 2022
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chun-Chieh Lu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE
- Publication number 20220359575
- Publication date Nov 10, 2022
- Semiconductor Energy Laboratory Co., Ltd.
- Masashi OOTA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TRANSISTORS WITH ENHANCED DOPANT PROFILE AND METHODS FOR FORMING TH...
- Publication number 20220336671
- Publication date Oct 20, 2022
- Taiwan Semiconductor Manufacturing Company Limited
- Min-Kun Dai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Semiconductor Devices Including Backside Power Rails and Methods of...
- Publication number 20220310785
- Publication date Sep 29, 2022
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chun-Hung Wu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, METHOD OF MANUFACTURI...
- Publication number 20220285170
- Publication date Sep 8, 2022
- KIOXIA Corporation
- Junichi HASHIMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Transistors with Enhanced Dopant Profile and Methods for Forming th...
- Publication number 20220254930
- Publication date Aug 11, 2022
- Taiwan Semiconductor Manufacturing Company Limited
- Min-Kun DAI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE
- Publication number 20220246474
- Publication date Aug 4, 2022
- DENSO CORPORATION
- Hiroki MIYAKE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE HAVING GALLIUM OXIDE-...
- Publication number 20220230890
- Publication date Jul 21, 2022
- DENSO CORPORATION
- Shuhei ICHIKAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE
- Publication number 20220189787
- Publication date Jun 16, 2022
- DENSO CORPORATION
- Shuhei ICHIKAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME
- Publication number 20220093748
- Publication date Mar 24, 2022
- DENSO CORPORATION
- Hiroki MIYAKE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE AND SEMICONDUCTOR DEVICE
- Publication number 20220085208
- Publication date Mar 17, 2022
- Kabushiki Kaisha Toshiba
- Kohei OASA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FERROELECTRIC MEMORY DEVICE AND METHOD OF FORMING THE SAME
- Publication number 20210375930
- Publication date Dec 2, 2021
- Taiwan Semiconductor Manufacturing Co., LTD
- Chun-Chieh Lu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE AND DISPLAY DEVICE INCLUDING THE SAME
- Publication number 20210343870
- Publication date Nov 4, 2021
- Semiconductor Energy Laboratory Co., Ltd.
- Shunpei YAMAZAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
OXYGEN VACANCY OF AMORPHOUS INDIUM GALLIUM ZINC OXIDE PASSIVATION B...
- Publication number 20210288186
- Publication date Sep 16, 2021
- Applied Materials, Inc.
- Jose-Ignacio Del-Agua-Borniquel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEVICES AND SYSTEMS WITH STRING DRIVERS INCLUDING HIGH BAND GAP MAT...
- Publication number 20210265499
- Publication date Aug 26, 2021
- Micron Technology, Inc.
- Haitao Liu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROCESS AND STRUCTURE FOR A SUPERJUNCTION DEVICE
- Publication number 20210242338
- Publication date Aug 5, 2021
- Power Integrations, Inc.
- Alexei Ankoudinov
- H01 - BASIC ELECTRIC ELEMENTS

producing ion implantation

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Method for manufacturing semiconductor device

Semiconductor device, method for manufacturing semiconductor device...

Manufacturing method of semiconductor device

Ferroelectric memory device and method of forming the same

Semiconductor device and display device including the same

Method for manufacturing semiconductor device having gallium oxide-...

Transistors with enhanced dopant profile and methods for forming th...

Semiconductor device and method for manufacturing the same

Semiconductor device and method for manufacturing the same

Ferroelectric memory device and method of forming the same

Leakage-free implantation-free ETSOI transistors

Electrostatic filter providing reduced particle generation

Oxygen vacancy of amorphous indium gallium zinc oxide passivation b...

Transistors with enhanced dopant profile and methods for forming th...

Implanting method and apparatus

Process and structure for a superjunction device

Thin film transistor with selectively doped oxide thin film

Semiconductor device and display device including the same

Structure and a manufacturing method of a MOSFET with an element of...

Methods for film modification

Devices and systems with string drivers including high band gap mat...

Method for producing composite wafer having oxide single-crystal film

Leakage-free implantation-free ETSOI transistors

Oxide semiconductor device and method for manufacturing same

Method for doping layer, thin film transistor and method for fabric...

Semiconductor device and method for manufacturing the same

Semiconductor device and method for manufacturing the same

Leakage-free implantation-free ETSOI transistors

Method for manufacturing composite wafer provided with oxide single...

Varied component density for thermal isolation

Patents Applicationslast 30 patents

PROCESS FOR PRODUCING ROLLS AND MEMBRANES OF SUBMICROMETRIC THICKNE...

FERROELECTRIC MEMORY DEVICE AND METHOD OF FORMING THE SAME

SEMICONDUCTOR DEVICE AND DISPLAY DEVICE INCLUDING THE SAME

SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE

VERTICAL GALLIUM OXIDE TRANSISTOR AND PREPARATION METHOD THEREOF

SEMICONDUCTOR DEVICE, METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE...

METHOD FOR MANUFACTURING SEMICONDUCTOR STRUCTURE WITH THIN FILM TRA...

SEMICONDUCTOR DEVICE

THREE-DIMENSIONAL NAND MEMORY DEVICE AND FABRICATION METHOD

METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE

SELF-FILLING SPACER STRUCTURE

Doped Aluminum-Alloyed Gallium Oxide And Ohmic Contacts

SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE

SEMICONDUCTOR STRUCTURE WITH THIN FILM TRANSISTOR AND METHOD FOR MA...

FERROELECTRIC MEMORY DEVICE AND METHOD OF FORMING THE SAME

MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE

TRANSISTORS WITH ENHANCED DOPANT PROFILE AND METHODS FOR FORMING TH...

Semiconductor Devices Including Backside Power Rails and Methods of...

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, METHOD OF MANUFACTURI...

Transistors with Enhanced Dopant Profile and Methods for Forming th...

METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE

METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE HAVING GALLIUM OXIDE-...

MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE

SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME

METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE AND SEMICONDUCTOR DEVICE

FERROELECTRIC MEMORY DEVICE AND METHOD OF FORMING THE SAME

SEMICONDUCTOR DEVICE AND DISPLAY DEVICE INCLUDING THE SAME

OXYGEN VACANCY OF AMORPHOUS INDIUM GALLIUM ZINC OXIDE PASSIVATION B...

DEVICES AND SYSTEMS WITH STRING DRIVERS INCLUDING HIGH BAND GAP MAT...

PROCESS AND STRUCTURE FOR A SUPERJUNCTION DEVICE