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H01J37/3023

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HELECTRICITY H01Electric elements H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge

Current Industry

H01J37/3023Programme control

Industries

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Patents Grantslast 30 patents

Information Patent Grant
System and methods for automated processing of multiple samples in...
- Patent number 12,165,833
- Issue date Dec 10, 2024
- FEI Company
- Michal Hrouzek
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Particle beam system and the use thereof for flexibly setting the c...
- Patent number 12,119,204
- Issue date Oct 15, 2024
- Carl Zeiss MultiSEM GmbH
- Stefan Schubert
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion implanter and ion implantation method
- Patent number 12,094,685
- Issue date Sep 17, 2024
- Sumitomo Heavy Industries Ion Technology Co., Ltd.
- Taisei Futakuchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi-charged particle beam writing apparatus, and multi-charged pa...
- Patent number 12,087,543
- Issue date Sep 10, 2024
- NuFlare Technology, Inc.
- Hiroshi Matsumoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for operating a multiple particle beam system while altering...
- Patent number 12,057,290
- Issue date Aug 6, 2024
- Carl Zeiss MultiSEM GmbH
- Hans Fritz
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Analyzing a sidewall of hole milled in a sample to determine thickn...
- Patent number 12,033,831
- Issue date Jul 9, 2024
- Applied Materials Israel Ltd.
- Ilya Blayvas
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Particle beam apparatus, defect repair method, lithographic exposur...
- Patent number 11,996,267
- Issue date May 28, 2024
- ASML Netherlands B.V.
- Ruben Cornelis Maas
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Writing data generating method, multi charged particle beam writing...
- Patent number 11,774,860
- Issue date Oct 3, 2023
- NuFlare Technology, Inc.
- Kenichi Yasui
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi-charged particle beam writing apparatus, and multi-charged pa...
- Patent number 11,545,339
- Issue date Jan 3, 2023
- NuFlare Technology, Inc.
- Hiroshi Matsumoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi-charged particle beam writing apparatus, and multi-charged pa...
- Patent number 11,508,553
- Issue date Nov 22, 2022
- NuFlare Technology, Inc.
- Hiroshi Matsumoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion beam irradiation apparatus and program therefor
- Patent number 11,462,385
- Issue date Oct 4, 2022
- NISSIN ION EQUIPMENT CO., LTD.
- Shinya Takemura
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Controlling etch angles by substrate rotation in angled etch tools
- Patent number 11,397,289
- Issue date Jul 26, 2022
- Applied Materials, Inc.
- Rutger Meyer Timmerman Thijssen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Operating a particle beam generator for a particle beam device
- Patent number 11,380,519
- Issue date Jul 5, 2022
- Carl Zeiss Microscopy GmbH
- Dirk Preikszas
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Dose-based end-pointing for low-kV FIB milling in TEM sample prepar...
- Patent number 11,313,042
- Issue date Apr 26, 2022
- FEI Company
- Thomas G. Miller
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Exposure apparatus and exposure method, lithography method, and dev...
- Patent number 11,276,558
- Issue date Mar 15, 2022
- Nikon Corporation
- Yuichi Shibazaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Forming a vertical surface
- Patent number 11,276,557
- Issue date Mar 15, 2022
- Applied Materials Israel Ltd.
- Yehuda Zur
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Writing data generating method, multi charged particle beam writing...
- Patent number 11,199,781
- Issue date Dec 14, 2021
- NuFlare Technology, Inc.
- Kenichi Yasui
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion implantation method, ion implantation apparatus and semiconduct...
- Patent number 11,195,695
- Issue date Dec 7, 2021
- Infineon Technologies AG
- Moriz Jelinek
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Writing data generation method, computer-readable recording medium...
- Patent number 10,971,331
- Issue date Apr 6, 2021
- NuFlare Technology, Inc.
- Shinji Sakamoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron beam irradiation method, electron beam irradiation apparat...
- Patent number 10,950,413
- Issue date Mar 16, 2021
- NuFlare Technology, Inc.
- Noriaki Nakayamada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for changing a surface via particle irradiation
- Patent number 10,859,819
- Issue date Dec 8, 2020
- Carl Zeiss SMT GmbH
- Walter Pauls
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Charged particle beam steering arrangement
- Patent number 10,854,422
- Issue date Dec 1, 2020
- RELIANCE PRECISION LIMITED
- Nigel Crosland
- B22 - CASTING POWDER METALLURGY
Information Patent Grant
Automated TEM sample preparation
- Patent number 10,825,651
- Issue date Nov 3, 2020
- FEI Company
- Valerie Brogden
- G01 - MEASURING TESTING
Information Patent Grant
Multi charged particle beam writing method, and multi charged parti...
- Patent number 10,790,115
- Issue date Sep 29, 2020
- NuFlare Technology, Inc.
- Hiroshi Matsumoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Exposure apparatus and exposure method, lithography method, and dev...
- Patent number 10,658,157
- Issue date May 19, 2020
- Nikon Corporation
- Yuichi Shibazaki
- G02 - OPTICS
Information Patent Grant
System and method for improved scanned spot beam
- Patent number 10,658,156
- Issue date May 19, 2020
- Applied Materials, Inc.
- Stanislav S. Todorov
- G02 - OPTICS
Information Patent Grant
Method for operating a plurality of FIB-SEM systems
- Patent number 10,615,002
- Issue date Apr 7, 2020
- Carl Zeiss Microscopy GmbH
- Josef Biberger
- G01 - MEASURING TESTING
Information Patent Grant
Multiple charged particle beam writing apparatus, and multiple char...
- Patent number 10,607,812
- Issue date Mar 31, 2020
- NuFlare Technology, Inc.
- Hideo Inoue
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Three-dimensional layer-by-layer shaping apparatus, three-dimension...
- Patent number 10,566,171
- Issue date Feb 18, 2020
- TECHNOLOGY RESEARCH ASSOCIATION FOR FUTURE ADDITIVE MANUFACTURING
- Zhixiong Yuan
- B22 - CASTING POWDER METALLURGY
Information Patent Grant
Gray-tone electron-beam lithography
- Patent number 10,534,115
- Issue date Jan 14, 2020
- Facebook Technologies, LLC
- Giuseppe Calafiore
- G02 - OPTICS

Patents Applicationslast 30 patents

Information Patent Application
ION IMPLANTER AND ION IMPLANTATION METHOD
- Publication number 20240404785
- Publication date Dec 5, 2024
- Sumitomo Heavy Industries Ion Technology Co., Ltd.
- Taisei Futakuchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR OPERATING A MULTIPLE PARTICLE BEAM SYSTEM WHILE ALTERING...
- Publication number 20240347316
- Publication date Oct 17, 2024
- Carl Zeiss MultiSEM GmbH
- Hans Fritz
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS AND APPARATUSES FOR PROCESSING A LITHOGRAPHIC OBJECT
- Publication number 20240310722
- Publication date Sep 19, 2024
- Carl Zeiss SMT GMBH
- Michael Budach
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Optimizing Image Distortion in a Multi Beam Charged Particle Proces...
- Publication number 20240304413
- Publication date Sep 12, 2024
- IMS Nanofabrication GmbH
- Christoph Spengler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
OPERATING A PARTICLE BEAM APPARATUS
- Publication number 20240274397
- Publication date Aug 15, 2024
- CARL ZEISS MICROSCOPY GMBH
- Sebastian Schaedler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PARTIAL BREAKDOWN OF PRECURSORS FOR ENHANCED ALD FILM GROWTH
- Publication number 20240222110
- Publication date Jul 4, 2024
- ASM IP HOLDING B.V.
- Tommi Tynell
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR DETERMINING AMOUNT OF WEAR OF EDGE RING, PLASMA PROCESSI...
- Publication number 20240212979
- Publication date Jun 27, 2024
- TOKYO ELECTRON LIMITED
- Ikko TANAKA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM AND METHODS FOR AUTOMATED PROCESSING OF MULTIPLE SAMPLES IN...
- Publication number 20230377833
- Publication date Nov 23, 2023
- FEI Company
- Michal HROUZEK
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS AND METHOD FOR AUTOMATED GRID VALIDATION
- Publication number 20230093535
- Publication date Mar 23, 2023
- FEI Company
- Pavol KARLÍK
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR MANUFACTURING APPARATUS, SEMICONDUCTOR DEVICE AND MAN...
- Publication number 20230069666
- Publication date Mar 2, 2023
- KIOXIA Corporation
- Takayuki ITO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI-CHARGED PARTICLE BEAM WRITING APPARATUS, AND MULTI-CHARGED PA...
- Publication number 20230056463
- Publication date Feb 23, 2023
- NuFlare Technology, Inc.
- Hiroshi MATSUMOTO
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
ANALYZING A SIDEWALL OF HOLE MILLED IN A SAMPLE TO DETERMINE THICKN...
- Publication number 20230057148
- Publication date Feb 23, 2023
- APPLIED MATERIALS ISRAEL LTD.
- Ilya Blayvas
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CONTROLLING ETCH ANGLES BY SUBSTRATE ROTATION IN ANGLED ETCH TOOLS
- Publication number 20220260764
- Publication date Aug 18, 2022
- Applied Materials, Inc.
- Rutger MEYER TIMMERMAN THIJSSEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION IMPLANTER AND ION IMPLANTATION METHOD
- Publication number 20220238302
- Publication date Jul 28, 2022
- Sumitomo Heavy Industries Ion Technology Co., Ltd.
- Taisei Futakuchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR OPERATING A MULTIPLE PARTICLE BEAM SYSTEM WHILE ALTERING...
- Publication number 20220130640
- Publication date Apr 28, 2022
- Carl Zeiss MultiSEM GmbH
- Hans Fritz
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WRITING DATA GENERATING METHOD, MULTI CHARGED PARTICLE BEAM WRITING...
- Publication number 20220100099
- Publication date Mar 31, 2022
- NuFlare Technology, Inc.
- Kenichi YASUI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CONTROLLING ETCH ANGLES BY SUBSTRATE ROTATION IN ANGLED ETCH TOOLS
- Publication number 20210333450
- Publication date Oct 28, 2021
- Applied Materials, Inc.
- Rutger MEYER TIMMERMAN THIJSSEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PARTICLE BEAM APPARATUS, DEFECT REPAIR METHOD, LITHOGRAPHIC EXPOSUR...
- Publication number 20210327678
- Publication date Oct 21, 2021
- ASML NETHERLANDS B.V.
- Ruben Cornelis MAAS
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FORMING A VERTICAL SURFACE
- Publication number 20210082664
- Publication date Mar 18, 2021
- APPLIED MATERIALS ISRAEL LTD.
- Yehuda Zur
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION BEAM IRRADIATION APPARATUS AND PROGRAM THEREFOR
- Publication number 20200312616
- Publication date Oct 1, 2020
- NISSIN ION EQUIPMENT CO., LTD.
- Shinya TAKEMURA
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
EXPOSURE APPARATUS AND EXPOSURE METHOD, LITHOGRAPHY METHOD, AND DEV...
- Publication number 20200251306
- Publication date Aug 6, 2020
- Nikon Corporation
- Yuichi Shibazaki
- G02 - OPTICS
Information Patent Application
MULTI-CHARGED PARTICLE BEAM WRITING APPARATUS, AND MULTI-CHARGED PA...
- Publication number 20200135428
- Publication date Apr 30, 2020
- NuFlare Technology, Inc.
- Hiroshi MATSUMOTO
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
DOSE-BASED END-POINTING FOR LOW-KV FIB MILLING IN TEM SAMPLE PREPAR...
- Publication number 20200095688
- Publication date Mar 26, 2020
- FEI Company
- Thomas G. Miller
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
WRITING DATA GENERATION METHOD, COMPUTER-READABLE RECORDING MEDIUM...
- Publication number 20200051782
- Publication date Feb 13, 2020
- NuFlare Technology, Inc.
- Shinji SAKAMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR CHANGING A SURFACE VIA PARTICLE IRRADIATION
- Publication number 20200012091
- Publication date Jan 9, 2020
- Carl Zeiss SMT GMBH
- Walter Pauls
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
ELECTRON BEAM IRRADIATION METHOD, ELECTRON BEAM IRRADIATION APPARAT...
- Publication number 20190362937
- Publication date Nov 28, 2019
- NuFlare Technology, Inc.
- Noriaki NAKAYAMADA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
AUTOMATED TEM SAMPLE PREPARATION
- Publication number 20190272975
- Publication date Sep 5, 2019
- FEI Company
- Valerie Brogden
- G01 - MEASURING TESTING
Information Patent Application
CHARGED PARTICLE BEAM STEERING ARRANGEMENT
- Publication number 20190252152
- Publication date Aug 15, 2019
- RELIANCE PRECISION LIMITED
- Nigel CROSLAND
- B22 - CASTING POWDER METALLURGY
Information Patent Application
ELECTRON BEAM SOURCE AND THE USE OF THE SAME
- Publication number 20190193193
- Publication date Jun 27, 2019
- ARCAM AB
- Mattias Fager
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
MULTIPLE CHARGED PARTICLE BEAM WRITING APPARATUS, AND MULTIPLE CHAR...
- Publication number 20190198290
- Publication date Jun 27, 2019
- NuFlare Technology, Inc.
- Hideo INOUE
- H01 - BASIC ELECTRIC ELEMENTS

Programme control

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

System and methods for automated processing of multiple samples in...

Particle beam system and the use thereof for flexibly setting the c...

Ion implanter and ion implantation method

Multi-charged particle beam writing apparatus, and multi-charged pa...

Method for operating a multiple particle beam system while altering...

Analyzing a sidewall of hole milled in a sample to determine thickn...

Particle beam apparatus, defect repair method, lithographic exposur...

Writing data generating method, multi charged particle beam writing...

Multi-charged particle beam writing apparatus, and multi-charged pa...

Multi-charged particle beam writing apparatus, and multi-charged pa...

Ion beam irradiation apparatus and program therefor

Controlling etch angles by substrate rotation in angled etch tools

Operating a particle beam generator for a particle beam device

Dose-based end-pointing for low-kV FIB milling in TEM sample prepar...

Exposure apparatus and exposure method, lithography method, and dev...

Forming a vertical surface

Writing data generating method, multi charged particle beam writing...

Ion implantation method, ion implantation apparatus and semiconduct...

Writing data generation method, computer-readable recording medium...

Electron beam irradiation method, electron beam irradiation apparat...

Method for changing a surface via particle irradiation

Charged particle beam steering arrangement

Automated TEM sample preparation

Multi charged particle beam writing method, and multi charged parti...

Exposure apparatus and exposure method, lithography method, and dev...

System and method for improved scanned spot beam

Method for operating a plurality of FIB-SEM systems

Multiple charged particle beam writing apparatus, and multiple char...

Three-dimensional layer-by-layer shaping apparatus, three-dimension...

Gray-tone electron-beam lithography

Patents Applicationslast 30 patents

ION IMPLANTER AND ION IMPLANTATION METHOD

METHOD FOR OPERATING A MULTIPLE PARTICLE BEAM SYSTEM WHILE ALTERING...

METHODS AND APPARATUSES FOR PROCESSING A LITHOGRAPHIC OBJECT

Optimizing Image Distortion in a Multi Beam Charged Particle Proces...

OPERATING A PARTICLE BEAM APPARATUS

PARTIAL BREAKDOWN OF PRECURSORS FOR ENHANCED ALD FILM GROWTH

METHOD FOR DETERMINING AMOUNT OF WEAR OF EDGE RING, PLASMA PROCESSI...

SYSTEM AND METHODS FOR AUTOMATED PROCESSING OF MULTIPLE SAMPLES IN...

APPARATUS AND METHOD FOR AUTOMATED GRID VALIDATION

SEMICONDUCTOR MANUFACTURING APPARATUS, SEMICONDUCTOR DEVICE AND MAN...

MULTI-CHARGED PARTICLE BEAM WRITING APPARATUS, AND MULTI-CHARGED PA...

ANALYZING A SIDEWALL OF HOLE MILLED IN A SAMPLE TO DETERMINE THICKN...

CONTROLLING ETCH ANGLES BY SUBSTRATE ROTATION IN ANGLED ETCH TOOLS

ION IMPLANTER AND ION IMPLANTATION METHOD

METHOD FOR OPERATING A MULTIPLE PARTICLE BEAM SYSTEM WHILE ALTERING...

WRITING DATA GENERATING METHOD, MULTI CHARGED PARTICLE BEAM WRITING...

CONTROLLING ETCH ANGLES BY SUBSTRATE ROTATION IN ANGLED ETCH TOOLS

PARTICLE BEAM APPARATUS, DEFECT REPAIR METHOD, LITHOGRAPHIC EXPOSUR...

FORMING A VERTICAL SURFACE

ION BEAM IRRADIATION APPARATUS AND PROGRAM THEREFOR

EXPOSURE APPARATUS AND EXPOSURE METHOD, LITHOGRAPHY METHOD, AND DEV...

MULTI-CHARGED PARTICLE BEAM WRITING APPARATUS, AND MULTI-CHARGED PA...

DOSE-BASED END-POINTING FOR LOW-KV FIB MILLING IN TEM SAMPLE PREPAR...

WRITING DATA GENERATION METHOD, COMPUTER-READABLE RECORDING MEDIUM...

METHOD FOR CHANGING A SURFACE VIA PARTICLE IRRADIATION

ELECTRON BEAM IRRADIATION METHOD, ELECTRON BEAM IRRADIATION APPARAT...

AUTOMATED TEM SAMPLE PREPARATION

CHARGED PARTICLE BEAM STEERING ARRANGEMENT

ELECTRON BEAM SOURCE AND THE USE OF THE SAME

MULTIPLE CHARGED PARTICLE BEAM WRITING APPARATUS, AND MULTIPLE CHAR...