provided with cooling means

Industry

CPC
G21K2201/065

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Parent Industries

GPHYSICS G21Nuclear engineering G21KTECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR IRRADIATION DEVICES GAMMA RAY OR X-RAY MICROSCOPES G21K2201/00Arrangements for handling radiation or particles

Current Industry

G21K2201/065provided with cooling means

Industries

Patents Grantslast 30 patents

Information Patent Grant
Apparatus and method for irradiation
- Patent number 11,633,510
- Issue date Apr 25, 2023
- AQUISENSE TECHNOLOGIES, LLC
- Jennifer Godwin Pagan
- C02 - TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
Information Patent Grant
Method for producing a reflective optical element, reflective optic...
- Patent number 11,372,334
- Issue date Jun 28, 2022
- Carl Zeiss SMT GmbH
- Markus Bauer
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
Radioisotope production
- Patent number 11,170,907
- Issue date Nov 9, 2021
- ASML Netherlands B.V.
- Pieter Willem Herman De Jager
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Extreme ultraviolet chamber apparatus, extreme ultraviolet light ge...
- Patent number 11,145,429
- Issue date Oct 12, 2021
- Gigaphoton Inc.
- Atsushi Ueda
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Apparatus and method for irradiation
- Patent number 10,994,036
- Issue date May 4, 2021
- AQUISENSE TECHNOLOGIES, LLC
- Jennifer Godwin Pagan
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Grant
Apparatus and method for irradiation
- Patent number 10,814,024
- Issue date Oct 27, 2020
- AQUISENSE TECHNOLOGIES, LLC
- Jennifer Godwin Pagan
- C02 - TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
Information Patent Grant
Semiconductor apparatus and method of operating the same
- Patent number 10,613,444
- Issue date Apr 7, 2020
- Taiwan Semiconductor Manufacturing Co., Ltd
- Chi-Hung Liao
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Method for producing a reflective optical element, reflective optic...
- Patent number 10,534,269
- Issue date Jan 14, 2020
- Carl Zeiss SMT GmbH
- Markus Bauer
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
Apparatus and method for irradiation
- Patent number 10,500,295
- Issue date Dec 10, 2019
- AquiSense Technologies LLC
- Jennifer Godwin Pagan
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Grant
Method for producing a reflective optical element, reflective optic...
- Patent number 10,481,501
- Issue date Nov 19, 2019
- Carl Zeiss SMT GmbH
- Markus Bauer
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Illumination optic for EUV projection lithography
- Patent number 10,379,444
- Issue date Aug 13, 2019
- Carl Zeiss SMT GmbH
- Matthias Mueller
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Reflective optical element
- Patent number 10,338,476
- Issue date Jul 2, 2019
- Carl Zeiss SMT GmbH
- Peter Huber
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Apparatus for generating extreme ultraviolet light
- Patent number 9,635,749
- Issue date Apr 25, 2017
- Samsung Electronics Co., Ltd.
- Sung-Joo Kim
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Method for producing a reflective optical component for an EUV proj...
- Patent number 9,541,685
- Issue date Jan 10, 2017
- Carl Zeiss SMT GmbH
- Holger Kierey
- B24 - GRINDING POLISHING
Information Patent Grant
Optical collector for collecting extreme ultraviolet radiation, met...
- Patent number 9,513,569
- Issue date Dec 6, 2016
- ETH Zurich
- Franz Dieterich
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Dual elliptical reflector with a co-located foci for curing optical...
- Patent number 9,105,367
- Issue date Aug 11, 2015
- Phoseon Technology, Inc.
- Doug Childers
- C03 - GLASS MINERAL OR SLAG WOOL
Information Patent Grant
High heat load optics with a liquid metal interface for use in an e...
- Patent number 9,041,900
- Issue date May 26, 2015
- Nikon Corporation
- Alton H. Phillips
- G02 - OPTICS
Information Patent Grant
High heat load optics with a liquid metal interface for use in an e...
- Patent number 9,041,904
- Issue date May 26, 2015
- Nikon Corporation
- Alton H. Phillips
- G02 - OPTICS
Information Patent Grant
EUV collector with cooling device
- Patent number 9,007,559
- Issue date Apr 14, 2015
- Carl Zeiss SMT GmbH
- Michael Layh
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Grazing incidence collector for laser produced plasma sources
- Patent number 8,411,815
- Issue date Apr 2, 2013
- Media Lario, S.r.L.
- Ian Wallhead
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Optical element, lithographic apparatus including such an optical e...
- Patent number 8,345,223
- Issue date Jan 1, 2013
- ASML Netherlands B.V.
- Wouter Anthon Soer
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Ultraviolet reflector with coolant gas holes and method
- Patent number 8,338,809
- Issue date Dec 25, 2012
- Applied Materials, Inc.
- Yao-Hung Yang
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Cooled spider and method for grazing-incidence collectors
- Patent number 8,264,665
- Issue date Sep 11, 2012
- Media Lario, S.r.L.
- John E. Hill
- G02 - OPTICS
Information Patent Grant
Source-collector module with GIC mirror and xenon liquid EUV LPP ta...
- Patent number 8,258,485
- Issue date Sep 4, 2012
- Media Lario S.R.L.
- Richard A. Levesque
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Cooling systems and methods for grazing incidence EUV lightography...
- Patent number 8,153,994
- Issue date Apr 10, 2012
- Media Lario S.R.L.
- Marco Pedrali
- G02 - OPTICS
Information Patent Grant
Ultraviolet reflector with coolant gas holes and method
- Patent number 7,964,858
- Issue date Jun 21, 2011
- Applied Materials, Inc.
- Yao-Hung Yang
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Optical component having an improved transient thermal behavior and...
- Patent number 7,965,456
- Issue date Jun 21, 2011
- Carl Zeiss SMT GmbH
- Wilhelm Egle
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Extreme UV radiation source device
- Patent number 7,622,727
- Issue date Nov 24, 2009
- Ushiodenki Kabushiki Kaisha
- Takahiro Shirai
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Liquid cooled mirror for use in extreme ultraviolet lithography
- Patent number 7,591,561
- Issue date Sep 22, 2009
- Nikon Corporation
- Alton H. Phillips
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Projection objective
- Patent number 7,557,902
- Issue date Jul 7, 2009
- Carl Zeiss SMT AG
- Udo Dinger
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING

Patents Applicationslast 30 patents

Information Patent Application
SOLID TARGET IRRADIATOR SYSTEM FOR RADIOISOTOPES PRODUCTION
- Publication number 20240242852
- Publication date Jul 18, 2024
- Best Theratronics Ltd.
- William Zeev Gelbart
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Application
APPARATUS AND METHOD FOR IRRADIATION
- Publication number 20210162083
- Publication date Jun 3, 2021
- AquiSense Technologies, LLC
- Jennifer Godwin Pagan
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Application
METHOD FOR PRODUCING A REFLECTIVE OPTICAL ELEMENT, REFLECTIVE OPTIC...
- Publication number 20200096874
- Publication date Mar 26, 2020
- Carl Zeiss SMT GMBH
- Markus Bauer
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
SEMICONDUCTOR APPARATUS AND METHOD OF OPERATING THE SAME
- Publication number 20200073248
- Publication date Mar 5, 2020
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chi-Hung LIAO
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
APPARATUS AND METHOD FOR IRRADIATION
- Publication number 20200069825
- Publication date Mar 5, 2020
- Jennifer Godwin Pagan
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Application
REFLECTOR
- Publication number 20190148028
- Publication date May 16, 2019
- Oxford University Innovation Limited
- Sean Robert Ravenhall
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Application
APPARATUS AND METHOD FOR IRRADIATION
- Publication number 20190046675
- Publication date Feb 14, 2019
- Jennifer Godwin Pagan
- C02 - TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
Information Patent Application
REFLECTIVE OPTICAL ELEMENT
- Publication number 20180307142
- Publication date Oct 25, 2018
- Carl Zeiss SMT GMBH
- Peter HUBER
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Application
ILLUMINATION OPTIC FOR EUV PROJECTION LITHOGRAPHY
- Publication number 20180074410
- Publication date Mar 15, 2018
- Carl Zeiss SMT GMBH
- Matthias Mueller
- G02 - OPTICS
Information Patent Application
METHOD FOR PRODUCING A REFLECTIVE OPTICAL ELEMENT, REFLECTIVE OPTIC...
- Publication number 20170315453
- Publication date Nov 2, 2017
- Carl Zeiss SMT GMBH
- Markus Bauer
- G02 - OPTICS
Information Patent Application
DUAL ELLIPTICAL REFLECTOR WITH A CO-LOCATED FOCI FOR CURING OPTICAL...
- Publication number 20150028229
- Publication date Jan 29, 2015
- PHOSEON TECHNOLOGY, INC.
- Doug Childers
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Application
METHOD FOR PRODUCING A REFLECTIVE OPTICAL COMPONENT FOR AN EUV PROJ...
- Publication number 20130335816
- Publication date Dec 19, 2013
- Holger Kierey
- G02 - OPTICS
Information Patent Application
EUV COLLECTOR MIRROR SHELL OF AN EUV COLLECTOR FOR EUV LITHOGRAPHY
- Publication number 20130176614
- Publication date Jul 11, 2013
- CARL ZEISS LASER OPTICS GmbH
- Willi Anderl
- G02 - OPTICS
Information Patent Application
DUAL ELLIPTICAL REFLECTOR WITH A CO-LOCATED FOCI FOR CURING OPTICAL...
- Publication number 20130068969
- Publication date Mar 21, 2013
- PHOSEON TECHNOLOGY, INC.
- Doug Childers
- C03 - GLASS MINERAL OR SLAG WOOL
Information Patent Application
MIRROR, MIRROR DEVICE, LASER APPARATUS, AND EXTREME ULTRAVIOLET LIG...
- Publication number 20130020511
- Publication date Jan 24, 2013
- Gigaphoton Inc.
- Hidenobu Kameda
- G02 - OPTICS
Information Patent Application
OPTICAL COLLECTOR COLLECTING EXTREME ULTRAVIOLET RADIATION, METHOD...
- Publication number 20130003167
- Publication date Jan 3, 2013
- Franz Dieterich
- B82 - NANO-TECHNOLOGY
Information Patent Application
HIGH HEAT LOAD OPTICS WITH A LIQUID METAL INTERFACE FOR USE IN AN E...
- Publication number 20120099088
- Publication date Apr 26, 2012
- Alton H. Phillips
- G02 - OPTICS
Information Patent Application
Source-collector module with GIC mirror and xenon liquid EUV LPP ta...
- Publication number 20120050704
- Publication date Mar 1, 2012
- MEDIA LARIO S.R.L
- Richard A. Levesque
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
EUV COLLECTOR
- Publication number 20120050703
- Publication date Mar 1, 2012
- Carl Zeiss SMT GMBH
- Michael Layh
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
ULTRAVIOLET REFLECTOR WITH COOLANT GAS HOLES AND METHOD
- Publication number 20110248183
- Publication date Oct 13, 2011
- Yao-Hung Yang
- B82 - NANO-TECHNOLOGY
Information Patent Application
OPTICAL COMPONENT HAVING AN IMPROVED TRANSIENT THERMAL BEHAVIOR AND...
- Publication number 20110211180
- Publication date Sep 1, 2011
- Carl Zeiss SMT GMBH
- Wilhelm Egle
- B82 - NANO-TECHNOLOGY
Information Patent Application
Cooled spider and method for grazing-incidence collectors
- Publication number 20110181860
- Publication date Jul 28, 2011
- MEDIA LARIO S.R.L
- John E. Hill
- G02 - OPTICS
Information Patent Application
Cooling systems and methods for grazing incidence EUV lightography...
- Publication number 20110128513
- Publication date Jun 2, 2011
- MEDIA LARIO S.R.L
- Marco Pedrali
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
OPTICAL ELEMENT, LITHOGRAPHIC APPARATUS INCLUDING SUCH AN OPTICAL E...
- Publication number 20110019174
- Publication date Jan 27, 2011
- Wouter Anthon Soer
- G02 - OPTICS
Information Patent Application
ILLUMINATION SYSTEM FOR A MICROLITHOGRAPHY PROJECTION EXPOSURE APPA...
- Publication number 20110001948
- Publication date Jan 6, 2011
- Carl Zeiss SMT AG
- Udo Dinger
- G02 - OPTICS
Information Patent Application
GRAZING INCIDENCE COLLECTOR FOR LASER PRODUCED PLASMA SOURCES
- Publication number 20100303199
- Publication date Dec 2, 2010
- MEDIA LARIO S.R.L
- Ian Wallhead
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
High Heat Load Optics with a Liquid Metal Interface for Use in an E...
- Publication number 20100110397
- Publication date May 6, 2010
- Alton H. Phillips
- G02 - OPTICS
Information Patent Application
ULTRAVIOLET REFLECTOR WITH COOLANT GAS HOLES AND METHOD
- Publication number 20100096564
- Publication date Apr 22, 2010
- APPLIED MATERIALS, INC.
- Yao-Hung Yang
- B82 - NANO-TECHNOLOGY
Information Patent Application
COOLING APPARATUS FOR OPTICAL MEMBER, BARREL, EXPOSURE APPARATUS, A...
- Publication number 20090103063
- Publication date Apr 23, 2009
- Jin Nishikawa
- G02 - OPTICS
Information Patent Application
Optical Component Having an Improved Transient Thermal Behavior and...
- Publication number 20090021950
- Publication date Jan 22, 2009
- Wilhelm Egle
- B82 - NANO-TECHNOLOGY

provided with cooling means

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Apparatus and method for irradiation

Method for producing a reflective optical element, reflective optic...

Radioisotope production

Extreme ultraviolet chamber apparatus, extreme ultraviolet light ge...

Apparatus and method for irradiation

Apparatus and method for irradiation

Semiconductor apparatus and method of operating the same

Method for producing a reflective optical element, reflective optic...

Apparatus and method for irradiation

Method for producing a reflective optical element, reflective optic...

Illumination optic for EUV projection lithography

Reflective optical element

Apparatus for generating extreme ultraviolet light

Method for producing a reflective optical component for an EUV proj...

Optical collector for collecting extreme ultraviolet radiation, met...

Dual elliptical reflector with a co-located foci for curing optical...

High heat load optics with a liquid metal interface for use in an e...

High heat load optics with a liquid metal interface for use in an e...

EUV collector with cooling device

Grazing incidence collector for laser produced plasma sources

Optical element, lithographic apparatus including such an optical e...

Ultraviolet reflector with coolant gas holes and method

Cooled spider and method for grazing-incidence collectors

Source-collector module with GIC mirror and xenon liquid EUV LPP ta...

Cooling systems and methods for grazing incidence EUV lightography...

Ultraviolet reflector with coolant gas holes and method

Optical component having an improved transient thermal behavior and...

Extreme UV radiation source device

Liquid cooled mirror for use in extreme ultraviolet lithography

Projection objective

Patents Applicationslast 30 patents

SOLID TARGET IRRADIATOR SYSTEM FOR RADIOISOTOPES PRODUCTION

APPARATUS AND METHOD FOR IRRADIATION

METHOD FOR PRODUCING A REFLECTIVE OPTICAL ELEMENT, REFLECTIVE OPTIC...

SEMICONDUCTOR APPARATUS AND METHOD OF OPERATING THE SAME

APPARATUS AND METHOD FOR IRRADIATION

REFLECTOR

APPARATUS AND METHOD FOR IRRADIATION

REFLECTIVE OPTICAL ELEMENT

ILLUMINATION OPTIC FOR EUV PROJECTION LITHOGRAPHY

METHOD FOR PRODUCING A REFLECTIVE OPTICAL ELEMENT, REFLECTIVE OPTIC...

DUAL ELLIPTICAL REFLECTOR WITH A CO-LOCATED FOCI FOR CURING OPTICAL...

METHOD FOR PRODUCING A REFLECTIVE OPTICAL COMPONENT FOR AN EUV PROJ...

EUV COLLECTOR MIRROR SHELL OF AN EUV COLLECTOR FOR EUV LITHOGRAPHY

DUAL ELLIPTICAL REFLECTOR WITH A CO-LOCATED FOCI FOR CURING OPTICAL...

MIRROR, MIRROR DEVICE, LASER APPARATUS, AND EXTREME ULTRAVIOLET LIG...

OPTICAL COLLECTOR COLLECTING EXTREME ULTRAVIOLET RADIATION, METHOD...

HIGH HEAT LOAD OPTICS WITH A LIQUID METAL INTERFACE FOR USE IN AN E...

Source-collector module with GIC mirror and xenon liquid EUV LPP ta...

EUV COLLECTOR

ULTRAVIOLET REFLECTOR WITH COOLANT GAS HOLES AND METHOD

OPTICAL COMPONENT HAVING AN IMPROVED TRANSIENT THERMAL BEHAVIOR AND...

Cooled spider and method for grazing-incidence collectors

Cooling systems and methods for grazing incidence EUV lightography...

OPTICAL ELEMENT, LITHOGRAPHIC APPARATUS INCLUDING SUCH AN OPTICAL E...

ILLUMINATION SYSTEM FOR A MICROLITHOGRAPHY PROJECTION EXPOSURE APPA...

GRAZING INCIDENCE COLLECTOR FOR LASER PRODUCED PLASMA SOURCES

High Heat Load Optics with a Liquid Metal Interface for Use in an E...

ULTRAVIOLET REFLECTOR WITH COOLANT GAS HOLES AND METHOD

COOLING APPARATUS FOR OPTICAL MEMBER, BARREL, EXPOSURE APPARATUS, A...

Optical Component Having an Improved Transient Thermal Behavior and...