Pulsed gas flow or change of composition over time

Industry

CPC
C23C16/45523

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Parent Industries

CCHEMISTRY METALLURGY C23Surface treatment C23CCOATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating

Current Industry

C23C16/45523Pulsed gas flow or change of composition over time

Industries

Patents Grantslast 30 patents

Information Patent Grant
Method and apparatus for chemical vapour deposition
- Patent number 11,970,765
- Issue date Apr 30, 2024
- Ionautics AB
- Henrik Pedersen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Sequential infiltration synthesis apparatus
- Patent number 11,970,766
- Issue date Apr 30, 2024
- ASM IP Holding B.V.
- Ivo Johannes Raaijmakers
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Gas delivery for tungsten-containing layer
- Patent number 11,939,668
- Issue date Mar 26, 2024
- Applied Materials, Inc.
- Zubin Huang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Deposition process for molybdenum or tungsten materials
- Patent number 11,932,935
- Issue date Mar 19, 2024
- Entegris, Inc.
- Robert L. Wright
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Sequential infiltration synthesis apparatus and a method of forming...
- Patent number 11,851,755
- Issue date Dec 26, 2023
- ASM IP Holding B.V.
- Jan Willem Maes
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Systems and methods for atomic layer deposition
- Patent number 11,814,727
- Issue date Nov 14, 2023
- ASM IP Holding B.V.
- Eric Jen Cheng Liu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Organotin oxide hydroxide patterning compositions, precursors, and...
- Patent number 11,809,081
- Issue date Nov 7, 2023
- Inpria Corporation
- Stephen T. Meyers
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Organotin oxide hydroxide patterning compositions, precursors, and...
- Patent number 11,754,924
- Issue date Sep 12, 2023
- Inpria Corporation
- Stephen T. Meyers
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
PECVD apparatus for in-situ deposition of film stacks
- Patent number 11,746,420
- Issue date Sep 5, 2023
- Novellus Systems, Inc.
- Pramod Subramonium
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Chemical delivery system and method of operating the chemical deliv...
- Patent number 11,746,413
- Issue date Sep 5, 2023
- Entegris, Inc.
- David James Eldridge
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for preparing self-assembled monolayers
- Patent number 11,749,523
- Issue date Sep 5, 2023
- ASM IP Holding B.V.
- Elina Färm
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Pre-coating method and film forming method
- Patent number 11,718,910
- Issue date Aug 8, 2023
- Tokyo Electron Limited
- Takeshi Itatani
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
PECVD coated pharmaceutical packaging
- Patent number 11,684,546
- Issue date Jun 27, 2023
- SIO2 Medical Products, Inc.
- Christopher Weikart
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for forming doped metal oxide films on a substrate by cyclic...
- Patent number 11,658,030
- Issue date May 23, 2023
- ASM IP Holding B.V.
- Tom Blomberg
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing semiconductor device, recording medium, and...
- Patent number 11,621,169
- Issue date Apr 4, 2023
- Kokusai Electric Corporation
- Koei Kuribayashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and method for enhancing a diffusion limited CVI/CVD process
- Patent number 11,584,987
- Issue date Feb 21, 2023
- Goodrich Corporation
- Ying She
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Sequential infiltration synthesis apparatus
- Patent number 11,581,186
- Issue date Feb 14, 2023
- ASM IP Holding B.V.
- Ivo Johannes Raaijmakers
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Selective deposition of metal oxide by pulsed chemical vapor deposi...
- Patent number 11,542,597
- Issue date Jan 3, 2023
- Applied Materials, Inc.
- Keith Tatseun Wong
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus, method of manufacturing semiconduct...
- Patent number 11,530,481
- Issue date Dec 20, 2022
- Kokusai Electric Corporation
- Naofumi Ohashi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Process for manufacturing a composite friction component
- Patent number 11,530,727
- Issue date Dec 20, 2022
- Centre National de la Recherche Scientifique
- Eric Bouillon
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Cycloheptatriene molybdenum (0) precursors for deposition of molybd...
- Patent number 11,530,477
- Issue date Dec 20, 2022
- Applied Materials, Inc.
- Andrea Leoncini
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Process for coating an oxide material
- Patent number 11,515,525
- Issue date Nov 29, 2022
- BASF SE
- Frank Kleine Jaeger
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus for forming self-assembled monolayers
- Patent number 11,495,455
- Issue date Nov 8, 2022
- ASM IP Holding B.V.
- Elina Färm
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus, method of manufacturing semiconduct...
- Patent number 11,462,401
- Issue date Oct 4, 2022
- Kokusai Electric Corporation
- Kosuke Takagi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Sequential infiltration synthesis apparatus and a method of forming...
- Patent number 11,447,861
- Issue date Sep 20, 2022
- ASM IP Holding B.V.
- Jan Willem Maes
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Chemical delivery system and method of operating the chemical deliv...
- Patent number 11,421,320
- Issue date Aug 23, 2022
- Entegris, Inc.
- David James Eldridge
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Vapor phase deposition of organic films
- Patent number 11,389,824
- Issue date Jul 19, 2022
- ASM IP Holding B.V.
- Viljami J. Pore
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma enhanced chemical vapor deposition of films for improved ver...
- Patent number 11,365,476
- Issue date Jun 21, 2022
- Applied Materials, Inc.
- Praket P. Jha
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Homogeneous and transparent protective coatings for precious metals...
- Patent number 11,365,481
- Issue date Jun 21, 2022
- City University of Hong Kong
- Kwok Yan Li
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Coated packaging
- Patent number 11,344,473
- Issue date May 31, 2022
- SiO2Medical Products, Inc.
- Christopher Weikart
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
COLD THERMAL CHEMICAL VAPOR DEPOSITION
- Publication number 20240117495
- Publication date Apr 11, 2024
- SILCOTEK CORP.
- Geoffrey K. WHITE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING METHOD, METHOD OF MANUFACTURING SEMICONDUCTOR...
- Publication number 20240105446
- Publication date Mar 28, 2024
- Kokusai Electric Corporation
- Takaaki NODA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PECVD COATED PHARMACEUTICAL PACKAGING
- Publication number 20240074944
- Publication date Mar 7, 2024
- SiO2 Medical Products, Inc.
- Christopher Weikart
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PROCESS FOR MANUFACTURING SILICON-CONTAINING MATERIALS
- Publication number 20230416907
- Publication date Dec 28, 2023
- Wacker Chemie AG
- Michael FRICKE
- C01 - INORGANIC CHEMISTRY
Information Patent Application
METHOD FOR FABRICATING SEMICONDUCTOR DEVICE WITH COMPOSITE CONTACT...
- Publication number 20230399738
- Publication date Dec 14, 2023
- NANYA TECHNOLOGY CORPORATION
- YU-CHANG CHANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PECVD APPARATUS FOR IN-SITU DEPOSITION OF FILM STACKS
- Publication number 20230366094
- Publication date Nov 16, 2023
- Novellus Systems, Inc.
- Jason Dirk Haverkamp
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR PRODUCING NON-CONTIGUOUS METAL OXIDE SEMICONDUCTORS, OF...
- Publication number 20230360912
- Publication date Nov 9, 2023
- Commissariat A L'Energie Atomique et Aux Energies Alternatives
- Pierre-Vincent GUENERY
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GAS DELIVERY FOR TUNGSTEN-CONTAINING LAYER
- Publication number 20230340662
- Publication date Oct 26, 2023
- Applied Materials, Inc.
- Zubin HUANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING METHOD
- Publication number 20230323533
- Publication date Oct 12, 2023
- Jusung Engineering Co., Ltd.
- Se Whan JIN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS OF PASSIVATION TO CONTROL OXYGEN CONTENT AND REACTIVITY OF...
- Publication number 20230304151
- Publication date Sep 28, 2023
- Group14 Technologies, Inc.
- Henry R. COSTANTINO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR FORMING DOPED METAL OXIDE FILMS ON A SUBSTRATE BY CYCLIC...
- Publication number 20230260784
- Publication date Aug 17, 2023
- ASM IP HOLDING B.V.
- Tom Blomberg
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF GROWING MONOLAYER TRANSITION METAL DICHALCOGENIDES VIA SU...
- Publication number 20230243030
- Publication date Aug 3, 2023
- Agency for Science, Technology and Research
- Henry Medina Silva
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20230238244
- Publication date Jul 27, 2023
- Kokusai Electric Corporation
- Koei KURIBAYASHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND APPARATUS FOR FORMING A PATTERNED STRUCTURE ON A SUBSTRATE
- Publication number 20230227965
- Publication date Jul 20, 2023
- ASM IP HOLDING, B.V.
- Shaoren Deng
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Methods Of Forming Ruthenium-Containing Films Without A Co-Reactant
- Publication number 20230227966
- Publication date Jul 20, 2023
- Merck Patent GmbH
- Guo LIU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Apparatus and Method of Manufacturing Oxide Film and Display Appara...
- Publication number 20230220547
- Publication date Jul 13, 2023
- LG Display Co., Ltd.
- Jaeyoon PARK
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEVICE FOR SUPPLYING A MIXED GAS, DEVICE FOR PRODUCING METAL NITRID...
- Publication number 20230193458
- Publication date Jun 22, 2023
- Taiyo Nippon Sanso Corporation
- Hayato MURATA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEQUENTIAL INFILTRATION SYNTHESIS APPARATUS
- Publication number 20230183856
- Publication date Jun 15, 2023
- ASM IP Holding B.V.
- Ivo Johannes Raaijmakers
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CYCLOHEPTATRIENE MOLYBDENUM (0) PRECURSORS FOR DEPOSITION OF MOLYBD...
- Publication number 20230129073
- Publication date Apr 27, 2023
- Applied Materials, Inc.
- Andrea Leoncini
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SELECTIVE DEPOSITION OF METAL OXIDE BY PULSED CHEMICAL VAPOR DEPOSI...
- Publication number 20230122224
- Publication date Apr 20, 2023
- Applied Materials, Inc.
- Keith Tatseun WONG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND NON...
- Publication number 20230073084
- Publication date Mar 9, 2023
- Kokusai Electric Corporation
- Naofumi OHASHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS FOR PREPARING SELF-ASSEMBLED MONOLAYERS
- Publication number 20230042093
- Publication date Feb 9, 2023
- ASM IP HOLDING B.V.
- Elina Färm
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
SEQUENTIAL INFILTRATION SYNTHESIS APPARATUS AND A METHOD OF FORMING...
- Publication number 20220389578
- Publication date Dec 8, 2022
- ASM IP HOLDING B.V.
- Jan Willem Maes
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEPOSITION PROCESS FOR MOLYBDENUM OR TUNGSTEN MATERIALS
- Publication number 20220356563
- Publication date Nov 10, 2022
- Entegris, Inc.
- Robert L. Wright
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
VAPOR PHASE DEPOSITION OF ORGANIC FILMS
- Publication number 20220323991
- Publication date Oct 13, 2022
- ASM IP HOLDING B.V.
- Viljami J. Pore
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHEMICAL DELIVERY SYSTEM AND METHOD OF OPERATING THE CHEMICAL DELIV...
- Publication number 20220298629
- Publication date Sep 22, 2022
- Entegris, Inc.
- David James Eldridge
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CARBON-NANOTUBE-BASED COMPOSITE COATING AND PRODUCTION METHOD THEREOF
- Publication number 20220220317
- Publication date Jul 14, 2022
- Luxembourg Institute of Science and Technology (LIST)
- Naoufal BAHLAWANE
- B82 - NANO-TECHNOLOGY
Information Patent Application
PHOTORESIST UNDERLAYER COMPOSITIONS AND PATTERNING METHODS
- Publication number 20220197142
- Publication date Jun 23, 2022
- Rohm and Haas Electronic Materials L.L.C.
- Joshua Kaitz
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PHOTORESIST UNDERLAYER COMPOSITIONS AND PATTERNING METHODS
- Publication number 20220197141
- Publication date Jun 23, 2022
- Rohm and Haas Electronic Materials L.L.C.
- Joshua Kaitz
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
A METHOD AND APPARATUS FOR CHEMICAL VAPOUR DEPOSITION
- Publication number 20220098725
- Publication date Mar 31, 2022
- Ionautics AB
- Henrik Pedersen
- H01 - BASIC ELECTRIC ELEMENTS

Pulsed gas flow or change of composition over time

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Method and apparatus for chemical vapour deposition

Sequential infiltration synthesis apparatus

Gas delivery for tungsten-containing layer

Deposition process for molybdenum or tungsten materials

Sequential infiltration synthesis apparatus and a method of forming...

Systems and methods for atomic layer deposition

Organotin oxide hydroxide patterning compositions, precursors, and...

Organotin oxide hydroxide patterning compositions, precursors, and...

PECVD apparatus for in-situ deposition of film stacks

Chemical delivery system and method of operating the chemical deliv...

Methods for preparing self-assembled monolayers

Pre-coating method and film forming method

PECVD coated pharmaceutical packaging

Method for forming doped metal oxide films on a substrate by cyclic...

Method of manufacturing semiconductor device, recording medium, and...

System and method for enhancing a diffusion limited CVI/CVD process

Sequential infiltration synthesis apparatus

Selective deposition of metal oxide by pulsed chemical vapor deposi...

Substrate processing apparatus, method of manufacturing semiconduct...

Process for manufacturing a composite friction component

Cycloheptatriene molybdenum (0) precursors for deposition of molybd...

Process for coating an oxide material

Apparatus for forming self-assembled monolayers

Substrate processing apparatus, method of manufacturing semiconduct...

Sequential infiltration synthesis apparatus and a method of forming...

Chemical delivery system and method of operating the chemical deliv...

Vapor phase deposition of organic films

Plasma enhanced chemical vapor deposition of films for improved ver...

Homogeneous and transparent protective coatings for precious metals...

Coated packaging

Patents Applicationslast 30 patents

COLD THERMAL CHEMICAL VAPOR DEPOSITION

SUBSTRATE PROCESSING METHOD, METHOD OF MANUFACTURING SEMICONDUCTOR...

PECVD COATED PHARMACEUTICAL PACKAGING

PROCESS FOR MANUFACTURING SILICON-CONTAINING MATERIALS

METHOD FOR FABRICATING SEMICONDUCTOR DEVICE WITH COMPOSITE CONTACT...

PECVD APPARATUS FOR IN-SITU DEPOSITION OF FILM STACKS

METHOD FOR PRODUCING NON-CONTIGUOUS METAL OXIDE SEMICONDUCTORS, OF...

GAS DELIVERY FOR TUNGSTEN-CONTAINING LAYER

SUBSTRATE PROCESSING METHOD

METHODS OF PASSIVATION TO CONTROL OXYGEN CONTENT AND REACTIVITY OF...

METHOD FOR FORMING DOPED METAL OXIDE FILMS ON A SUBSTRATE BY CYCLIC...

METHOD OF GROWING MONOLAYER TRANSITION METAL DICHALCOGENIDES VIA SU...

METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCT...

METHOD AND APPARATUS FOR FORMING A PATTERNED STRUCTURE ON A SUBSTRATE

Methods Of Forming Ruthenium-Containing Films Without A Co-Reactant

Apparatus and Method of Manufacturing Oxide Film and Display Appara...

DEVICE FOR SUPPLYING A MIXED GAS, DEVICE FOR PRODUCING METAL NITRID...

SEQUENTIAL INFILTRATION SYNTHESIS APPARATUS

CYCLOHEPTATRIENE MOLYBDENUM (0) PRECURSORS FOR DEPOSITION OF MOLYBD...

SELECTIVE DEPOSITION OF METAL OXIDE BY PULSED CHEMICAL VAPOR DEPOSI...

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND NON...

METHODS FOR PREPARING SELF-ASSEMBLED MONOLAYERS

SEQUENTIAL INFILTRATION SYNTHESIS APPARATUS AND A METHOD OF FORMING...

DEPOSITION PROCESS FOR MOLYBDENUM OR TUNGSTEN MATERIALS

VAPOR PHASE DEPOSITION OF ORGANIC FILMS

CHEMICAL DELIVERY SYSTEM AND METHOD OF OPERATING THE CHEMICAL DELIV...

CARBON-NANOTUBE-BASED COMPOSITE COATING AND PRODUCTION METHOD THEREOF

PHOTORESIST UNDERLAYER COMPOSITIONS AND PATTERNING METHODS

PHOTORESIST UNDERLAYER COMPOSITIONS AND PATTERNING METHODS

A METHOD AND APPARATUS FOR CHEMICAL VAPOUR DEPOSITION