Pulsed pressure or control pressure

Industry

CPC
C23C16/45557

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Parent Industries

CCHEMISTRY METALLURGY C23Surface treatment C23CCOATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating

Current Industry

C23C16/45557Pulsed pressure or control pressure

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Method of depositing epitaxial material, structure formed using the...
- Patent number 12,173,404
- Issue date Dec 24, 2024
- ASM IP Holding B.V.
- Amir Kajbafvala
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Depositing coatings on and within housings, apparatus, or tools uti...
- Patent number 12,163,216
- Issue date Dec 10, 2024
- Halliburton Energy Services, Inc.
- Christopher Michael Jones
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for conditioning a plasma processing chamber
- Patent number 12,060,636
- Issue date Aug 13, 2024
- Lam Research Corporation
- Chiara Helena Catherina Giammanco MacPherson
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing semiconductor device, substrate processing...
- Patent number 12,037,677
- Issue date Jul 16, 2024
- Kokusai Electric Corporation
- Ryuji Yamamoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Pulse-managed plasma method for coating on internal surfaces of wor...
- Patent number 12,037,923
- Issue date Jul 16, 2024
- Pratt & Whitney Canada Corp.
- Ludvik Martinu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Flash annealing of transparent conductive oxide and semiconductor c...
- Patent number 12,032,124
- Issue date Jul 9, 2024
- Vitro Flat Glass LLC
- Ashtosh P. Ganjoo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Gas distribution system and reactor system including same
- Patent number 12,024,775
- Issue date Jul 2, 2024
- ASM IP Holding B.V.
- Sonti Sreeram
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of processing substrate
- Patent number 12,024,777
- Issue date Jul 2, 2024
- Wonik IPS Co., Ltd.
- Dae Seong Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of manufacturing semiconductor device, non-transitory comput...
- Patent number 12,000,045
- Issue date Jun 4, 2024
- Kokusai Electric Corporation
- Takuya Joda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Processing apparatus and film forming method
- Patent number 11,972,929
- Issue date Apr 30, 2024
- Tokyo Electron Limited
- Makoto Wada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing method, substrate processing apparatus using t...
- Patent number 11,965,244
- Issue date Apr 23, 2024
- Wonik IPS Co., Ltd.
- Kyung Park
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Pressurization type method for manufacturing metal monoatomic layer...
- Patent number 11,926,898
- Issue date Mar 12, 2024
- IUCF-HYU (Industry-University Cooperation Foundation Hanyang University)
- Myung Mo Sung
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film forming apparatus and method for manufacturing part having fil...
- Patent number 11,919,032
- Issue date Mar 5, 2024
- Tokyo Electron Limited
- Takayuki Ishii
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Fluid handling structure and method for a gas phase deposition appa...
- Patent number 11,920,241
- Issue date Mar 5, 2024
- Nederlandse Organisatie voor toegepast-natuurwetenschappelijk onderzoek TNO
- Ruud Olieslagers
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus, state determination method and comp...
- Patent number 11,920,240
- Issue date Mar 5, 2024
- Tokyo Electron Limited
- Ryo Araki
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Semiconductor manufacturing device
- Patent number 11,879,171
- Issue date Jan 23, 2024
- Denso Corporation
- Hiroaki Fujibayashi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Dynamic pressure control for processing chambers implementing real-...
- Patent number 11,869,754
- Issue date Jan 9, 2024
- Applied Materials, Inc.
- Tina Dhekial-Phukan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for producing reduced graphene oxide
- Patent number 11,866,336
- Issue date Jan 9, 2024
- UNIST(ULSAN NATIONAL INSTITUTE OF SCIENCE AND TECHNOLOGY)
- Gun Ho Kim
- C01 - INORGANIC CHEMISTRY
Information Patent Grant
Techniques to improve adhesion and defects for tungsten carbide film
- Patent number 11,859,275
- Issue date Jan 2, 2024
- Applied Materials, Inc.
- Vivek Bharat Shah
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Systems and methods for pulse width modulated dose control
- Patent number 11,834,736
- Issue date Dec 5, 2023
- Lam Research Corporation
- Mariusch Gregor
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Gas separation control in spatial atomic layer deposition
- Patent number 11,821,083
- Issue date Nov 21, 2023
- Applied Materials, Inc.
- Ning Li
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
System and method for managing substrate outgassing
- Patent number 11,817,297
- Issue date Nov 14, 2023
- Applied Materials, Inc.
- Matthew Spuller
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Stabilized metal monolayer structure
- Patent number 11,814,723
- Issue date Nov 14, 2023
- IUCF-HYU (Industry-University Cooperation Foundation Hanyang University)
- Myung Mo Sung
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Depositing coatings on and within housings, apparatus, or tools uti...
- Patent number 11,788,187
- Issue date Oct 17, 2023
- Halliburton Energy Services, Inc.
- Christopher Michael Jones
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Liquid vaporizer
- Patent number 11,788,190
- Issue date Oct 17, 2023
- ASM IP Holding B.V.
- Jereld Lee Winkler
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
High temperature vacuum seal
- Patent number 11,767,593
- Issue date Sep 26, 2023
- Applied Materials, Inc.
- Muhannad Mustafa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
ALD apparatus, method and valve
- Patent number 11,761,082
- Issue date Sep 19, 2023
- Picosun Oy
- Marko Pudas
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for controlling a flow pulse shape
- Patent number 11,761,083
- Issue date Sep 19, 2023
- Applied Materials, Inc.
- Joseph AuBuchon
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Highly adhesive CVD grown boron doped diamond graded layer on WC-Co
- Patent number 11,739,419
- Issue date Aug 29, 2023
- INDIAN INSTITUTE OF TECHNOLOGY MADRAS (IIT MADRAS)
- Kannan Ramasubramaniyan
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Method and apparatus for forming layer, metal oxide transistor and...
- Patent number 11,732,354
- Issue date Aug 22, 2023
- IUCF-HYU (Industry-University Cooperation Foundation Hanyang University)
- Myung Mo Sung
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
MODERATE TEMPERATURE CVD ALPHA ALUMINA COATING
- Publication number 20240425978
- Publication date Dec 26, 2024
- WALTER AG
- Mandy Höhn
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GENERATION OF AN ACTIVE OXYGEN SPECIES
- Publication number 20240417858
- Publication date Dec 19, 2024
- Silanna UV Technologies Pte Ltd
- Petar Atanackovic
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS FOR DEPOSITING A FILM ON A SURFACE OF A SUBSTRATE BY CYCLIC...
- Publication number 20240401190
- Publication date Dec 5, 2024
- ASM IP HOLDING B.V.
- Do Han Kim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
REMOTE SOLID REFILL CHAMBER
- Publication number 20240401192
- Publication date Dec 5, 2024
- ASM IP HOLDING B.V.
- Eric James Shero
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
REMOTE PLASMA DEPOSITION WITH ELECTROSTATIC CLAMPING
- Publication number 20240387226
- Publication date Nov 21, 2024
- LAM RESEARCH CORPORATION
- Aaron Blake MILLER
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEVICE AND METHOD FOR DISPENSING A GAS PHASE OF A SOLID PRECURSOR
- Publication number 20240368758
- Publication date Nov 7, 2024
- Air Liquide Electronics Systems
- Sonia PLAZA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS AND SYSTEMS FOR INHIBITING PRECURSOR INTERACTIONS DURING RA...
- Publication number 20240368760
- Publication date Nov 7, 2024
- Lotus Applied Technology, LLC
- ERIC DICKEY
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF MAKING SILICIDE IN HIGH-ASPECT RATIO STRUCTURES BY HYBRID...
- Publication number 20240332023
- Publication date Oct 3, 2024
- Applied Materials, Inc.
- Ying-Bing JIANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF PROCESSING SUBSTRATE, SUBSTRATE PROCESSING APPARATUS, AND...
- Publication number 20240327976
- Publication date Oct 3, 2024
- Kokusai Electric Corporation
- Kimihiko NAKATANI
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20240318306
- Publication date Sep 26, 2024
- Kokusai Electric Corporation
- Keigo NISHIDA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PULSE-MANAGED PLASMA METHOD FOR COATING ON INTERNAL SURFACES OF WOR...
- Publication number 20240318564
- Publication date Sep 26, 2024
- Pratt & Whitney Canada Corp.
- Ludvik MARTINU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20240287671
- Publication date Aug 29, 2024
- Kokusai Electric Corporation
- Ryuji YAMAMOTO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20240287672
- Publication date Aug 29, 2024
- Kokusai Electric Corporation
- Noriyuki ISOBE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COMPOSITE FILM APPLIED TO FLEXIBLE SUBSTRATE, PREPARATION METHOD TH...
- Publication number 20240287674
- Publication date Aug 29, 2024
- Jiangsu Favored Nanotechnology Co., Ltd.
- Jian ZONG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, NON-TRANSITORY COMPUT...
- Publication number 20240279807
- Publication date Aug 22, 2024
- Kokusai Electric Corporation
- Takuya JODA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20240271278
- Publication date Aug 15, 2024
- Kokusai Electric Corporation
- Atsushi Sano
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE TREATMENT APPARATUS AND SUBSTRATE TREATMENT METHOD USING...
- Publication number 20240263308
- Publication date Aug 8, 2024
- HANWHA PRECISION MACHINERY CO., LTD.
- Dong Won SEO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
VAPOR SUPPLY APPARATUS
- Publication number 20240254623
- Publication date Aug 1, 2024
- Samsung Electronics Co., Ltd.
- Changhwan Kim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF PROCESSING SUBSTRATE, MET...
- Publication number 20240254630
- Publication date Aug 1, 2024
- Kokusai Electric Corporation
- Hideo TATENO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING METHOD, METHOD OF MANUFACTURING SEMICONDUCTOR...
- Publication number 20240247367
- Publication date Jul 25, 2024
- Kodusai Electric Corporation
- Koei KURIBAYASHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA CHEMICAL VAPOR DEPOSITION (CVD) APPARATUS AND FILM FORMING M...
- Publication number 20240242940
- Publication date Jul 18, 2024
- KIOXIA Corporation
- Takuya HIROHASHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF FORMING FILM, METHOD OF MANUFACTURING SEMICONDUCTOR DEVIC...
- Publication number 20240240308
- Publication date Jul 18, 2024
- Kokusai Electric Corporation
- Yuki TAIRA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
VALVE PULSING TO CONTROL PRECURSOR PRESSURE
- Publication number 20240240323
- Publication date Jul 18, 2024
- ASM IP HOLDING B.V.
- Ryan Paull
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
REMOTE SOLID REFILL CHAMBER
- Publication number 20240218506
- Publication date Jul 4, 2024
- ASM IP HOLDING B.V.
- Eric James Shero
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE DEGASSING METHOD AND SEMICONDUCTOR FABRICATION METHOD USI...
- Publication number 20240218511
- Publication date Jul 4, 2024
- Samsung Electronics Co., Ltd.
- DONG-GU KIM
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS AND APPARATUS FOR AN ACCUMULATOR
- Publication number 20240218512
- Publication date Jul 4, 2024
- ASM IP HOLDING B.V.
- Madhan Kumar Arulanandam
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMING APPARATUS AND METHOD FOR MANUFACTURING PART HAVING FIL...
- Publication number 20240207882
- Publication date Jun 27, 2024
- TOKYO ELECTRON LIMITED
- Takayuki ISHII
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GAS SUPPLY SYSTEM, SUBSTRATE PROCESSING APPARATUS, AND OPERATION ME...
- Publication number 20240191356
- Publication date Jun 13, 2024
- TOKYO ELECTRON LIMITED
- Eiichi SUGAWARA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, METHOD...
- Publication number 20240186156
- Publication date Jun 6, 2024
- Kokusai Electric Corporation
- Kenji ONO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HIGH-EFFICIENCY SEAL COMPOSED OF CARBON NANOTUBES
- Publication number 20240183445
- Publication date Jun 6, 2024
- UT-Battelle, LLC
- Jun Qu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Pulsed pressure or control pressure

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Method of depositing epitaxial material, structure formed using the...

Depositing coatings on and within housings, apparatus, or tools uti...

Method for conditioning a plasma processing chamber

Method of manufacturing semiconductor device, substrate processing...

Pulse-managed plasma method for coating on internal surfaces of wor...

Flash annealing of transparent conductive oxide and semiconductor c...

Gas distribution system and reactor system including same

Method of processing substrate

Method of manufacturing semiconductor device, non-transitory comput...

Processing apparatus and film forming method

Substrate processing method, substrate processing apparatus using t...

Pressurization type method for manufacturing metal monoatomic layer...

Film forming apparatus and method for manufacturing part having fil...

Fluid handling structure and method for a gas phase deposition appa...

Substrate processing apparatus, state determination method and comp...

Semiconductor manufacturing device

Dynamic pressure control for processing chambers implementing real-...

Method for producing reduced graphene oxide

Techniques to improve adhesion and defects for tungsten carbide film

Systems and methods for pulse width modulated dose control

Gas separation control in spatial atomic layer deposition

System and method for managing substrate outgassing

Stabilized metal monolayer structure

Depositing coatings on and within housings, apparatus, or tools uti...

Liquid vaporizer

High temperature vacuum seal

ALD apparatus, method and valve

Methods for controlling a flow pulse shape

Highly adhesive CVD grown boron doped diamond graded layer on WC-Co

Method and apparatus for forming layer, metal oxide transistor and...

Patents Applicationslast 30 patents

MODERATE TEMPERATURE CVD ALPHA ALUMINA COATING

GENERATION OF AN ACTIVE OXYGEN SPECIES

METHODS FOR DEPOSITING A FILM ON A SURFACE OF A SUBSTRATE BY CYCLIC...

REMOTE SOLID REFILL CHAMBER

REMOTE PLASMA DEPOSITION WITH ELECTROSTATIC CLAMPING

DEVICE AND METHOD FOR DISPENSING A GAS PHASE OF A SOLID PRECURSOR

METHODS AND SYSTEMS FOR INHIBITING PRECURSOR INTERACTIONS DURING RA...

METHOD OF MAKING SILICIDE IN HIGH-ASPECT RATIO STRUCTURES BY HYBRID...

METHOD OF PROCESSING SUBSTRATE, SUBSTRATE PROCESSING APPARATUS, AND...

SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...

PULSE-MANAGED PLASMA METHOD FOR COATING ON INTERNAL SURFACES OF WOR...

METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCT...

METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCT...

COMPOSITE FILM APPLIED TO FLEXIBLE SUBSTRATE, PREPARATION METHOD TH...

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, NON-TRANSITORY COMPUT...

METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCT...

SUBSTRATE TREATMENT APPARATUS AND SUBSTRATE TREATMENT METHOD USING...

VAPOR SUPPLY APPARATUS

SUBSTRATE PROCESSING APPARATUS, METHOD OF PROCESSING SUBSTRATE, MET...

SUBSTRATE PROCESSING METHOD, METHOD OF MANUFACTURING SEMICONDUCTOR...

PLASMA CHEMICAL VAPOR DEPOSITION (CVD) APPARATUS AND FILM FORMING M...

METHOD OF FORMING FILM, METHOD OF MANUFACTURING SEMICONDUCTOR DEVIC...

VALVE PULSING TO CONTROL PRECURSOR PRESSURE

REMOTE SOLID REFILL CHAMBER

SUBSTRATE DEGASSING METHOD AND SEMICONDUCTOR FABRICATION METHOD USI...

METHODS AND APPARATUS FOR AN ACCUMULATOR

FILM FORMING APPARATUS AND METHOD FOR MANUFACTURING PART HAVING FIL...

GAS SUPPLY SYSTEM, SUBSTRATE PROCESSING APPARATUS, AND OPERATION ME...

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, METHOD...

HIGH-EFFICIENCY SEAL COMPOSED OF CARBON NANOTUBES