Pupil plane manipulation

Industry

CPC
G01B2290/50

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Parent Industries

GPHYSICS G01Measuring instruments G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS MEASURING ANGLES MEASURING AREAS MEASURING IRREGULARITIES OF SURFACES OR CONTOURS G01B2290/00Aspects of interferometers not specifically covered by any group under G01B9/02

Current Industry

G01B2290/50Pupil plane manipulation

Industries

Patents Grantslast 30 patents

Information Patent Grant
Method for compensation during the process of wavefront reconstruct...
- Patent number 11,561,082
- Issue date Jan 24, 2023
- Shanghai Institute of Optics And Fine Mechanics, Chinese Academy of Sciences
- Peng Li
- G01 - MEASURING TESTING
Information Patent Grant
System and method for a displacement measurement
- Patent number 10,845,191
- Issue date Nov 24, 2020
- Nikon Corporation
- Eric Peter Goodwin
- G01 - MEASURING TESTING
Information Patent Grant
Interferometer using tilted object waves and comprising a Fizeau in...
- Patent number 10,612,905
- Issue date Apr 7, 2020
- Universitaet Stuttgart
- Goran Baer
- G01 - MEASURING TESTING
Information Patent Grant
Measuring device for interferometric determination of a shape of an...
- Patent number 10,527,403
- Issue date Jan 7, 2020
- Carl Zeiss SMT GmbH
- Jochen Hetzler
- G01 - MEASURING TESTING
Information Patent Grant
Edge registration for interferometry
- Patent number 10,488,176
- Issue date Nov 26, 2019
- Corning Incorporated
- Thomas James Dunn
- G01 - MEASURING TESTING
Information Patent Grant
System and method for a displacement measurement
- Patent number 10,302,419
- Issue date May 28, 2019
- Nikon Corporation
- Eric Peter Goodwin
- G01 - MEASURING TESTING
Information Patent Grant
Scanning white-light interferometry system for characterization of...
- Patent number 10,288,408
- Issue date May 14, 2019
- Nanometrics Incorporated
- Nigel P. Smith
- G02 - OPTICS
Information Patent Grant
Optical coherence microscopy system having a filter for suppressing...
- Patent number 9,791,684
- Issue date Oct 17, 2017
- Ecole Polytechnique Federale de Lausanne (EPFL)
- Martin Villiger
- G02 - OPTICS
Information Patent Grant
Portable interferometric device
- Patent number 9,574,868
- Issue date Feb 21, 2017
- Ramot at Tel Aviv University Ltd.
- Natan Tzvi Shaked
- G02 - OPTICS
Information Patent Grant
Measuring apparatus including multi-wavelength interferometer
- Patent number 9,372,068
- Issue date Jun 21, 2016
- Canon Kabushiki Kaisha
- Akihiro Hatada
- G01 - MEASURING TESTING
Information Patent Grant
True-spectroscopic dual mode high resolution full-field optical coh...
- Patent number 9,310,186
- Issue date Apr 12, 2016
- Ben-Gurion University of the Negev Research and Development Authority
- Ibrahim Abdulhalim
- G01 - MEASURING TESTING
Information Patent Grant
Multi-wavelength interferometer, measurement apparatus, and measure...
- Patent number 9,062,957
- Issue date Jun 23, 2015
- Canon Kabushiki Kaisha
- Akihiro Yamada
- G01 - MEASURING TESTING
Information Patent Grant
Interferometer and method for measuring characteristics of opticall...
- Patent number 7,948,636
- Issue date May 24, 2011
- Zygo Corporation
- Peter De Groot
- G01 - MEASURING TESTING
Information Patent Grant
Multiple-angle multiple-wavelength interferometer using high-NA ima...
- Patent number 7,869,057
- Issue date Jan 11, 2011
- Zygo Corporation
- Peter de Groot
- G01 - MEASURING TESTING
Information Patent Grant
Interferometry method for ellipsometry, reflectometry, and scattero...
- Patent number 7,812,963
- Issue date Oct 12, 2010
- Zygo Corporation
- Peter J. De Groot
- G01 - MEASURING TESTING
Information Patent Grant
Interferometer and method for measuring characteristics of opticall...
- Patent number 7,684,049
- Issue date Mar 23, 2010
- Zygo Corporation
- Peter De Groot
- G01 - MEASURING TESTING
Information Patent Grant
Generating model signals for interferometry
- Patent number 7,619,746
- Issue date Nov 17, 2009
- Zygo Corporation
- Xavier Colonna De Lega
- G01 - MEASURING TESTING
Information Patent Grant
Surface characterization based on lateral shearing of diffracted wa...
- Patent number 7,538,891
- Issue date May 26, 2009
- California Institute of Technology
- Michael Mello
- G01 - MEASURING TESTING
Information Patent Grant
Scanning interferometry for thin film thickness and surface measure...
- Patent number 7,468,799
- Issue date Dec 23, 2008
- Zygo Corporation
- Peter J. de Groot
- G01 - MEASURING TESTING
Information Patent Grant
Profiling complex surface structures using scanning interferometry
- Patent number 7,466,429
- Issue date Dec 16, 2008
- Zygo Corporation
- Peter J. De Groot
- G01 - MEASURING TESTING
Information Patent Grant
Interferometry method for ellipsometry, reflectometry, and scattero...
- Patent number 7,403,289
- Issue date Jul 22, 2008
- Zygo Corporation
- Peter J. De Groot
- G01 - MEASURING TESTING
Information Patent Grant
Scanning interferometry for thin film thickness and surface measure...
- Patent number 7,324,210
- Issue date Jan 29, 2008
- Zygo Corporation
- Peter J De Groot
- G01 - MEASURING TESTING
Information Patent Grant
Interferometer and method for measuring characteristics of opticall...
- Patent number 7,324,214
- Issue date Jan 29, 2008
- Zygo Corporation
- Peter De Groot
- G01 - MEASURING TESTING
Information Patent Grant
Interferometry method for ellipsometry, reflectometry, and scattero...
- Patent number 7,315,382
- Issue date Jan 1, 2008
- Zygo Corporation
- Peter J. De Groot
- G01 - MEASURING TESTING
Information Patent Grant
Profiling complex surface structures using height scanning interfer...
- Patent number 7,239,398
- Issue date Jul 3, 2007
- Zygo Corporation
- Peter J. De Groot
- G01 - MEASURING TESTING
Information Patent Grant
Simultaneous phase-shifting fizeau interferometer
- Patent number 7,230,718
- Issue date Jun 12, 2007
- 4D Technology Corporation
- James E. Millerd
- G01 - MEASURING TESTING
Information Patent Grant
Interferometry method for ellipsometry, reflectometry, and scattero...
- Patent number 7,139,081
- Issue date Nov 21, 2006
- Zygo Corporation
- Peter J. De Groot
- G01 - MEASURING TESTING
Information Patent Grant
Profiling complex surface structures using scanning interferometry
- Patent number 7,106,454
- Issue date Sep 12, 2006
- Zygo Corporation
- Peter J. De Groot
- G01 - MEASURING TESTING
Information Patent Grant
Simultaneous phase-shifting Fizeau interferometer
- Patent number 7,057,738
- Issue date Jun 6, 2006
- A D Technology Corporation
- James E. Millerd
- G01 - MEASURING TESTING
Information Patent Grant
Hybrid shearing and phase-shifting point diffraction interferometer
- Patent number 6,573,997
- Issue date Jun 3, 2003
- The Regents of California
- Kenneth Alan Goldberg
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
METHOD FOR COMPENSATION DURING THE PROCESS OF WAVEFRONT RECONSTRUCT...
- Publication number 20220412720
- Publication date Dec 29, 2022
- Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences
- Peng LI
- G01 - MEASURING TESTING
Information Patent Application
SYSTEM AND METHOD FOR A DISPLACEMENT MEASUREMENT
- Publication number 20190234729
- Publication date Aug 1, 2019
- Nikon Corporation
- Eric Peter Goodwin
- G01 - MEASURING TESTING
Information Patent Application
MEASURING DEVICE FOR INTERFEROMETRIC DETERMINATION OF A SHAPE OF AN...
- Publication number 20190154427
- Publication date May 23, 2019
- Carl Zeiss SMT GMBH
- Jochen HETZLER
- G01 - MEASURING TESTING
Information Patent Application
INTERFEROMETER USING TILTED OBJECT WAVES AND COMPRISING A FIZEAU IN...
- Publication number 20180328711
- Publication date Nov 15, 2018
- UNIVERSITAET STUTTGART
- Goran Baer
- G01 - MEASURING TESTING
Information Patent Application
SCANNING WHITE-LIGHT INTERFEROMETRY SYSTEM FOR CHARACTERIZATION OF...
- Publication number 20180156597
- Publication date Jun 7, 2018
- Nanometrics Incorporated
- Nigel P. Smith
- G01 - MEASURING TESTING
Information Patent Application
INTERFERENCE MEASURING APPARATUS AND INTERFERENCE MEASURING METHOD
- Publication number 20140160490
- Publication date Jun 12, 2014
- Canon Kabushiki Kaisha
- Yuya Nishikawa
- G01 - MEASURING TESTING
Information Patent Application
MEASURING APPARATUS INCLUDING MULTI-WAVELENGTH INTERFEROMETER
- Publication number 20130155414
- Publication date Jun 20, 2013
- Canon Kabushiki Kaisha
- Akihiro Hatada
- G01 - MEASURING TESTING
Information Patent Application
MULTI-WAVELENGTH INTERFEROMETER, MEASUREMENT APPARATUS, AND MEASURE...
- Publication number 20130100458
- Publication date Apr 25, 2013
- Canon Kabushiki Kaisha
- Akihiro Yamada
- G01 - MEASURING TESTING
Information Patent Application
DARK FIELD OPTICAL COHERENCE MICROSCOPY
- Publication number 20130010283
- Publication date Jan 10, 2013
- Martin Villiger
- G02 - OPTICS
Information Patent Application
INTERFEROMETER AND METHOD FOR MEASURING CHARACTERISTICS OF OPTICALL...
- Publication number 20100265516
- Publication date Oct 21, 2010
- Peter De Groot
- G01 - MEASURING TESTING
Information Patent Application
GENERATING MODEL SIGNALS FOR INTERFEROMETRY
- Publication number 20090021723
- Publication date Jan 22, 2009
- Zygo Corporation
- Xavier Colonna De Lega
- G01 - MEASURING TESTING
Information Patent Application
Interferometry Method for Ellipsometry, Reflectometry, and Scattero...
- Publication number 20090015844
- Publication date Jan 15, 2009
- PETER J. DE GROOT
- G01 - MEASURING TESTING
Information Patent Application
INTERFEROMETER AND METHOD FOR MEASURING CHARACTERISTICS OF OPTICALL...
- Publication number 20080266574
- Publication date Oct 30, 2008
- Peter De Groot
- G01 - MEASURING TESTING
Information Patent Application
SCANNING INTERFEROMETRY FOR THIN FILM THICKNESS AND SURFACE MEASURE...
- Publication number 20080180694
- Publication date Jul 31, 2008
- Zygo Corporation
- Peter J. de Groot
- G02 - OPTICS
Information Patent Application
PROFILING COMPLEX SURFACE STRUCTURES USING SCANNING INTERFEROMETRY
- Publication number 20080065350
- Publication date Mar 13, 2008
- Peter J. De Groot
- G01 - MEASURING TESTING
Information Patent Application
Multiple-Angle Multiple-Wavelength Interferometer Using High-NA Ima...
- Publication number 20080049233
- Publication date Feb 28, 2008
- Zygo Corporation
- Peter De Groot
- G01 - MEASURING TESTING
Information Patent Application
Interferometry Method for Ellipsometry, Reflectometry, and Scattero...
- Publication number 20070247637
- Publication date Oct 25, 2007
- Peter J. De Groot
- G01 - MEASURING TESTING
Information Patent Application
High-sensitivity surface detection system and method
- Publication number 20070229833
- Publication date Oct 4, 2007
- Allan Rosencwaig
- G01 - MEASURING TESTING
Information Patent Application
Profiling complex surface structures using height scanning interfer...
- Publication number 20070097380
- Publication date May 3, 2007
- Peter J. De Groot
- G01 - MEASURING TESTING
Information Patent Application
Interferometry method for ellipsometry, reflectometry, and scattero...
- Publication number 20070081167
- Publication date Apr 12, 2007
- Peter J. De Groot
- G01 - MEASURING TESTING
Information Patent Application
Interferometer and method for measuring characteristics of opticall...
- Publication number 20070046953
- Publication date Mar 1, 2007
- Peter De Groot
- G01 - MEASURING TESTING
Information Patent Application
Simultaneous phase-shifting fizeau interferometer
- Publication number 20060203251
- Publication date Sep 14, 2006
- James E. Millerd
- G01 - MEASURING TESTING
Information Patent Application
Scanning interferometry for thin film thickness and surface measure...
- Publication number 20050088663
- Publication date Apr 28, 2005
- Peter J. De Groot
- G02 - OPTICS
Information Patent Application
Profiling complex surface structures using scanning interferometry
- Publication number 20050073692
- Publication date Apr 7, 2005
- Peter J. De Groot
- G01 - MEASURING TESTING
Information Patent Application
Simultaneous phase-shifting fizeau interferometer
- Publication number 20050046864
- Publication date Mar 3, 2005
- James E. Millerd
- G01 - MEASURING TESTING
Information Patent Application
Interferometry method for ellipsometry, reflectometry, and scattero...
- Publication number 20040085544
- Publication date May 6, 2004
- Peter J. De Groot
- G01 - MEASURING TESTING
Information Patent Application
Point-diffraction interferometer
- Publication number 20030067611
- Publication date Apr 10, 2003
- CARL ZEISS SEMICONDUCTOR MANUFACTURING TECHNOLOGIES AG
- Hugo Matthieu Visser
- G01 - MEASURING TESTING

Pupil plane manipulation

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Method for compensation during the process of wavefront reconstruct...

System and method for a displacement measurement

Interferometer using tilted object waves and comprising a Fizeau in...

Measuring device for interferometric determination of a shape of an...

Edge registration for interferometry

System and method for a displacement measurement

Scanning white-light interferometry system for characterization of...

Optical coherence microscopy system having a filter for suppressing...

Portable interferometric device

Measuring apparatus including multi-wavelength interferometer

True-spectroscopic dual mode high resolution full-field optical coh...

Multi-wavelength interferometer, measurement apparatus, and measure...

Interferometer and method for measuring characteristics of opticall...

Multiple-angle multiple-wavelength interferometer using high-NA ima...

Interferometry method for ellipsometry, reflectometry, and scattero...

Interferometer and method for measuring characteristics of opticall...

Generating model signals for interferometry

Surface characterization based on lateral shearing of diffracted wa...

Scanning interferometry for thin film thickness and surface measure...

Profiling complex surface structures using scanning interferometry

Interferometry method for ellipsometry, reflectometry, and scattero...

Scanning interferometry for thin film thickness and surface measure...

Interferometer and method for measuring characteristics of opticall...

Interferometry method for ellipsometry, reflectometry, and scattero...

Profiling complex surface structures using height scanning interfer...

Simultaneous phase-shifting fizeau interferometer

Interferometry method for ellipsometry, reflectometry, and scattero...

Profiling complex surface structures using scanning interferometry

Simultaneous phase-shifting Fizeau interferometer

Hybrid shearing and phase-shifting point diffraction interferometer

Patents Applicationslast 30 patents

METHOD FOR COMPENSATION DURING THE PROCESS OF WAVEFRONT RECONSTRUCT...

SYSTEM AND METHOD FOR A DISPLACEMENT MEASUREMENT

MEASURING DEVICE FOR INTERFEROMETRIC DETERMINATION OF A SHAPE OF AN...

INTERFEROMETER USING TILTED OBJECT WAVES AND COMPRISING A FIZEAU IN...

SCANNING WHITE-LIGHT INTERFEROMETRY SYSTEM FOR CHARACTERIZATION OF...

INTERFERENCE MEASURING APPARATUS AND INTERFERENCE MEASURING METHOD

MEASURING APPARATUS INCLUDING MULTI-WAVELENGTH INTERFEROMETER

MULTI-WAVELENGTH INTERFEROMETER, MEASUREMENT APPARATUS, AND MEASURE...

DARK FIELD OPTICAL COHERENCE MICROSCOPY

INTERFEROMETER AND METHOD FOR MEASURING CHARACTERISTICS OF OPTICALL...

GENERATING MODEL SIGNALS FOR INTERFEROMETRY

Interferometry Method for Ellipsometry, Reflectometry, and Scattero...

INTERFEROMETER AND METHOD FOR MEASURING CHARACTERISTICS OF OPTICALL...

SCANNING INTERFEROMETRY FOR THIN FILM THICKNESS AND SURFACE MEASURE...

PROFILING COMPLEX SURFACE STRUCTURES USING SCANNING INTERFEROMETRY

Multiple-Angle Multiple-Wavelength Interferometer Using High-NA Ima...

Interferometry Method for Ellipsometry, Reflectometry, and Scattero...

High-sensitivity surface detection system and method

Profiling complex surface structures using height scanning interfer...

Interferometry method for ellipsometry, reflectometry, and scattero...

Interferometer and method for measuring characteristics of opticall...

Simultaneous phase-shifting fizeau interferometer

Scanning interferometry for thin film thickness and surface measure...

Profiling complex surface structures using scanning interferometry

Simultaneous phase-shifting fizeau interferometer

Interferometry method for ellipsometry, reflectometry, and scattero...

Point-diffraction interferometer